WO2006101235A1 - Resin stamper - Google Patents

Resin stamper Download PDF

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Publication number
WO2006101235A1
WO2006101235A1 PCT/JP2006/306153 JP2006306153W WO2006101235A1 WO 2006101235 A1 WO2006101235 A1 WO 2006101235A1 JP 2006306153 W JP2006306153 W JP 2006306153W WO 2006101235 A1 WO2006101235 A1 WO 2006101235A1
Authority
WO
WIPO (PCT)
Prior art keywords
resin
layer
stamper
laminate
polymer
Prior art date
Application number
PCT/JP2006/306153
Other languages
French (fr)
Japanese (ja)
Inventor
Haruhiko Takahashi
Tomohiro Ohtaki
Original Assignee
Zeon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2005-090237 priority Critical
Priority to JP2005090237 priority
Application filed by Zeon Corporation filed Critical Zeon Corporation
Publication of WO2006101235A1 publication Critical patent/WO2006101235A1/en

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