WO2005009680A2 - Apparatus for measuring the crushing strength of micron superabrasives - Google Patents
Apparatus for measuring the crushing strength of micron superabrasives Download PDFInfo
- Publication number
- WO2005009680A2 WO2005009680A2 PCT/US2004/023116 US2004023116W WO2005009680A2 WO 2005009680 A2 WO2005009680 A2 WO 2005009680A2 US 2004023116 W US2004023116 W US 2004023116W WO 2005009680 A2 WO2005009680 A2 WO 2005009680A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- abrasive
- piston
- cup
- particles
- crushing
- Prior art date
Links
- 239000002245 particle Substances 0.000 claims abstract description 73
- 238000000034 method Methods 0.000 claims abstract description 57
- 230000008569 process Effects 0.000 claims abstract description 32
- 238000009826 distribution Methods 0.000 claims abstract description 29
- 238000003825 pressing Methods 0.000 claims abstract description 4
- 229910003460 diamond Inorganic materials 0.000 claims description 27
- 239000010432 diamond Substances 0.000 claims description 27
- 230000001186 cumulative effect Effects 0.000 claims description 7
- 238000001000 micrograph Methods 0.000 claims description 4
- 238000000445 field-emission scanning electron microscopy Methods 0.000 claims description 3
- 239000000843 powder Substances 0.000 description 67
- 206010017076 Fracture Diseases 0.000 description 32
- 208000010392 Bone Fractures Diseases 0.000 description 29
- 239000000047 product Substances 0.000 description 23
- 238000012360 testing method Methods 0.000 description 22
- 239000013078 crystal Substances 0.000 description 13
- 238000002474 experimental method Methods 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 9
- 238000003786 synthesis reaction Methods 0.000 description 9
- 230000009643 growth defect Effects 0.000 description 7
- 230000003068 static effect Effects 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 5
- 230000006911 nucleation Effects 0.000 description 5
- 238000010899 nucleation Methods 0.000 description 5
- 230000035882 stress Effects 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 4
- 238000012512 characterization method Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000003197 catalytic effect Effects 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 239000010419 fine particle Substances 0.000 description 3
- 239000012634 fragment Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
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- 239000002184 metal Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
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- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000004626 scanning electron microscopy Methods 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 101100327917 Caenorhabditis elegans chup-1 gene Proteins 0.000 description 1
- RYXPMWYHEBGTRV-UHFFFAOYSA-N Omeprazole sodium Chemical compound [Na+].N=1C2=CC(OC)=CC=C2[N-]C=1S(=O)CC1=NC=C(C)C(OC)=C1C RYXPMWYHEBGTRV-UHFFFAOYSA-N 0.000 description 1
- 208000013201 Stress fracture Diseases 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000002775 capsule Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/40—Investigating hardness or rebound hardness
- G01N3/48—Investigating hardness or rebound hardness by performing impressions under impulsive load by indentors, e.g. falling ball
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/24—Investigating strength properties of solid materials by application of mechanical stress by applying steady shearing forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/56—Investigating resistance to wear or abrasion
- G01N3/565—Investigating resistance to wear or abrasion of granular or particulate material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0091—Powders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N2015/0096—Investigating consistence of powders, dustability, dustiness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0058—Kind of property studied
- G01N2203/0076—Hardness, compressibility or resistance to crushing
- G01N2203/0087—Resistance to crushing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/026—Specifications of the specimen
- G01N2203/0284—Bulk material, e.g. powders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/40—Grinding-materials
Definitions
- the present invention relates to the c haracterization of micron superabrasives with respect to mechanical strength and fracture characteristics.
- the present invention has particular applicability in measuring the crushing strength of micron superabrasive powders used; e.g., in lapping processes.
- micron superabrasive powders defined as diamond and cubic boron nitride (CBN) powders
- CBN cubic boron nitride
- the fracture mechanism of superabrasive p articles is controlled by their crystalline structure (i.e. monocrystalline vs. polycrystalline) and by the nature and concentration of crystal growth defects (i.e. pre-existing fractures, voids, mechanical stresses and impurities). Consistent abrasive performance is achieved only by employing micron superabrasive powders whose properties are precisely defined and controlled.
