WO2006026547A2 - Apparatus and method for contouring the surface of a workpiece by using a machine tool - Google Patents

Apparatus and method for contouring the surface of a workpiece by using a machine tool Download PDF

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Publication number
WO2006026547A2
WO2006026547A2 PCT/US2005/030654 US2005030654W WO2006026547A2 WO 2006026547 A2 WO2006026547 A2 WO 2006026547A2 US 2005030654 W US2005030654 W US 2005030654W WO 2006026547 A2 WO2006026547 A2 WO 2006026547A2
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WO
WIPO (PCT)
Prior art keywords
displacement
cutting tool
workpiece
digital
signals
Prior art date
Application number
PCT/US2005/030654
Other languages
French (fr)
Other versions
WO2006026547A3 (en
Inventor
Erwin Wenti Liang
Eugene George Olczak
Joseph Lucian Smolenski
Teeporn Paul Tanpitukpongse
Eric Redito Robrigado
Original Assignee
General Electric Company
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Company filed Critical General Electric Company
Priority to EP05792477A priority Critical patent/EP1789859A2/en
Publication of WO2006026547A2 publication Critical patent/WO2006026547A2/en
Publication of WO2006026547A3 publication Critical patent/WO2006026547A3/en

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B29/00—Holders for non-rotary cutting tools; Boring bars or boring heads; Accessories for tool holders
    • B23B29/04—Tool holders for a single cutting tool
    • B23B29/12—Special arrangements on tool holders
    • B23B29/125—Vibratory toolholders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0823—Devices involving rotation of the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B23K26/355—Texturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/182—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by the machine tool function, e.g. thread cutting, cam making, tool direction control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2260/00—Details of constructional elements
    • B23B2260/108—Piezoelectric elements
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41344—Piezo, electrostrictive linear drive
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/42—Servomotor, servo controller kind till VSS
    • G05B2219/42209—Two slides, fine and quick, coarse and slow, piggyback, multirate positioner
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T82/00—Turning
    • Y10T82/25—Lathe
    • Y10T82/2502—Lathe with program control

