WO2005104258A1 - 弾性体の検査方法、検査装置、及び寸法予測プログラム - Google Patents
弾性体の検査方法、検査装置、及び寸法予測プログラム Download PDFInfo
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- WO2005104258A1 WO2005104258A1 PCT/JP2005/008042 JP2005008042W WO2005104258A1 WO 2005104258 A1 WO2005104258 A1 WO 2005104258A1 JP 2005008042 W JP2005008042 W JP 2005008042W WO 2005104258 A1 WO2005104258 A1 WO 2005104258A1
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- 238000007689 inspection Methods 0.000 title claims abstract description 115
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/045—Analysing solids by imparting shocks to the workpiece and detecting the vibrations or the acoustic waves caused by the shocks
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/12—Analysing solids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/36—Detecting the response signal, e.g. electronic circuits specially adapted therefor
- G01N29/42—Detecting the response signal, e.g. electronic circuits specially adapted therefor by frequency filtering or by tuning to resonant frequency
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/01—Indexing codes associated with the measuring variable
- G01N2291/014—Resonance or resonant frequency
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H57/00—Electrostrictive relays; Piezoelectric relays
- H01H2057/006—Micromechanical piezoelectric relay
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
Definitions
- the present invention relates to an elastic body inspection method, an inspection apparatus, and a dimension prediction program that achieve high accuracy, a piezoelectric Z electrostriction actuator inspection method, an inspection apparatus, a displacement amount prediction program, and a piezoelectric z electrode.
- the present invention relates to a strain sensor inspection method, an inspection device, and a detection sensitivity prediction program.
- This piezoelectric Z electrostrictive device is a device that utilizes the electric charge and electric field induced by the electric field induced strain and stress as described above.
- the piezoelectric Z electrostrictive actuator uses a conventional servomotor, pulse motor, or the like. Compared to the electromagnetic method, it is easy to control minute displacement, high energy conversion efficiency of mechanical Z electrical work, energy saving, ultra-precise mounting, and contributes to the miniaturization and light weight of products. As a result, it is considered that its application fields will continue to expand.
- the piezoelectric Z electrostrictive actuator is, for example, a surface of a ceramic base formed by integrally forming a thick supporting portion provided with cavities and a vibrating portion covering the cavities. And a piezoelectric Z electrostriction operating portion in which a lower electrode, a piezoelectric Z electrostrictive body, and an upper electrode are sequentially laminated.
- a piezoelectric Z electrostrictor when an electric field is generated between the upper electrode and the lower electrode, the piezoelectric Z electrostrictive body made of the piezoelectric Z electrostrictive material is deformed, and a vertical displacement is applied to the vibrating portion.
- the piezoelectric Z-electrostrictive actuator is applied as an actuator for precision equipment due to the action of displacing the vibrating part, for example, By changing the part up and down, contact and non-contact of the switch are controlled, and fluid control is performed as a micro pump.
- a piezoelectric Z electrostrictor in which the displacement amount of each vibrating portion is equal to or more than a certain value and is uniform when the same voltage is applied (the same electric field is generated) is desired. Therefore, when shipping a piezoelectric Z-electrostrictive actuator as a product, it was necessary to directly inspect the displacement of the vibrating part using a laser Doppler vibrometer or the like. However, if the inspection is performed on all the lots of the manufactured piezoelectric Z electrostrictive actuators, the cost becomes high. Therefore, an alternative inspection method has been required.
- Non-patent document 1 "Vibration Engineering Handbook” (published by Yokendo), 1st edition, published in 1976, Chapter 4 Free vibration of distributed system, 4.6 Vibration of plate (P. 98-109)
- Non-Patent Document 2 “Basic Industrial Vibration” (published by Yokendo), 14th edition, published in 1989, Chapter 4 Transverse vibration of flat plate (P. 224-228)
- the present invention has been made in view of the above-described circumstances, and an object thereof is to provide a piezoelectric Z-electrode with high precision without disassembly and destruction that does not cause actual driving as a product. It is an object of the present invention to provide a method for inspecting a strain device (piezoelectric Z electrostrictor or piezoelectric electrostrictive sensor).
- the displacement of the vibrating part depends on the overall rigidity including the base (vibrating part and supporting part) and the shape of the vibrating part. It has been found that there is a close relationship between each element exerting on the mechanical properties or form of the piezoelectric Z electrostrictor, such as the shape, the position of the piezoelectric Z electrostrictive operating portion with respect to the vibrating portion, and the like.
- the dimensional deviation of one portion of the piezoelectric Z electrostrictive actuator which is a plate (plate-like body) shows a resonance peak corresponding to the (1, 2) order vibration mode.
- Dimensional deviation of the other parts is related to the ratio of the resonance frequencies corresponding to the (3, 1) -order and (1, 1) -order vibration modes, and so on.
- the cause of the shift was found to have a characteristic ((m, n) order) resonance that appears characteristically.
- ⁇ , 3.5 vibration mode of a special order in the present specification, which is still described in the conventional literature.
- the vibration of a plate can be expressed in the form of the (m, n) -order vibration mode, as described in Non-Patent Documents 1 and 2. I can do it.
- a square or rectangular plate has vertical and horizontal directions, and a circular plate has a circumferential direction.
- the (m, n) -order vibration mode can be described according to the number of nodes of the standing wave of vibration.
- a mode having no clauses is referred to as a primary mode
- a mode having one clause is referred to as a secondary mode.
- a vibration mode having m-1 nodes in the vertical direction and n-1 nodes in the horizontal direction is referred to as an (m, n) -order vibration mode.
- the vibration mode at each resonance frequency is specified by vibrating the plate at the resonance frequency, measuring the vibrations at multiple points on the plate with a laser Doppler vibrometer, etc., and analyzing the obtained vibration data comprehensively for animation, etc. It is possible to specify by observing with.
- the detection sensitivity of the piezoelectric Z electrostrictive sensor can be inspected as well as the displacement amount of the piezoelectric Z electrostrictive actuator. Furthermore, it has been found that the method can be applied as a method for inspecting the dimensions of a structure including a piezoelectric Z electrostrictive device (piezoelectric Z electrostrictor and piezoelectric Z electrostrictive sensor) and having a wide elastic body, The present invention has been completed. Specifically, the present invention provides the following means.
- the gender provides an elastic body inspection method that predicts the size of the elastic body.
- the above frequency characteristics can be obtained by directly measuring mechanical vibration when an elastic body is vibrated by a vibrator or a piezoelectric Z electrostrictive element using a laser Doppler vibrometer, an acceleration sensor, or the like.
- a piezoelectric Z electrostrictor / piezoelectric Z electrostrictive sensor it is better to use a network analyzer or impedance analyzer to measure the electrical impedance and the frequency characteristics of gain and phase. Inexpensive and high-speed measurement is possible.
- the above-mentioned frequency characteristic has a peak height PKx, an area Sx, and a difference between a maximum value and a minimum value of a first-order resonance waveform, and a difference between the first-order resonance waveform and another-order resonance waveform.
- the peak height ratio PKRxy, the peak height difference PKDxy, the area ratio SRxy, the area difference SDxy, the ratio between the maximum value and the minimum value, and the difference between the maximum value and the minimum value between and is any one of the following.
- the inspection of the elastic body can be easily performed depending on the force or no force at which a resonance peak acting on the resonance of a certain order (m, n) appears, that is, whether or not the (m, n) order resonance is generated. (This is applicable to all the inventions according to the present invention).
- the resonance waveform exerting on the (m, n) order resonance corresponds to the (m, n) order vibration mode among the waveforms shown as the frequency characteristics in a predetermined frequency band.
- This is a waveform (curve) showing the vicinity of the resonance peak.
- Frequency characteristics include, but are not limited to, force mechanical vibration transmission characteristics, electrical impedance characteristics, electrical transmission characteristics, and electrical reflection characteristics, etc., with the horizontal axis representing frequency and the vertical axis representing gain. It can be represented by a chart with phase, impedance and phase, or admittance and phase.
- Mechanical resonance and electrical resonance are two separate phenomena. In a piezoelectric Z electrostrictor, a piezoelectric Z electrostrictive sensor is observed at almost the same resonance frequency. Therefore, this phenomenon has been applied to piezoelectric resonators and piezoelectric filters.
- the (m, n) -order resonance is specified by a peak-shaped or valley-shaped portion having a peak in the above-described resonance waveform in a chart showing frequency characteristics.
- the resonance waveform is a waveform representing the vicinity of the peak or valley.
- the area of the resonance waveform is the area of the peak-to-valley-shaped portion of the peak-free base line on the chart representing the frequency characteristics, and the height of the resonance waveform peak. Is the value of the peak height of the peak or valley, and the value on the vertical axis is the gain, impedance, admittance, and phase.
