WO2005122255A1 - Metal interconnects for image sensors - Google Patents

Metal interconnects for image sensors Download PDF

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Publication number
WO2005122255A1
WO2005122255A1 PCT/US2005/019429 US2005019429W WO2005122255A1 WO 2005122255 A1 WO2005122255 A1 WO 2005122255A1 US 2005019429 W US2005019429 W US 2005019429W WO 2005122255 A1 WO2005122255 A1 WO 2005122255A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
metal
conducting
sealing element
copper
Prior art date
Application number
PCT/US2005/019429
Other languages
French (fr)
Inventor
Liang Tan
Herbert James Erhardt
Original Assignee
Eastman Kodak Company
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eastman Kodak Company filed Critical Eastman Kodak Company
Priority to DE602005027688T priority Critical patent/DE602005027688D1/en
Priority to CN2005800181947A priority patent/CN1965407B/en
Priority to KR1020067025523A priority patent/KR101210176B1/en
Priority to EP05756194A priority patent/EP1751799B1/en
Priority to JP2007515578A priority patent/JP4856064B2/en
Publication of WO2005122255A1 publication Critical patent/WO2005122255A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
    • H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/14636—Interconnect structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
    • H01L23/53204—Conductive materials
    • H01L23/53209—Conductive materials based on metals, e.g. alloys, metal silicides
    • H01L23/53228—Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being copper
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
    • H01L23/53204—Conductive materials
    • H01L23/53209—Conductive materials based on metals, e.g. alloys, metal silicides
    • H01L23/53257—Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being a refractory metal
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Definitions

  • the invention relates generally to the field of metal interconnects for image sensors and, more particularly, to such interconnects that are made of copper and that are connected via non-corrosive metals to circuitry external to the seal ring .
  • Image sensors include a substrate having a plurality of pixels. Each pixel typically includes a photosensitive area that converts incident light into charge packets. One of more transistors are connected to the photosensitive area for various purposes, such as passing the charge therefrom and for signal processing of the charge packet that may be external to the imaging area. Each of the transistors is connected to a voltage source for permitting the transistors to be operated as desired. A plurality of buses connected the transistors to voltage sources. The buses are typically layered, one above another, and they are connected together through electrical connection, VIAs and pre-contacts, and they eventually pass through an internal seal ring to an external pad. These external pads on the wafer DIEs are eventually connected to package leads to form the electrical connections. Typically the buses are made of either aluminum (Al) or copper
  • the invention resides in an integrated circuit having a substrate; a sealing element spanning a periphery of the substrate that forms a boundary for the substrate; two metal lines spanning the substrate in at least two distinct layers contained within the boundary; a first conducting element disposed outside the sealing element; and one or more second conducting elements connecting the two metal lines and that spans the sealing element; wherein the conducting elements are substantially non-oxidizing metals that are resistant to oxidization and that connect the metal lines to the first conducting element.
  • the present invention has the advantage of using copper internal of the seal ring, but does not extend it external to the seal ring. Instead, corrosive resistant metals in the VIAs and pre-contacts, such as tungsten, are used external to the seal ring.
  • Fig. 1 is a side view in cross section of a typical transistor of the present invention
  • Fig. 2 is a side view of the metal interconnects that connect the transistors to external circuitry.
  • pre-contacts are electrical connections between the semiconductor substrate and the metal layer immediately above it, metal 1.
  • VIAs are electrical connections between adjacent metal lines, for example metal 1 and metal 2.
  • the source, gate and drain will each have its own pre-contact and respective metal layers.
  • the source will have its own pre-contact, metal 1 metal 2, metal 3, and metal 4, and the gate will have its own pre-contact, metal 1 metal 2, metal 3, and metal 4.
  • the 1 denotes it is the metal layer immediately above the substrate.
  • CMOS integrated circuits DIE 5 of the present invention.
  • the CMOS (Complementary Metal-Oxide-Semiconductor) ICs include a plurality of MOSFET transistors each with a gate terminal 10 as well as source 11 and drain 12 terminals.
  • Fig. 2 shows an illustration of the contact 13 and metal layers that can be made for either the source, drain or gate terminals.
  • the image sensor ICs also includes a plurality of photodiodes 3 that receive the incident light that is represented as charge packets in the photodiodes, as is well known in the art.
  • the gate 10 is connected to metal 1 (17g) through pre-contact 13g, while remaining heavily doped source 11 and drain 12 regions in the semiconductor substrate 14 are connected to metal 1 (17s, 17d) through their pre-contacts 13s and 13d.
  • a channel region 15 in the semiconductor under the gate electrodes 10 separates the source 11 and drain 12.
  • the channel 15 is lightly doped with a dopant type opposite to that of the source 11 and drain 12.
  • the semiconductor is also physically separated from the gate electrode 10, by a gate dielectric layer 16 (for example, Si02/Si 3 N 4 ).
  • routing metal layers 17, 18, 19 and 20 are important to ease the routing (especially automated routing) of logic signals between modules and improves the power and clock distribution to modules.
  • Improved routability is achieved through additional layers of metal 18, 19, and 20.
  • Multiple interconnect metals 17, 18, 19 and 20 are becoming almost mandatory for all of CMOS ICs as well as image sensors (CMOS and CCD).
  • Each adjacent metal layer 17, 18, 19 and 20 is separated by an intermediate isolation layer 21 and their electrical connections are achieved by VIAs 22 and pre-contact 13.
  • the VIAs 22 and pre-contact 13 are deposited with some better step coverage metal materials, such as Tungsten (W) etc., which is also corrosion-resistant.
  • the copper (Cu) metals 17, 18 and 19 have played an important role to replace a traditional aluminum (Al) metal due to its higher conductivity, lower sheet resistance and lower cost.
  • Al aluminum
  • the disadvantage is that Cu is easily oxidized and corroded.
  • all non-copper based metal layers such as metal layer 4 (20) and VIAs 22 as well as pre-contacts 13, which are adjacent the periphery of the die 5, are elongated 23, 24, 25, 26 and 27 so that it forms a wall- like extension that extends past the periphery (internal seal rings 28) of the die 5.
  • These elongated metal layers 23, Visa 24, 25, 26, and pre-contact 27 permit the conductors to be electrically connected to the PADs 29 without extending copper (Cu) metals 17, 18 and 19 past the internal rings 28 of the die 5 that would expose the conductors to the environment, particularly air, that can cause corrosion and/or easy oxidized.
  • the VIAs 22, 24, 25, 26 and pre-contact 13 and 27 are made of corrosion-resistant materials, such as tungsten, that resist corrosion.
  • the interconnect metal layers 17, 18 and 19 are typically made of copper except top metal layer 4 (20), for example. This invention will provide robust connection between leads and CSP PAD 29 extension metals.
  • This invention can be also applied to all CMOS ICs and CCD image sensor products with Cu based interconnect metal layers 17, 18 and 19, for example, potentially using wafer level CSP technology in IC industry. PARTS LIST

