WO2006033738A3 - Improved micro-fluid ejection devices and method therefor - Google Patents

Improved micro-fluid ejection devices and method therefor Download PDF

Info

Publication number
WO2006033738A3
WO2006033738A3 PCT/US2005/029553 US2005029553W WO2006033738A3 WO 2006033738 A3 WO2006033738 A3 WO 2006033738A3 US 2005029553 W US2005029553 W US 2005029553W WO 2006033738 A3 WO2006033738 A3 WO 2006033738A3
Authority
WO
WIPO (PCT)
Prior art keywords
fluid ejection
array
fluid
ejection actuators
method therefor
Prior art date
Application number
PCT/US2005/029553
Other languages
French (fr)
Other versions
WO2006033738A2 (en
WO2006033738B1 (en
Inventor
Robert W Cornell
Richard L Goin
James H Powers
Original Assignee
Lexmark Int Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lexmark Int Inc filed Critical Lexmark Int Inc
Priority to AU2005287347A priority Critical patent/AU2005287347A1/en
Priority to EP05790880A priority patent/EP1794002A2/en
Publication of WO2006033738A2 publication Critical patent/WO2006033738A2/en
Publication of WO2006033738A3 publication Critical patent/WO2006033738A3/en
Publication of WO2006033738B1 publication Critical patent/WO2006033738B1/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1645Manufacturing processes thin film formation thin film formation by spincoating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14032Structure of the pressure chamber
    • B41J2/1404Geometrical characteristics
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1603Production of bubble jet print heads of the front shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1632Manufacturing processes machining
    • B41J2/1634Manufacturing processes machining laser machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/11Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics

Abstract

A micro-fluid ejection head structure having multiple arrays of fluid ejection actuators. The structure includes a semiconductor substrate having a first array of fluid ejection actuators for ejecting a first fluid therefrom, and a second array of fluid ejection actuators for ejecting a second fluid therefrom. The first array of fluid ejection actuators is disposed in a first location on the substrate, and the second array of fluid ejection actuators is disposed in a second location on the substrate. A thick film layer having a thickness is attached adjacent the semiconductor substrate. The thick film layer has fluid flow channels formed therein solely for the first array of fluid ejection actuators. A nozzle plate is attached to the thick film layer opposite the semiconductor substrate. The nozzle plate has fluid flow channels formed therein for both the first array of fluid ejection actuators and the second array of fluid ejection actuators.
PCT/US2005/029553 2004-08-19 2005-08-19 Improved micro-fluid ejection devices and method therefor WO2006033738A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2005287347A AU2005287347A1 (en) 2004-08-19 2005-08-19 Improved micro-fluid ejection devices and method therefor
EP05790880A EP1794002A2 (en) 2004-08-19 2005-08-19 Improved micro-fluid ejection devices and method therefor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/921,657 US7165831B2 (en) 2004-08-19 2004-08-19 Micro-fluid ejection devices
US10/921,657 2004-08-19

Publications (3)

Publication Number Publication Date
WO2006033738A2 WO2006033738A2 (en) 2006-03-30
WO2006033738A3 true WO2006033738A3 (en) 2007-04-12
WO2006033738B1 WO2006033738B1 (en) 2007-05-18

Family

ID=35909218

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/029553 WO2006033738A2 (en) 2004-08-19 2005-08-19 Improved micro-fluid ejection devices and method therefor

Country Status (4)

