WO2005010864A1 - Acoustic transducer - Google Patents
Acoustic transducer Download PDFInfo
- Publication number
- WO2005010864A1 WO2005010864A1 PCT/US2004/023141 US2004023141W WO2005010864A1 WO 2005010864 A1 WO2005010864 A1 WO 2005010864A1 US 2004023141 W US2004023141 W US 2004023141W WO 2005010864 A1 WO2005010864 A1 WO 2005010864A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- matching layer
- management system
- acoustic transducer
- fluid
- thermal management
- Prior art date
Links
- 239000000463 material Substances 0.000 claims abstract description 22
- 238000012546 transfer Methods 0.000 claims abstract description 9
- 239000012530 fluid Substances 0.000 claims description 50
- 238000010790 dilution Methods 0.000 claims description 16
- 239000012895 dilution Substances 0.000 claims description 16
- 238000005070 sampling Methods 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 8
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000006260 foam Substances 0.000 claims description 3
- 239000000872 buffer Substances 0.000 description 26
- 239000013078 crystal Substances 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000001816 cooling Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 239000004964 aerogel Substances 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 239000007853 buffer solution Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/004—Mounting transducers, e.g. provided with mechanical moving or orienting device
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
- B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
- B06B1/067—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface which is used as, or combined with, an impedance matching layer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/66—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by measuring frequency, phase shift or propagation time of electromagnetic or other waves, e.g. using ultrasonic flowmeters
- G01F1/667—Arrangements of transducers for ultrasonic flowmeters; Circuits for operating ultrasonic flowmeters
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02836—Flow rate, liquid level
Definitions
- the present invention relates to acoustic transducers, including those used in flow meters.
- Piezoceramic elements are commonly used in acoustic transducers to generate ultrasonic acoustic pulses or continuous wave fields. However, these ceramics lose polarization if exposed to temperatures in excess of half of their Curie point. For commercially available ceramics, this limits the operating temperature of the ceramic to under 200°C. To operate in fluids above this temperature, one method is to provide a buffer or delay line between the piezoceramic element and the fluid (for example, exhaust gas) as shown in Figure 1.
- Figure 1 depicts an acoustic transducer 10.
- FIG. 2 illustrates the exhaust, buffer tip, crystal and ambient temperatures, and the thermal resistences of the external convective boundary layer, buffer, and internal convective boundary layer in a lumped parameter model.
- T crystal T exhaust - ( sT exhaust - T ambient ) ' ⁇ R > BL + Rb ⁇ r ) R ' IjB ⁇ Lr + b(.utitudef.f._er, + R • EBL
- a disadvantage associated with existing buffer systems is that a short buffer has problems when operating with hot fluids, while making the buffer longer requires that the buffer guide the wave front in the desired direction.
- solid buffers fail to effectively guide the acoustic pulse resulting in a dispersive buffer that distorts the ultrasonic pulse and limits the usefulness of the flow meter.
- an acoustic transducer comprising an acoustic pulse generator, an impedance matching layer, and a thermal management system.
- the acoustic transducer is for measuring a property of a fluid.
- the impedance matching layer is between the pulse generator and the fluid.
- the matching layer is formed of a low thermal conductivity material.
- the thermal management system is mounted to the matching layer to transfer heat from the matching layer.
- the thermal management system is formed of a high thermal conductivity material relative to the matching layer.
- the thermal management system is arranged along the matching layer such that substantial heat is transferred to the environment from the thermal management system without excessive temperature increase at the pulse generator.
- the acoustic pulse generator is preferably a piezoceramic element for generating an ultrasonic pulse.
- An impedance matching layer type of buffer is similar to a traditional buffer but has a reduced length to the point where traveling waves are no longer present and the dispersion problems associated with wave guides are not a concern. Put another way, the impedance matching layer is of small enough thickness that standing waves form.
- the pulse generator is configured to operate at a particular frequency and the matching layer has a thickness approximately equal to an odd multiple of the quarter wavelength ( ⁇ /4, 3 ⁇ /4, 5 ⁇ /4, . . .) of sound in the matching layer for the particular frequency of the pulse generator.
- the matching layer thermal conductivity is less than 15 W/(m-K).
- the matching layer thermal conductivity is less than 1 W/(m-K).
- the matching layer may be made of silica, and is preferably made of foam silica. Of course, ceramics or other materials may alternatively be used for the matching layer.
- a metallic sealing layer is not needed and the matching layer may be in direct contact with the fluid which is being measured or have a light anti-reflective surface coating.
