WO2005064374A1 - Fabrication of polymer waveguide using a mold - Google Patents
Fabrication of polymer waveguide using a mold Download PDFInfo
- Publication number
- WO2005064374A1 WO2005064374A1 PCT/KR2004/000518 KR2004000518W WO2005064374A1 WO 2005064374 A1 WO2005064374 A1 WO 2005064374A1 KR 2004000518 W KR2004000518 W KR 2004000518W WO 2005064374 A1 WO2005064374 A1 WO 2005064374A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- mold
- core
- waveguide
- under cladding
- layer
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00663—Production of light guides
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1221—Basic optical elements, e.g. light-guiding paths made from organic materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2011/00—Optical elements, e.g. lenses, prisms
- B29L2011/0075—Light guides, optical cables
Definitions
- the present invention relates to a method for preparing a polymer waveguide comprising a core and at least one cladding layer, the waveguide having low optical loss and no lip around its core, using a mold having a recessed shape for forming the core pattern.
- Multi-mode optical waveguides comprising an under cladding layer, a core layer which serves as a multi-mode transport channel and an upper cladding layer are employed in short distance communication, e.g., LAN(local area network), building network, access network, optical backplane and optical interconnection.
- LAN local area network
- Such optical waveguides have been produced using an inexpensive polymer such as polyimides, epoxides and acrylates instead of silica.
- various techniques have been reported by Jenoptik Mikrotechnik GmbH, in Germany, and Chou at Prinston University and Whiteside at Harvard University in United States, which produce a core layer by press-embossing or stamping. These conventional methods, however, are hampered by the problem that a lip is formed around the core, which causes increased optical loss of the waveguide.
- a method for preparing a polymer waveguide composed of an under cladding, a core and an upper cladding layers comprising: 1) forming the under cladding coating layer on a substrate; 2) placing above the under cladding layer a mold having the shape formed by assembling at least two waveguide pattern units having predesigned channels and two band parts such that the channels of the units are interconnected and open to the two band parts, in such a way that the recess of the mold and the under cladding layer face each other to form a void therebetween; 3) injecting a photocurable polymeric resin through one end of the two band parts to fill the void with the resin and photocuring the resin to form the core layer, and removing the mold from the under cladding layer; and 4) forming the upper cladding coating layer on the core layer.
- FIG. 1 a waveguide pattern unit (10) for a multi-mode splitter unit (FIG. 1A), and the assembly of twelve waveguide pattern units and two band parts (20) (FIG. IB), obtained in Example 1; and FIG. 2 : scanning electron microscope (SEM) scans (FIGs. 2 A and 2B) and an atomic microscope scan (FIG. 2C) of the core of the polymer waveguide obtained in Example 5.
- SEM scanning electron microscope
- the inventive method for preparing a polymer waveguide is characterized by stamping to generate a waveguide pattern, by way of using a mold having a recessed shape formed by assembling at least two waveguide pattern units having predesigned channels together with two band parts such that the channels of the units are interconnected and open to the band parts, and filling the void generated by contacting the mold and a under cladding layer with a photocurable polymeric resin to form a core layer.
- the band part in the mold has a depth identical to that of the waveguide pattern.
- the inventive mold may be a rubber or metal mold prepared by a conventional photolithography or LIGA(Lithographie Galvanoformung Abformung) technique.
- a rubber mold may be prepared by pouring a siloxane-based resin(e.g., polydimethylsiloxane rubber) on a master having a projection which is prepared by a photolithography or LIGA technique, leaving it at room temperature to remove bubbles therefrom, and then, curing at a temperature ranging from 30 to 100 ° C for 2 to 10 hrs.
- a metal mold may be prepared in a similar way by emboding a desired recess on a metal(e.g., nickel) plate using an LIGA technique.
- a hole opening for resin injection or withdrawal is formed at the end part of the band part, and if necessary, the mold may be nickel plated.
- the inventive polymer waveguide is prepared by forming an under cladding coating layer on a substrate; placing the prepared mold above the under cladding layer in such a way that the recess of the mold and the under cladding layer face each other to form a void therebetween; injecting a photocurable polymeric resin through one end of the two band parts to fill the void with the resin, and photocuring the resin to form a core layer, and removing the mold from the under cladding layer; and forming an upper cladding coating layer on the core layer.