- any frequency characteristic value may be used, it is preferable to take a phase in the case of electric vibration and a gain in the case of mechanical vibration.
- the base line is relatively flat and data processing is easy.
- the difference between the maximum value and the minimum value of the resonance waveform is suitably adopted in the case of a chart that takes the value of impedance or admittance as the value of the vertical axis.
- the base line becomes a curve or straight line with a right-up or down-right force, and resonance and anti-resonance form a pair, with peaks at the peak and valley. Therefore, the difference between the two can be used as a characteristic value for predicting the dimensional deviation and the displacement amount.
- the method for inspecting an elastic body according to the present invention is preferably used when the size of the elastic body is a displacement amount between any two of the two or more elastic bodies constituting the structure. Used. Further, it is suitably used when the size of the elastic body is the swell amount of any one of the two or more elastic bodies constituting the structure.
- a method for inspecting a piezoelectric Z electrostrictor comprising a piezoelectric Z electrostrictor and two or more electrodes, wherein the piezoelectric Z electrostrictor is vibrated.
- a method for inspecting a piezoelectric Z electrostrictor that picks up the frequency characteristics of the piezoelectric Z electrostrictor and predicts the amount of displacement of the piezoelectric Z electrostrictor based on the frequency characteristics is provided.
- the above-mentioned one or more frequency ratios FR to one or more frequency differences FD are provided with one or more resonance frequencies Fz to static electricity of the piezoelectric Z electrostrictive bodies. It is preferable to predict the displacement of the piezoelectric Z electrostrictor by any one or a combination of two or more in addition to the capacitance CP.
- the frequency characteristics are determined by the peak height PKx, the area Sx, the difference between the maximum value and the minimum value of the first-order resonance waveform, and the difference between the first-order resonance waveform and the other-order resonance waveform.
- a method for inspecting a piezoelectric Z-electrostrictive sensor including a piezoelectric Z-electrostrictive body and two or more electrodes comprising: A test method for a piezoelectric z-electrostrictive sensor is provided which picks up frequency characteristics and predicts the detection sensitivity of the piezoelectric z-electrostrictive sensor based on the frequency characteristics.
- the one or more frequency ratios FRxy to one or more frequency differences FDxy may be replaced by one or more resonance frequencies Fz to piezoelectric Z electrostriction. It is preferable to estimate the detection sensitivity of the piezoelectric Z electrostrictive sensor by adding the body capacitance CP.
- the frequency characteristics are determined by the peak height PKx, the area Sx, the difference between the maximum value and the minimum value of the first order resonance waveform, and the difference between the first order resonance waveform and the other order.
- the peak height ratio PKRxy, the peak height difference PKDxy, the area ratio SRxy, the area difference SDxy, the ratio between the maximum value and the minimum value, and the difference between the maximum value and the minimum value with the resonance waveform It is preferably any one of the following differences:
- an apparatus for inspecting an elastic body acting on a structure having two or more elastic bodies, wherein a frequency characteristic when the structure is vibrated is picked up An elastic body inspection apparatus provided with means for predicting the size of an elastic body based on frequency characteristics is provided.
- the frequency characteristics include a peak height PKx, an area Sx, a difference between a maximum value and a minimum value of a first-order resonance waveform, and a difference between the first-order resonance waveform and the other-order resonance waveform.
- the elastic body inspection apparatus is preferably used when the size of the elastic body is a displacement amount between any two of the two or more elastic bodies constituting the structure. Used. Further, it is suitably used when the size of the elastic body is the swell amount of any one of the two or more elastic bodies constituting the structure.
- an apparatus for inspecting a piezoelectric Z electrostrictive actuator including a piezoelectric Z electrostrictive body and two or more electrodes, wherein the piezoelectric Z electrostrictive actuator is vibrated.
- an inspection apparatus for a piezoelectric Z electrostrictor comprising means for picking up frequency characteristics at that time and predicting the displacement of the piezoelectric Z electrostrictor based on the frequency characteristics.
- the above-mentioned one or more frequency ratios FRxy to one or more frequency differences FDxy are replaced by one or more resonance frequencies Fz to piezoelectric Z-electrodes. It is preferable to provide a means for predicting the amount of displacement of the piezoelectric Z-electrostrictive actuator by any one or a combination of two or more in addition to the capacitance CP of the strain body.
- the frequency characteristics are determined by the peak height PKx, the area Sx, the difference between the maximum value and the minimum value of the first-order resonance waveform, and the difference between the first-order resonance waveform and the other-order resonance waveform.
- Resonant waveform The peak height ratio PKRxy, the peak height difference PKDxy, the area ratio SRxy, the area difference SDxy, the ratio between the maximum value and the minimum value, and the difference between the maximum value and the minimum value Is preferably any of the following.
- an apparatus for inspecting a piezoelectric Z electrostrictive sensor including a piezoelectric Z electrostrictive body and two or more electrodes, wherein the piezoelectric Z electrostrictive sensor is vibrated.
- An inspection apparatus for a piezoelectric Z electrostrictive sensor comprising means for picking up the frequency characteristic of the piezoelectric Z electrostrictive sensor and predicting the detection sensitivity of the piezoelectric Z electrostrictive sensor based on the frequency characteristic is provided.
- the one or more frequency ratios FRxy to one or more frequency differences FDxy are replaced by one or more resonance frequencies Fz to piezoelectric Z electrostriction. It is preferable to include means for predicting the detection sensitivity of the piezoelectric Z electrostrictive sensor by adding the body capacitance CP.
- the frequency characteristics are determined by the peak height PKx, the area Sx, the difference between the maximum value and the minimum value of the first-order resonance waveform, and the difference between the first-order resonance waveform and the other-order resonance waveform.
- the peak height ratio PKRxy, the peak height difference PKDxy, the area ratio SRxy, the area difference SDxy, the ratio between the maximum value and the minimum value, and the difference between the maximum value and the minimum value with the resonance waveform It is preferably any one of the following differences:
- a computer in order to predict the size of the elastic body acting on the structure having two or more elastic bodies, a computer is used to calculate the frequency characteristic of the structure whose calculated size is to be calculated. Means for inputting measured values, means for obtaining the predicted dimensions of the elastic body on the structure based on the formula for calculating the predicted dimensions, and means for outputting the predicted dimensions of the elastic body on the obtained structure.
- a program for estimating the size of the elastic body for causing the elastic body to perform is provided.
- the elastic body size prediction program according to the present invention provides a case where the predicted elastic body size is a displacement amount between any two of the two or more elastic bodies constituting the structure. It is suitably used for In addition, the size of the elastic body predicted above is two or more constituting the structure. It is suitably used when the amount of undulation is any one of the elastic bodies.
- the elastic body size prediction program controls the computer to shake the structure in order to predict the size of the elastic body acting on the structure having two or more elastic bodies.
- a means for obtaining a frequency ratio FRn (FRn FnZFl) of 1 or more by the primary resonance frequency F1 and one or more higher-order nth-order resonance frequencies Fn. It is preferable to function as a means for obtaining a predicted size of the elastic body exerted on the structure by means of the structure, and a means for outputting the predicted dimension of the elastic body exerted on the obtained structure.
- the program for estimating the size of an elastic body according to the present invention further includes a computer for vibrating the structure in order to predict the size of the elastic body acting on the structure having two or more elastic bodies.
- a computer calculates the predicted displacement. Try to Means for inputting the frequency characteristics of the piezoelectric Z-electrostrictor, means for obtaining the predicted displacement of the piezoelectric Z-electrostrictor based on the formula for calculating the predicted displacement, and the predicted displacement of the obtained piezoelectric Z-electrostrictor As a means for outputting the amount, a displacement amount prediction program of the piezoelectric z-electrostrictive actuator for functioning is provided.
- the area and peak height of the resonance waveform exerted on the first-order resonance or one or more higher-order nth-order resonances may be used as the frequency characteristic.
- the difference between the maximum value and the minimum value, and the area ratio between the resonance waveform determined by them and the resonance waveform exerted on one or more higher-order nth-order resonances It is possible to enter the ratio of the peak height and the ratio of the difference between the local maximum and the local minimum.
- a displacement prediction program for a piezoelectric Z electrostrictive actuator includes a piezoelectric Z electrostrictive body including a piezoelectric Z electrostrictive body and two or more electrodes.
- a computer is used to input the primary resonance frequency F1 (the above frequency characteristics) when the piezoelectric Z electrostrictor is vibrated.