- micron superabrasive powder products be designed and manufactured to possess a specific set of chemical and physical properties that are responsible for their performance in a particular application. It is equally important that the end user understand the chemical and physical properties associated with different micron superabrasive powder types/products, and make an informed decision to select the product that performs best for their application. Whether used as abrasive or non-abrasive (i.e. feedstock for PCD manufacturing),
- WDC99 941903-1.034337.0408 mechanical strength and fracture characteristics are primarily responsible for the performance of a micron superabrasive powder type/product.
- sub-sieve powders powders that are smaller than 400 mesh
- micron powders in the size range from 40 microns (approx. 400 mesh) to 80 microns (approx. 200 mesh)
- fine mesh sizes overlap with coarse micron-sizes.
- the fracture mechanism of micron superabrasive particles plays a determinant role in any abrasive process. During abrasive action, the edges and points of micron superabrasive particles tend to dull.
- micron superabrasive particles Progressive dulling of the particles leads to increased mechanical and thermal stresses at the abrasive-workpiece interface. If allowed to continue, this process leads to catastrophic failure of the micron superabrasive particles and workpiece damage. To avoid catastrophic failure, the micron superabrasive particles must be able to microfracture under severe mechanical stresses and develop new fresh cutting edges and points in a so-called "self sharpening" mechanism.
- the fracture mechanism of micron superabrasive particles is controlled by crystalline structure (i.e. monocrystalline vs. polycrystalline) and by the nature and concentration of crystal growth defects (i.e. pre-existing fractures, voids, mechanical stresses and impurities).
- Micron superabrasive powders represent a by-product of the diamond or CBN synthesis process and are produced by milling of mesh size powders. Consequently, some of the characteristics of the starting mesh powders (so-called diamond or CBN feeds), are mirrored in the resulting micron superabrasive powders.
- the intrinsic properties of the diamond or CBN crystal are determined by the nature (static vs. dynamic) and particularities of the HPHT synthesis process.
- the kinetics of the catalytic HPHT synthesis process i.e., nucleation and growth rates
- thermodynamic parameters - pressure and temperature are controlled by thermodynamic parameters - pressure and temperature.
- the nucleation and growth rates control the nature and amount of crystal growth defects (pre-existing fractures, voids, mechanical stresses, impurities) which, in turn, are responsible for the mechanical strength of the crystal.
- micron superabrasive powders The characterization of micron superabrasive powders is a difficult and complex task, involving the evaluation of the properties of a very large number of particles. There are no standard techniques in the prior art for measuring the m echanical strength and/or fracture characteristics of micron superabrasive powders, by either static or dynamic methods. Instead, the mechanical strength and fracture characteristics of micron superabrasive powders are controlled indirectly, by controlling the feed type and quality (i.e., metal bond diamond/CBN using a belt press or cubic press synthesis process; or resin bond diamond/CBN using a belt press or cubic press or opposed anvils press synthesis process).
- the feed type and quality i.e., metal bond diamond/CBN using a belt press or cubic press synthesis process; or resin bond diamond/CBN using a belt press or cubic press or opposed anvils press synthesis process.
- the concentration of residual crystal growth defects, as well as the particle shape and surface texture of the resulting micron superabrasive powders can be significantly modified through a number of mechanical, chemical and thermal processes that are incorporated into the micronizing process.
- An advantage of the present invention is a method and apparatus for the characterization of micron superabrasive powder types and/or products with respect to mechanical strength and fracture characteristics based on an evaluation of their fracture strength and fracture characteristics (mode of fracture) when subjected to mechanical forces similar to those encountered in lapping processes.
- WDC99 941903-1.034337.0408 According to the present invention, the foregoing and other advantages are achieved in part by a method for measuring the crushing strength of an abrasive comprising particles, used in a lapping process.
- the method comprises determining an initial particle size distribution for the particles; subjecting the abrasive to a crushing force approximately equal to that of the lapping process; detennining a post-crushing particle size distribution for the particles; and comparing the initial and post-crushing particle size distributions.
- Another aspect of the present invention is an apparatus for measuring the crushing strength of an abrasive, comprising particles, used in a lapping process.
- the apparatus comprises a cup for holding the abrasive; a first motor for rotating the cup in a first direction; a piston having a face for rotatably fitting within the cup and contacting the abrasive; a second motor for rotating the piston in a second direction opposite the first direction; and a press for pressing the piston against the abrasive and crushing the particles while the first and second motors are rotating.
- Figure 1 schematically illustrates an apparatus for measuring crushing strength of micron superabrasives in accordance with an embodiment of the present invention.
