WO2005035437A3 - High-precision feedback control for ion sculpting of solid state features - Google Patents

High-precision feedback control for ion sculpting of solid state features

Info

Publication number
WO2005035437A3
WO2005035437A3 PCT/US2004/033086 US2004033086W WO2005035437A3 WO 2005035437 A3 WO2005035437 A3 WO 2005035437A3 US 2004033086 W US2004033086 W US 2004033086W WO 2005035437 A3 WO2005035437 A3 WO 2005035437A3
Authority
WO
WIPO (PCT)
Prior art keywords
solid state
feedback control
detection species
structural feature
state features
Prior art date
Application number
PCT/US2004/033086
Other languages
French (fr)
Other versions
WO2005035437A2 (en
Inventor
Jene Golovchenko
Derek M Stein
George E Yefchak
Richard J Pittaro
Curt Flory
Original Assignee
Harvard College
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harvard College, Agilent Technologies Inc filed Critical Harvard College
Publication of WO2005035437A2 publication Critical patent/WO2005035437A2/en
Publication of WO2005035437A3 publication Critical patent/WO2005035437A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483—Physical analysis of biological material
    • G01N33/487—Physical analysis of biological material of liquid biological material
    • G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
    • G01N33/48721—Investigating individual macromolecules, e.g. by translocation through nanopores
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0055—Manufacturing logistics
    • B81C99/0065—Process control; Yield prediction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3174—Etching microareas

Abstract

The invention provides a method for controlled fabrication of a solid state structural feature. In the method, a solid state structure is provided and the structure is exposed to an ion beam, under fabrication process conditions for producing the structural feature. A physical detection species is directed toward a designated structure location, and the rate at which the detection species proceeds from the designated structure location is measured. Detection species rate measurements are fit to a mathematical model, and the fabrication process conditions are controlled, based on the fitted detection species rate measurements, to fabricate the structural feature.
PCT/US2004/033086 2003-10-08 2004-10-07 High-precision feedback control for ion sculpting of solid state features WO2005035437A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US50965603P 2003-10-08 2003-10-08
US60/509,656 2003-10-08

Publications (2)

Publication Number Publication Date
WO2005035437A2 WO2005035437A2 (en) 2005-04-21
WO2005035437A3 true WO2005035437A3 (en) 2005-06-16

Family

ID=34435004

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/033086 WO2005035437A2 (en) 2003-10-08 2004-10-07 High-precision feedback control for ion sculpting of solid state features

Country Status (1)

Country Link
WO (1) WO2005035437A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7258838B2 (en) 1999-06-22 2007-08-21 President And Fellows Of Harvard College Solid state molecular probe device
DE102006030874B4 (en) * 2006-07-04 2013-03-14 Pro-Beam Ag & Co. Kgaa Method and device for machining workpieces
EP2507387B1 (en) 2009-12-01 2017-01-25 Oxford Nanopore Technologies Limited Biochemical analysis instrument and method
CN103370617B (en) 2010-10-01 2015-11-25 牛津纳米孔技术有限公司 Biochemical analysis equipment and rotary valve

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5091320A (en) * 1990-06-15 1992-02-25 Bell Communications Research, Inc. Ellipsometric control of material growth
WO2003003446A2 (en) * 2001-06-27 2003-01-09 President And Fellows Of Harvard College Control of solid state dimensional features

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5091320A (en) * 1990-06-15 1992-02-25 Bell Communications Research, Inc. Ellipsometric control of material growth
WO2003003446A2 (en) * 2001-06-27 2003-01-09 President And Fellows Of Harvard College Control of solid state dimensional features

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JIALI LI ET AL: "Ion-beam sculpting at nanometre length scales", NATURE, MACMILLAN JOURNALS LTD. LONDON, GB, vol. 412, no. 6843, 12 July 2001 (2001-07-12), pages 166 - 169, XP002254895, ISSN: 0028-0836 *

Also Published As

Publication number Publication date
WO2005035437A2 (en) 2005-04-21

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