- a piezoelectric Z electrostrictor comprising a piezoelectric Z electrostrictor and two or more electrodes
- the computer is vibrated by a piezoelectric Z electrostrictor.
- Means for inputting, means for inputting the capacitance CP of the piezoelectric Z electrostrictive body, the primary resonance frequency F1 and the higher-order nth-order resonance frequency Fn or higher, the frequency ratio of 1 or higher FRn (FRn FnZFl ), Means for obtaining the predicted displacement of the piezoelectric Z-electrostrictive actuator based on Equation 4 (the above formula for calculating the predicted displacement), and outputting the obtained predicted displacement of the piezoelectric Z-electrostrictive actuator It is preferable that the function is made to function.
- the program for estimating the displacement of a piezoelectric Z electrostrictor further estimates the displacement of a piezoelectric Z electrostrictor having a piezoelectric Z electrostrictor and two or more electrodes.
- a computer is used to input one or more m-th order resonance frequencies Fm (the above frequency characteristics) when the piezoelectric Z electrostriction actuator is vibrated. It is preferable to function as a means for obtaining a predicted displacement amount of the Z electrostrictive actuator and a means for outputting the obtained predicted displacement amount of the piezoelectric Z electrostrictive actuator.
- the program for estimating the displacement of a piezoelectric electrostrictive actuator according to the present invention further estimates the displacement of a piezoelectric electrostrictive actuator including a piezoelectric electrostrictive body and two or more electrodes. Means for inputting the primary resonance frequency F1 (the above-mentioned frequency characteristics) when the piezoelectric vibrator is vibrated by the computer, and vibrates the piezoelectric electrostrictor.
- F1 the above-mentioned frequency characteristics
- the program for estimating the displacement of a piezoelectric electrostrictive actuator according to the present invention further estimates the displacement of a piezoelectric electrostrictive actuator including a piezoelectric electrostrictive body and two or more electrodes.
- Means for inputting ⁇ -order resonance frequency Fn (above frequency characteristics) and mth-order resonance frequency Fm (above frequency characteristics), means for inputting capacitance CP of piezoelectric Z electrostrictive body, primary resonance frequencies F1 and 1 Means for obtaining a frequency ratio FRn (FRn FnZFl) of 1 or more by the above high-order nth-order resonance frequency Fn.
- Prediction of the piezoelectric Z electrostrictor based on Equation 7 (calculation formula of the predicted displacement amount described above) Means for obtaining the amount of displacement, obtained piezoelectric Z electrostriction Means for outputting the predicted displacement of the motor, as, it is preferable that to function.
- a piezoelectric electrostrictive cell including a piezoelectric electrostrictive body and two or more electrodes is provided.
- a computer is used to input the frequency characteristics of the piezoelectric Z-electrostrictive sensor for which the predicted detection sensitivity is to be calculated.
- a detection sensitivity prediction program for the piezoelectric Z electrostrictive sensor to function is provided.
- the detection sensitivity prediction program for a piezoelectric Z electrostrictive sensor As the frequency characteristics, the area and the peak of the resonance waveform related to the first-order resonance or one or more higher-order nth-order resonances are used.
- the height, the difference between the local maximum value and the local minimum value, and the area ratio between the resonance waveform for the primary resonance and the resonance waveform for the one or more higher-order nth-order resonances determined by the difference. It is possible to enter the ratio of the peak height and the ratio of the difference between the local maximum and the local minimum.
- the detection sensitivity prediction program for a piezoelectric Z electrostrictive sensor predicts the detection sensitivity of a piezoelectric Z electrostrictive sensor including a piezoelectric Z electrostrictive body and two or more electrodes.
- FRn FnZFl
- Fn the above-mentioned frequency characteristics
- a means for obtaining a frequency ratio FRn (FRn FnZFl) of 1 or more by an nth-order resonance frequency Fn of 1 or more, and a piezoelectric Z electrostrictive sensor It is preferable to function as a means for obtaining the predicted detection sensitivity and a means for outputting the obtained predicted detection sensitivity of the piezoelectric Z electrostrictive sensor.
- the detection sensitivity prediction program for a piezoelectric Z electrostrictive sensor further detects a piezoelectric Z electrostrictive sensor including a piezoelectric Z electrostrictive body and two or more electrodes.
- a computer was used to input the primary resonance frequency F1 (the above-mentioned frequency characteristics) when the piezoelectric Z electrostrictive sensor was vibrated, and the piezoelectric Z electrostrictive sensor was vibrated.
- Means for inputting one or more higher-order n-order resonance frequencies Fn frequency characteristics described above
- means for inputting the capacitance CP of the piezoelectric Z electrostrictive body, the first-order resonance frequency F1 and one or more higher-order Means for obtaining a frequency ratio FRn (FRn FnZFl) of 1 or more from the n-th resonance frequency Fn of the above
- the function is to function as a means for outputting the predicted detection sensitivity of the obtained piezoelectric Z electrostrictive sensor.
- Each mathematical expression in the invention of each program according to the present invention is a mathematical expression that can be used in the invention of each method.
- the (first) elastic body inspection method according to the present invention predicts the size of the elastic body from the frequency ratio FRn of 1 or more. 1) Equation 1 of the elastic body size prediction program may be used.
- the inspection method and the inspection apparatus for an elastic body provide a method for inspecting a structure having two or more elastic bodies as constituents, in which a part of the structure is not used as a criterion for the inspection, and the entire structure is minute.
- the first order resonance frequency, the other order resonance frequency, and the frequency ratio or frequency difference obtained by them, and the peak height, area, and local maximum of the first order resonance waveform Based on the difference between the peak value and the minimum value, and the peak height ratio, peak height difference, area ratio, area difference, etc. between the resonance waveform of one order and the resonance waveform of the other order.
- the inspection can be performed with high accuracy without relying on experience. Since the inspection is a non-destructive inspection, a more accurate quality judgment can be quickly performed.
- the inspection method and the inspection apparatus for the piezoelectric Z electrostrictive actuator according to the present invention provide a piezoelectric Z electrostrictive actuator having a piezoelectric Z electrostrictive body and two or more electrodes as components. Rather than using only the capacitance acting on the electrostrictive body for inspection, the resonance frequency of the first order when the entire piezoelectric Z electrostrictive actuator is actually vibrated , The resonance frequencies of the other orders, and the frequency ratios or frequency differences obtained therefrom, as well as the peak height, area, difference between the maximum value and the minimum value of the resonance waveform of one order, and the difference of the one order Predict the displacement of the piezoelectric Z electrostrictive actuator based on the peak height ratio, peak height difference, area ratio, area difference, etc.
- Inspection can be performed with high accuracy without relying on experience. And since it is a non-destructive inspection, more accurate quality judgment can be performed quickly. Therefore, an error of shipping an undesired product can be prevented.
- An inspection method and an inspection apparatus for a piezoelectric Z electrostrictive sensor according to the present invention are a part of a piezoelectric Z electrostrictive sensor including a piezoelectric Z electrostrictive body and two or more electrodes.
- the first order resonance frequency and the other order resonance frequency when the whole piezoelectric Z electrostriction sensor is actually vibrated Frequency ratio or frequency difference, and the peak height, area, difference between the maximum value and the minimum value of the first order resonance waveform, and the difference between the first order resonance waveform and the other order resonance waveform.
- the detection sensitivity of the piezoelectric z-electrostrictive sensor is predicted based on the peak height ratio, peak height difference, area ratio, area difference, etc., so inspection can be performed with high accuracy without relying on experience You can do it. And because it is a non-destructive inspection, more accurate quality judgment can be made quickly. Therefore, an error of shipping an undesired product can be prevented.
- FIG. 1 is a view showing an example of a piezoelectric Z electrostrictive actuator, and is a perspective view showing a vibrating section and a supporting section separately.
- FIG. 2 is a cross-sectional view illustrating an AA ′ cross section including a vibrating portion and a piezoelectric Z electrostriction operating portion of the piezoelectric Z electrostriction actuator shown in FIG. 1.
- FIG. 3 is a cross-sectional view illustrating a BB ′ cross-section including a vibrating section and a piezoelectric Z electrostriction operating section of the piezoelectric Z electrostriction actuator shown in FIG. 1.
- FIG. 4 is a cross-sectional view showing an example of a piezoelectric Z-electrostrictive actuator in which a base and a piezoelectric Z-electrostrictive operating portion are shifted, and a cross-section corresponding to FIG. 3 is shown.
- FIG. 5 A piezoelectric Z electrostrictive actuator in which the vibrating part has a downward undulation (in the figure)
- FIG. 4 is a cross-sectional view showing a cross section corresponding to FIG.