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

An integrated circuit includes a substrate; a sealing element spanning a periphery of the substrate that forms a protective boundary for the substrate; a plurality of copper lines spanning the substrate in at least two distinct layers contained within the protective boundary; a first conducting element disposed outside the sealing element; and one or more second conducting elements connecting at least two of the copper lines and that spans the sealing element; wherein the conducting elements are substantially non-oxidizing metals that are resistant to oxidization and that connect the copper line to the first conducting element.

Description

METAL INTERCONNECTS FORIMAGE SENSORS
FIELD OFTHEINVENTION The invention relates generally to the field of metal interconnects for image sensors and, more particularly, to such interconnects that are made of copper and that are connected via non-corrosive metals to circuitry external to the seal ring .
BACKGROUND OF THE INVENTION Image sensors include a substrate having a plurality of pixels. Each pixel typically includes a photosensitive area that converts incident light into charge packets. One of more transistors are connected to the photosensitive area for various purposes, such as passing the charge therefrom and for signal processing of the charge packet that may be external to the imaging area. Each of the transistors is connected to a voltage source for permitting the transistors to be operated as desired. A plurality of buses connected the transistors to voltage sources. The buses are typically layered, one above another, and they are connected together through electrical connection, VIAs and pre-contacts, and they eventually pass through an internal seal ring to an external pad. These external pads on the wafer DIEs are eventually connected to package leads to form the electrical connections. Typically the buses are made of either aluminum (Al) or copper
(Cu). However, extending the copper outside the internal seal ring exposes the copper to air and the like which causes the copper to be oxidized. Aluminum is less likely to be oxidized when exposed to air; however, its conductivity is lower than copper. Consequently, a need exists for image sensors that use copper for its conductive properties, but also resists its tendency to be oxidized when exposed to air. SUMMARY OF THE INVENTION The present invention is directed to overcoming one or more of the problems set forth above. Briefly summarized, according to one aspect of the present invention, the invention resides in an integrated circuit having a substrate; a sealing element spanning a periphery of the substrate that forms a boundary for the substrate; two metal lines spanning the substrate in at least two distinct layers contained within the boundary; a first conducting element disposed outside the sealing element; and one or more second conducting elements connecting the two metal lines and that spans the sealing element; wherein the conducting elements are substantially non-oxidizing metals that are resistant to oxidization and that connect the metal lines to the first conducting element. These and other aspects, objects, features and advantages of the present invention will be more clearly understood and appreciated from a review of the following detailed description of the preferred embodiments and appended claims, and by reference to the accompanying drawings.
Advantageous Effect Of The Invention The present invention has the advantage of using copper internal of the seal ring, but does not extend it external to the seal ring. Instead, corrosive resistant metals in the VIAs and pre-contacts, such as tungsten, are used external to the seal ring.
BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a side view in cross section of a typical transistor of the present invention; and Fig. 2 is a side view of the metal interconnects that connect the transistors to external circuitry.
