WO2005022664A3 - Production of electronic devices - Google Patents

Production of electronic devices Download PDF

Info

Publication number
WO2005022664A3
WO2005022664A3 PCT/GB2004/003754 GB2004003754W WO2005022664A3 WO 2005022664 A3 WO2005022664 A3 WO 2005022664A3 GB 2004003754 W GB2004003754 W GB 2004003754W WO 2005022664 A3 WO2005022664 A3 WO 2005022664A3
Authority
WO
WIPO (PCT)
Prior art keywords
production
electronic devices
substrate
liquid
deposited material
Prior art date
Application number
PCT/GB2004/003754
Other languages
French (fr)
Other versions
WO2005022664A2 (en
Inventor
Paul Cain
Anoop Menon
Henning Sirringhaus
James D Watts
Tim Von Werne
Thomas M Brown
Original Assignee
Plastic Logic Ltd
Paul Cain
Anoop Menon
Henning Sirringhaus
James D Watts
Tim Von Werne
Thomas M Brown
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB0320491.4A external-priority patent/GB0320491D0/en
Application filed by Plastic Logic Ltd, Paul Cain, Anoop Menon, Henning Sirringhaus, James D Watts, Tim Von Werne, Thomas M Brown filed Critical Plastic Logic Ltd
Priority to US10/570,264 priority Critical patent/US8986793B2/en
Priority to EP04768301A priority patent/EP1665290B1/en
Priority to DE602004006283T priority patent/DE602004006283T2/en
Publication of WO2005022664A2 publication Critical patent/WO2005022664A2/en
Publication of WO2005022664A3 publication Critical patent/WO2005022664A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having a potential-jump barrier or a surface barrier
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/464—Lateral top-gate IGFETs comprising only a single gate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having a potential-jump barrier or a surface barrier
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/466—Lateral bottom-gate IGFETs comprising only a single gate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having a potential-jump barrier or a surface barrier
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/468—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/191—Deposition of organic active material characterised by provisions for the orientation or alignment of the layer to be deposited
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/60—Forming conductive regions or layers, e.g. electrodes

Abstract

A method of producing a metal element of an electronic device on a substrate, including the steps of: forming a mixture of a material comprising metal atoms with a liquid, depositing the material from the liquid mixture onto a substrate, and then irradiating at least part of the deposited material with light to increase the electrical conductivity of the deposited material.
PCT/GB2004/003754 2003-09-02 2004-09-02 Production of electronic devices WO2005022664A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US10/570,264 US8986793B2 (en) 2003-09-02 2004-09-02 Production of electronic devices
EP04768301A EP1665290B1 (en) 2003-09-02 2004-09-02 Production of electronic devices
DE602004006283T DE602004006283T2 (en) 2003-09-02 2004-09-02 MANUFACTURE OF ELECTRONIC COMPONENTS

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GBGB0320491.4A GB0320491D0 (en) 2003-09-02 2003-09-02 Multi-level patterning
GB0320491.4 2003-09-02
GB0329740.5 2003-12-23
GBGB0329740.5A GB0329740D0 (en) 2003-09-02 2003-12-23 Multi-layer patterning

Publications (2)

Publication Number Publication Date
WO2005022664A2 WO2005022664A2 (en) 2005-03-10
WO2005022664A3 true WO2005022664A3 (en) 2005-08-25

Family

ID=34276818

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2004/003754 WO2005022664A2 (en) 2003-09-02 2004-09-02 Production of electronic devices

Country Status (4)

Country Link
EP (2) EP1665290B1 (en)
AT (1) ATE361532T1 (en)
DE (1) DE602004006283T2 (en)
WO (1) WO2005022664A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7846838B2 (en) 2005-07-29 2010-12-07 Polyic Gmbh & Co. Kg Method for producing an electronic component