- Figure 2 is a cross-sectional view of a portion of the apparatus of Fig. 1.
- Figures 3A and 3B are graphs showing particle size distribution (PSD) for a superabrasive before and after crushing, respectively.
- Figures 4-6 are graphs showing the crushing strengths o f s everal superabrasives as obtained using the present invention.
- Figure 7 is a cross-sectional view of a portion of the apparatus of Fig. 1.
- the present invention represents a breakthrough ,in the characterization of micron superabrasives (i.e., diamond and CBN powders) with respect to fracture strength, a property that is ultimately responsible for their performance in most application areas.
- the inventive apparatus measures the fracture strength of micron superabrasives when subjected to crushing action under controlled conditions that replicate lapping process conditions.
- the present invention includes an apparatus and a measurement technique to characterize micron superabrasive powder types or products with respect to their fracture strength, expressed as crushing strength or resistance to crushing.
- the measurement technique is based on the evaluation of the ratio of particles that resisted crushing to the initial number of particles (before crushing) in a given micron superabrasive powder, when subjected to mechanical forces similar to those encountered in the lapping process.
- Testing machine 100 uses lapping process kinematics to crush micron superabrasive powders under controlled conditions, in a size range down to 10 microns (mean size of the particle size distribution).
- a capsule 110 for crushing the superabrasive powders under test c omprises a steel cup 1 15 and a steel piston 120 which rotate independently in opposite directions at controlled speeds by gearmotors 135, 140, the speeds being measured in revolutions per minute (RPM).
- a linear actuator 125 such as a conventional double end hollow rod pneumatic or hydraulic cylinder, or a conventional servo-driven actuator, is connected to piston 120 to deliver the desired loads (e.g., 500 lbs or less) to cup 115, which is rotatably mounted to a spindle 145.
- Spindle 145 is connected to gearmotor 140 via a belt 150, and piston 120 is rotatably coupled to spindle 170, which is connected to gearmotor 135 via chain 175.
- Gearmotor 135 is rigidly mounted to an anti- rotation assembly 155.
- Piston 120, linear actuator 125, anti-rotation assembly 155, gearmotor 135 and spindle 170 are all rigidly mounted to a platform 160.
- Cup 115, spindle 145, gearmotor 140 and anti-rotation assembly 155 are all rigidly supported by a base 165. Referring now to Fig. 2, both the face 120a of piston 120 and the bottom 115a of cup
- PCD polycrystalline diamond compact
- a known amount (e.g., one carat) of micron superabrasive powder is charged into cup 115 on top of PCD disc 130 to form a circular layer of uniform thickness, and the crushing cycle is started.
- piston 120 is lowered into cup 115 until it touches the superabrasive powder layer.
- the desired load is applied.
- both the cup 115 and the piston 120 are rotated simultaneously in opposite directions at the desired speeds, for the entire duration of the crushing cycle.
- the rotation of cup 115 and piston 120 is simultaneously stopped, the load is removed and the piston 120 is lifted.
- On-size particles in the starting powder (OSS): The cumulative percentiles of particles between 50% and 95% - of the frequency distribution, in the starting superabrasive powder (prior to crushing) is the OSS,
- Crushing strength is the ratio of the on-size particles in the resulting powder (particles that resisted crashing), to the on-size particles in the starting powder
- Crushing strength index (CSI) OSR/OSS x l00
- the distribution of the "on-size" particles in the as-crushed powders was plotted for 10-20 ⁇ MA subjected to static loading (compression). The data showed that under static compression and for the loads used, the micron superabrasive powder does not exhibit any significant (measurable) crushing.
- the crushing strength data indicate that, under the test conditions employed, the metal bond diamond type/product synthesized via "belt press process” (MA), exhibits higher crashing strength than the resin bond diamond type/product synthesized via "opposed anvil press” process (RA), over the entire size range investigated.
- the metal bond diamond type/product synthesized via "cubic press process” (IG) shows inconsistent crashing strength over the same size range and under same test conditions. While for 30 microns and 10 microns powders the crushing strength of IG is similar to MA, the crashing strength of the 15 microns IG powder is much lower than that of MA and almost equal to that ofRA.
- PSD charts can be produced of the fine particles fraction generated during crashing strength tests of the micron
- SEM and FESEM micrographs may be taken. Distinctive fracture characteristics may be discerned b etween micron superabrasive powder types/products from such pre- and post-crashing micrographs.