DETAILED DESCRIPTION OF THE INVENTION Before discussing the present invention, it is beneficial to discuss some terms as used herein. In this regard, pre-contacts are electrical connections between the semiconductor substrate and the metal layer immediately above it, metal 1. VIAs are electrical connections between adjacent metal lines, for example metal 1 and metal 2. It is further noted that the source, gate and drain will each have its own pre-contact and respective metal layers. For example, the source will have its own pre-contact, metal 1 metal 2, metal 3, and metal 4, and the gate will have its own pre-contact, metal 1 metal 2, metal 3, and metal 4. Even though each has a metal layer 1 and the like, it is noted that they are different from each other, and the 1 denotes it is the metal layer immediately above the substrate. Referring to Figs. 1 and 2, there are shown side views in cross section of the CMOS integrated circuits (IC) DIE 5 of the present invention. The CMOS (Complementary Metal-Oxide-Semiconductor) ICs include a plurality of MOSFET transistors each with a gate terminal 10 as well as source 11 and drain 12 terminals. (Fig. 2 shows an illustration of the contact 13 and metal layers that can be made for either the source, drain or gate terminals.) For thoroughness, it is noted that the image sensor ICs also includes a plurality of photodiodes 3 that receive the incident light that is represented as charge packets in the photodiodes, as is well known in the art. In order to form the electrical connections, the gate 10 is connected to metal 1 (17g) through pre-contact 13g, while remaining heavily doped source 11 and drain 12 regions in the semiconductor substrate 14 are connected to metal 1 (17s, 17d) through their pre-contacts 13s and 13d. A channel region 15 in the semiconductor under the gate electrodes 10 separates the source 11 and drain 12. The channel 15 is lightly doped with a dopant type opposite to that of the source 11 and drain 12. The semiconductor is also physically separated from the gate electrode 10, by a gate dielectric layer 16 (for example, Si02/Si3N4). To add the signal and power, routing metal layers 17, 18, 19 and 20 are important to ease the routing (especially automated routing) of logic signals between modules and improves the power and clock distribution to modules. Improved routability is achieved through additional layers of metal 18, 19, and 20. Multiple interconnect metals 17, 18, 19 and 20 are becoming almost mandatory for all of CMOS ICs as well as image sensors (CMOS and CCD). Each adjacent metal layer 17, 18, 19 and 20 is separated by an intermediate isolation layer 21 and their electrical connections are achieved by VIAs 22 and pre-contact 13. The VIAs 22 and pre-contact 13 are deposited with some better step coverage metal materials, such as Tungsten (W) etc., which is also corrosion-resistant. In order to improve high speed performance particularly when semiconductor scaling down to deep submicron, for example, less than 0.18micron CMOS or other CCD technology, the copper (Cu) metals 17, 18 and 19 have played an important role to replace a traditional aluminum (Al) metal due to its higher conductivity, lower sheet resistance and lower cost. However, the disadvantage is that Cu is easily oxidized and corroded. Referring to Fig 2, in order to make Cu-based IC products fitting to wafer level chip scale packages (CSP), all non-copper based metal layers, such as metal layer 4 (20) and VIAs 22 as well as pre-contacts 13, which are adjacent the periphery of the die 5, are elongated 23, 24, 25, 26 and 27 so that it forms a wall- like extension that extends past the periphery (internal seal rings 28) of the die 5. These elongated metal layers 23, Visa 24, 25, 26, and pre-contact 27 permit the conductors to be electrically connected to the PADs 29 without extending copper (Cu) metals 17, 18 and 19 past the internal rings 28 of the die 5 that would expose the conductors to the environment, particularly air, that can cause corrosion and/or easy oxidized. The VIAs 22, 24, 25, 26 and pre-contact 13 and 27 are made of corrosion-resistant materials, such as tungsten, that resist corrosion. The interconnect metal layers 17, 18 and 19 are typically made of copper except top metal layer 4 (20), for example. This invention will provide robust connection between leads and CSP PAD 29 extension metals. This invention can be also applied to all CMOS ICs and CCD image sensor products with Cu based interconnect metal layers 17, 18 and 19, for example, potentially using wafer level CSP technology in IC industry. PARTS LIST
gate source drain pre-contact metal layer 1 metal layer 2 metal layer 3 metal layer 4 isolation layer