- FIG. 6 (a) is a cross-sectional view showing an example in which a piezoelectric Z electrostrictive actuator is applied as an actuator section of a microswitch, showing a non-conductive state (OFF).
- FIG. 6 (b) is a cross-sectional view showing an example in which a piezoelectric Z electrostrictive actuator is applied as an actuator section of a microswitch, showing a conductive state (ON).
- FIG. 7 is a cross-sectional view showing one example of a piezoelectric Z electrostrictive actuator.
- FIG. 8 is a cross-sectional view showing one example of a piezoelectric Z electrostrictive actuator.
- FIG. 9 is a cross-sectional view illustrating an example of a piezoelectric Z electrostrictive actuator having a lateral displacement of a distance D, which is an example of a piezoelectric Z electrostrictive actuator.
- FIG. 10 is a cross-sectional view showing an example of a piezoelectric Z electrostrictive actuator in which an upward undulation (in the figure,! /,) Of a swell amount H is present, showing an example of a piezoelectric Z electrostrictive actuator. .
- FIG. 11 is a view showing an example of a piezoelectric Z electrostrictive actuator, in which a lateral shift of a distance D and an upward swell of a swell amount H (! /, In the figure) are shown.
- FIG. 11 is a view showing an example of a piezoelectric Z electrostrictive actuator, in which a lateral shift of a distance D and an upward swell of a swell amount H (! /, In the figure) are shown.
- FIG. 12 is a cross-sectional view showing one example of a piezoelectric Z electrostrictive actuator.
- FIG. 13 is a diagram illustrating an example of a piezoelectric Z electrostrictive actuator, and is a perspective view illustrating a vibrating section and a supporting section separately.
- FIG. 14 is a sectional view showing a section taken along CC ′ in FIG. 13.
- FIG. 15 (a) is a perspective view showing an example of a piezoelectric Z electrostrictive actuator.
- FIG. 15 (b) is a perspective view showing an example of a piezoelectric Z electrostrictive actuator.
- FIG. 16 (a) is a top view showing an example of the shape of the vibrating part of the piezoelectric Z electrostrictive actuator.
- FIG. 16 (b) is a top view showing an example of the shape of the vibrating portion of the piezoelectric Z electrostrictive actuator.
- FIG. 16 (c) is a top view showing an example of the shape of the vibrating portion of the piezoelectric Z electrostrictive actuator.
- FIG. 16 (d) is a top view showing an example of the shape of the vibrating portion of the piezoelectric Z electrostrictive actuator.
- FIG. 16 (e) is a top view showing an example of the shape of the vibrating portion of the piezoelectric Z electrostrictive actuator.
- FIG. 17 (a) is a configuration diagram illustrating an example of a frequency characteristic measurement system.
- FIG. 17 (b) is a configuration diagram illustrating an example of a wavenumber characteristic measurement system.
- FIG. 18 is a configuration diagram illustrating an example of a frequency characteristic measurement system.
- FIG. 19 (a) is a configuration diagram illustrating an example of a frequency characteristic measurement system.
- FIG. 19 (b) is a configuration diagram illustrating an example of a frequency characteristic measurement system.
- FIG. 21 is an explanatory diagram showing vibration modes of a circular plate.
- FIG. 22 (a)] is a diagram showing a vibration distribution in a primary vibration mode.
- FIG. 22 (b)] is a diagram showing a vibration distribution of a higher order peak A vibration mode.
- [22 (c)] is a diagram showing a vibration distribution of a higher-order peak B vibration mode.
- FIG. 23 is a chart showing an example of a frequency characteristic of a piezoelectric Z electrostrictive actuator.
- FIG. 24 (a) is a chart showing one example of frequency characteristics of a piezoelectric Z electrostrictive actuator.
- FIG. 24 (b) is a chart showing an example of frequency characteristics of a piezoelectric Z electrostrictive actuator.
- FIG. 24 (c) is a chart showing an example of frequency characteristics of a piezoelectric Z electrostrictive actuator.
- FIG. 25 (a) is a chart illustrating an example of frequency characteristics of a piezoelectric Z electrostrictive actuator.
- FIG. 25 (b) is a chart showing one example of frequency characteristics of a piezoelectric Z electrostrictive actuator.
- FIG. 25 (c) is a chart showing an example of frequency characteristics of a piezoelectric Z electrostrictive actuator.
- FIG. 26 is a graph showing the relationship between the amount of displacement between the piezoelectric Z-electrostrictive body and the vibrating part and the amount of displacement of the piezoelectric Z-electrostrictive actuator having the amount of displacement.
- FIG. 27 is a graph showing the relationship between the frequency ratio FR1A and the amount of displacement (absolute value) between the piezoelectric Z electrostrictive body and the vibrating part.
- FIG. 28 (a) A graph showing the relationship between the amount of lateral displacement and the peak height (of the resonance waveform).
- FIG. 28 (b) A graph showing the relationship between the amount of lateral displacement and the area (of the resonance waveform).
- ⁇ 28 (c)] is a graph showing the relationship between the amount of lateral displacement and the height of the peak (between the resonance waveforms), and the relationship between the amount of lateral deviation and the ratio of the area (between the resonant waveforms).
- FIG. 29 is a graph showing the relationship between the amount of undulation of a vibrating portion applied to a piezoelectric Z electrostrictive actuator and the amount of displacement of a piezoelectric Z electrostrictive actuator having the undulating amount.
- FIG. 30 is a graph showing the relationship between the frequency ratio FR1B and the amount of undulation of a vibrating portion applied to the piezoelectric Z electrostrictor.
- FIG. 31 is a graph showing the relationship between the frequency ratio FRDE and the amount of undulation of a vibrating portion applied to a piezoelectric Z electrostrictive actuator.
- FIG. 32 (a) A graph of predicted displacement and measured displacement when displacement is predicted by a linear expression of only the capacity CP.
- FIG. 32 (b) is a graph showing a relationship between a predicted displacement amount and a measured displacement amount when a displacement is predicted using wavenumber characteristics.
- FIG. 33 (a) is a configuration diagram showing an example of a computer system in which a displacement prediction program for a piezoelectric Z electrostrictive actuator according to the present invention is incorporated.
- FIG. 33 (b) is a configuration diagram showing an example of a computer system in which a program for estimating the amount of displacement of a piezoelectric Z electrostrictor according to the present invention is incorporated.
- the present invention simply refers to an inspection method, an inspection apparatus, and a dimension prediction program for an elastic body, and an inspection method, an inspection apparatus, and a displacement estimation method for a piezoelectric Z electrostrictive actuator. It refers to the program, the piezoelectric Z electrostriction sensor inspection method, the inspection device, and the detection sensitivity prediction program.
- FIG. 1 is a perspective view in which a vibrating section 66 and a supporting section 68 are separated
- FIG. 2 is a cross-sectional view showing a cross section AA ′ of FIG. 1 including a vibrating section 66 and a piezoelectric Z electrostriction operating section 78.
- FIG. 1 is a perspective view in which a vibrating section 66 and a supporting section 68 are separated
- FIG. 2 is a cross-sectional view showing a cross section AA ′ of FIG. 1 including a vibrating section 66 and a piezoelectric Z electrostriction operating section 78.
- the illustrated piezoelectric Z electrostriction actuator 20 includes a base 44 and a piezoelectric Z electrostriction operating section 78.
- the base body 44 is formed by integrally forming a thick supporting portion 68 having a cavity 46 and a vibrating portion 66 for covering the cavity 46.
- the piezoelectric Z electrostriction operating section 78 includes a piezoelectric Z electrostrictive body 79, an upper electrode 75 formed on one surface thereof, and a lower electrode 77 formed on the other surface. It is arranged on one surface of the base 44 so as to be in contact with the vibrating section 66.
- the piezoelectric Z-electrostrictor has such a structure, and the base and the piezoelectric Z-electrostrictive body are usually formed of a ceramic material (piezoelectric Z-electrostrictive material), and the electrodes are formed of a metal material (conductive material). Since these are elastic materials, the piezoelectric Z electrostrictive body, the base, and the like correspond to the elastic body, and the piezoelectric Z electrostrictive actuator corresponds to a structure having two or more elastic bodies.
- FIGS. 6A and 6B are cross-sectional views showing an example in which a piezoelectric Z electrostrictive actuator is applied as an actuator part of a microswitch.
- the illustrated microswitch 120 has a switch electrode 18 provided in the cavity 46 of the piezoelectric Z electrostrictor 20 and a terminal plate 121 attached to the cavity 46 so as to close the cavity 46, and the switch electrode 18 is attached to the terminal plate 121.