Definitions

  • This invention is related generally to machine tool control methods, and a machine tool apparatus.
  • CNC computer numerically controlled
  • milling machines can machine grooves in a workpiece by controlling the displacement of a cutting tool relative to the workpiece.
  • a workpiece is mounted on or bonded to a surface of a drum.
  • the drum is controlled to rotate as the cutting tool is displaced both into and along the workpiece.
  • Some CNC turning or milling machines include a pair of relatively massive slides that move along orthogonal axes to displace the cutting tool along and into the workpiece.
  • one of the directions that the cutting tool is displaced is along the rotational axis of the drum, and another direction is into the workpiece.
  • Other CNC turning or milling machines include a fast tool servo (FTS) with a piezoelectric actuator, for example, to displace the cutting tool relative to the work piece.
  • FTS fast tool servo
  • the piezoelectric actuator displaces the cutting tool based upon control signals received, and the cutting tool is displaced relative to the workpiece, either into the workpiece, or laterally relative to the surface of the workpiece.
  • a machining tool for machining a workpiece on a workpiece support in response to control signals.
  • the workpiece comprises: a cutting tool configured to cut a surface of the workpiece; a first displacement mechanism arranged to displace the cutting tool relative to the workpiece in a first set of coordinates in response to the control signals; a second displacement mechanism supported by the first translation mechanism and arranged to displace the cutting tool relative to the workpiece in a second set of coordinates, the second displacement mechanism capable of a higher frequency response than the first displacement mechanism; and a controller configured to receive the control signals and synchronize the displacement of the cutting tool due to the first displacement mechanism with the displacement of the cutting tool due to the second displacement mechanism.
  • the controller comprises: a displacement determination unit that determines a target displacement of the cutting tool in the second set of coordinates and provides target displacement digital signals based on the determined target displacement; a digital to analog unit comprising a plurality of digital to analog converters configured to receive respective of the target displacement digital signals from the displacement determination unit and convert the target displacement digital signals to target displacement analog signals; and at least one switch configured to alternate which digital to analog converters release respective of the target displacement analog signals.
  • a machining tool for machining a workpiece on a workpiece support in response to control signals.
  • the machining tool comprises: a cutting tool configured to cut a surface of the workpiece; a first displacement mechanism arranged to displace the cutting tool relative to the workpiece in a first set of coordinates in response to control signals, the first displacement mechanism configured to displace the cutting tool in a first direction and in a second direction so as to define a number of discrete paths along the workpiece based upon the control signals, wherein the workpiece support comprises a cylindrical drum, the first direction is an angular displacement, ⁇ , about an axis of the drum, the second direction is along the axis of the drum, and the discrete paths are rings; a second displacement mechanism supported by the first translation mechanism and arranged to displace the cutting tool relative to the workpiece in a second set of coordinates; and a controller configured to receive the control signals and synchronize the displacement of the cutting tool due to the first displacement mechanism with the displacement of the
  • the controller comprises: a displacement determination unit that determined a target displacement of the cutting tool in the second set of coordinates and provides target displacement digital signals based on the determined target displacement; a plurality of digital to analog converters configured to receive respective of the target displacement digital signals from the displacement determination unit and convert the target displacement digital signals to target displacement analog signals; and a switch configured to alternate which digital to analog converter releases a respective of the target displacement analog signals based upon the control signals.
  • a method of machining a workpiece in response to control signals comprises: providing a cutting tool configured to cut a surface of the workpiece; displacing the cutting tool relative to the workpiece in a first set of coordinates in response to the control signals using a first displacement mechanism; displacing the cutting tool relative to the workpiece in a second set of coordinates using a second displacement mechanism, the second displacement mechanism capable of a higher frequency response than the first displacement mechanism; and synchronizing the displacement of the cutting tool in the first set of coordinates with the displacement of the cutting tool in the second set of coordinates.
  • the displacing the cutting tool relative to the workpiece in a second set of coordinates comprises: determining a * target displacement of the cutting tool in the second set of coordinates; providing target displacement digital signals based on the determined target displacement; converting the target displacement digital signals to target displacement analog signals using a plurality of digital to analog converters; and switching which digital to analog converter releases a respective of the target displacement analog signals.
  • Figure 1 is a schematic of a drum workpiece support illustrating the coordinates thereof.
  • Figure 2 is a schematic of a substantially planar workpiece support illustrating the coordinates thereof.
  • Figure 3 is a schematic of a machining tool according to an embodiment of the invention.
  • Figure 4 is a schematic of a second displacement mechanism according to an embodiment of the invention with two piezoelectric actuators and amplifiers.
  • Figure 5 is a schematic illustrating digital to analog converters and a single switch according to an embodiment of the invention.
  • Figure 6 is a schematic illustrating digital to analog converters and multiple switches according to an embodiment of the invention.
  • Figures 7 and 8 are a top view of a workpiece machined according embodiments of the present invention.
  • the present invention is applicable to machining deterministic or randomized mesoscopic (micro-and macro-scaled) structures or textures on a work piece surface, such as a mastered surface.
  • the present inventors have realized that there is a need to implement a machining tool having both a relatively slow cutting tool displacement mechanism and a faster cutting tool displacement mechanism where displacements due to the displacement mechanisms are synchronized with each other.
  • the relatively slow cutting tool displacement mechanism is slower than the faster cutting tool displacement mechanism in the sense that faster cutting tool displacement mechanism is capable of a higher frequency response than the relatively slow cutting tool displacement mechanism.
  • the synchronization preferably is based on the same set of control signals, for example, that are typically sent to control the relatively slow cutting tool displacement mechanism.
  • Such synchronization allows for a machining tool system where multiple passes may be made over the same cutting tool path, where the position of the cutting tool displacement is substantially identical for each of the passes.
  • the features formed in a workpiece with the cutting tool may be formed with good precision.
  • the switch allows for a very fast control of the signal, for example in the nanosecond range. Thus very precise synchronization is possible.
  • Figure 1 shows a drum workpiece support for supporting a workpiece (not shown) thereon to illustrate the coordinates of a machining tool system employing a cutting tool according to an embodiment of the invention.
  • the drum 110 has a length L and a radius r.
  • the drum 1 10 can be rotated about its axis 1 12 along an angular direction ⁇ . Additionally, a cutting tool 1 14 may be moved laterally along the axis 1 12 along the z axis, or along the y axis radially toward or away from the axis 112 (toward or away form the workpiece).
  • Figure 2 shows a substantially planar workpiece support for supporting a workpiece thereon to illustrate the coordinates of a machining tool system employing a cutting tool according to another embodiment of the invention.
  • the workpiece support 200 comprises a substantially planar surface upon which the workpiece (not shown) is supported.
  • the workpiece support 200 has a length L and a width W and can be translated along its width W, for example along the x axis.
  • the cutting tool 214 may be moved laterally along the z axis along L, or along the y axis toward or away from the surface of the workpiece support 200.
  • FIG 3 is a schematic of a machining tool 300 according to an embodiment of the invention.
  • the machining tool 300 includes a workpiece support 310.
  • the workpiece support 310 may comprise a rotating drum as shown in Figure 3 (or Figure 1).
  • the workpiece support may comprise a substantially planar surface, such as shown in Figure 2, or may have some other geometry.
  • the machining tool 300 includes a cutting tool 312 that is configured to be displaced toward or away from the surface of the workpiece support 310, and thus toward and into any workpiece or away from any workpiece on the workpiece support.
  • the cutting tool 312 may also be displaced laterally relative to the surface of the workpiece support 310 and the workpiece thereon.
  • the machining tool 300 has a first displacement mechanism arranged to displace the cutting tool 312 relative to the workpiece.
  • the first displacement mechanism displaces the cutting tool 312 relative to the workpiece in response to control signals.
  • the control signals originating from a machine controller 319 comes through a machine interface 320, such as a lathe interface in the case that the workpiece support 312 is a drum.
  • the control signals may be digital signals from a machine encoder or resolver (not shown) of the machine controller 319, and may be in G code and M code, for example, as is known for machine encoders.
  • the control signals may be in the form of TTL square wave pulses or analog sine waves.
  • the first displacement mechanism may comprise a spindle drive 322 and a slide 324, for example.
  • the spindle drive 322 drives the workpiece support 310 about its axis in a first direction along an angular displacement ⁇ (See Figure 1 illustrating angular displacement ⁇ ).
  • the slide 324 displaces the cutting tool 312 along the axis of the workpiece support 310. Both the spindle drive 322 and the slide 324 movement are controlled based on the control signals from the machine controller 320.
  • the machining tool 300 has a second displacement mechanism arranged to displace the cutting tool 312 relative to the workpiece.
  • the second displacement mechanism displaces the cutting tool 312 relative to the workpiece in response to the control signals originating from the machine interface 320.
  • the set of control signals are the same as those used to control the first displacement mechanism.
  • the second displacement mechanism displaces the cutting tool 312 relative to the workpiece in a second set of coordinates.
  • the second set of coordinates may include the direction along the axis of the drum (the z axis), and the direction radially away or toward the axis (the y axis) (see Figure 1).
  • the second displacement mechanism is capable of a higher frequency response than the first displacement mechanism. Because the higher frequency motion of a second displacement mechanism is synchronized with a lower frequency motion, surface structures with multiple scales may be formed with traditional control signals at a much higher speed. The microstructures formed can thus have a greater range of change.
  • the second displacement mechanism may comprise an FTS, such as at least one piezoelectric amplifier 332 and piezoelectric actuator 334, for example.
  • the at least one piezoelectric actuator 334 may include a first piezoelectric actuator 334a configured to displace the cutting tool in a first direction, and a second piezoelectric actuator 334b configured to displace the cutting tool in a second direction different from the first direction (see Figure 4).
  • the first and second direction may orthogonal to each other and may be along y-axis (into or out of the work piece), and z-axis (along the drum axis), for example. Alternatively the directions need not be orthogonal.
  • the machining tool 300 may also include a controller 340 configured to receive the control signals and synchronize the displacement of the cutting tool 312 due to the first displacement mechanism with the displacement of the cutting tool due to the second displacement mechanism 330.
  • the controller 340 includes an electronic control unit 342 including a displacement determination unit 344, digital to analog unit 347 comprising a plurality of digital to analog converters 346, a path counter unit 348, and a feedback control unit 350.
  • a displacement determination unit 344 digital to analog unit 347 comprising a plurality of digital to analog converters 346
  • path counter unit 348 path counter unit 348
  • feedback control unit 350 may be separate from the electronic control unit 342.
  • the electronic control unit 342 may be a dSPACE system such as the DSl 103 PPC Controller Board provided by dSPACE, or a digital signal processor (DSP) such as ChicoPlus from Innovative Integration, for example.
  • DSP digital signal processor
  • the present invention is not limited to a particular electronic control unit.
  • the controller 340 also includes an nX signal multiplier/divider 354, such as an nX encoder multiplier/divider, that receives position control signals from the machine encoder of the machine interface 320, and functions to multiply the frequency of the control signals by n times in the second direction, and pass the multiplied frequency control signals to the displacement determination unit 344.
