WO2004065798A1 - Accurate fluid operated cylinder positioning system - Google Patents

Accurate fluid operated cylinder positioning system Download PDF

Info

Publication number
WO2004065798A1
WO2004065798A1 PCT/US2004/001853 US2004001853W WO2004065798A1 WO 2004065798 A1 WO2004065798 A1 WO 2004065798A1 US 2004001853 W US2004001853 W US 2004001853W WO 2004065798 A1 WO2004065798 A1 WO 2004065798A1
Authority
WO
WIPO (PCT)
Prior art keywords
piston
housing
fluid
position sensor
chamber
Prior art date
Application number
PCT/US2004/001853
Other languages
French (fr)
Other versions
WO2004065798A8 (en
Inventor
Jeff Moler
Mike Alexy
Mark Oudshoorn
Original Assignee
Viking Technologies Lc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Viking Technologies Lc. filed Critical Viking Technologies Lc.
Priority to EP04704847A priority Critical patent/EP1595079A1/en
Priority to CA2513707A priority patent/CA2513707C/en
Priority to JP2006501113A priority patent/JP4690309B2/en
Publication of WO2004065798A1 publication Critical patent/WO2004065798A1/en
Publication of WO2004065798A8 publication Critical patent/WO2004065798A8/en

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B11/00Servomotor systems without provision for follow-up action; Circuits therefor
    • F15B11/006Hydraulic "Wheatstone bridge" circuits, i.e. with four nodes, P-A-T-B, and on-off or proportional valves in each link
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B11/00Servomotor systems without provision for follow-up action; Circuits therefor
    • F15B11/02Systems essentially incorporating special features for controlling the speed or actuating force of an output member
    • F15B11/04Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the speed
    • F15B11/046Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the speed depending on the position of the working member
    • F15B11/048Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the speed depending on the position of the working member with deceleration control
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B9/00Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member
    • F15B9/02Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type
    • F15B9/08Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type controlled by valves affecting the fluid feed or the fluid outlet of the servomotor
    • F15B9/09Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type controlled by valves affecting the fluid feed or the fluid outlet of the servomotor with electrical control means
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/43Programme-control systems fluidic
    • G05B19/44Programme-control systems fluidic pneumatic
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00Circuits for servomotor systems
    • F15B2211/30Directional control
    • F15B2211/305Directional control characterised by the type of valves
    • F15B2211/3056Assemblies of multiple valves
    • F15B2211/30565Assemblies of multiple valves having multiple valves for a single output member, e.g. for creating higher valve function by use of multiple valves like two 2/2-valves replacing a 5/3-valve
    • F15B2211/30575Assemblies of multiple valves having multiple valves for a single output member, e.g. for creating higher valve function by use of multiple valves like two 2/2-valves replacing a 5/3-valve in a Wheatstone Bridge arrangement (also half bridges)
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00Circuits for servomotor systems
    • F15B2211/30Directional control
    • F15B2211/31Directional control characterised by the positions of the valve element
    • F15B2211/3105Neutral or centre positions
    • F15B2211/3111Neutral or centre positions the pump port being closed in the centre position, e.g. so-called closed centre
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00Circuits for servomotor systems
    • F15B2211/30Directional control
    • F15B2211/31Directional control characterised by the positions of the valve element
    • F15B2211/3144Directional control characterised by the positions of the valve element the positions being continuously variable, e.g. as realised by proportional valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00Circuits for servomotor systems
    • F15B2211/30Directional control
    • F15B2211/315Directional control characterised by the connections of the valve or valves in the circuit
    • F15B2211/3157Directional control characterised by the connections of the valve or valves in the circuit being connected to a pressure source, an output member and a return line
    • F15B2211/31576Directional control characterised by the connections of the valve or valves in the circuit being connected to a pressure source, an output member and a return line having a single pressure source and a single output member
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00Circuits for servomotor systems
    • F15B2211/30Directional control
    • F15B2211/32Directional control characterised by the type of actuation
    • F15B2211/327Directional control characterised by the type of actuation electrically or electronically
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00Circuits for servomotor systems
    • F15B2211/60Circuit components or control therefor
    • F15B2211/63Electronic controllers
    • F15B2211/6303Electronic controllers using input signals
    • F15B2211/6306Electronic controllers using input signals representing a pressure
    • F15B2211/6309Electronic controllers using input signals representing a pressure the pressure being a pressure source supply pressure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00Circuits for servomotor systems
    • F15B2211/60Circuit components or control therefor
    • F15B2211/63Electronic controllers
    • F15B2211/6303Electronic controllers using input signals
    • F15B2211/6306Electronic controllers using input signals representing a pressure
    • F15B2211/6313Electronic controllers using input signals representing a pressure the pressure being a load pressure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00Circuits for servomotor systems
    • F15B2211/60Circuit components or control therefor
    • F15B2211/63Electronic controllers
    • F15B2211/6303Electronic controllers using input signals
    • F15B2211/6336Electronic controllers using input signals representing a state of the output member, e.g. position, speed or acceleration
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00Circuits for servomotor systems
    • F15B2211/70Output members, e.g. hydraulic motors or cylinders or control therefor
    • F15B2211/705Output members, e.g. hydraulic motors or cylinders or control therefor characterised by the type of output members or actuators
    • F15B2211/7051Linear output members
    • F15B2211/7053Double-acting output members
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00Circuits for servomotor systems
    • F15B2211/70Output members, e.g. hydraulic motors or cylinders or control therefor
    • F15B2211/765Control of position or angle of the output member
    • F15B2211/7656Control of position or angle of the output member with continuous position control
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/41Servomotor, servo controller till figures
    • G05B2219/41304Pneumatic
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/41Servomotor, servo controller till figures
    • G05B2219/41309Hydraulic or pneumatic drive