- the end of the other band part is used for evacuation of the void during or after the injection of the photocurable polymeric resin.
- the polymeric resin may be cured by UV irradiating from the mold side regardless of the transparency of the substrate, while the use of a metal mold necessarily requires the use of a transparent substrate.
- the isolated rubber mold may be reused at least ten times, while a metal mold may be reused almost perpetually.
- the under and upper cladding layers may be formed by a conventional coating method, e.g., spin coating, followed by a conventional curing method, e.g., UV irradiation, and are made of a photocurable polymeric resin having a lower refractive index than that of the core layer resin.
- the photocurable polymeric resin which is used in the present invention may be a conventional resin composition for a waveguide, preferably the composition disclosed by the present inventors in Korean Patent Publication No. 2003-71343.
- the substrate which may be used in the present invention include silicon wafers, and transparent acrylic plates and glass plates.
- the inventive photocurable polymer waveguide comprises a core with no lip, having a width and a depth of 50 to 1000 ⁇ m, and an improved surface roughness of at least 0.5 nm(rms), thereby exhibiting a low optical loss ranging from 0.05 to 0.3 dB/cm at 850 nm.
- the prepared polymer waveguide provides waveguide device units through subsequent steps, i.e., binding of dummy sheet, dicing and polishing steps.
- Example 1 Design of an assembly for a mold
- a waveguide pattern unit (10) was designed in the form of a cascade- type 1 x 4 multi-mode splitter unit having a width x length of 65mm x 70mm, wherein one major channel (400 ⁇ . x 200 m(width x depth)) splits into four branch channels(200 ⁇ m x 200 m(width x depth)) as shown in FIG. 1A. Twelve of such units were arranged in a four row x three column configuration together with two rectangular band parts (20) having a width x length of 5mm x 5mm and a depth of 200 ⁇ m such that the channels of the units in each row were interconnected with each other and also to the two bands, as shown in FIG. IB, to obtain an assembly for a mold.
- Example 2 Preparation of a rubber mold -1) A photomask was prepared using the assembly obtained in Example 1. An SU-8 photoresist was coated on a silicon wafer, dried and light- exposed using a mask-aligner and the prepared photomask, and treated with a developer, to prepare an embossing photoresist master. An aluminum tape wall was installed on the circumference of the master. A polydimethylsiloxane rubber was poured thereto, kept at room temperature to remove bubbles therefrom, and cured at 50 °C for 3 hrs, to obtain a rubber mold having a recessed shape.
- Example 3 Preparation of a rubber mold -2) A photomask was prepared using the assembly obtained in Example 1. The photomask was placed on a 5mm thick nickel metal plate and subject to LIGA, to prepare an embossing master. For enhancing the surface roughness, the master was nickel plated and polished. An aluminum tape wall was installed on the circumference of the master. A polydimethylsiloxane rubber was poured thereto, kept at room temperature to remove bubbles therefrom, and cured at 50 °C for 3 hrs, to obtain a rubber mold having a recessed shape.
- Example 4 Preparation of a metal mold -3) A photomask was prepared using the assembly obtained in Example 1. The photomask was placed on a 5mm thick nickel metal plate and subject to LIGA, to prepare a metal mold having a recessed shape. For enhancing the surface roughness, the mold was nickel plated and polished. Further, two 1mm diameter holes opening to the two band parts were formed at the respective ends of the band parts.
- Example 5 Preparation of a polymer waveguide using a rubber mold -1) A photocurable resin composition having a refractive index of 1.40 was uniformly spread on a silicon wafer, spin-coated at 3000 rpm for 30 seconds, cured with a 100 mJ/cm 2 UV fusion lamp and treated at 60 ⁇ 100°C for 10 minutes, to form an under cladding layer, wherein the photocurable resin composition was a mixture of 40 g of a urethane oligomer substituted with fluorine (an oligomer synthesized from a mixture of 375.27 g of Fluorolink D, 89.38 g of isophorondiisocyanate and 34.85 g of hydroxymethacrylate), 20 g of SR-339, 20 g of 2- ⁇ erfluorooctylethylacrylate, 10 g of 2-hydroxypropylacrylate, 4.5 g of Darocure #1173, 5 g of Z-6030 and 0.5
- Example 2 or 3 The rubber mold obtained in Example 2 or 3 was placed above the under cladding layer such that the recess of the mold and the under cladding layer faced each other to form a void therebetween.
