WO2004081991A3 - Micro parallel kinematic mechanism design and fabrication - Google Patents

Micro parallel kinematic mechanism design and fabrication Download PDF

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Publication number
WO2004081991A3
WO2004081991A3 PCT/US2004/007578 US2004007578W WO2004081991A3 WO 2004081991 A3 WO2004081991 A3 WO 2004081991A3 US 2004007578 W US2004007578 W US 2004007578W WO 2004081991 A3 WO2004081991 A3 WO 2004081991A3
Authority
WO
WIPO (PCT)
Prior art keywords
micro
link mechanism
micro parallel
platform
fabrication
Prior art date
Application number
PCT/US2004/007578
Other languages
French (fr)
Other versions
WO2004081991A2 (en
Inventor
Jong-I Mou
Chi-Te Chin
Original Assignee
Univ Arizona
Jong-I Mou
Chi-Te Chin
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Arizona, Jong-I Mou, Chi-Te Chin filed Critical Univ Arizona
Priority to US10/548,852 priority Critical patent/US20070090722A1/en
Publication of WO2004081991A2 publication Critical patent/WO2004081991A2/en
Publication of WO2004081991A3 publication Critical patent/WO2004081991A3/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B5/00—Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)

Abstract

A planar micro parallel-link mechanism that provides fine planar motion to a platform (14) in two translation directions and one rotation direction using comb-drive actuators (18) with gear chain (16) systems coupled to rack-and-pinions (36) and struts (46). The micro parallel-link mechanism has a large operating envelope and can be fabricated using surface micromachining techniques. The kinematic and dynamic analyses of the micro parallel-link mechanism are integrated with closed-loop control system to monitor and supervise the position and velocity of the micro mechanism with three degree-of freedom motions. Methods of depositing and building miniaturized tools and parts on the platform are also disclosed to provide the basic building block for a number of products applicable for nano technology, sensor, actuators, and biotechnology applications.
PCT/US2004/007578 2003-03-11 2004-03-11 Micro parallel kinematic mechanism design and fabrication WO2004081991A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US10/548,852 US20070090722A1 (en) 2004-03-11 2004-03-11 Micro parallel kinematic mechanism design and fabrication

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US60/432,886 2002-11-05
US43288603P 2003-03-11 2003-03-11

Publications (2)

Publication Number Publication Date
WO2004081991A2 WO2004081991A2 (en) 2004-09-23
WO2004081991A3 true WO2004081991A3 (en) 2005-03-03

Family

ID=32990543

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/007578 WO2004081991A2 (en) 2003-03-11 2004-03-11 Micro parallel kinematic mechanism design and fabrication

Country Status (1)

Country Link
WO (1) WO2004081991A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6960849B1 (en) * 2003-03-31 2005-11-01 Sandia Corporation Three-dimensional microelectromechanical tilting platform operated by gear-driven racks
WO2008121845A2 (en) * 2007-03-29 2008-10-09 The University Of Utah Research Foundation Micro-deployable devices and systems

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5631514A (en) * 1994-06-09 1997-05-20 The United States Of America As Represented By The United States Department Of Energy Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process
US5955801A (en) * 1997-12-01 1999-09-21 Sandia Corporation Microfabricated microengine with constant rotation rate
US5990473A (en) * 1998-02-04 1999-11-23 Sandia Corporation Apparatus and method for sensing motion in a microelectro-mechanical system
US5994801A (en) * 1998-08-12 1999-11-30 Sandia Corporation Microelectromechanical gyroscope
US6082208A (en) * 1998-04-01 2000-07-04 Sandia Corporation Method for fabricating five-level microelectromechanical structures and microelectromechanical transmission formed
US6307815B1 (en) * 1998-07-23 2001-10-23 Sandia Corporation Microelectromechanical timer

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5631514A (en) * 1994-06-09 1997-05-20 The United States Of America As Represented By The United States Department Of Energy Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process
US5955801A (en) * 1997-12-01 1999-09-21 Sandia Corporation Microfabricated microengine with constant rotation rate
US5990473A (en) * 1998-02-04 1999-11-23 Sandia Corporation Apparatus and method for sensing motion in a microelectro-mechanical system
US6082208A (en) * 1998-04-01 2000-07-04 Sandia Corporation Method for fabricating five-level microelectromechanical structures and microelectromechanical transmission formed
US6307815B1 (en) * 1998-07-23 2001-10-23 Sandia Corporation Microelectromechanical timer
US5994801A (en) * 1998-08-12 1999-11-30 Sandia Corporation Microelectromechanical gyroscope

Also Published As

Publication number Publication date
WO2004081991A2 (en) 2004-09-23

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