  • n is greater than or less than 1.
  • the nX encoder multiplier/divider functions to increase the frequency of the control signals where the increased frequency is n times the input frequency.
  • the nX signal multiplier/divider increases the resolution of the number of points in the second direction processed by the displacement determination unit 344.
  • n when n is less than 1 , the nX signal multiplier/divider functions to decrease the frequency of the control signals where the decreased frequency is again n times the input frequency. In this case the nX encoder multiplier/divider decreases the resolution of the number of points in the second direction processed by the displacement determination unit 344.
  • n may be an integer greater than or equal to 2, for example, such as 4, for example.
  • nX signal multiplier/divider 354 An example of the functioning of the nX signal multiplier/divider 354 is as follows. Assume that the nX signal multiplier/divider 354 is a 4X signal multiplier, and the position signals correspond to 5000 points circumferentially along the ⁇ direction of the drum. In other words, the resolution in the ⁇ direction for the first displacement mechanism is 5000 points.
  • the nX signal multiplier 345 acts to increase frequency of the position signal to 4 times the input frequency. This increase in frequency increases the number of points circumferentially along the drum to 20000 through interpolation, for example, to thereby increase the resolution of points acted on by the displacement determination unit 344, and thus 20,000 points for the second displacement direction.
  • the increased frequency signal is then fed to the displacement determination unit 344, and also acts to trigger at least one switch 360 as discussed further below.
  • nX signal multiplier/divider 354 provides some degree of tunability to the machining tool 300. For a lower n, the resolution is decreased, but the machining speed of the machining tool 300 is increased since fewer points need be processed for a particular path along the workpiece. On the other hand, if a higher resolution, and therefore fidelity, is desired, a larger n may be chosen at the expense of the machining speed.
  • the controller 340 may include an optical interface 356 that provides electrical isolation and receives the trigger signals from the machine interface 320, passes the trigger signals to the path counter unit 348.
  • the trigger signals of the control signals from machine interface 320 indicate the triggering of the first displacement mechanism.
  • the path counter unit 348 is configured to determine the current path that the cutting tool 312 is on.
  • the path counter unit 348 performs this function based on the control signals from the machine interface 320, and specifically based on the trigger signals of the control signals.
  • the paths will correspond to rings that are to be cut into the workpiece, and the path counter unit 348 keeps track of the ring number.
  • the displacement determination unit 344 determines a target displacement of the cutting tool in the second set of coordinates and provides target displacement digital signals based on the determined target displacement. The displacement determination unit 344 performs this determination based on the multiplied frequency control signals from the nX signal multiplier/divider 354 and the current path determined from the path counter unit 348. Thus, the path counter unit 348 informs the displacement determination unit 344 of the current path. If it is not desired to increase the frequency of the control signals, for example so that the machining speed is higher, the displacement determination unit 344 may receive control signals without increasing their frequency, and the nX signal multiplier/divider 354 may be omitted.
  • the increased frequency control signals provides information about a position along one or more of the coordinates of the first displacement mechanism but with increased (or decreased) resolution.
  • the workpiece support 310 is a rotating drum with the first displacement mechanism providing displacement along the z-axis (rotational axis) and in the ⁇ direction
  • the machining tool 300 includes a 4X signal multiplier/divider.
  • the number of points in the ⁇ direction around the drum is 5000 for the first displacement mechanism
  • the control signal indicates that the 1000 th point (about one-fifth of the way around the drum from the first point) along the ⁇ direction is the current point for the first displacement mechanism.
  • the 4X signal multiplier/divider 354 provides increased frequency signals corresponding to 4 points in the second set of coordinates (for the second displacement mechanism) for every point in the first set of coordinates (for the first displacement mechanism), and thus provides for 4 points around the 1000 th point.
  • the displacement determination unit 344 uses the multiplied frequency signal, which is indicative of one of these 4 points indicating position around the drum, and the current path (or ring), and determines a target displacement of the cutting tool in the second set of coordinates corresponding to the second displacement mechanism.
  • the current point corresponds to a current angle ⁇ cur and that the current path is p cur .
  • the second set of coordinates are given by y 2 and Z 2 .
  • the target displacement in the second set of coordinates is a function of the displacement in the first set of coordinates as indicated by the control signals.
  • the displacement determination unit 344 provides target displacement digital signals based on the determined target displacement.
  • the plurality of digital to analog converters 346 are configured to receive respective of the target displacement digital signals from the displacement determination unit 344 and convert the target displacement digital signals to target displacement analog signals.
  • the displacement determination unit 344 may determine the target displacement by calculating the displacement on the fly as the multiplied frequency control signals are received from the nX signal multiplier/divider 354.
  • the target displacement determination unit 344 may include a processor with appropriate software or firmware to calculate the target displacement as desired.
  • the target displacement may be pre-calculated and the pre-calculated values of the target displacement may be received from external to the displacement determination unit 344.
  • the target displacement may be pre-calculated and stored in a memory external to the displacement determination unit 344, and streamed into the displacement determination unit 344 as the multiplied frequency control signals are received.
  • the machining tool 300 includes at least one switch 360 configured to alternate which digital to analog converter 346 releases the analog signals corresponding to a respective of the target displacement digital signals received from the displacement determination unit 344.
  • the at least one switch 360 may comprise a gate, for example.
  • the at least one switch 360 alternates which digital to analog converter 346 releases a respective of the target displacement analog signals based upon the control signals, for example, based upon the multiplied frequency control signal from the nX signal multiplier/divider 354.
  • the use of a switch or switches to alternate between the digital to analog converters 346 increases the machining speed of the machining tool 300 for a particular resolution on the workpiece by increasing the rate at which analog signals may be sent to the second displacement mechanism. This is accomplished by employing multiple digital to analog converters 346 (see Figures 5 and 6) on the digital to analog unit, and alternately switching between the converters 346.
  • Figure 5 illustrates an embodiment with two digital to analog converters 346 on the digital to analog unit 347, and a single switch 360. In general, the number of digital to analog converters 346 may be more than two, however.
  • Figure 6 illustrates another embodiment with a plurality of digital to analog converters 346 on the digital to analog unit 347, and N switches 360, where N is greater than 1.
  • the plurality of digital to analog converters 346 are divided into a plurality of groups, where each group corresponds to a different switch of the plurality of switches 36O 1 .
  • Each of the switches 36O 1 is configured to alternate which digital to analog converter 346 of the converters in its corresponding group releases respective of the target displacement analog signals.
  • each of the groups of digital to analog converters may be directed to a different piezoelectric amplifier 332 and piezoelectric actuator 334.
  • each piezoelectric actuator 344 of the N piezoelectric actuators corresponding to a different group of the digital to analog converters 346.
  • voice coils may be used
  • the machining tool may comprise one or more filter buffers 362 arranged to receive and smooth the target displacement analog signals from the digital to analog converters 346. As shown in Figure 5 and 6, there may be a filter buffer 362 corresponding to each of the switches 360 of the at least one switch. The signal from the filter buffers 362 is passed on to the second displacement unit.
  • the smoothing can help to eliminate chatters during machining.
  • the target displacement analog signals are received from each filter buffer 362 by the second displacement mechanism, which in response displaces the cutting tool 312.
  • the second displacement mechanism comprises at least one piezoelectric amplifier 332 and corresponding piezoelectric actuator(s) 334
  • the amplifier 332 amplifies the target displacement analog signal and passes the amplified signal to its respective piezoelectric actuator 334.
  • the machining tool 300 may also include a sensor unit 371, including a position sensor 370 and a sensor amplifier 372, and a feed back control unit 353, including an analog to digital unit 351 and feed back control circuit 350, to adjust the target displacement control signals as necessary.
  • the position sensor unit 371 is arranged to detect the position of the cutting tool 312, and to provide a position signal indicative of the detected position of the cutting tool 312 to the feedback control unit 353.
  • the feedback control unit 353 is arranged to receive the position signal, amplified by the sensor amplifier 372 as desired, and adjust the target displacement digitals signals based on the position signal.
  • the analog to digital unit 351 comprises one or more analog to digital converters to convert the position signal from the sensor amplifier 372 to digital and provide a digital position signal to the feedback control circuit 350.
  • the feedback control circuit 350 provides a feedback signal to correct the target displacement signal at the combiner 345. The feedback control helps compensate for hysteretic and creep effects of the piezoelectric materials of the piezoelectric actuators, and thus
  • the determination of the target displacement depends upon the particular application.
  • An example of determining the target displacement is as follows. Assuming that the first set of coordinates are ⁇ i and z ⁇ , where ⁇ i is angular displacement of the drum of the workpiece support 310, and z ⁇ is the distance along the rotational axis of the drum. Further assume that the second set of coordinates is given by y 2 , the distance into the workpiece, and z 2 , along the direction of the rotational axis of the drum. In general y 2 and Z 2 will be a function of ⁇ i and z ⁇ . The values of ⁇ i and z ⁇ are determined from the control signals (which are also applied for control of the first displacement mechanism).
  • the particular formula used depends on the desired shape of the pattern cut into the workpiece, such as sawtooth or sinusoidal shape.
  • , z ⁇ )), and Z 2 fz2( ⁇
  • the present invention is not limited, however, to a particular function or functions for the target displacement, as the particular target displacement will depend upon the application.
  • Figures 7 and 8 illustrate top views of workpieces with examples of particular microstructures machined therein.
  • Figures 7 and 8 illustrate a number of paths cut into a 3mm x 3mm workpiece, where the paths are subject to a pseudo random modulation.
  • the unmodified paths provide structures with a pitch, P, of 30 ⁇ m, where the width of the cutting tool is 60 ⁇ m.
  • the second set of coordinates is given by y 2 , (the distance into the workpiece, or the cut depth), and z 2 (the distance along the axis of rotation of the drum).
  • z 2 is generally perpendicular to the structures shown in Figures 7 and 8.
  • y 2 was kept constant with a constant cut depth of 27.5 ⁇ m , and target displacement along the z-direction was pseudo randomly modulated so the that the lateral distance was between limits of -15 ⁇ m and +15 ⁇ m, and a wavelength of the motion was between 100 and 200 ⁇ m.
  • the ratio of lateral distance to wavelength determines the slope of path and thus the turning power of the intended application.
  • the pseudo random modulation may be provided by a interpolated waveform that is fit through random control points, as in Figures 7 and 8, or by generating a broad band digitally sampled noise signal, which may be filtered and scaled to provide the desired range of amplitude or frequency, for example.
  • microstructure may be machined in applications including diffusers, solar cell panels, reflectors, brightness enhancement films and heat/mass transfer control surfaces.
  • microstructure may be machined in applications including diffusers, solar cell panels, reflectors, brightness enhancement films and heat/mass transfer control surfaces.
  • textured (by machining) TCO/glass/metal substrates, which provide light trapping may be formed.
  • Angle selective specular reflectors may also be formed.
  • the particular first and second set of coordinates will depend on the particular application.
  • the structures formed may have variation in one or more of amplitude, phase, period and frequency.
  • a second displacement mechanism such as an FTS
  • FTS second displacement mechanism
  • surface structures with multiple scales may be formed with traditional control signals at a much higher speed.
  • the microstructures formed have a greater range of change. Machining these structures in multiple repeatable passes produces a superior surface finish.