Country Link
US (1) US7165831B2 (en)
EP (1) EP1794002A2 (en)
AU (1) AU2005287347A1 (en)
WO (1) WO2006033738A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4459037B2 (en) * 2004-12-01 2010-04-28 キヤノン株式会社 Liquid discharge head
US7909428B2 (en) * 2006-07-28 2011-03-22 Hewlett-Packard Development Company, L.P. Fluid ejection devices and methods of fabrication
US7918366B2 (en) * 2006-09-12 2011-04-05 Hewlett-Packard Development Company, L.P. Multiple drop weight printhead and methods of fabrication and use
JP6950210B2 (en) * 2017-03-15 2021-10-13 ブラザー工業株式会社 Liquid discharge head
US10314342B2 (en) 2017-10-20 2019-06-11 Altria Client Services Llc E-vaping device using a jet dispensing cartridge, and method of operating the e-vaping device
US11926157B2 (en) 2021-03-05 2024-03-12 Funai Electric Co., Ltd. Photoresist imaging and development for enhanced nozzle plate adhesion
CN115165294A (en) * 2022-06-30 2022-10-11 中国航天空气动力技术研究院 Test device for simulating ablation gas injection coupling effect

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6267468B1 (en) * 2000-04-13 2001-07-31 Hewlett-Packard Company Printhead substrate having a mixture of single and double sided elongate ink feed channels
US6286941B1 (en) * 1998-10-26 2001-09-11 Hewlett-Packard Company Particle tolerant printhead

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55132291A (en) 1979-04-02 1980-10-14 Canon Inc Recording device
US4490728A (en) 1981-08-14 1984-12-25 Hewlett-Packard Company Thermal ink jet printer
US4716423A (en) 1985-11-22 1987-12-29 Hewlett-Packard Company Barrier layer and orifice plate for thermal ink jet print head assembly and method of manufacture
US5291226A (en) 1990-08-16 1994-03-01 Hewlett-Packard Company Nozzle member including ink flow channels
US5442384A (en) 1990-08-16 1995-08-15 Hewlett-Packard Company Integrated nozzle member and tab circuit for inkjet printhead
US5278584A (en) 1992-04-02 1994-01-11 Hewlett-Packard Company Ink delivery system for an inkjet printhead
US5450113A (en) 1992-04-02 1995-09-12 Hewlett-Packard Company Inkjet printhead with improved seal arrangement
US5648805A (en) 1992-04-02 1997-07-15 Hewlett-Packard Company Inkjet printhead architecture for high speed and high resolution printing
US5442386A (en) 1992-10-13 1995-08-15 Hewlett-Packard Company Structure and method for preventing ink shorting of conductors connected to printhead
US5852460A (en) 1995-03-06 1998-12-22 Hewlett-Packard Company Inkjet print cartridge design to decrease deformation of the printhead when adhesively sealing the printhead to the print cartridge
US5736998A (en) 1995-03-06 1998-04-07 Hewlett-Packard Company Inkjet cartridge design for facilitating the adhesive sealing of a printhead to an ink reservoir
US6120131A (en) 1995-08-28 2000-09-19 Lexmark International, Inc. Method of forming an inkjet printhead nozzle structure
US6158843A (en) 1997-03-28 2000-12-12 Lexmark International, Inc. Ink jet printer nozzle plates with ink filtering projections
KR100514711B1 (en) 1997-05-14 2005-09-15 세이코 엡슨 가부시키가이샤 Method of forming nozzle for injectors and method of manufacturing ink jet head
US6071427A (en) 1998-06-03 2000-06-06 Lexmark International, Inc. Method for making a printhead
US6364455B1 (en) 1999-06-29 2002-04-02 Wisertek International Corporation Printhead of ink jet printing apparatus and manufacturing method therefor
US6322200B1 (en) 1999-10-29 2001-11-27 Hewlett-Packard Company Decoupled nozzle plate and electrical flexible circuit for an inkjet print cartridge
US6513896B1 (en) 2000-03-10 2003-02-04 Hewlett-Packard Company Methods of fabricating fit firing chambers of different drop weights on a single printhead
US6971170B2 (en) 2000-03-28 2005-12-06 Microjet Technology Co., Ltd Method of manufacturing printhead
US6328405B1 (en) 2000-03-30 2001-12-11 Hewlett-Packard Company Printhead comprising multiple types of drop generators
KR20020009281A (en) 2000-07-25 2002-02-01 윤종용 Ink-jet Printer Head and Fabrication Method Theirof
US6733111B2 (en) 2001-01-12 2004-05-11 Fuji Photo Film Co., Ltd. Inkjet head
US6491376B2 (en) 2001-02-22 2002-12-10 Eastman Kodak Company Continuous ink jet printhead with thin membrane nozzle plate
US6387719B1 (en) 2001-02-28 2002-05-14 Lexmark International, Inc. Method for improving adhesion
JP3838890B2 (en) 2001-08-21 2006-10-25 Necエレクトロニクス株式会社 Semiconductor integrated circuit and design method thereof
TW506908B (en) 2001-09-06 2002-10-21 Nanodynamics Inc Piezoelectric ink jet print head and the manufacturing process thereof
EP1297959A1 (en) 2001-09-28 2003-04-02 Hewlett-Packard Company Inkjet printheads