- a switch electrode 19 is provided so as to be opposed to. If the vibrating section 66 is not deformed, the switch electrodes 18 and 19 are non-conductive (OFF) (see FIG. 6A). However, when the piezoelectric Z electrostrictive body 79 is displaced and the vibrating section 66 is deformed, Then, the switch electrodes 18 and 19 are turned on (see FIG. 6B).
- a piezoelectric Z electrostrictive actuator in addition to the piezoelectric Z electrostrictive body 20 in which the piezoelectric Z electrostrictive body is a single layer, a piezoelectric Z electrostrictive actuator whose sectional views are shown in FIG. 7, FIG. 8, and FIG. 70, 30, and 40 are exemplified.
- 7 is a cross-sectional view illustrating a cross section according to FIG. 2
- FIGS. 8 and 12 are cross-sectional views illustrating a cross section according to FIG.
- the piezoelectric Z electrostrictive actuators 70, 30, and 40 shown in FIGS. 7, 8, and 12 also serve as a force with the base 44 and the piezoelectric Z electrostriction operating section 78.
- Reference numeral 44 denotes a force common to the piezoelectric Z electrostrictor 20 in that a thick supporting portion 68 having a cavity 46 and a vibrating portion 66 covering the cavity 46 are integrally formed.
- the actuator 70 and the piezoelectric Z electrostrictive actuator 30 have two layers of piezoelectric and electrostrictive bodies 79 sandwiched between an upper electrode 75, an intermediate electrode 73, and a lower electrode 77.
- the electrostrictive actuator 40 (see FIG. 12) is also different in that it has three piezoelectric Z electrostrictive bodies 79 similarly.
- the electrode located closest to the vibrating portion of the piezoelectric Z electrostrictive operating portion is called a lower electrode
- the electrode located farthest from the vibrating portion is called an upper electrode
- a plurality of piezoelectric Z When the electrostrictive bodies are stacked, the electrode other than the upper electrode and the lower electrode is called an intermediate electrode.
- FIG. 15 (a) and FIG. 15 (b) are perspective views illustrating an embodiment of the base of the piezoelectric Z electrostrictive actuator.
- a vibrating part 66 having a piezoelectric Z electrostriction operating part 78 provided on one surface is supported by a supporting part 68 and a cavity 46 is provided.
- a vibrating unit having a piezoelectric Z electrostriction operating unit 78 provided on one surface such as a piezoelectric Z electrostrictor actuator 51 shown in FIG. It may be a cantilevered form in which the base 44 is supported by the support portion 68 on only one side thereof.
- the piezoelectric Z electrostrictive actuator is not limited, but a piezoelectric Z electrostrictive operating section that generates displacement on one surface of the vibrating section is provided, and the piezoelectric Z electrostrictive operating section, the vibrating section, Since this is a device that deforms, when a large displacement is required, it is preferable that the other surface side of the vibrating part is free and not restricted in order to facilitate the deformation.
- a strong generated force or a high-speed response it is preferable to use a dual-supporting mode that supports both ends of the piezoelectric Z electrostrictive operation section (see FIG. 15A).
- FIGS. 16A to 16E are top views illustrating the shape of the vibrating section 66.
- FIG. The shapes seen from the top of the thin plate-shaped vibrating part 66 are square (Fig. 16 (a)), rectangular (Fig. 16 (b)), circular (Fig. 16 (c)), and oval (Fig. 16 (d)). ) And hexagons (polygons, FIG. 16 (e)).
- the entire periphery may be supported by the support portion 68, and may be supported by the support portion 68 at two opposite portions or one portion of the circumference. You can be supported.
- the piezoelectric Z electrostrictive actuator does not limit the shape of the vibrating section 66.
- the piezoelectric Z electrostrictor 20 As an example, the piezoelectric Z electrostrictor The method of manufacturing the data will be described.
- a piezoelectric Z electrostrictive actuator when a ceramic material is used for the substrate, it can be manufactured using a green sheet laminating method, and the piezoelectric Z electrostrictive operating section uses a film forming method such as a thin film or a thick film. Can be manufactured.
- the base 44 is manufactured as follows. For example, a binder is prepared by adding a binder, a solvent, a dispersant, a plasticizer, and the like to ceramic powder such as zirconium oxide and the like, and a slurry is prepared. A green sheet having a predetermined thickness is produced. Then, the green sheet is processed into various required shapes by a method such as punching using a die or laser processing. Then, after a plurality of green sheets are successively stacked, a ceramic Darine laminate is obtained by, for example, pressure bonding with heating. When the obtained green sheet laminate is fired at a temperature of about 1200 to 1600 ° C., a substrate 44 is obtained.
- a piezoelectric Z electrostriction operating section 78 is formed on one surface of the base 44.
- the lower electrode 77 is printed at a predetermined position on one surface of the base body 44 by a film forming method such as a screen printing method, baked at a temperature of about 1250 to 1450 ° C., and then the piezoelectric Z electrostrictive body 79 is formed.
- electrode leads for connecting the electrodes to the drive circuit may be printed and fired.
- a polarization process is performed.
- the polarization is performed, for example, by applying a voltage (polarization voltage) between the upper electrode 75 and the lower electrode 77 that is sufficiently higher than the drive voltage to be used.
- the driving voltage is 30 V
- the polarization is performed at about 70 V.
- an inspection is performed on the polarized Z electrostrictive actuator 20 to confirm whether the base 44 and the piezoelectric Z electrostrictive actuator 78 have been normally manufactured. If the base 44 and the piezoelectric Z electrostriction operating part 78 are displaced or the vibrating part 66 is undulating, the same (drive) voltage can be applied between the electrodes. In some cases, a desired displacement cannot be obtained.
- FIG. 4 is a cross-sectional view showing an example of a piezoelectric Z electrostriction actuator in which the piezoelectric Z electrostriction operating portion 78 is laterally displaced with respect to the base body 44.
- FIG. 4 is a view showing a cross section corresponding to FIG.
- Reasons for the occurrence of the lateral displacement include a limitation in positioning accuracy at the time of screen printing, and elongation of a screen plate used for screen printing.
- the piezoelectric Z electrostrictor 20 shown in FIG. 3 is manufactured and used as a plurality of sets. In the mode shown in FIG.
- a plurality of sets are produced.
- a lower electrode 77, a piezoelectric Z-electrostrictive body 79, a conductive material paste and a piezoelectric Z-electrostrictive material paste are formed on one surface of a substrate 44 on which a plurality of cavities 46 are provided by using a screen printing method.
- the upper electrode 75 is printed, and a plurality of piezoelectric Z electrostriction operating portions 78 are formed.
- FIG. 14 is a cross-sectional view showing a cross section taken along the line CC ′ in FIG. 13, and is a diagram illustrating an example in which a plurality of piezoelectric Z electrostriction operating portions are unevenly shifted.
- FIG. 14 is a cross-sectional view showing a cross section taken along the line CC ′ in FIG. 13, and is a diagram illustrating an example in which a plurality of piezoelectric Z electrostriction operating portions are unevenly shifted.
- the piezoelectric Z electrostriction operating portion 78 on the left side in the figure is shifted laterally with respect to the cavity 46, and V, but the piezoelectric Z electrostriction operating portion 78 at the center in the figure is relative to the cavity 46.
- the piezoelectric Z electrostriction operating portion 78 on the right side in the figure has a large lateral displacement with respect to the cavity 46.
- the dimensions of the piezoelectric Z electrostrictive actuator 20 are specifically the amount of the lateral displacement described above, that is, the piezoelectric Z
- the amount of undulation of the vibrating section 66 of the base 44 can be mentioned.
- FIG. 5 is a cross-sectional view showing a piezoelectric Z electrostrictor in which the vibrating section 66 has a downward swell in FIG. 3.
- the swell amount H (see FIG. 5) is defined as positive (plus) the upward swell. That is, the piezoelectric Z electrostriction
- the swayer has a swell of a minus swell amount.
- FIGS. 9, 10, and 11 are views showing a piezoelectric Z electrostrictive actuator having two layers of the piezoelectric Z electrostrictive body 79, including a vibrating part and a piezoelectric Z electrostrictive operating part, according to FIG. 3.
- FIG. 4 is a cross-sectional view illustrating a cross section that is taken.
- FIG. 9 shows a form in which there is a lateral displacement of a distance D m).
- FIG. 10 shows a mode in which there is upward undulation in the figure of the undulation amount H (m).
- FIGS. 9 and 11 show a mode in which there is a lateral displacement of the distance D ( ⁇ m) and an upward undulation H ( ⁇ m).
- the piezoelectric Z electrostrictive body 79 of the piezoelectric Z electrostrictive operating section 78 which is a displacement generating section, and the vibrating section 66 overlap (pressure).