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Abstract

There is provided a machining tool for machining a workpiece (310) on a workpiece support in response to control signals. The machining tool includes a cutting tool (312) configured to cut a surface of the workpiece. The machining tool also includes a first displacement mechanism (324) and a second displacement mechanism (334). The first displacement mechanism arranged to displace the cutting tool relative to the workpiece in a first set of coordinates in response to the control signals. The second displacement mechanism supported by the first translation mechanism and arranged to displace the cutting tool relative to the workpiece in a second set of coordinates, the second displacement mechanism capable of a higher frequency response than the first displacement mechanism. The machining tool also includes a controller (340) configured to receive the control signals and synchronize the displacement of the cutting tool due to the first displacement mechanism with the displacement of the cutting tool due to the second displacement mechanism.

Description

MACHINE TOOL CONTROL METHODS AND DESIGNS FOR FABRICATING MESOSCOPIC SURFACE STRUCTURES ON SUBSTRATES
FIELD OF THE INVENTION
This invention is related generally to machine tool control methods, and a machine tool apparatus.
BACKGROUND OF THE INVENTION
Machining tools for machining structures in the surface of a workpiece are known. For example computer numerically controlled (CNC) turning or milling machines can machine grooves in a workpiece by controlling the displacement of a cutting tool relative to the workpiece.
In a typical application, a workpiece is mounted on or bonded to a surface of a drum. The drum is controlled to rotate as the cutting tool is displaced both into and along the workpiece.
Some CNC turning or milling machines include a pair of relatively massive slides that move along orthogonal axes to displace the cutting tool along and into the workpiece. In the case of applications with a rotating drum support, one of the directions that the cutting tool is displaced is along the rotational axis of the drum, and another direction is into the workpiece.
Other CNC turning or milling machines include a fast tool servo (FTS) with a piezoelectric actuator, for example, to displace the cutting tool relative to the work piece. The piezoelectric actuator displaces the cutting tool based upon control signals received, and the cutting tool is displaced relative to the workpiece, either into the workpiece, or laterally relative to the surface of the workpiece.
SUMMARY OF THE INVENTION
In accordance with one embodiment of the present invention, there is provided a machining tool for machining a workpiece on a workpiece support in response to control signals. The workpiece comprises: a cutting tool configured to cut a surface of the workpiece; a first displacement mechanism arranged to displace the cutting tool relative to the workpiece in a first set of coordinates in response to the control signals; a second displacement mechanism supported by the first translation mechanism and arranged to displace the cutting tool relative to the workpiece in a second set of coordinates, the second displacement mechanism capable of a higher frequency response than the first displacement mechanism; and a controller configured to receive the control signals and synchronize the displacement of the cutting tool due to the first displacement mechanism with the displacement of the cutting tool due to the second displacement mechanism.
According to one aspect of this embodiment, the controller comprises: a displacement determination unit that determines a target displacement of the cutting tool in the second set of coordinates and provides target displacement digital signals based on the determined target displacement; a digital to analog unit comprising a plurality of digital to analog converters configured to receive respective of the target displacement digital signals from the displacement determination unit and convert the target displacement digital signals to target displacement analog signals; and at least one switch configured to alternate which digital to analog converters release respective of the target displacement analog signals.
In accordance with another embodiment of the present invention, there is provided a machining tool for machining a workpiece on a workpiece support in response to control signals. The machining tool comprises: a cutting tool configured to cut a surface of the workpiece; a first displacement mechanism arranged to displace the cutting tool relative to the workpiece in a first set of coordinates in response to control signals, the first displacement mechanism configured to displace the cutting tool in a first direction and in a second direction so as to define a number of discrete paths along the workpiece based upon the control signals, wherein the workpiece support comprises a cylindrical drum, the first direction is an angular displacement, θ, about an axis of the drum, the second direction is along the axis of the drum, and the discrete paths are rings; a second displacement mechanism supported by the first translation mechanism and arranged to displace the cutting tool relative to the workpiece in a second set of coordinates; and a controller configured to receive the control signals and synchronize the displacement of the cutting tool due to the first displacement mechanism with the displacement of the cutting tool due to the second displacement mechanism. The controller comprises: a displacement determination unit that determined a target displacement of the cutting tool in the second set of coordinates and provides target displacement digital signals based on the determined target displacement; a plurality of digital to analog converters configured to receive respective of the target displacement digital signals from the displacement determination unit and convert the target displacement digital signals to target displacement analog signals; and a switch configured to alternate which digital to analog converter releases a respective of the target displacement analog signals based upon the control signals.
In accordance with another embodiment of the present invention, there is provided a method of machining a workpiece in response to control signals. The method comprises: providing a cutting tool configured to cut a surface of the workpiece; displacing the cutting tool relative to the workpiece in a first set of coordinates in response to the control signals using a first displacement mechanism; displacing the cutting tool relative to the workpiece in a second set of coordinates using a second displacement mechanism, the second displacement mechanism capable of a higher frequency response than the first displacement mechanism; and synchronizing the displacement of the cutting tool in the first set of coordinates with the displacement of the cutting tool in the second set of coordinates.
In accordance with an aspect of this embodiment, the displacing the cutting tool relative to the workpiece in a second set of coordinates comprises: determining a * target displacement of the cutting tool in the second set of coordinates; providing target displacement digital signals based on the determined target displacement; converting the target displacement digital signals to target displacement analog signals using a plurality of digital to analog converters; and switching which digital to analog converter releases a respective of the target displacement analog signals. BRIEF DESCRIPTION OF THE DRAWINGS
Figure 1 is a schematic of a drum workpiece support illustrating the coordinates thereof.
Figure 2 is a schematic of a substantially planar workpiece support illustrating the coordinates thereof.
Figure 3 is a schematic of a machining tool according to an embodiment of the invention.
Figure 4 is a schematic of a second displacement mechanism according to an embodiment of the invention with two piezoelectric actuators and amplifiers.
Figure 5 is a schematic illustrating digital to analog converters and a single switch according to an embodiment of the invention.
Figure 6 is a schematic illustrating digital to analog converters and multiple switches according to an embodiment of the invention.
Figures 7 and 8 are a top view of a workpiece machined according embodiments of the present invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
Reference will now be made in detail to presently preferred embodiments of the present invention. Wherever possible, the same reference numbers will be used throughout the drawings to refer to the same or like parts.
The present invention is applicable to machining deterministic or randomized mesoscopic (micro-and macro-scaled) structures or textures on a work piece surface, such as a mastered surface.
The present inventors have realized that there is a need to implement a machining tool having both a relatively slow cutting tool displacement mechanism and a faster cutting tool displacement mechanism where displacements due to the displacement mechanisms are synchronized with each other. The relatively slow cutting tool displacement mechanism is slower than the faster cutting tool displacement mechanism in the sense that faster cutting tool displacement mechanism is capable of a higher frequency response than the relatively slow cutting tool displacement mechanism. The synchronization preferably is based on the same set of control signals, for example, that are typically sent to control the relatively slow cutting tool displacement mechanism.
Such synchronization allows for a machining tool system where multiple passes may be made over the same cutting tool path, where the position of the cutting tool displacement is substantially identical for each of the passes. Thus, the features formed in a workpiece with the cutting tool may be formed with good precision.
Further such synchronization allows both the slower and faster cutting tools to be controlled using a single set of control signals. Thus, the control is simplified by using a single set of control signals.
Further the switch allows for a very fast control of the signal, for example in the nanosecond range. Thus very precise synchronization is possible.
Figure 1 shows a drum workpiece support for supporting a workpiece (not shown) thereon to illustrate the coordinates of a machining tool system employing a cutting tool according to an embodiment of the invention. The drum 110 has a length L and a radius r. The drum 1 10 can be rotated about its axis 1 12 along an angular direction θ. Additionally, a cutting tool 1 14 may be moved laterally along the axis 1 12 along the z axis, or along the y axis radially toward or away from the axis 112 (toward or away form the workpiece).