Definitions

  • the present invention discloses an accurate and inexpensive fluid operated cylinder positioning system and method. Positioning a cylinder or valve mainstage based on differential pressure according to the present invention can be a viable method of control that is more cost effective and completely different from current offerings by industry leaders.
  • the present invention uses standard, inexpensive components and techniques to achieve control with accuracy approaching that of an expensive system, but with a cost comparable to a simple system.
  • L c is the length from the inside end of the cap end to the surface of the piston.

Abstract

A position control system is used for controlling a fluid operated cylinder (12) having at least one fluid chamber (14) defined by a piston (18) located within a housing (20) for movement between first and second end limits of travel (22, 24). The system includes at least two electrically actuated proportional flow control valves (26, 30) connected to each port of the cylinder for selectively and proportionally controlling fluid flow into and out of the at least one chamber. At least one pressure sensor (38, 40) is provided for measuring fluid pressure with respect to each chamber. At least one discreet position sensor (42) is located adjacent a midpoint of the cylinder for sensing a discreet centered position of the piston. A controller (44) includes a program and is operably connected for controlling actuation of the at least two valves in response to pressure measured by the at least one pressure sensor and location measured by the at least one position sensor.

Description

ACCURATE FLUID OPERATED CYLINDER POSITIONING SYSTEM
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a continuation of provisional application serial no.
60/442,191 filed January 23, 2003, a continuation of provisional application serial no. 60/471,031 filed May 16, 2003, and a continuation of provisional application serial no. 60/460,549 filed on April 4, 2003, all of which are incorporated by reference herein in their entireties.
FIELD OF THE INVENTION
[0002] The present invention relates to an accurate positioning system for a fluid operated cylinder having at least one expandible chamber defined by a housing and a movable piston.
BACKGROUND OF THE INVENTION
[0003] Sales of cylinder positioning systems have generally fallen into one of two categories, simple and complex. A simple system is inexpensive, and typically uses timing or limit switches to achieve control. Although this type of system has significant cost advantages, it has some performance disadvantages. Limit switch systems lack the ability to dynamically change the point or points at which the cylinder stops, and timing controlled systems require constant pressure, load, and wear. Complex systems are more tolerant of pressure, load, and wear changes but have disadvantages in cost and complexity. Complex systems can cost between 10 and 20 times more than the simple system. The complex systems typically use fragile or expensive sensor technology, and require a trained, experienced person for installation.
SUMMARY OF THE INVENTION
[0004] It would be desirable in the present invention to provide an inexpensive and accurate fluid operated cylinder positioning system. It would be desirable to provide a system relatively tolerant of pressure, load, and wear changes while maintaining low cost and simplicity. Accordingly, the present invention discloses an accurate and inexpensive fluid operated cylinder positioning system and method. Positioning a cylinder or valve mainstage based on differential pressure according to the present invention can be a viable method of control that is more cost effective and completely different from current offerings by industry leaders. The present invention uses standard, inexpensive components and techniques to achieve control with accuracy approaching that of an expensive system, but with a cost comparable to a simple system.
[0005] A position control system according to the present invention is used for controlling a fluid operated cylinder having at least one fluid chamber defined by a piston located within a housing for movement between first and second end limits of travel. The system includes at least two electrically actuated proportional flow valves connected to each port of the fluid operated cylinder to be controlled for selectively and proportionally controlling fluid flow into and out of the at least one fluid chamber of the fluid operated cylinder to be controlled. At least one pressure sensor is provided for measuring fluid pressure with respect to each chamber of the fluid operated cylinder to be controlled. At least one discreet position sensor is located adjacent a midpoint of the fluid operated cylinder to be controlled for sensing a discreet centered position of the piston within the cylinder. A control program according to the present invention is operably connected to the at least two valves, the at least one pressure sensor, and the at least one position sensor for controlling actuation of the at least two valves in response to pressure measured by the at least one pressure sensor and location measured by the at least one position sensor.
