WO2006086169A3 - Immersion process for electroplating applications - Google Patents

Immersion process for electroplating applications Download PDF

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Publication number
WO2006086169A3
WO2006086169A3 PCT/US2006/003025 US2006003025W WO2006086169A3 WO 2006086169 A3 WO2006086169 A3 WO 2006086169A3 US 2006003025 W US2006003025 W US 2006003025W WO 2006086169 A3 WO2006086169 A3 WO 2006086169A3
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
immersion process
waveform
electroplating applications
plating solution
Prior art date
Application number
PCT/US2006/003025
Other languages
French (fr)
Other versions
WO2006086169A2 (en
Inventor
Hooman Hafezi
Joseph Behnke
Aron Rosenfeld
Timothy R Webb
Joseph Yahalom
Christopher Reiss Mcguirk
Original Assignee
Applied Materials Inc
Hooman Hafezi
Joseph Behnke
Aron Rosenfeld
Timothy R Webb
Joseph Yahalom
Christopher Reiss Mcguirk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc, Hooman Hafezi, Joseph Behnke, Aron Rosenfeld, Timothy R Webb, Joseph Yahalom, Christopher Reiss Mcguirk filed Critical Applied Materials Inc
Publication of WO2006086169A2 publication Critical patent/WO2006086169A2/en
Publication of WO2006086169A3 publication Critical patent/WO2006086169A3/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/18—Electroplating using modulated, pulsed or reversing current
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/34—Pretreatment of metallic surfaces to be electroplated
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00—Electroplating characterised by the article coated
    • C25D7/12—Semiconductors
    • C25D7/123—Semiconductors first coated with a seed layer or a conductive layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/288—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
    • H01L21/2885—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition using an external electrical current, i.e. electro-deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material

Abstract

A method for immersing a substrate into a plating solution. In one embodiment, the method includes applying a first waveform to the substrate as the substrate is being immersed into the plating solution, stopping the application of the first waveform to the substrate as soon as the substrate is fully immersed inside the plating solution, and applying a second waveform to the substrate prior to the substrate being situated into a plating position.
PCT/US2006/003025 2005-02-07 2006-01-31 Immersion process for electroplating applications WO2006086169A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/052,443 2005-02-07
US11/052,443 US20060175201A1 (en) 2005-02-07 2005-02-07 Immersion process for electroplating applications

Publications (2)

Publication Number Publication Date
WO2006086169A2 WO2006086169A2 (en) 2006-08-17
WO2006086169A3 true WO2006086169A3 (en) 2007-11-15

Family

ID=36778835

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/003025 WO2006086169A2 (en) 2005-02-07 2006-01-31 Immersion process for electroplating applications

Country Status (3)

Country Link
US (1) US20060175201A1 (en)
TW (1) TW200632146A (en)
WO (1) WO2006086169A2 (en)

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US20060237319A1 (en) * 2005-04-22 2006-10-26 Akira Furuya Planting process and manufacturing process for semiconductor device thereby, and plating apparatus
US20090114542A1 (en) * 2007-11-06 2009-05-07 Spansion Llc Process of forming an electronic device including depositing a conductive layer over a seed layer
EP2072644A1 (en) * 2007-12-21 2009-06-24 ETH Zürich, ETH Transfer Device and method for the electrochemical deposition of chemical compounds and alloys with controlled composition and or stoichiometry
KR101783786B1 (en) * 2011-06-24 2017-10-10 에이씨엠 리서치 (상하이) 인코포레이티드 Methods and apparatus for uniformly metallization on substrates
US11579344B2 (en) 2012-09-17 2023-02-14 Government Of The United States Of America, As Represented By The Secretary Of Commerce Metallic grating
US10508358B2 (en) * 2012-09-17 2019-12-17 Government Of The United States Of America, As Represented By The Secretary Of Commerce Process for forming a transition zone terminated superconformal filling
US20160102416A1 (en) * 2013-01-29 2016-04-14 Novellus Systems, Inc. Low copper/high halide electroplating solutions for fill and defect control
US11814743B2 (en) * 2020-06-15 2023-11-14 Taiwan Semiconductor Manufacturing Company, Ltd. Plating membrane

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Also Published As

Publication number Publication date
US20060175201A1 (en) 2006-08-10
TW200632146A (en) 2006-09-16
WO2006086169A2 (en) 2006-08-17

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