Figure 2 shows a substantially planar workpiece support for supporting a workpiece thereon to illustrate the coordinates of a machining tool system employing a cutting tool according to another embodiment of the invention. The workpiece support 200 comprises a substantially planar surface upon which the workpiece (not shown) is supported. The workpiece support 200 has a length L and a width W and can be translated along its width W, for example along the x axis. The cutting tool 214 may be moved laterally along the z axis along L, or along the y axis toward or away from the surface of the workpiece support 200.
Figure 3 is a schematic of a machining tool 300 according to an embodiment of the invention. The machining tool 300 includes a workpiece support 310. The workpiece support 310 may comprise a rotating drum as shown in Figure 3 (or Figure 1). Alternatively, the workpiece support may comprise a substantially planar surface, such as shown in Figure 2, or may have some other geometry.
The machining tool 300 includes a cutting tool 312 that is configured to be displaced toward or away from the surface of the workpiece support 310, and thus toward and into any workpiece or away from any workpiece on the workpiece support. The cutting tool 312 may also be displaced laterally relative to the surface of the workpiece support 310 and the workpiece thereon.
The machining tool 300 has a first displacement mechanism arranged to displace the cutting tool 312 relative to the workpiece. The first displacement mechanism displaces the cutting tool 312 relative to the workpiece in response to control signals. The control signals originating from a machine controller 319 comes through a machine interface 320, such as a lathe interface in the case that the workpiece support 312 is a drum. The control signals may be digital signals from a machine encoder or resolver (not shown) of the machine controller 319, and may be in G code and M code, for example, as is known for machine encoders. The control signals may be in the form of TTL square wave pulses or analog sine waves.
The first displacement mechanism may comprise a spindle drive 322 and a slide 324, for example. The spindle drive 322 drives the workpiece support 310 about its axis in a first direction along an angular displacement θ (See Figure 1 illustrating angular displacement θ). The slide 324 displaces the cutting tool 312 along the axis of the workpiece support 310. Both the spindle drive 322 and the slide 324 movement are controlled based on the control signals from the machine controller 320.
The machining tool 300 has a second displacement mechanism arranged to displace the cutting tool 312 relative to the workpiece. The second displacement mechanism displaces the cutting tool 312 relative to the workpiece in response to the control signals originating from the machine interface 320. The set of control signals are the same as those used to control the first displacement mechanism.
The second displacement mechanism displaces the cutting tool 312 relative to the workpiece in a second set of coordinates. For example, for a workpiece support 310 that is a drum, the second set of coordinates may include the direction along the axis of the drum (the z axis), and the direction radially away or toward the axis (the y axis) (see Figure 1).
Preferably the second displacement mechanism is capable of a higher frequency response than the first displacement mechanism. Because the higher frequency motion of a second displacement mechanism is synchronized with a lower frequency motion, surface structures with multiple scales may be formed with traditional control signals at a much higher speed. The microstructures formed can thus have a greater range of change.
The second displacement mechanism may comprise an FTS, such as at least one piezoelectric amplifier 332 and piezoelectric actuator 334, for example. The at least one piezoelectric actuator 334 may include a first piezoelectric actuator 334a configured to displace the cutting tool in a first direction, and a second piezoelectric actuator 334b configured to displace the cutting tool in a second direction different from the first direction (see Figure 4). The first and second direction may orthogonal to each other and may be along y-axis (into or out of the work piece), and z-axis (along the drum axis), for example. Alternatively the directions need not be orthogonal.
The machining tool 300 may also include a controller 340 configured to receive the control signals and synchronize the displacement of the cutting tool 312 due to the first displacement mechanism with the displacement of the cutting tool due to the second displacement mechanism 330.
The controller 340 includes an electronic control unit 342 including a displacement determination unit 344, digital to analog unit 347 comprising a plurality of digital to analog converters 346, a path counter unit 348, and a feedback control unit 350. Alternatively, one or more of the displacement determination unit 344, digital to analog unit 347, path counter unit 348, and feedback control unit 350 may be separate from the electronic control unit 342. The electronic control unit 342 may be a dSPACE system such as the DSl 103 PPC Controller Board provided by dSPACE, or a digital signal processor (DSP) such as ChicoPlus from Innovative Integration, for example. The present invention is not limited to a particular electronic control unit.
The controller 340 also includes an nX signal multiplier/divider 354, such as an nX encoder multiplier/divider, that receives position control signals from the machine encoder of the machine interface 320, and functions to multiply the frequency of the control signals by n times in the second direction, and pass the multiplied frequency control signals to the displacement determination unit 344. In general, n is greater than or less than 1. When n is greater than 1, the nX encoder multiplier/divider functions to increase the frequency of the control signals where the increased frequency is n times the input frequency. In this case the nX signal multiplier/divider increases the resolution of the number of points in the second direction processed by the displacement determination unit 344. On the other hand, when n is less than 1 , the nX signal multiplier/divider functions to decrease the frequency of the control signals where the decreased frequency is again n times the input frequency. In this case the nX encoder multiplier/divider decreases the resolution of the number of points in the second direction processed by the displacement determination unit 344. n may be an integer greater than or equal to 2, for example, such as 4, for example.
An example of the functioning of the nX signal multiplier/divider 354 is as follows. Assume that the nX signal multiplier/divider 354 is a 4X signal multiplier, and the position signals correspond to 5000 points circumferentially along the θ direction of the drum. In other words, the resolution in the θ direction for the first displacement mechanism is 5000 points. The nX signal multiplier 345 acts to increase frequency of the position signal to 4 times the input frequency. This increase in frequency increases the number of points circumferentially along the drum to 20000 through interpolation, for example, to thereby increase the resolution of points acted on by the displacement determination unit 344, and thus 20,000 points for the second displacement direction. The increased frequency signal is then fed to the displacement determination unit 344, and also acts to trigger at least one switch 360 as discussed further below.
Selecting n for the nX signal multiplier/divider 354 provides some degree of tunability to the machining tool 300. For a lower n, the resolution is decreased, but the machining speed of the machining tool 300 is increased since fewer points need be processed for a particular path along the workpiece. On the other hand, if a higher resolution, and therefore fidelity, is desired, a larger n may be chosen at the expense of the machining speed.
The controller 340 may include an optical interface 356 that provides electrical isolation and receives the trigger signals from the machine interface 320, passes the trigger signals to the path counter unit 348. The trigger signals of the control signals from machine interface 320 indicate the triggering of the first displacement mechanism.
The path counter unit 348 is configured to determine the current path that the cutting tool 312 is on. The path counter unit 348 performs this function based on the control signals from the machine interface 320, and specifically based on the trigger signals of the control signals. In the case that the workpiece support 310 is a rotating drum, the paths will correspond to rings that are to be cut into the workpiece, and the path counter unit 348 keeps track of the ring number.
The displacement determination unit 344 determines a target displacement of the cutting tool in the second set of coordinates and provides target displacement digital signals based on the determined target displacement. The displacement determination unit 344 performs this determination based on the multiplied frequency control signals from the nX signal multiplier/divider 354 and the current path determined from the path counter unit 348. Thus, the path counter unit 348 informs the displacement determination unit 344 of the current path. If it is not desired to increase the frequency of the control signals, for example so that the machining speed is higher, the displacement determination unit 344 may receive control signals without increasing their frequency, and the nX signal multiplier/divider 354 may be omitted.
The increased frequency control signals (or just the control signals if increased resolution is not desired) provides information about a position along one or more of the coordinates of the first displacement mechanism but with increased (or decreased) resolution. As an example, assume the workpiece support 310 is a rotating drum with the first displacement mechanism providing displacement along the z-axis (rotational axis) and in the θ direction, and the machining tool 300 includes a 4X signal multiplier/divider. Also assume the number of points in the θ direction around the drum is 5000 for the first displacement mechanism, and the control signal indicates that the 1000th point (about one-fifth of the way around the drum from the first point) along the θ direction is the current point for the first displacement mechanism. The 4X signal multiplier/divider 354 provides increased frequency signals corresponding to 4 points in the second set of coordinates (for the second displacement mechanism) for every point in the first set of coordinates (for the first displacement mechanism), and thus provides for 4 points around the 1000th point. The displacement determination unit 344 uses the multiplied frequency signal, which is indicative of one of these 4 points indicating position around the drum, and the current path (or ring), and determines a target displacement of the cutting tool in the second set of coordinates corresponding to the second displacement mechanism.