- the area of the piezoelectric Z electrostrictive body 79 projected onto the vibrating section 66) changes, and the displacement of the piezoelectric Z electrostrictive actuator can change.
- the length of the BB 'cross section is much smaller than the length of the AA and cross section cavities, so the device characteristics are easily affected by the amount of lateral displacement in the BB' cross section.
- the lateral displacement between the piezoelectric Z electrostrictive body 79 and the vibrating section 66 refers to the displacement in the BB 'section shown in FIG.
- the lateral shift amounts shown in FIGS. 9 and 11 are the same.
- FIG. 17 (a) is a configuration diagram showing a system for picking up frequency characteristics by vibrating with an external force.
- This frequency characteristic measurement system mainly includes a vibrator 211, a laser vibrometer 212, an FFT analyzer 213, and an amplifier 214.
- a piezoelectric Z electrostrictor 210 is fixed to the vibrator 211 with a double-sided tape or an adhesive, vibrated, the vibration is measured by a laser vibrometer 212 , and the vibration is prayed by an FFT analyzer 213. Can be picked up.
- Amplifier 214 acts to amplify the signal of FFT analyzer 213 to drive the shaker.
- a gain phase analyzer, a frequency analyzer, etc. can be used instead of the FFT analyzer, and an acceleration sensor can be used instead of the laser vibrometer.
- an acceleration sensor can be used instead of the laser vibrometer.
- FIG. 17B is a configuration diagram showing a frequency characteristic measurement system that directly drives the piezoelectric Z electrostrictive actuator 210 without using a vibrator.
- a piezoelectric Z-electrostrictive device including a piezoelectric Z-electrostrictor has a function of vibrating by the inverse piezoelectric effect by itself, unlike an elastic body that does not vibrate by itself, so the vibrator 211 shown in FIG. It is possible to vibrate without using it, and it is possible to construct a frequency characteristic measurement system at lower cost.
- the frequency characteristic measurement system shown in Fig. 17 (a) and Fig. 17 (b) can directly measure the mechanical vibration itself, and can also measure the target point of laser irradiation and the acceleration sensor. It is preferable that the distribution of vibration can be measured by changing the place where the sensor is installed.
- FIG. 18 is a configuration diagram showing a frequency characteristic measuring system for measuring impedance characteristics, which is one of the frequency characteristics of the piezoelectric Z electrostrictive device.
- this frequency characteristic measuring system it is possible to measure the impedance-phase characteristic, the admittance-phase characteristic, and the like of the piezoelectric Z electrostrictive device.
- the impedance of the piezoelectric Z electrostrictive device changes greatly due to the piezoelectric effect due to the increase in vibration, so it is possible to acquire the resonance waveform without using a laser vibrometer. That is, it is preferable in that the measurement can be performed at a lower cost and at a higher speed than the frequency characteristic measurement system shown in FIG. 17 (a) or FIG. 17 (b).
- FIG. 19 (a) and 19 (b) show a case where a network analyzer is connected to a piezoelectric Z electrostrictor to be inspected through a probe (measurement jig) and a transmitted wave and a reflected wave with respect to an input signal are analyzed.
- FIG. 1 is a configuration diagram showing an example of a system for measuring frequency characteristics of impedance (magnitude and phase).
- FIG. 19 (a) shows an example of a frequency characteristic measurement system of the transmission method (transmission method)
- FIG. 19 (b) shows an example of a frequency characteristic measurement system of the reflection method.
- frequency characteristic measurement systems for example, it is possible to measure frequency characteristics as gain-phase characteristics, and it is also possible to measure impedance-phase characteristics and admittance-phase characteristics using the network analyzer function. It is. these According to the frequency characteristic measuring system of the present invention, it is possible to perform cheaper and faster measurement as compared with the frequency characteristic measuring system using the impedance analyzer shown in FIG.
- FIG. 23 is a chart showing an example of measurement of impedance single-phase characteristics (frequency characteristics) of a piezoelectric Z electrostrictive actuator according to the present invention.
- the method for detecting the resonance frequency uses not only the minimum value and the minimum value of the impedance, the maximum value and the minimum value of the phase, but also the maximum value and the minimum value of admittance, the maximum value and the minimum value of the gain, etc. It is also possible.
- the capacitance CP of the piezoelectric Z electrostrictive body 79 is measured by applying a voltage between the upper electrode 75 and the lower electrode 77 using an LCR meter or the like.
- the applied voltage and its frequency are not limited, but are, for example, a frequency of 1 kHz, for example, a voltage of about IV.
- FIG. 20 is a diagram illustrating a vibration mode of a rectangular plate.
- FIG. 21 is a diagram showing a vibration mode in the case of a circular plate.
- the vibration mode can be specified in the same way as (m, n) by the number of nodes in the circumferential direction and radial direction of the circular plate instead of the vertical and horizontal directions of the rectangular plate. is there.
- the piezoelectric Z electrostrictive actuator of the present applicant which is a plate-like body, It is considered that there is one or both of the following reasons: the Z-electrostrictive operation part exists and is not symmetrical in the vertical direction, and the vibrating part slightly undulates vertically.
- ⁇ 1.0 is shown as the supporting portion, and 0 is shown as the center.
- Vibration is applied to the Z electrostrictor (plate-like body), and vibrations at multiple points of the piezoelectric Z electrostrictor are measured using a laser Doppler vibrometer or the like, and the vibration data is analyzed comprehensively. It can be specified by observing with animation or the like.
- FIG. 23 is a diagram illustrating an example of the frequency characteristic of the phase value displayed on the screen of the network analyzer.
- the first-order resonance frequency F1 is detected as a frequency indicating the minimum value of the impedance or the maximum value of the phase at the lowest frequency.
- the first-order resonance frequency is a resonance frequency of a vibration mode (1, 1) (a vibration in which one antinode is formed) as illustrated in FIG.
- the resonance frequency FA of the higher-order peak A is detected as a frequency showing the second phase maximum value on the higher frequency side than the resonance frequency F1.
- the resonance frequency of the higher order peak A is the resonance frequency of the vibration mode (3, 1) (vibration forming three antinodes) as illustrated in FIG. 22 (b).
- the resonance frequency FB of the higher order peak B is detected as a frequency indicating the maximum value of the third phase on the higher frequency side than the resonance frequency FA.
- the resonance frequency of the higher-order peak B is the resonance frequency of a special vibration mode (3.5, 1) as exemplified in Fig. 22 (c).
- FIG. 26 is a graph showing the relationship between the amount of lateral displacement between the piezoelectric Z-electrostrictive body 79 and the vibrating section 66 and the amount of displacement of the piezoelectric Z-electrostrictive actuator having the amount of lateral displacement.
- an analysis was performed including the piezoelectric Z electrostrictor with a large displacement.
- the amount of undulation of the vibrating section 66 will be described.
- the height H (m) to the vertex of the vibrating portion 66 from which the plane force connecting both ends of the vibrating portion 66 has also protruded is referred to as the undulation amount of the vibrating portion 66. If the apex of the vibrating part is recessed from the plane connecting both ends of the vibrating part 66, the height H (undulation amount) is represented by a negative value.
- FIG. 29 is a graph showing the relationship between the amount of undulation of the vibrating section 66 and the amount of displacement of the piezoelectric Z electrostrictive actuator having the amount of undulation.
- FR 1B and the amount of undulation are roughly proportional, and as shown in Equation 11, based on a (FR1B) obtained by multiplying FR1B by coefficient a, ) Is possible.
- the amount of lateral displacement and the amount of displacement are substantially proportional, and as clearly shown in FIG. 29, the amount of undulation and the amount of displacement have a relationship represented by a second-order polynomial.
- Equation 12 a (FR1A) obtained by multiplying FR1A by coefficient a, c (FR1B) obtained by multiplying FR1B by coefficient c, and b (FR1B) 2 obtained by multiplying the square of FR1B by coefficient b
- the piezoelectric Z-electrostrictive body 79 is formed by printing or the like, the printing of the piezoelectric Z-electrostrictive body 79 is performed so that the amount of lateral displacement between the piezoelectric Z-electrostrictive body 79 and the vibrating portion 66 is changed. It is possible to adjust the predicted displacement amount by changing the position slightly.
- FR1A Based on (FR1A), c (FR1B) obtained by multiplying FR1B by the coefficient c, and b (FR1B) 2 obtained by multiplying the square of FR1B by the coefficient b (the capacitance can be further added). It is possible to determine the amount of displacement.
- the piezoelectric Z-electrostrictive body 79 is formed by printing or the like, the printing position of the piezoelectric Z-electrostrictive body 79 is changed so that the amount of lateral displacement between the piezoelectric Z-electrostrictive body 79 and the vibrating portion 66 is changed. It is possible to adjust the predicted displacement amount by making small changes.