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7102155B2 (en) 2003-09-04 2006-09-05 Hitachi, Ltd. Electrode substrate, thin film transistor, display device and their production
GB2435717B (en) * 2003-09-04 2008-03-26 Hitachi Ltd Active matrix display device
DE602005025074D1 (en) 2004-12-08 2011-01-13 Samsung Mobile Display Co Ltd Method for producing a conductor structure of a thin-film transistor
GB0427563D0 (en) * 2004-12-16 2005-01-19 Plastic Logic Ltd A method of semiconductor patterning
US7723008B2 (en) * 2005-03-22 2010-05-25 Intel Corporation Photoactive adhesion promoter in a slam
JP2006352083A (en) * 2005-05-18 2006-12-28 Ricoh Co Ltd Organic thin film transistor and active matrix display device
KR100647695B1 (en) 2005-05-27 2006-11-23 삼성에스디아이 주식회사 Otft and fabrication method thereof and flat panel display device with the same
US7655566B2 (en) * 2005-07-27 2010-02-02 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
ITMI20051901A1 (en) * 2005-10-10 2007-04-11 St Microelectronics Srl PROCESS OF MANUFACTURE OF THIN FILM TRANSISTORS IN ORGANIC MATERIAL AND TRANSISTOR
JP5066848B2 (en) * 2006-02-10 2012-11-07 コニカミノルタホールディングス株式会社 Thin film transistor manufacturing method
WO2007110671A2 (en) * 2006-03-29 2007-10-04 Plastic Logic Limited Techniques for device fabrication with self-aligned electrodes
US8105643B2 (en) 2006-05-31 2012-01-31 Cabot Corporation Process for printing features with smaller dimensions
JP5168845B2 (en) 2006-08-07 2013-03-27 株式会社リコー LAMINATED STRUCTURE, ELECTRONIC DEVICE USING LAMINATED STRUCTURE, METHOD FOR MANUFACTURING THE SAME, ELECTRONIC DEVICE ARRAY, AND DISPLAY DEVICE
DE102006047388A1 (en) 2006-10-06 2008-04-17 Polyic Gmbh & Co. Kg Field effect transistor and electrical circuit
WO2008087196A1 (en) * 2007-01-19 2008-07-24 Basf Se Method for the transfer of structural data, and device therefor
GB2466495B (en) 2008-12-23 2013-09-04 Cambridge Display Tech Ltd Method of fabricating a self-aligned top-gate organic transistor
US9076975B2 (en) 2010-04-27 2015-07-07 Xerox Corporation Dielectric composition for thin-film transistors

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998037133A1 (en) * 1997-02-20 1998-08-27 Partnerships Limited, Inc. Low temperature method and compositions for producing electrical conductors
WO2001047045A1 (en) * 1999-12-21 2001-06-28 Plastic Logic Limited Solution processing
WO2002095805A2 (en) * 2001-05-23 2002-11-28 Plastic Logic Limited Laser parrering of devices

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0968537B1 (en) 1997-08-22 2012-05-02 Creator Technology B.V. A method of manufacturing a field-effect transistor substantially consisting of organic materials
US6190831B1 (en) 1998-09-29 2001-02-20 Kodak Polychrome Graphics Llc Processless direct write printing plate having heat sensitive positively-charged polymers and methods of imaging and printing
US6190830B1 (en) 1998-09-29 2001-02-20 Kodak Polychrome Graphics Llc Processless direct write printing plate having heat sensitive crosslinked vinyl polymer with organoonium group and methods of imaging and printing

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998037133A1 (en) * 1997-02-20 1998-08-27 Partnerships Limited, Inc. Low temperature method and compositions for producing electrical conductors
WO2001047045A1 (en) * 1999-12-21 2001-06-28 Plastic Logic Limited Solution processing
WO2002095805A2 (en) * 2001-05-23 2002-11-28 Plastic Logic Limited Laser parrering of devices

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7846838B2 (en) 2005-07-29 2010-12-07 Polyic Gmbh & Co. Kg Method for producing an electronic component

Also Published As

Publication number Publication date
DE602004006283T2 (en) 2007-12-27
DE602004006283D1 (en) 2007-06-14
EP1665290B1 (en) 2007-05-02
EP1665290A2 (en) 2006-06-07
WO2005022664A2 (en) 2005-03-10
ATE361532T1 (en) 2007-05-15
EP2166543A1 (en) 2010-03-24
EP2166543B1 (en) 2011-03-23

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