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6286941B1 (en) * 1998-10-26 2001-09-11 Hewlett-Packard Company Particle tolerant printhead
US6267468B1 (en) * 2000-04-13 2001-07-31 Hewlett-Packard Company Printhead substrate having a mixture of single and double sided elongate ink feed channels

Also Published As

Publication number Publication date
US7165831B2 (en) 2007-01-23
WO2006033738A2 (en) 2006-03-30
AU2005287347A1 (en) 2006-03-30
WO2006033738B1 (en) 2007-05-18
EP1794002A2 (en) 2007-06-13
US20060038851A1 (en) 2006-02-23

Similar Documents

Publication Publication Date Title
WO2006033738A3 (en) Improved micro-fluid ejection devices and method therefor
JP2005178364A5 (en)
WO2007076029A3 (en) Low energy, long life micro-fluid ejection device
US7775652B2 (en) Layered structure and ink-jet head including the same
EP1780017A3 (en) Piezoelectric inkjet printhead
EP1621347A3 (en) Ink jet head substrate, ink jet head, and method of manufacturing an ink jet head susbstrate
KR20080007983A (en) Inkjet head having piezoelectric actuator for restrictor
EP1645416A3 (en) Piezoelectric type inkjet printhead and method of manufacturing the same
WO2006017808A3 (en) Print head nozzle formation
US6422689B1 (en) Inkjet print head
JP2009202401A5 (en)
WO2006004970A3 (en) Integrated black and colored ink printheads
WO2005108095A3 (en) Droplet ejection apparatus
CA2372371A1 (en) Ink jet head, producing method therefor and ink jet recording apparatus
WO2006053221A3 (en) Ultra-low energy micro-fluid ejection device
CA2514556A1 (en) Fluid ejection head
WO2008045691A3 (en) Media sheet
KR20180076094A (en) Adhesive sheet applied with barrier and method for manufacturing the same
JP2007290295A5 (en)
CN103963466A (en) Liquid ejecting head, liquid ejecting apparatus and method for manufacturing liquid ejecting head
JP2006035853A5 (en)
EP0799699B1 (en) Laminated ink jet recording head
JP6021415B2 (en) Liquid discharge head and recording apparatus
WO2005044573A3 (en) Fluid ejection device with insulating feature
KR101969292B1 (en) Adhesive sheet applied with barrier and method for manufacturing the same

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KM KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NG NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SM SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): BW GH GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LT LU LV MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

DPE1 Request for preliminary examination filed after expiration of 19th month from priority date (pct application filed from 20040101)
121 Ep: the epo has been informed by wipo that ep was designated in this application
NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 2005287347

Country of ref document: AU

WWE Wipo information: entry into national phase

Ref document number: 2005790880

Country of ref document: EP

ENP Entry into the national phase

Ref document number: 2005287347

Country of ref document: AU

Date of ref document: 20050819

Kind code of ref document: A

WWP Wipo information: published in national office

Ref document number: 2005287347

Country of ref document: AU

WWP Wipo information: published in national office

Ref document number: 2005790880

Country of ref document: EP