- crashing experiments using the present invention have shown the fracture mode o f MA diamond is predominantly microchipping with the generation of mostly fine diamond fragments.
- MA diamond particles retain most of their integrity with the resulting particles showing a tendency towards dulling of edges and corners. The resulting particle shapes are more round.
- the fracture mode of RA diamond is predominantly microfracturing with the generation of a wide range of diamond fragments.
- RA diamond particles show a tendency toward retaining their sharpness as opposed to integrity - the resulting particle shapes are irregular with sharp edges and points.
- 30 microns and 10 microns IG diamond powders show more microchipping than MA (larger amount of finer diamond fragments).
- the 15 microns IG diamond powder exhibits a rather peculiar fracture mode with a combination of microchipping and microfracturing, indicating that IG diamond powder tested is a rather inconsistent type/product.
- sub-sieve size a common parameter
- the present invention enables producers to measure the fracture strength of different micron superabrasive powders (diamond and CBN) to better control the mechanical strength of their micron superabrasive types/products.
- the present invention also enables end users to make an informed selection of a micron type/product that performs best in their particular application, whether in loose abrasive, slurry, compound or bonded tool form, since mechanical strength and fracture DC99 941903-1.034337.0408 characteristics are the properties that are responsible for their performance in most applications.
- the present invention can be practiced by employing conventional materials, methodology and equipment. Accordingly, the details of such materials, equipment and methodology are not set forth herein in detail.
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- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
- Crushing And Grinding (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/565,123 US7275446B2 (en) | 2003-07-23 | 2004-07-20 | Apparatus for measuring the crushing strength of micron superabrasives |
JP2006521155A JP4355339B2 (en) | 2003-07-23 | 2004-07-20 | A device for measuring the crushing strength of micron superabrasive grains |
EP04778554.8A EP1646857B1 (en) | 2003-07-23 | 2004-07-20 | Apparatus for measuring the crushing strength of micron superabrasives |
HK07100390.9A HK1095174A1 (en) | 2003-07-23 | 2007-01-11 | Apparatus for measuring the crushing strength of micron superabrasives |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US48911103P | 2003-07-23 | 2003-07-23 | |
US60/489,111 | 2003-07-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005009680A2 true WO2005009680A2 (en) | 2005-02-03 |
WO2005009680A3 WO2005009680A3 (en) | 2005-07-21 |
Family
ID=34102823
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2004/023116 WO2005009680A2 (en) | 2003-07-23 | 2004-07-20 | Apparatus for measuring the crushing strength of micron superabrasives |
Country Status (6)
Country | Link |
---|---|
US (1) | US7275446B2 (en) |
EP (1) | EP1646857B1 (en) |
JP (1) | JP4355339B2 (en) |
CN (1) | CN100552418C (en) |
HK (1) | HK1095174A1 (en) |
WO (1) | WO2005009680A2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2515388A (en) * | 2013-04-30 | 2014-12-24 | Element Six Ltd | Tester apparatus for super-abrasive grains |
CN111037444A (en) * | 2019-12-23 | 2020-04-21 | 北京迪蒙吉意超硬材料技术有限公司 | Polycrystalline diamond compact surface polishing machine with self-adaptive temperature and pressure |
Families Citing this family (13)
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DK1694570T3 (en) | 2003-12-19 | 2011-07-25 | Chep Technology Pty Ltd | Apparatus and method for automated pallet inspection |
CN101344469B (en) * | 2008-05-14 | 2010-12-15 | 中国科学技术大学 | Particle sludge intensity measuring instrument and method |
US8734753B2 (en) | 2010-12-30 | 2014-05-27 | Engis Corporation | Surface etched diamond particles and method for etching the surface of diamond particles |
US10101263B1 (en) * | 2013-12-06 | 2018-10-16 | Us Synthetic Corporation | Methods for evaluating superabrasive elements |