Claims

CLAIMS: 1. An integrated circuit comprising: (a) a substrate; (b) a sealing element spanning a periphery of the substrate that forms a boundary for the substrate; (c) two metal lines spanning the substrate in at least two distinct layers contained within the boundary; (d) a first conducting element disposed outside the sealing element; and (e) one or more second conducting elements connecting the two metal lines and that spans the sealing element; wherein the conducting elements are substantially non-oxidizing metals that are resistant to oxidization and that connect the metal lines to the first conducting element. 2. The integrated circuit as in claim 2, wherein the second conducting element is tungsten.
PCT/US2005/019429 2004-06-04 2005-06-02 Metal interconnects for image sensors WO2005122255A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE602005027688T DE602005027688D1 (en) 2004-06-04 2005-06-02 METAL CONNECTIONS FOR IMAGE SENSORS
CN2005800181947A CN1965407B (en) 2004-06-04 2005-06-02 Metal interconnects for image sensors
KR1020067025523A KR101210176B1 (en) 2004-06-04 2005-06-02 Metal interconnects for image sensors
EP05756194A EP1751799B1 (en) 2004-06-04 2005-06-02 Metal interconnects for image sensors
JP2007515578A JP4856064B2 (en) 2004-06-04 2005-06-02 Image sensor metal wiring

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US57703604P 2004-06-04 2004-06-04
US60/577,036 2004-06-04
US11/048,975 2005-02-02
US11/048,975 US8072066B2 (en) 2004-06-04 2005-02-02 Metal interconnects for integrated circuit die comprising non-oxidizing portions extending outside seal ring

Publications (1)

Publication Number Publication Date
WO2005122255A1 true WO2005122255A1 (en) 2005-12-22

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Family Applications (1)

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PCT/US2005/019429 WO2005122255A1 (en) 2004-06-04 2005-06-02 Metal interconnects for image sensors

Country Status (8)

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US (1) US8072066B2 (en)
EP (1) EP1751799B1 (en)
JP (1) JP4856064B2 (en)
KR (1) KR101210176B1 (en)
CN (1) CN1965407B (en)
DE (1) DE602005027688D1 (en)
TW (1) TWI385756B (en)
WO (1) WO2005122255A1 (en)

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US10790272B2 (en) * 2017-08-02 2020-09-29 Qualcomm Incorporated Manufacturability (DFM) cells in extreme ultra violet (EUV) technology

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US20030089997A1 (en) * 2001-11-09 2003-05-15 Egon Mergenthaler Tiedowns connected to kerf regions and edge seals
US20030122220A1 (en) * 1999-05-20 2003-07-03 West Jeffrey A. Scribe street seals in semiconductor devices and method of fabrication

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JP3865636B2 (en) * 2002-01-09 2007-01-10 松下電器産業株式会社 Semiconductor device and semiconductor chip
US6861754B2 (en) * 2003-07-25 2005-03-01 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor device with anchor type seal ring
US7053453B2 (en) * 2004-04-27 2006-05-30 Taiwan Semiconductor Manufacturing Company, Ltd. Substrate contact and method of forming the same
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Publication number Priority date Publication date Assignee Title
US20020024115A1 (en) * 1998-02-06 2002-02-28 Ibnabdeljalil M?Apos;Hamed Sacrificial structures for arresting insulator cracks in semiconductor devices
US20030122220A1 (en) * 1999-05-20 2003-07-03 West Jeffrey A. Scribe street seals in semiconductor devices and method of fabrication
US20030089997A1 (en) * 2001-11-09 2003-05-15 Egon Mergenthaler Tiedowns connected to kerf regions and edge seals

Also Published As

Publication number Publication date
TWI385756B (en) 2013-02-11
JP4856064B2 (en) 2012-01-18
KR20070031320A (en) 2007-03-19
US8072066B2 (en) 2011-12-06
US20050269706A1 (en) 2005-12-08
KR101210176B1 (en) 2012-12-07
EP1751799B1 (en) 2011-04-27
CN1965407A (en) 2007-05-16
EP1751799A1 (en) 2007-02-14
DE602005027688D1 (en) 2011-06-09
CN1965407B (en) 2011-11-30
TW200614423A (en) 2006-05-01
JP2008502155A (en) 2008-01-24

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