For the sake of illustration, assume that the current point corresponds to a current angle θcur and that the current path is pcur. Also assume that the second set of coordinates are given by y2 and Z2. The displacement calculation unit 344 will determine the target displacement in the second set of coordinates as y2 = fy2(θcur, pcur), and Z2 = fz2(θcur, pcur), where fy2(θcur, pcur) and fz2(θcur, pcur) are functions of θcur and pcur. In other words the target displacement in the second set of coordinates is a function of the displacement in the first set of coordinates as indicated by the control signals.
The displacement determination unit 344 provides target displacement digital signals based on the determined target displacement. The plurality of digital to analog converters 346 are configured to receive respective of the target displacement digital signals from the displacement determination unit 344 and convert the target displacement digital signals to target displacement analog signals.
The displacement determination unit 344 may determine the target displacement by calculating the displacement on the fly as the multiplied frequency control signals are received from the nX signal multiplier/divider 354. In this case, the target displacement determination unit 344 may include a processor with appropriate software or firmware to calculate the target displacement as desired. Alternative, the target displacement may be pre-calculated and the pre-calculated values of the target displacement may be received from external to the displacement determination unit 344. The target displacement may be pre-calculated and stored in a memory external to the displacement determination unit 344, and streamed into the displacement determination unit 344 as the multiplied frequency control signals are received.
The machining tool 300 includes at least one switch 360 configured to alternate which digital to analog converter 346 releases the analog signals corresponding to a respective of the target displacement digital signals received from the displacement determination unit 344. The at least one switch 360 may comprise a gate, for example. The at least one switch 360 alternates which digital to analog converter 346 releases a respective of the target displacement analog signals based upon the control signals, for example, based upon the multiplied frequency control signal from the nX signal multiplier/divider 354.
The use of a switch or switches to alternate between the digital to analog converters 346 increases the machining speed of the machining tool 300 for a particular resolution on the workpiece by increasing the rate at which analog signals may be sent to the second displacement mechanism. This is accomplished by employing multiple digital to analog converters 346 (see Figures 5 and 6) on the digital to analog unit, and alternately switching between the converters 346. Figure 5 illustrates an embodiment with two digital to analog converters 346 on the digital to analog unit 347, and a single switch 360. In general, the number of digital to analog converters 346 may be more than two, however.
Figure 6 illustrates another embodiment with a plurality of digital to analog converters 346 on the digital to analog unit 347, and N switches 360,, where N is greater than 1. In this embodiment, the plurality of digital to analog converters 346 are divided into a plurality of groups, where each group corresponds to a different switch of the plurality of switches 36O1. Each of the switches 36O1 is configured to alternate which digital to analog converter 346 of the converters in its corresponding group releases respective of the target displacement analog signals.
Further the output of each of the groups of digital to analog converters may be directed to a different piezoelectric amplifier 332 and piezoelectric actuator 334. For N piezoelectric actuators, each piezoelectric actuator 344 of the N piezoelectric actuators corresponding to a different group of the digital to analog converters 346. As an alternative to piezoelectric actuators, voice coils may be used
The machining tool may comprise one or more filter buffers 362 arranged to receive and smooth the target displacement analog signals from the digital to analog converters 346. As shown in Figure 5 and 6, there may be a filter buffer 362 corresponding to each of the switches 360 of the at least one switch. The signal from the filter buffers 362 is passed on to the second displacement unit. The smoothing can help to eliminate chatters during machining.
The target displacement analog signals are received from each filter buffer 362 by the second displacement mechanism, which in response displaces the cutting tool 312. For example, if the second displacement mechanism comprises at least one piezoelectric amplifier 332 and corresponding piezoelectric actuator(s) 334, the amplifier 332 amplifies the target displacement analog signal and passes the amplified signal to its respective piezoelectric actuator 334.
The machining tool 300 may also include a sensor unit 371, including a position sensor 370 and a sensor amplifier 372, and a feed back control unit 353, including an analog to digital unit 351 and feed back control circuit 350, to adjust the target displacement control signals as necessary. The position sensor unit 371 is arranged to detect the position of the cutting tool 312, and to provide a position signal indicative of the detected position of the cutting tool 312 to the feedback control unit 353. The feedback control unit 353 is arranged to receive the position signal, amplified by the sensor amplifier 372 as desired, and adjust the target displacement digitals signals based on the position signal. The analog to digital unit 351 comprises one or more analog to digital converters to convert the position signal from the sensor amplifier 372 to digital and provide a digital position signal to the feedback control circuit 350. The feedback control circuit 350 provides a feedback signal to correct the target displacement signal at the combiner 345. The feedback control helps compensate for hysteretic and creep effects of the piezoelectric materials of the piezoelectric actuators, and thus enhances correct tool movement.
The determination of the target displacement depends upon the particular application. An example of determining the target displacement is as follows. Assuming that the first set of coordinates are θi and z\, where θi is angular displacement of the drum of the workpiece support 310, and z\ is the distance along the rotational axis of the drum. Further assume that the second set of coordinates is given by y2, the distance into the workpiece, and z2, along the direction of the rotational axis of the drum. In general y2 and Z2 will be a function of θi and z\. The values of θi and zι are determined from the control signals (which are also applied for control of the first displacement mechanism). Thus, the general formulas for y2 and Z2 are y2 = fy2(θi, z\), and z2 = fz2(θ|, Zi). The particular formula used depends on the desired shape of the pattern cut into the workpiece, such as sawtooth or sinusoidal shape.
In many applications it is desired to include random or pseudo-random modulation of the pattern cut into the workpiece. In this case the formula for the target displacement may be given as y2 = fy2(θt, Z1, fy2ran(θ|, zι)), and Z2 = fz2(θ|, Z1, fz2ran(θ|, zi)), where fy2ran(θi, Zi) and fz2ran(θi, Z|) are random or pseudo random functions. The present invention is not limited, however, to a particular function or functions for the target displacement, as the particular target displacement will depend upon the application. Figures 7 and 8 illustrate top views of workpieces with examples of particular microstructures machined therein. Figures 7 and 8 illustrate a number of paths cut into a 3mm x 3mm workpiece, where the paths are subject to a pseudo random modulation. The unmodified paths (nominal paths) provide structures with a pitch, P, of 30 μm, where the width of the cutting tool is 60 μm. The second set of coordinates is given by y2, (the distance into the workpiece, or the cut depth), and z2 (the distance along the axis of rotation of the drum). z2 is generally perpendicular to the structures shown in Figures 7 and 8. y2 was kept constant with a constant cut depth of 27.5 μm , and target displacement along the z-direction was pseudo randomly modulated so the that the lateral distance was between limits of -15μm and +15μm, and a wavelength of the motion was between 100 and 200 μm. The ratio of lateral distance to wavelength determines the slope of path and thus the turning power of the intended application. In general the pseudo random modulation may be provided by a interpolated waveform that is fit through random control points, as in Figures 7 and 8, or by generating a broad band digitally sampled noise signal, which may be filtered and scaled to provide the desired range of amplitude or frequency, for example.
The present invention is applicable to a number of different applications. For example, microstructure may be machined in applications including diffusers, solar cell panels, reflectors, brightness enhancement films and heat/mass transfer control surfaces. For example, for thin-film solar cell applications, textured (by machining) TCO/glass/metal substrates, which provide light trapping may be formed. Angle selective specular reflectors may also be formed.
The particular first and second set of coordinates will depend on the particular application. The structures formed may have variation in one or more of amplitude, phase, period and frequency.
In embodiments of the present invention, because the high frequency motion of a second displacement mechanism, such as an FTS, is synchronized with a lower frequency motion, surface structures with multiple scales may be formed with traditional control signals at a much higher speed. The microstructures formed have a greater range of change. Machining these structures in multiple repeatable passes produces a superior surface finish.
While the invention has been described in detail and with reference to specific embodiments thereof, it will be apparent to one skilled in the art that various changes and modifications can be made therein without departing from the spirit and scope of the invention. Thus, the breadth and scope of the present invention should not be limited by any of the above-described exemplary embodiments, but should be defined only in accordance with the following claims and their equivalents.