KR102009909B1 (en) | 2015-10-07 | 2019-08-21 | 주식회사 엘지화학 | Measuring method of rupture strength of a superabsorbent resin particle |
US10739238B2 (en) * | 2015-10-15 | 2020-08-11 | SimSAGe Pty Ltd. | Apparatus and method for determining the hardness of a granular material |
CN110967248B (en) * | 2019-11-06 | 2023-03-03 | 英国微力测量有限公司 | Microparticle strength measuring instrument and measuring method |
TW202124261A (en) * | 2019-11-21 | 2021-07-01 | 日商電化股份有限公司 | Method for adjusting particle crushing strength of boron nitride powder, boron nitride powder and method for producing same |
US11346756B2 (en) | 2020-01-02 | 2022-05-31 | SipChem Sahara International Petrochemical Company JSC | Bulk crush strength test apparatus |
JP7351415B2 (en) * | 2020-05-26 | 2023-09-27 | 日本電信電話株式会社 | Particle size distribution measurement method and device |
CN112781985B (en) * | 2020-12-29 | 2024-09-03 | 宁波杉杉新材料科技有限公司 | Method for testing bonding strength of secondary particles |
CN114166628B (en) * | 2021-11-24 | 2024-03-15 | 湖北工程学院 | Method for determining relative crushing rate of calcareous sand under different stress paths |
CN117233023B (en) * | 2023-11-13 | 2024-01-26 | 张家口原轼新型材料股份有限公司 | Diamond wire saw wear resistance detection device and detection method |
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US2224248A (en) * | 1939-07-10 | 1940-12-10 | Robert J Blum | Apparatus for testing the crush strength of paper |
US2518959A (en) * | 1948-07-21 | 1950-08-15 | Perkins & Son Inc B F | Apparatus for testing the crush strength of paper |
US3713592A (en) * | 1970-10-01 | 1973-01-30 | H Beike | Process and apparatus for the fine comminution of solids |
US3831437A (en) * | 1973-01-11 | 1974-08-27 | Powers Manufacturing | Apparatus for squeeze testing containers |
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US4054050A (en) * | 1976-06-01 | 1977-10-18 | Reid Luther J | Apparatus for measuring the crush strength of solid particles |
SU1073616A1 (en) * | 1982-07-02 | 1984-02-15 | Всесоюзный Научно-Исследовательский И Проектный Институт Алюминиевой,Магниевой И Электродной Промышленности | Coke charge mechanical strength determination method |
US4581253A (en) * | 1984-12-07 | 1986-04-08 | Acme Resin Corporation | Process for preparing pre-cured proppant charge |
JP2775538B2 (en) * | 1991-11-14 | 1998-07-16 | 住友重機械工業株式会社 | Forming simulation method and apparatus |
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EP1201607B1 (en) * | 1999-05-28 | 2014-07-30 | Hitachi Chemical Company, Ltd. | Cerium oxide abrasive, method for polishing substrate using the same and method for manufacturing semiconductor device |
-
2004
- 2004-07-20 WO PCT/US2004/023116 patent/WO2005009680A2/en active Application Filing
- 2004-07-20 JP JP2006521155A patent/JP4355339B2/en not_active Expired - Fee Related
- 2004-07-20 EP EP04778554.8A patent/EP1646857B1/en not_active Expired - Lifetime
- 2004-07-20 CN CNB200480021271XA patent/CN100552418C/en not_active Expired - Fee Related
- 2004-07-20 US US10/565,123 patent/US7275446B2/en active Active
-
2007
- 2007-01-11 HK HK07100390.9A patent/HK1095174A1/en not_active IP Right Cessation
Non-Patent Citations (2)
Title |
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None |
See also references of EP1646857A4 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2515388A (en) * | 2013-04-30 | 2014-12-24 | Element Six Ltd | Tester apparatus for super-abrasive grains |
GB2515388B (en) * | 2013-04-30 | 2015-07-01 | Element Six Ltd | Tester apparatus for super-abrasive grains |
CN111037444A (en) * | 2019-12-23 | 2020-04-21 | 北京迪蒙吉意超硬材料技术有限公司 | Polycrystalline diamond compact surface polishing machine with self-adaptive temperature and pressure |
Also Published As
Publication number | Publication date |
---|---|
JP4355339B2 (en) | 2009-10-28 |
WO2005009680A3 (en) | 2005-07-21 |
JP2006528355A (en) | 2006-12-14 |
US20060174714A1 (en) | 2006-08-10 |
EP1646857A4 (en) | 2011-11-30 |
HK1095174A1 (en) | 2007-04-27 |
EP1646857B1 (en) | 2018-04-11 |
CN1826516A (en) | 2006-08-30 |
CN100552418C (en) | 2009-10-21 |
EP1646857A2 (en) | 2006-04-19 |
US7275446B2 (en) | 2007-10-02 |
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