- the thermal management system may vary in material and configuration provided that substantial heat is transferred to the environment from the thermal management system without excessive temperature increase at the pulse generator.
- the thermal management system thermal conductivity is at least 15 WV( ⁇ rK). More preferably, the thermal management system thermal conductivity is at least 100 W/(m-K).
- the preferred thermal management system includes a plurality of fins mounted to the holder to dissipate heat low on the body of the matcher. During operation, at least a portion of the matching layer sides and the matching layer tip extend into the fluid which is being measured.
- the thermal management system is arranged to insulate the portion of the matching layer sides from heat from the fluid while leaving the tip of the matching layer in contact with the fluid.
- an acoustic transducer is provided in combination with an apparatus including a conduit through which a fluid flows.
- the apparatus may be an exhaust gas sampling or testing apparatus.
- a sampling system comprising a fluid inlet for receiving a fluid, a dilution inlet for receiving a dilution gas, a mixing section for mixing at least a portion of the fluid with the dilution gas, and a collection section for collecting a sample of the mixture.
- the system further comprises a flow meter for measuring a flow related to the sampling system.
- the flow meter includes an acoustic transducer for measuring the flow.
- the transducer employs various features described above.
- the flow meter includes a pair of acoustic transducers arranged in an opposed fashion in a conduit through which fluid flows for measuring the flow.
- a sampling system comprising a sample line for sampling a fluid from a main conduit, and a flow meter for measuring a flow of the fluid through the main conduit.
- the flow meter includes an acoustic transducer for measuring the flow.
- the system further comprises a dilution inlet for receiving a dilution gas, a mixing section for mixing the fluid flow from the sample line with the dilution gas at a generally fixed ratio, and a collection section for sampling the mixture.
- the mixture is sampled at a rate generally proportional to the flow of the fluid through the main conduit.
- the transducer employs various features described above.
- the flow meter includes a pair of acoustic transducers arranged in an opposed fashion in the main conduit.
- acoustic transducer including a heat shielded acoustic matching coupler with integral cooling wherein the matching layer has a thermal management system mounted thereto such that substantial heat is transferred to the environment from the thermal management system without excessive temperature increase at the pulse generator.
- FIGURE 1 illustrates a prior art use of a thermal buffer
- FIGURE 2 illustrates an electrical equivalent circuit of the thermal buffer arrangement shown in Figure 1;
- FIGURE 3 illustrates an acoustic transducer in accordance with the present invention
- FIGURE 4 illustrates an electrical equivalent circuit of the acoustic transducer arrangement shown in Figure 3;
- FIGURE 5 illustrates a bag mini-diluter sampling system in accordance with the present invention.
- FIGURE 6 illustrates the flow meter in the system of Figure 5.
- FIG. 3 illustrates an acoustic transducer 30 for measuring a property of a fluid.
- Transducer 30 includes piezoelectric element 32, and an impedance matching layer type buffer 34 which extends through wall 36 of a conduit through which the fluid flows.
- the conduit is part of an apparatus in which the acoustic transducer 30 is used.
- Impedance matching layer 34 is made of a light weight, low thermal conductivity material and is preferably foam silica.
- the impedance matching layer is of small enough thickness that standing waves form. The thickness should be an odd multiple of the quarter wavelength of sound in the matching layer for the particular frequency of the pulse generator.
- Transducer 30 also includes a thermal management system composed of a metal sleeve 37 over the matching layer 34 and piezoceramic element 32.
- Sleeve 37 extends through wall 36 and a metal shield 38 with a small air gap between it and the matching layer 34 forms a high contact resistance in comparison to convective thermal boundary layer 40.
- the metal shield 38 also protects the buffer during installation and operation.
- the buffer tip is sealed to the metal shield 38 using a fired glass insert 43.
- the matching layer 34 may be coated with an anti-reflective coating 45 of an ultra-light material such as an aerogel to increase signal quality.
- Fins 42 are mounted to the sleeve 37 which holds piezoceramic element 32 to dissipate heat from low on the body of the matching layer 34.
- An epoxy seal bonds the sleeve 37 to the matching layer buffer 34 with minimal contact resistance to let heat flow freely through fins 42 of the thermal management system.
- FIG. 4 with an electrical equivalent circuit illustrates the exhaust, buffer tip, crystal and ambient temperatures, and the thermal resistences of the buffer tip convective boundary layer 40, buffer 34, and fins 42.
- the buffer resistance is shown with part of the resistance before the fins 42 and part of the resistance after the fins 42 to model the dissipation of heat from low on the body of matching layer 34.