- FIG. 32 (b) is a graph showing the relationship between the predicted displacement amount and the measured displacement amount when the displacement is predicted by Equation (13). This graph shows the relationship between the predicted displacement and the measured displacement measured by a laser Doppler vibrometer when 16 piezoelectric Z electrostrictors with the same configuration as the piezoelectric Z electrostrictor 20 were fabricated. To indicate that the two are approximately proportional.
- the correlation between the predicted displacement and the actually measured displacement is better in FIG. 32 (b) than in FIG. 32 (a), and it can be seen that the displacement can be predicted with higher accuracy.
- FIG. 24 (a) to FIG. 24 (c) are charts showing measurement examples of frequency characteristics of one phase of impedance of the piezoelectric Z electrostrictive actuator.
- Fig. 24 (a) shows the frequency characteristics when no lateral displacement occurs (deviation force ⁇ ; zm), and
- Fig. 24 (b) shows the frequency characteristics when the lateral displacement is small.
- 24 (c) is the frequency characteristic when the side slip is large Is shown.
- the left peak in the figure indicates the primary peak, and the left peak indicates the higher peak C.
- the resonance frequency peak acting on the vibration mode (1, 1) has a peak in a low frequency region. No noticeable peak is observed in a certain region where the wave number is high.
- the vibration mode (1, The peak of the resonance frequency (resonance waveform) according to 2) occurs, and as clearly shown in the comparison between FIG. 24 (b) and FIG. 24 (c), as the amount of lateral displacement increases, the peak increases.
- the area R that acts on the resonance waveform between the frequency R and the frequency T also increases. Also, as the lateral displacement increases, the peak height PK1 of the resonance frequency (of the resonance waveform) acting on the vibration mode (1, 1) that appears in the low frequency region, and the resonance between the frequency Q force and the frequency P The area S1 acting on the waveform becomes smaller.
- the basic tendency is the same as the phase characteristic. That is, as shown in FIG. 24 (a), in the piezoelectric Z electrostrictive actuator having no lateral displacement, the local maximum value E1 and the local maximum value E1 generated by the resonance acting on the vibration mode (1, 1) in the low frequency region are obtained. A step-like waveform is not seen in a high frequency constant region where the difference from the small value E2 is large. On the other hand, as shown in FIGS.
- the curve 181 shows the relationship between the amount of lateral displacement and the height PKC of the higher order peak C
- the curve 182 shows the relationship between the amount of lateral displacement and the height PK1 of the primary peak.
- a curve 183 indicates the relationship between the amount of lateral displacement and the area SC of the higher order peak C
- a curve 184 indicates the relationship between the amount of lateral displacement and the area S1 of the primary peak.
- the curve 185 shows the relationship between the amount of lateral displacement and the peak height ratio PKCZPK1
- the curve 1 86 shows the relationship between the amount of lateral shift and the ratio of the area of the peak (area ratio) SCZS1.
- the phenomenon that the height of the peak (of the resonance waveform) of the vibration mode (1, 2) increases due to the lateral displacement can be explained for the following reasons. That is, when the piezoelectric Z electrostriction operating portion is arranged without lateral displacement with respect to the vibrating portion, the center of gravity of the piezoelectric Z electrostrictive actuator as a structure coincides with the center of vibration. Also, due to the expansion and contraction of the piezoelectric Z electrostriction operating section, a bending displacement close to the vibration mode (1, 1) is originally excited. That is, the center of the vibrating part is greatly excited.
- the problematic lateral displacement is the displacement in the BB 'section of the piezoelectric Z-electrostrictive actuator shown in Fig. 1, and is a vibration mode (1, 2) with a narrow center in the lateral direction (see Fig. 20). Is strongly excited.
- the force that strongly excites the (2, 1) mode in the case of displacement in the AA 'cross section in Fig. 1, the force that strongly excites the (2, 1) mode. Displacement in this direction has almost no adverse effect on displacement.
- This is not a problem in this document, this concept can be applied to dimensional deviation inspection.
- the method of predicting the lateral displacement and displacement using the higher order peak C shown in Fig. 24 (b) and Fig. 24 (c) is compared to the method of using the higher order peak A shown in Fig. 23.
- the peaks (resonance waveforms) that become noise near each peak (resonance waveform) are relatively small, and the probability of erroneously detecting another unintended peak (resonance waveform) is low. It is possible to predict the lateral shift well, which is more preferable.
- the formula for predicting the amount of lateral displacement due to higher-order peak C can be approximated as a straight line near the origin from Fig. 28 (a), so it can be expressed by a simple formula such as Equation 14 .
- FIG. 25 (a), FIG. 25 (b), and FIG. 25 (c) are diagrams showing an example of the frequency characteristic of the phase value displayed on the screen of the network analyzer
- FIG. Fig. 5 shows the frequency characteristics of a piezoelectric Z-electrostrictive actuator with a downward undulating force S in the vibrating part (see Fig. 5).
- Fig. 25 (b) shows the piezoelectric Z-electrostrictive actuator without undulating in the vibrating part (see Fig. 3).
- Fig. 25 (c) shows the frequency characteristics of a piezoelectric Z electrostrictive actuator (see Fig. 10) in which the vibrating part has an upward undulation.
- the resonance frequency D of the higher order peak D is detected at a frequency of 8 to 9 MHz
- the resonance frequency E of the higher order peak E Are detected at frequencies 10 to: L lMHz.
- the resonance frequency of the higher order peak D is the resonance frequency of the vibration mode (1, 3)
- the resonance frequency of the higher order peak E is the resonance frequency of the vibration mode (3.5, 3).
- FIG. 31 is a graph showing the relationship between the frequency ratio FRDE and the amount of undulation of the vibrating portion applied to the piezoelectric Z electrostrictive actuator. Since the equation for predicting the amount of undulation based on the higher order peaks D and E can be approximately regarded as a straight line from FIG. 31, it can be expressed by a simple equation such as equation (15).
- equation (16) the equation for predicting the amount of displacement based on the higher-order peaks C, D, and E is as follows. Considering the relationship, it can be expressed by, for example, an equation such as equation (16).
- the piezoelectric Z-electrostrictive actuator has been inspected based only on the capacitance of the piezoelectric Z-electrostrictive body. Therefore, other elements constituting the piezoelectric Z-electrostrictive actuator, that is, the vibrating portion, the support portion, and the like. There were no differences between products such as substrates composed of, reflected in the inspection results. For this reason, in the above inspection, there was a limit to the improvement in the accuracy of the inspection.In the inspection described above, the predicted lateral displacement, predicted waviness, and predicted displacement were obtained by actually vibrating the manufactured piezoelectric Z electrostrictive actuator.
- the present invention can also be effectively used for inspection of a piezoelectric Z electrostrictive actuator set in which a plurality of piezoelectric Z electrostrictive actuators are arranged vertically and horizontally. That is, the piezoelectric z electrostrictor
- the variation in the dimensional deviation of each piezoelectric z-electrostrictive actuator in the set is the variation in the characteristics of the piezoelectric z-electrostrictive actuator set.
- Information such as the resonance frequency and resonance frequency ratio of these first and higher order resonance modes, the height and area of the resonance waveform peak, etc. However, it is possible to accurately predict the characteristic variation of the piezoelectric Z electrostrictive actuator set.
- the frequency ratio FR1A and the frequency ratio FR1B and, if necessary, the capacitance CP are calculated and calculated, and the dimensions of the piezoelectric Z electrostrictor 20 and the piezoelectric Z electrostrictor 20 are calculated.
- a program for predicting the size of an elastic body (piezoelectric Z-electrostrictor) and a program for predicting the displacement of a piezoelectric Z-electrostrictor according to the present invention for predicting the amount of displacement will be described.
- FIGS. 33 (a) and 33 (b) are configuration diagrams of a computer system in which a displacement prediction program is incorporated.
- the computer system 10 shown in FIG. 33A mainly includes a central processing unit 1, a storage device 2 (main memory), an input device 4, and an output device 5.
- the displacement amount prediction program according to the present invention is a program for causing a computer to function as a predetermined means in order to predict a displacement amount of a piezoelectric Z electrostrictive actuator including a piezoelectric Z electrostrictive body and two or more electrodes. is there .
- the displacement amount prediction program according to the present invention is stored in the storage device 2, and the central processing unit 1 issues a command to other devices constituting the computer system 10 based on the program.
- the central processing unit 1 predicts the displacement of the piezoelectric Z electrostrictive actuator based on the calculation formula to be applied to the piezoelectric Z electrostrictive actuator, which attempts to predict the displacement according to the command of the displacement predicting program. Calculate the amount.