Claims

WHAT IS CLAIMED IS:
1. A machining tool for machining a workpiece on a workpiece support in response to control signals, comprising:
a cutting tool configured to cut a surface of the workpiece;
a first displacement mechanism arranged to displace the cutting tool relative to the workpiece in a first set of coordinates in response to the control signals;
a second displacement mechanism supported by the first translation mechanism and arranged to displace the cutting tool relative to the workpiece in a second set of coordinates, the second displacement mechanism capable of a higher frequency response than the first displacement mechanism; and
a controller configured to receive the control signals and synchronize the displacement of the cutting tool due to the first displacement mechanism with the displacement of the cutting tool due to the second displacement mechanism.
2. The machining tool of claim 1 , wherein the controller comprises:
a displacement determination unit that determines a target displacement of the cutting tool in the second set of coordinates and provides target displacement digital signals based on the determined target displacement;
a digital to analog unit comprising a plurality of digital to analog converters configured to receive respective of the target displacement digital signals from the displacement determination unit and convert the target displacement digital signals to target displacement analog signals; and
at least one switch configured to alternate which digital to analog converters release respective of the target displacement analog signals.
3. The machining tool of claim 2, wherein the at least one switch alternates which digital to analog converters release respective of the target displacement analog signals based upon the control signals.
4. The machining tool of claim 2, wherein the plurality of digital to analog converters are divided into a plurality of groups of digital to analog converters, the at least one switch comprises a plurality of switches, each of the groups corresponding to a different switch of the plurality of switches, and each switch is configured to alternate which digital to analog converter of the converters in a corresponding group of the groups release respective of the target displacement analog signals.
5. The machining tool of claim 4, wherein the second displacement mechanism comprises N actuators, each actuator of the N actuators configured to displace the cutting tool based on the target displacement analog signals, each actuator of the N actuators corresponding to a different group of the plurality of groups.
6 The machining tool of claim 5, where the actuators comprise piezoelectric actuators or voice coils.
7. The machining tool of claim 2, wherein the first displacement mechanism is configured to displace the cutting tool, based upon the control signals, in a first direction and in a second direction so as to define a number of discrete paths along the workpiece.
8. The machining tool of claim 7, wherein the workpiece support comprises a cylindrical drum, the first direction is along an angular displacement, θ, about an axis of the drum, and the second direction is along the axis of the drum.
9. The machining tool of claim 7, wherein the workpiece support comprises a substantially planar surface, and the first direction and the second direction are substantially orthogonal to each other.
10. The machining tool of claim 7, wherein the controller further comprises a path counter unit configured to determine the current path based upon the control signals, and to inform the displacement determination unit of the current path.
11. The machining tool of claim 10, wherein the workpiece support comprises a cylindrical drum, the first direction is along an angular displacement, θ, about an axis of the drum, the second direction is along the axis of the drum, and the discrete paths are rings.
12. The machining tool of claim 7, wherein the controller further comprises:
an nX signal multiplier/divider configured to receive the control signals, multiply the frequency of the control signals by n times in the second direction, n is a number greater than or less than 1 , and pass the multiplied frequency control signals to the displacement determination unit.
13. The machining tool of claim 10, wherein the controller further comprises:
an optical interface configured to receive trigger signals of the control signals, the trigger signals indicating the triggering of the first displacement mechanism, convert the trigger signals to optical signals, and send the optical signals to the path counter unit.
14. The machining tool of claim 2, wherein the at least one switch comprises at least one gate switch.
15. The machining tool of claim 2, wherein the controller further comprises a filter buffer arranged to receive and smooth the target displacement analog signals.
16. The machining tool of claim 2, wherein the second displacement mechanism comprises at least one actuator configured to displace the cutting tool based on the target displacement analog signals.
17. The machining tool of claim 16, wherein the at least one actuator comprises N actuators, where N is an integer greater than or equal to two.
18. The machining tool of claim 17, wherein each of the N actuators is configured to displace the cutting tool in a different direction.
19. The machining tool of claim 17, wherein N is equal to two and the different directions are orthogonal to each other.
20. The machining tool of claim 2, further comprising:
a sensor unit arranged to detect the position of the cutting tool, and to provide a position signal indicative of the detected position of the cutting tool to the controller; and wherein the controller comprises a feedback control unit arranged to receive the position signal from the sensor unit and adjust the target displacement digital signals based on the position signal.
21. The machining tool of claim 20, wherein the sensor unit comprises:
a sensor detecting a position of the cutting tool and providing an unamplified position signal; and
a sensor amplifier arranged to amplify the unamplified position signal to provide the position signal.
22. The machining tool of claim 20, wherein the feedback control unit comprises:
an analog to digital converter unit arranged to receive the position signal from the sensor unit and convert the position signal to a digital position signal; and
a feed back controller circuit arranged to receive the digital position signal and adjust the target displacement digital signal based on the digital position signal.
23. The machining tool of claim 2, wherein the displacement determination unit determines the target displacement by calculating the target displacement.
24. The machining tool of claim 23, wherein the displacement determination unit calculates the target displacement according to a displacement function.
25. The machining tool of claim 24, wherein the displacement function is defined by a first function modulated by a second function, the second function being random or pseudo random.
26. The machining tool of claim 2, wherein the displacement determination unit determines the target displacement by receiving pre-calculated target displacement values.
27. A machining tool for machining a workpiece on a workpiece support in response to control signals, comprising:
a cutting tool configured to cut a surface of the workpiece;
a first displacement mechanism arranged to displace the cutting tool relative to the workpiece in a first set of coordinates in response to control signals, the first displacement mechanism configured to displace the cutting tool in a first direction and in a second direction so as to define a number of discrete paths along the workpiece based upon the control signals, wherein the workpiece support comprises a cylindrical drum, the first direction is an angular displacement, θ, about an axis of the drum, the second direction is along the axis of the drum, and the discrete paths are rings;
a second displacement mechanism supported by the first translation mechanism and arranged to displace the cutting tool relative to the workpiece in a second set of coordinates; and
a controller configured to receive the control signals and synchronize the displacement of the cutting tool due to the first displacement mechanism with the displacement of the cutting tool due to the second displacement mechanism, the controller comprising:
a displacement determination unit that determined a target displacement of the cutting tool in the second set of coordinates and provides target displacement digital signals based on the determined target displacement;
a plurality of digital to analog converters configured to receive respective of the target displacement digital signals from the displacement determination unit and convert the target displacement digital signals to target displacement analog signals; and a switch configured to alternate which digital to analog converter releases a respective of the target displacement analog signals based upon the control signals.
28. A method of machining a workpiece in response to control signals, comprising:
providing a cutting tool configured to cut a surface of the workpiece;
displacing the cutting tool relative to the workpiece in a first set of coordinates in response to the control signals using a first displacement mechanism;
displacing the cutting tool relative to the workpiece in a second set of coordinates using a second displacement mechanism, the second displacement mechanism capable of a higher frequency response than the first displacement mechanism;
synchronizing the displacement of the cutting tool in the first set of coordinates with the displacement of the cutting tool in the second set of coordinates.
29. The method of claim 28, wherein displacing the cutting tool relative to the workpiece in a second set of coordinates comprises:
determining a target displacement of the cutting tool in the second set of coordinates;
providing target displacement digital signals based on the determined target displacement;
converting the target displacement digital signals to target displacement analog signals using a plurality of digital to analog converters; and
switching which digital to analog converter releases a respective of the target displacement analog signals.
30. The method of claim 29, wherein the switching is based upon the control signals.
31. The method of claim 29, wherein in the displacing the cutting tool relative to the workpiece in the first set of coordinates, the cutting tool is displaced in a first direction and in a second direction so as to define a number of discrete paths along the workpiece.
32. The method of claim 28, wherein displacing the cutting tool relative to the workpiece in the first set of coordinates, the cutting tool is displaced in a first direction and in a second direction so as to define a number of discrete paths along the workpiece.
33. The method of claim 32, wherein displacing the cutting tool relative to the workpiece in the first set of coordinates and the second set of coordinate comprises making more than one pass over each discrete path, each pass over a particular path being substantially identical in displacement of the cutting tool.
34. The method of claim 33, wherein displacing the cutting tool relative to the workpiece in a second set of coordinates comprises:
calculating a target displacement of the cutting tool in the second set of coordinates according to a displacement function, wherein the displacement function is defined by a first function modulated by a second function, the second function being random or pseudo random.
PCT/US2005/030654 2004-08-31 2005-08-29 Apparatus and method for contouring the surface of a workpiece by using a machine tool WO2006026547A2 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012000148A1 (en) 2012-01-05 2013-07-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Tool adapter for use in machine tool for highly-accurate machining of contoured and structured surfaces and other geometric forms, has receiving device for connection to machine spindle , where adapter shaft is divided by coupling