- the matching layer is formed of a low thermal conductivity material and the thermal management system is formed of a high thermal conductivity material and is arranged along the matching layer such that substantial heat is transferred to the environment from fins 42 without excessive temperature increase at piezoceramic element 32. That is, many variations may be made to the design while still achieving a suitable thermal management solution provided that the buffer remains small enough to function as an impedance matching layer and the thermal management system is mounted low enough on the matching layer.
- the matching layer materials and properties may vary depending on the configuration of other aspects of the thermal management system, for example, depending on the fin surface area.
- FIG. 5 illustrates a bag mini-diluter sampling system at 60.
- Sampling system 60 includes a main conduit having an inlet 62 for receiving exhaust.
- Flow meter 64 measures the flow of fluid through the main conduit, and total exhaust volume is accumulated.
- Flow meter 64 provides a direct exhaust flow measurement signal, and includes at least one acoustic transducer of the present invention.
- a blower 66 may assist fluid flow through the conduit.
- a sample line 68 samples exhaust from the main conduit.
- a dilution inlet 70 receives a dilution gas.
- Fixed flow control 72 and fixed flow control 74 (mass flow controllers or critical flow Venturis) control the flow of dilution gas and sampled exhaust gas, respectively, to provide a generally fixed ratio at the mixing section.
- Pump 76 pumps the mixture of the dilution gas and the exhaust gas sample for eventual collection in bags 82.
- Proportional flow device 78 provides a flow to sample collecting bags 82 that is proportional to the flow through the main conduit. Accordingly, bypass 80 is provided to allow some of the mixture to bypass the collections.
- Figure 6 illustrates flow meter 64 in greater detail showing a pair of acoustic transducers 30 arranged in an opposed fashion across the conduit. While embodiments of the invention have been illustrated and described, it is not intended that these embodiments illustrate and describe all possible forms of the invention. Rather, the words used in the specification are words of description rather than limitation, and it is understood that various changes may be made without departing from the spirit and scope of the invention.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Multimedia (AREA)
- Mechanical Engineering (AREA)
- Electromagnetism (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Measuring Volume Flow (AREA)
- Thermotherapy And Cooling Therapy Devices (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006521159A JP4704337B2 (en) | 2003-07-21 | 2004-07-20 | Acoustic transducer |
DE112004001360T DE112004001360T5 (en) | 2003-07-21 | 2004-07-20 | Acoustic transducer |
GB0601055A GB2419947B (en) | 2003-07-21 | 2004-07-20 | Acoustic Transducer |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/623,997 | 2003-07-21 | ||
US10/623,997 US7062972B2 (en) | 2003-07-21 | 2003-07-21 | Acoustic transducer |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2005010864A1 true WO2005010864A1 (en) | 2005-02-03 |
Family
ID=34079902
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2004/023141 WO2005010864A1 (en) | 2003-07-21 | 2004-07-20 | Acoustic transducer |
Country Status (5)
Country | Link |
---|---|
US (1) | US7062972B2 (en) |
JP (1) | JP4704337B2 (en) |
DE (1) | DE112004001360T5 (en) |
GB (1) | GB2419947B (en) |
WO (1) | WO2005010864A1 (en) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007025068A2 (en) * | 2005-08-26 | 2007-03-01 | Ricciardi Jonathan J | Method and apparatus for optimizing aerosol generation with ultrasonic transducers |
US8343100B2 (en) | 2006-03-29 | 2013-01-01 | Novartis Ag | Surgical system having a non-invasive flow sensor |
US8006570B2 (en) * | 2006-03-29 | 2011-08-30 | Alcon, Inc. | Non-invasive flow measurement |
JP5287513B2 (en) * | 2009-05-29 | 2013-09-11 | 株式会社デンソー | Ultrasonic flow meter |
DE102009039633A1 (en) * | 2009-09-01 | 2011-03-03 | Truttenbach Asset Management Gbr (Vertretungsberechtigter Gesellschafter: Andreas Truttenbach, 77866 Rheinau) | Ultrasonic flow rate measuring device for measuring speed of e.g. gas, to measure acoustic waves, has housing attached to wall at its end region and comprising housing parts formed from different materials with different acoustic impedances |