- a photocurable resin composition having a refractive index of 1.45 was injected through one end of the band parts using an injector, wherein the photocurable resin composition was a mixture of 40 g of a urethane oligomer substituted with fluorine (an oligomer synthesized from a mixture of 375.27 g of Fluorolink D, 89.38 g of isophorondiisocyanate and 38.9 g of 2-hydroxypropylacrylate), 30 g of SR-339, 20 g of 2-perfluorooctylethylacrylate, 4.5 g of Darocure #1173, 5 g of Z-6030 and 0.5 g of BHT, as disclosed in Example 10 of Korean Patent Publication No.
- the band injected with the resin was more or less filled with the resin, the end of the other band part was evacuated with a vacuum pump.
- the resin was cured with a 100 mJ/cm 2 UV fusion lamp from the mold side, and treated at 60-100 ° C for 10 minutes, to form a core layer.
- the photocurable resin composition having a refractive index of 1.40 which was used in the preparation of the under cladding layer was spin- coated on the core layer at 1000 rpm for 20 seconds, cured with a 100 mJ/cm 2 UV fusion lamp and treated at 60 ⁇ 100 ° C for 10 minutes, to form an upper cladding layer, thereby obtaining a polymer waveguide.
- Example 6 Preparation of a polymer waveguide using a rubber mold -2) The procedure of Example 5 was repeated except that a flat acrylic plate was used instead of the silicon wafer, to prepare a polymer waveguide.
- Example 7 Preparation of a polymer waveguide using a metal mold -3) The procedure of Example 5 was repeated except that a flat acrylic plate and the metal mold obtained in Example 4 were used instead of the silicon wafer and the rubber mold, respectively, to prepare a polymer waveguide.
- Example 8 Preparation of a polymer waveguide using a metal mold -4) The procedure of Example 7 was repeated except that a flat glass plate was used instead of the acrylic plate, to prepare a polymer waveguide.
- Example 9 Characteristics of polymer waveguides The characteristics of the polymer waveguide obtained in Example 5 in terms of specific refractive index and insertion loss were measured, the insertion loss being determined using a 850nm light source and a polymer clad silica fiber having the same size as that of the core of the prepared waveguide. The results are shown in Table 1. Table 1
- the present invention provides a very simple and efficient method for mass-producing at a low manufacturing cost a polymer waveguide, especially a multi-mode waveguide, having no lip around the core and exhibiting low optical loss.