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7785098B1 (en) 2001-06-05 2010-08-31 Mikro Systems, Inc. Systems for large area micro mechanical systems
WO2002098624A1 (en) * 2001-06-05 2002-12-12 Mikro Systems Inc. Methods for manufacturing three-dimensional devices and devices created thereby
US7141812B2 (en) 2002-06-05 2006-11-28 Mikro Systems, Inc. Devices, methods, and systems involving castings
US20060065085A1 (en) * 2004-09-29 2006-03-30 General Electric Company Multi element tool designs for modifying surface characteristics of substrates
US7618164B2 (en) * 2005-06-09 2009-11-17 Ubright Optronics Corporation Moire reducing optical substrates with irregular prism structures
TWI339743B (en) * 2005-12-06 2011-04-01 Ubright Optronics Corp A luminance enhancement film and manufacturing method thereof and method for enhancing brightness of an image
JP4895677B2 (en) * 2006-05-19 2012-03-14 パナソニック株式会社 3-axis tool unit and processing device
US7807938B2 (en) * 2006-06-22 2010-10-05 Sabic Innovative Plastics Ip B.V. Mastering tools and systems and methods for forming a plurality of cells on the mastering tools
TWI384260B (en) * 2006-06-30 2013-02-01 Ubright Optronics Corp Luminance enhancement optical substrates with optical defect masking structures
US20080116584A1 (en) * 2006-11-21 2008-05-22 Arkalgud Sitaram Self-aligned through vias for chip stacking
KR101011092B1 (en) * 2007-07-19 2011-01-25 도시바 기카이 가부시키가이샤 Microscopic geometry cutting device and microscopic geometry cutting method
CN101835597B (en) * 2007-09-21 2013-05-22 3M创新有限公司 Optical film
CN101620282B (en) * 2008-06-30 2011-11-30 鸿富锦精密工业（深圳）有限公司 Method for processing aspherical lens module
EP2362822A2 (en) 2008-09-26 2011-09-07 Mikro Systems Inc. Systems, devices, and/or methods for manufacturing castings
CN102334047B (en) * 2009-02-26 2014-04-02 大日本印刷株式会社 Optical sheet, surface light source apparatus, transmission type display apparatus, light emitter, mold, and method for manufacturing mold
US9685900B2 (en) 2010-11-19 2017-06-20 General Electric Company Low-inductance, high-efficiency induction machine and method of making same
US9780716B2 (en) 2010-11-19 2017-10-03 General Electric Company High power-density, high back emf permanent magnet machine and method of making same
JP5033929B1 (en) * 2011-11-10 2012-09-26 ハリキ精工株式会社 Machine Tools
US8813824B2 (en) 2011-12-06 2014-08-26 Mikro Systems, Inc. Systems, devices, and/or methods for producing holes
DE102014224220A1 (en) * 2014-11-27 2016-06-02 Carl Zeiss Smt Gmbh Piezoelectric positioning device and positioning method by means of such a piezoelectric positioning device

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3644049A (en) * 1969-11-26 1972-02-22 Heald Machine Co Machine tool
US4343206A (en) * 1980-06-12 1982-08-10 The United States Of America As Represented By The United States Department Of Energy Slide system for machine tools
DE3730762A1 (en) * 1987-09-12 1989-03-23 Rheinische Maschinenfabrik & E Method and apparatus for the shape cutting of an originally cylindrical workpiece
EP0420244A1 (en) * 1989-09-27 1991-04-03 Toyoda Koki Kabushiki Kaisha Apparatus for machining a non-circular workpiece
EP0476678A2 (en) * 1990-09-20 1992-03-25 Toyoda Koki Kabushiki Kaisha Method and apparatus for machining a non-circular workpiece
US5315526A (en) * 1989-12-07 1994-05-24 Okuma Corporation Numerically controlled lathe
US5467675A (en) * 1993-11-15 1995-11-21 North Carolina State University Apparatus and method for forming a workpiece surface into a non-rotationally symmetric shape
US5735028A (en) * 1994-10-19 1998-04-07 Matsushita Electric Industrial Co., Ltd. Processing apparatus with movable processing tool and processing method
DE19640280A1 (en) * 1996-09-30 1998-04-09 Samson Ag Tool head for the machining of a surface of a workpiece
DE9422389U1 (en) * 1994-01-20 2001-06-28 Emag Maschinenfabrik GmbH, 73084 Salach Tool cutting device for high-precision machining of round, non-circular and / or non-cylindrical inner and / or outer contours

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4228333A1 (en) * 1991-08-26 1993-03-04 Konishiroku Photo Ind Ultra=precision machining appts. for preparing photoreceptor carrier cylinder for copier - compares measured cutting force with stored reference values to evaluate surface quality for machining control in real=time
EP0942227B1 (en) * 1994-09-27 2004-03-24 Minnesota Mining And Manufacturing Company Luminance control film
DE69602588T2 (en) * 1995-03-03 1999-10-14 Minnesota Mining & Mfg LIGHT-CONTROLLING FILM WITH A VARIETY STRUCTURED SURFACE AND LIGHT-CONTROLLING ITEM PRODUCED FROM IT
US5917664A (en) * 1996-02-05 1999-06-29 3M Innovative Properties Company Brightness enhancement film with soft cutoff
US6237452B1 (en) * 1997-12-29 2001-05-29 Massachusetts Institute Of Technology Precision high speed turning machine
AU752774B2 (en) * 1998-02-18 2002-09-26 Minnesota Mining And Manufacturing Company Optical film
US6356391B1 (en) * 1999-10-08 2002-03-12 3M Innovative Properties Company Optical film with variable angle prisms
CN100437407C (en) * 2000-01-11 2008-11-26 电子科学工业公司 Abbe error correction system and method
US20030035231A1 (en) * 2001-08-03 2003-02-20 Epstein Kenneth A. Optical film having microreplicated structures; and methods
US7275468B2 (en) * 2002-05-29 2007-10-02 Massachusetts Institute Of Technology Rotary fast tool servo system and methods
WO2005043266A2 (en) * 2003-10-31 2005-05-12 Massachusetts Institute Of Technology Variable reluctance fast positioning system and methods

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3644049A (en) * 1969-11-26 1972-02-22 Heald Machine Co Machine tool
US4343206A (en) * 1980-06-12 1982-08-10 The United States Of America As Represented By The United States Department Of Energy Slide system for machine tools
DE3730762A1 (en) * 1987-09-12 1989-03-23 Rheinische Maschinenfabrik & E Method and apparatus for the shape cutting of an originally cylindrical workpiece
EP0420244A1 (en) * 1989-09-27 1991-04-03 Toyoda Koki Kabushiki Kaisha Apparatus for machining a non-circular workpiece
US5315526A (en) * 1989-12-07 1994-05-24 Okuma Corporation Numerically controlled lathe
EP0476678A2 (en) * 1990-09-20 1992-03-25 Toyoda Koki Kabushiki Kaisha Method and apparatus for machining a non-circular workpiece
US5467675A (en) * 1993-11-15 1995-11-21 North Carolina State University Apparatus and method for forming a workpiece surface into a non-rotationally symmetric shape
DE9422389U1 (en) * 1994-01-20 2001-06-28 Emag Maschinenfabrik GmbH, 73084 Salach Tool cutting device for high-precision machining of round, non-circular and / or non-cylindrical inner and / or outer contours
US5735028A (en) * 1994-10-19 1998-04-07 Matsushita Electric Industrial Co., Ltd. Processing apparatus with movable processing tool and processing method
DE19640280A1 (en) * 1996-09-30 1998-04-09 Samson Ag Tool head for the machining of a surface of a workpiece

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012000148A1 (en) 2012-01-05 2013-07-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Tool adapter for use in machine tool for highly-accurate machining of contoured and structured surfaces and other geometric forms, has receiving device for connection to machine spindle , where adapter shaft is divided by coupling
DE102012000148B4 (en) * 2012-01-05 2015-09-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Tool adapter and machine tool with this

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