JP2015112326A (en) * | 2013-12-12 | 2015-06-22 | キヤノン株式会社 | Probe and subject information acquisition device |
CN108519440B (en) * | 2018-04-09 | 2024-07-26 | 河北珠峰仪器仪表设备有限公司 | Ultrasonic measurement probe suitable for online detection at high temperature |
CN109201439A (en) * | 2018-08-06 | 2019-01-15 | 东南大学 | A kind of medical ultrasonic transducer impedance matching methods |
CN109596183B (en) * | 2018-12-26 | 2024-04-05 | 无锡市宇超电子有限公司 | Flow transducer |
US11181406B2 (en) | 2019-12-03 | 2021-11-23 | Woodward, Inc. | Ultrasonic mass fuel flow meter |
US11307069B2 (en) | 2020-03-06 | 2022-04-19 | Woodward, Inc. | Ultrasonic flow meter in a bypass channel coupled in parallel with a flow tube |
US11668818B2 (en) | 2020-08-07 | 2023-06-06 | Woodward, Inc. | Ultrasonic position sensor |
WO2022032157A1 (en) | 2020-08-07 | 2022-02-10 | Woodward, Inc. | Ultrasonic flow meter flow control |
EP4308888A1 (en) | 2021-03-17 | 2024-01-24 | Woodward, Inc. | Ultrasonic mass fuel flow meter |
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US4297607A (en) * | 1980-04-25 | 1981-10-27 | Panametrics, Inc. | Sealed, matched piezoelectric transducer |
JPH02127897A (en) * | 1988-11-08 | 1990-05-16 | Murata Mfg Co Ltd | Transducer for atmospheric ultrasonic wave |
JPH02132327A (en) * | 1988-11-14 | 1990-05-21 | Toshiba Corp | Ultrasonic sensor for high temperature |
US5355048A (en) * | 1993-07-21 | 1994-10-11 | Fsi International, Inc. | Megasonic transducer for cleaning substrate surfaces |
US5756360A (en) * | 1995-09-29 | 1998-05-26 | Horiba Instruments Inc. | Method and apparatus for providing diluted gas to exhaust emission analyzer |
US6481493B1 (en) * | 1998-08-04 | 2002-11-19 | Dr. Heilscher Gmbh | Arrangement for heat discharge, particularly for ultrasonic transducers with high performance |
DE10151992A1 (en) * | 2001-10-22 | 2003-05-08 | Kunstoff Zentrum In Leipzig Ge | System for cooling high frequency vibration elements has multiple bores through which the cooling medium is conducted to the vibrator |
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- 2003-07-21 US US10/623,997 patent/US7062972B2/en not_active Expired - Fee Related
-
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- 2004-07-20 DE DE112004001360T patent/DE112004001360T5/en not_active Withdrawn
- 2004-07-20 JP JP2006521159A patent/JP4704337B2/en not_active Expired - Fee Related
- 2004-07-20 GB GB0601055A patent/GB2419947B/en not_active Expired - Fee Related
- 2004-07-20 WO PCT/US2004/023141 patent/WO2005010864A1/en active Application Filing
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US4297607A (en) * | 1980-04-25 | 1981-10-27 | Panametrics, Inc. | Sealed, matched piezoelectric transducer |
JPH02127897A (en) * | 1988-11-08 | 1990-05-16 | Murata Mfg Co Ltd | Transducer for atmospheric ultrasonic wave |
JPH02132327A (en) * | 1988-11-14 | 1990-05-21 | Toshiba Corp | Ultrasonic sensor for high temperature |
US5355048A (en) * | 1993-07-21 | 1994-10-11 | Fsi International, Inc. | Megasonic transducer for cleaning substrate surfaces |
US5756360A (en) * | 1995-09-29 | 1998-05-26 | Horiba Instruments Inc. | Method and apparatus for providing diluted gas to exhaust emission analyzer |
US6481493B1 (en) * | 1998-08-04 | 2002-11-19 | Dr. Heilscher Gmbh | Arrangement for heat discharge, particularly for ultrasonic transducers with high performance |
DE10151992A1 (en) * | 2001-10-22 | 2003-05-08 | Kunstoff Zentrum In Leipzig Ge | System for cooling high frequency vibration elements has multiple bores through which the cooling medium is conducted to the vibrator |
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PATENT ABSTRACTS OF JAPAN vol. 0143, no. 62 (E - 0960) 6 August 1990 (1990-08-06) * |
Also Published As
Publication number | Publication date |
---|---|
US20050016281A1 (en) | 2005-01-27 |
GB2419947B (en) | 2006-10-18 |
DE112004001360T5 (en) | 2006-08-10 |
GB0601055D0 (en) | 2006-03-01 |
GB2419947A (en) | 2006-05-10 |
JP2006528356A (en) | 2006-12-14 |
JP4704337B2 (en) | 2011-06-15 |
US7062972B2 (en) | 2006-06-20 |
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