WO2006017340A2 - Plasma enhanced chemical vapor deposition system for forming carbon nanotubes - Google Patents
Plasma enhanced chemical vapor deposition system for forming carbon nanotubesInfo
- Publication number
- WO2006017340A2 WO2006017340A2 PCT/US2005/024871 US2005024871W WO2006017340A2 WO 2006017340 A2 WO2006017340 A2 WO 2006017340A2 US 2005024871 W US2005024871 W US 2005024871W WO 2006017340 A2 WO2006017340 A2 WO 2006017340A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- electrode
- power supply
- carbon nanotubes
- pecvd
- power
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
- C01B32/162—Preparation characterised by catalysts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
- H01J37/32027—DC powered
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/332—Coating
- H01J2237/3321—CVD [Chemical Vapor Deposition]
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007521615A JP2008514531A (en) | 2004-07-12 | 2005-07-12 | Plasma enhanced chemical vapor deposition system for forming carbon nanotubes |
EP05790716A EP1781836A4 (en) | 2004-07-12 | 2005-07-12 | Plasma enhanced chemical vapor deposition system for forming carbon nanotubes |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/889,807 US20060008594A1 (en) | 2004-07-12 | 2004-07-12 | Plasma enhanced chemical vapor deposition system for forming carbon nanotubes |
US10/889,807 | 2004-07-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2006017340A2 true WO2006017340A2 (en) | 2006-02-16 |
WO2006017340A3 WO2006017340A3 (en) | 2007-12-13 |
Family
ID=35541690
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/024871 WO2006017340A2 (en) | 2004-07-12 | 2005-07-12 | Plasma enhanced chemical vapor deposition system for forming carbon nanotubes |
Country Status (5)
Country | Link |
---|---|
US (1) | US20060008594A1 (en) |
EP (1) | EP1781836A4 (en) |
JP (1) | JP2008514531A (en) |
TW (1) | TW200604370A (en) |
WO (1) | WO2006017340A2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11955314B2 (en) | 2019-01-09 | 2024-04-09 | Tokyo Electron Limited | Plasma processing apparatus |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4781662B2 (en) * | 2004-11-17 | 2011-09-28 | シャープ株式会社 | Carbon nanotube manufacturing method and carbon nanotube manufacturing apparatus |
KR100806129B1 (en) * | 2006-08-02 | 2008-02-22 | 삼성전자주식회사 | Method of forming a carbon nanotube |
US7794797B2 (en) * | 2007-01-30 | 2010-09-14 | Cfd Research Corporation | Synthesis of carbon nanotubes by selectively heating catalyst |
WO2013027797A1 (en) * | 2011-08-24 | 2013-02-28 | 日本ゼオン株式会社 | Device for manufacturing and method for manufacturing oriented carbon nanotube aggregates |
JP6131095B2 (en) * | 2012-06-19 | 2017-05-17 | 株式会社アマダホールディングス | Mold position detecting device, bending device, mold, mounting member position detecting method with respect to mounted device |
CN103849848B (en) * | 2012-11-28 | 2016-08-31 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Physical vapor deposition device |
US10246060B2 (en) * | 2015-08-20 | 2019-04-02 | Fca Us Llc | Integrated vacuum for motor vehicle |
CN108504096B (en) * | 2018-04-19 | 2020-02-18 | 天津大学 | Preparation method of carbon nano tube/polymer composite material |
CN109259045A (en) | 2018-10-19 | 2019-01-25 | 恩智浦美国有限公司 | With the thawing equipment that can relocate electrode |
JP7406965B2 (en) * | 2019-01-09 | 2023-12-28 | 東京エレクトロン株式会社 | plasma processing equipment |
KR20230137037A (en) | 2022-03-21 | 2023-10-04 | 주식회사 씨에이티빔텍 | Apparatus and method for manufacturing carbon nanotube |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3257328B2 (en) * | 1995-03-16 | 2002-02-18 | 株式会社日立製作所 | Plasma processing apparatus and plasma processing method |
JP3119172B2 (en) * | 1995-09-13 | 2000-12-18 | 日新電機株式会社 | Plasma CVD method and apparatus |
US7004107B1 (en) * | 1997-12-01 | 2006-02-28 | Applied Materials Inc. | Method and apparatus for monitoring and adjusting chamber impedance |
JP2000277003A (en) * | 1999-03-23 | 2000-10-06 | Futaba Corp | Manufacture of electron emission source and electron emission source |
KR100360470B1 (en) * | 2000-03-15 | 2002-11-09 | 삼성에스디아이 주식회사 | Method for depositing a vertically aligned carbon nanotubes using thermal chemical vapor deposition |
CN1325372C (en) * | 2001-07-27 | 2007-07-11 | 萨里大学 | Production of carbon nanotubes |
KR20030028296A (en) * | 2001-09-28 | 2003-04-08 | 학교법인 한양학원 | Plasma enhanced chemical vapor deposition apparatus and method of producing a cabon nanotube using the same |
-
2004
- 2004-07-12 US US10/889,807 patent/US20060008594A1/en not_active Abandoned
-
2005
- 2005-07-11 TW TW094123432A patent/TW200604370A/en unknown
- 2005-07-12 EP EP05790716A patent/EP1781836A4/en not_active Withdrawn
- 2005-07-12 JP JP2007521615A patent/JP2008514531A/en active Pending
- 2005-07-12 WO PCT/US2005/024871 patent/WO2006017340A2/en active Application Filing
Non-Patent Citations (1)
Title |
---|
See references of EP1781836A4 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11955314B2 (en) | 2019-01-09 | 2024-04-09 | Tokyo Electron Limited | Plasma processing apparatus |
Also Published As
Publication number | Publication date |
---|---|
WO2006017340A3 (en) | 2007-12-13 |
EP1781836A4 (en) | 2009-03-18 |
JP2008514531A (en) | 2008-05-08 |
TW200604370A (en) | 2006-02-01 |
EP1781836A2 (en) | 2007-05-09 |
US20060008594A1 (en) | 2006-01-12 |
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