- the central processing unit 1 outputs the obtained predicted displacement amount of the piezoelectric Z electrostriction actuator to a printer or a CRT (screen) according to a command of the displacement amount prediction program.
- the calculation formula can be incorporated in the displacement amount prediction program. Further, the calculation formula is not limited to the example, but can be changed according to the characteristics of the inspection object, such as an exponential function or a higher-order polynomial.
- the central processing unit 1 receives the instruction of the displacement amount prediction program in the storage device 2, and calculates the resonance frequency ratio, the ratio of the peak height, the area ratio, and the like.
- the central processing unit 1 receives a command of the displacement amount prediction program in the storage device 2, and calculates Equations 1 and 2, which are the calculation formulas for calculating the predicted displacement amount applied to the piezoelectric Z electrostrictor. Based on Equation 13, the predicted displacement of the piezoelectric Z electrostrictor is calculated.
- the capacitance is used to calculate the predicted displacement (equivalent to Equation 4)
- the capacitance CP of the piezoelectric Z electrostrictor of the piezoelectric Z electrostrictor for which the predicted displacement is to be calculated is Input from a keyboard or LCR meter.
- the central processing unit 1 outputs the calculated predicted displacement amount as digital data or analog data to a printer, a CRT (screen), or the like according to a command of the displacement amount prediction program.
- the computer system 330 shown in FIG. 33 (b) is obtained by adding a pass / fail sorting device (robot) to the computer system shown in FIG. 33 (a).
- a pass / fail sorting device robot
- the displacement predicted based on the displacement prediction program is stored in the storage device, and information on pass / fail judgment based on the specified threshold! / ⁇ value is also stored in the storage device.
- the pass / fail sorting device sorts the subject (piezoelectric Z electrostrictive actuator product) based on the pass / fail judgment information. For example, a non-defective product is in a tray dedicated to non-defective products, and a defective product is a tray dedicated to defective products. And the like.
- the elastic body dimensional prediction program according to the present invention (also simply referred to as a dimensional prediction program) includes a piezoelectric Z electrostrictive body 79 of an elastic piezoelectric electrostrictive operating section 78 and a vibrating section 66 of a base body 44.
- This is a program for making a computer function as a predetermined means for estimating such dimensions (shift amount and undulation amount).
- the dimension prediction program according to the present invention is stored in the storage device 2 in accordance with the above-described displacement amount prediction program, except that Equation 1 is used for calculating the predicted dimension, and based on this program.
- the central processing unit 1 issues a command to other devices constituting the combi-processor system 10, and a detailed description thereof will be omitted.
- the inspection method, the inspection apparatus, and the displacement amount prediction program for the piezoelectric Z electrostrictive actuator according to the present invention have been described with reference to an example of the piezoelectric Z electrostrictive actuator.
- the force of the piezoelectric Z electrostrictive sensor according to the present invention The piezoelectric Z-electrostrictive sensors targeted by each of the inspection methods, inspection equipment, and detection sensitivity prediction programs also differ only in electrical-Z mechanical conversion and mechanical-Z electrical conversion. It is the same as Z Electrostrictor.
- the piezoelectric z-electrostrictive actuator that can be targeted by each of the piezoelectric z-electrostrictive actuator inspection method, the inspection device, and the displacement amount prediction program according to the present invention is a piezoelectric z-electrostrictive body that is a dielectric. And two or more electrodes, it corresponds to a structure having two or more elastic bodies.
- a piezoelectric Z electrostrictive actuator includes, in addition to a piezoelectric Z electrostrictive operating section including a piezoelectric Z electrostrictive body and two or more electrodes, an elastic body that is a vibrating section and a support section.
- An example is shown that includes a base that is configured, and in that example, the piezoelectric Z electrostrictive operation section, the vibration section, and the support section are shown as one elastic body.
- the elastic body that can be targeted by each of the elastic body inspection method, the inspection apparatus, and the size prediction program according to the present invention is an object that exhibits non-plastic elasticity and is composed of two or more elastic bodies.
- the structure is not limited to a piezoelectric Z-electrostrictive body (piezoelectric Z-electrostrictive operating section) and a ceramic base (vibrating section) as long as it is at least one elastic body of the structural body.
- the piezoelectric Z electrostrictive device according to the present invention which can be targeted by each of the inspection method, the inspection apparatus, and the displacement amount prediction program of the piezoelectric Z electrostrictive device, and the piezoelectric Z electrostrictive sensor according to the present invention.
- the piezoelectric Z-electrostrictive sensor which is the target of each of the inspection methods, inspection devices, and detection sensitivity prediction programs, performs a united function using the charge-Z electric field induced by the strain and stress induced by the electric field.
- An inspection method, an inspection device, and a size prediction program for an elastic body according to the present invention, and an inspection method, an inspection device, and a displacement amount prediction program for a piezoelectric z-electrostrictive actuator include, for example, a measuring device, an optical modulator, and an optical switch. , Electric switches, micro relays, micro valves, transfer devices, image display devices such as displays and projectors, image drawing devices, microphone port pumps, droplet discharge devices, micro mixing devices, micro stirring devices, micro reaction devices, etc. It can be suitably used as an inspection means of various piezoelectric Z electrostrictive actuators applied to the above.
- the inspection method, the inspection apparatus, and the detection sensitivity prediction program of the piezoelectric Z electrostrictive sensor according to the present invention include various piezoelectric Z electrostrictive sensors used for detecting fluid characteristics, sound pressure, minute weight, acceleration, and the like. It can be suitably used as an inspection means.
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- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Micromachines (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
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Abstract
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JP2006512654A JP4885714B2 (ja) | 2004-04-27 | 2005-04-27 | 弾性体の検査方法、検査装置、及び寸法予測プログラム |
EP20050736739 EP1744379A4 (en) | 2004-04-27 | 2005-04-27 | INVESTIGATION METHODS FOR ELASTIC BODIES, INVESTIGATION EQUIPMENT AND DIMENSION FORECASTING PROGRAM |
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JP2009049359A (ja) * | 2007-07-25 | 2009-03-05 | Ngk Insulators Ltd | 圧電/電歪素子及び圧電/電歪素子の製造方法 |
WO2009057535A1 (ja) * | 2007-10-30 | 2009-05-07 | Ngk Insulators, Ltd. | 電気機械変換素子の電気機械特性検査方法 |
WO2009128546A1 (ja) | 2008-04-18 | 2009-10-22 | 日本碍子株式会社 | 圧電/電歪デバイスの検査方法及び検査装置、並びに圧電/電歪デバイスの調整方法 |
JP2013541179A (ja) * | 2010-09-03 | 2013-11-07 | エプコス アーゲー | 圧電アクチュエータの曲げ振動制御方法 |
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US8217667B2 (en) * | 2009-01-16 | 2012-07-10 | Hill-Rom Services, Inc. | Method and apparatus for piezoelectric sensor status assessment |
GB201101870D0 (en) * | 2011-02-03 | 2011-03-23 | The Technology Partnership Plc | Pump |
JP5765275B2 (ja) * | 2012-03-13 | 2015-08-19 | ブラザー工業株式会社 | 圧電アクチュエータの性能検査方法及び液体吐出装置 |
US9513179B2 (en) * | 2014-01-20 | 2016-12-06 | Good Vibrations Engineering Ltd. | Force moment sensor |
JP6524679B2 (ja) * | 2015-02-02 | 2019-06-05 | 富士通株式会社 | 水晶振動子の検査方法 |
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JP7446964B2 (ja) * | 2020-09-29 | 2024-03-11 | 日本発條株式会社 | ディスク装置用サスペンションの製造方法と、製造装置 |
DE102022125498A1 (de) | 2022-10-04 | 2024-04-04 | Valeo Schalter Und Sensoren Gmbh | Überprüfen einer Funktion einer elektromechanischen Einheit eines Ultraschallsensors mit wenigstens einer von einer Grundmode unterschiedlichen Mode |
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Also Published As
Publication number | Publication date |
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EP2104154A2 (en) | 2009-09-23 |
US20050284224A1 (en) | 2005-12-29 |
JPWO2005104258A1 (ja) | 2008-03-13 |
EP2104154B1 (en) | 2015-06-03 |
JP4885714B2 (ja) | 2012-02-29 |
EP1744379A4 (en) | 2007-10-24 |
US7424827B2 (en) | 2008-09-16 |
EP2104154A3 (en) | 2010-02-17 |
EP2290722A1 (en) | 2011-03-02 |
EP1744379A1 (en) | 2007-01-17 |
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