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Ophthalmology & Optometry (AREA)
- Mechanical Engineering (AREA)
- Optical Integrated Circuits (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006546798A JP2007517253A (en) | 2003-12-31 | 2004-03-12 | Production of polymer optical waveguides using molds |
EP04720277A EP1704430A4 (en) | 2003-12-31 | 2004-03-12 | Fabrication of polymer waveguide using a mold |
US10/579,660 US20070104440A1 (en) | 2003-12-31 | 2004-03-12 | Fabrication of polymer waveguide using a mold |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030101171A KR100610230B1 (en) | 2003-12-31 | 2003-12-31 | Fabrication of polymer waveguide using uv-molding method |
KR10-2003-0101171 | 2003-12-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2005064374A1 true WO2005064374A1 (en) | 2005-07-14 |
Family
ID=36847685
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR2004/000518 WO2005064374A1 (en) | 2003-12-31 | 2004-03-12 | Fabrication of polymer waveguide using a mold |
Country Status (5)
Country | Link |
---|---|
US (1) | US20070104440A1 (en) |
EP (1) | EP1704430A4 (en) |
JP (1) | JP2007517253A (en) |
KR (1) | KR100610230B1 (en) |
WO (1) | WO2005064374A1 (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100810916B1 (en) * | 2006-03-30 | 2008-03-10 | 부산대학교 산학협력단 | Optical waveguide and method of the same |
KR101345383B1 (en) * | 2007-06-08 | 2013-12-24 | 삼성전자주식회사 | Method for manufacturing the all-in-one type light guide plate |
TWI359850B (en) * | 2007-08-30 | 2012-03-11 | Ind Tech Res Inst | Photo-sensitive adhesive for liquid crystal displa |
CN101802667B (en) * | 2007-09-19 | 2014-02-19 | 日立化成工业株式会社 | Method for manufacturing optical waveguide and optical waveguide manufactured by the method |
JP5101325B2 (en) * | 2008-02-07 | 2012-12-19 | 日東電工株式会社 | Method for manufacturing optical waveguide for touch panel |
KR100971005B1 (en) | 2008-05-26 | 2010-07-20 | 부산대학교 산학협력단 | Optical layer formation system of polymer optical device |
WO2010114477A1 (en) * | 2009-03-30 | 2010-10-07 | Agency For Science, Technology And Research | Method of forming an optical structure |
IL268871B2 (en) | 2017-03-16 | 2024-05-01 | Molecular Imprints Inc | Optical polymer films and methods for casting the same |
EP3697588B1 (en) | 2017-10-17 | 2024-04-03 | Magic Leap, Inc. | A system for molding a photocurable material into a planar object |
EP3867677A4 (en) * | 2018-10-16 | 2021-12-22 | Magic Leap, Inc. | Methods and apparatuses for casting polymer products |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20020063036A (en) * | 2001-01-26 | 2002-08-01 | 주식회사 오랜텍 | Method of fabricating polymer optical waveguide and method of fabricating hybrid integrated device using the same |
JP2002311263A (en) * | 2001-04-13 | 2002-10-23 | Hitachi Cable Ltd | Polymer waveguide and method for manufacturing the same |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3239598B2 (en) * | 1994-02-25 | 2001-12-17 | キヤノン株式会社 | Method for manufacturing diffractive optical element |
US6355198B1 (en) * | 1996-03-15 | 2002-03-12 | President And Fellows Of Harvard College | Method of forming articles including waveguides via capillary micromolding and microtransfer molding |
JP2004086144A (en) | 2002-06-27 | 2004-03-18 | Fuji Xerox Co Ltd | Method for manufacturing macromolecular optical waveguide |
JP2004144987A (en) | 2002-10-24 | 2004-05-20 | Fuji Xerox Co Ltd | Manufacturing method of polymeric optical waveguide |
US6865307B1 (en) * | 2003-07-16 | 2005-03-08 | Lockheed Martin Corporation | Method for forming an optical printed circuit board |
-
2003
- 2003-12-31 KR KR1020030101171A patent/KR100610230B1/en active IP Right Grant
-
2004
- 2004-03-12 JP JP2006546798A patent/JP2007517253A/en active Pending
- 2004-03-12 US US10/579,660 patent/US20070104440A1/en not_active Abandoned
- 2004-03-12 WO PCT/KR2004/000518 patent/WO2005064374A1/en active Application Filing
- 2004-03-12 EP EP04720277A patent/EP1704430A4/en not_active Withdrawn
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20020063036A (en) * | 2001-01-26 | 2002-08-01 | 주식회사 오랜텍 | Method of fabricating polymer optical waveguide and method of fabricating hybrid integrated device using the same |
JP2002311263A (en) * | 2001-04-13 | 2002-10-23 | Hitachi Cable Ltd | Polymer waveguide and method for manufacturing the same |
Non-Patent Citations (1)
Title |
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See also references of EP1704430A4 * |
Also Published As
Publication number | Publication date |
---|---|
KR20050069214A (en) | 2005-07-05 |
KR100610230B1 (en) | 2006-08-08 |
JP2007517253A (en) | 2007-06-28 |
EP1704430A1 (en) | 2006-09-27 |
US20070104440A1 (en) | 2007-05-10 |
EP1704430A4 (en) | 2007-03-07 |
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