[0006] Other applications of the present invention will become apparent to those skilled in the art when the following description of the best mode contemplated for practicing the invention is read in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS
[0007] The description herein makes reference to the accompanying drawings wherein like reference numerals refer to like parts throughout the several views, and wherein:
[0008] Figure 1 is a simplified schematic diagram of a multiple valve configuration for controlling fluid flow with respect to at least one expandible chamber of a fluid operated cylinder in accordance with a control program stored in memory; and [0009] Figure 2 is a simplified schematic view of a flow diagram for the control program according to the present invention.
DESCRIPTION OF THE PREFERRED EMBODIMENT
[0010] The present invention implements a pneumatic cylinder control scheme with a cost comparable to a simple system, but with performance approaching that of a complex system. The control scheme according to the present invention is a combination of hardware and software. The hardware is supportive of the required functions. However, actual operation is determined by the software. Further, the software is constructed in such a fashion that variables determine the actual final operation. This approach allows for example, a variety of motion profiles, i.e. control of acceleration/deceleration profiles, velocity, timing, force, repetition, etc. In addition, this control scheme allows operation of either dual acting cylinders or single acting cylinders. In other words, the present invention can operate cylinders with fluid control on both sides, or cylinders with fluid on one side and a mechanism such as a spring to cause return on the other side. Although the description contained herein is oriented toward pneumatically operated cylinders, the control scheme according to the present invention, described also applies to other fluids such as hydraulics or other liquids. In yet another application of this control scheme, the cylinder can be replaced by a main stage valve. These are typically very large valves. In this case, the control scheme acts as a proportional pilot for the mainstage, allowing proportional positioning of the mainstage valve. Historically, the valve industry has used complex methods such as torque motors or proportional valves with precision fee back for controlling such mainstage valves. The device used for this application is referred to as a valve positioner control. The control scheme described herein according to the present invention can therefore be used to replace the existing positioner control. As with the cylinder, the mainstage valve can be operated with various fluids and can operate as a dual acting or as a single acting mainstage positioner.
[0011] According to the present invention, a method of controlling a standard pneumatic cylinder can be developed with reasonable accuracy by monitoring and changing the pressure on one or both sides of the piston. The basic theory behind this type of cylinder control is that if a known volume, i.e. a cylinder chamber, has a given amount of air pressure within that known volume, it will exert a known force on the chamber. This is demonstrated by the basic formula:
Force = Pressure x Area ( 1 )
With a known load and some reasonable assumptions about friction, the forces can be calculated on each side of the piston in a pneumatic cylinder. These forces will directly equate to the piston moving a known distance. The theory behind this assumption is proven in the next section
[0012] In order to implement this type of control, three variables are monitored. First, two signals corresponding to the pressure in both chambers of the cylinder are required. This is achieved by pressure transducers on each inlet to the cylinder. Additionally a hall-effect sensor, or other type of discreet position sensor, is used at mid-stroke to re-calibrate the system occasionally, thus maintaining system accuracy.
[0013] For the initial concept, some variables are assumed to be known and constant. These include cylinder load, friction, and wear. In the present invention these could be determined and compensated for in real time using common measuring and control methods such as adaptive algorithms if desired.
[0014] For the purpose of this explanation, inefficiencies such as heat of compression, friction, and losses due to change of air direction are ignored. This description applies to a double-acting cylinder, where the end with the rod is called the "load" end and the opposing end is the "cap" end.
[0015] The equation that governs the relationship between pressure differential within two chambers is:
Figure imgf000006_0001
Where Pc, Vc, and Tc are Pressure, Volume, and Temperature for chamber 1 (or cap end) and P1; V,, and T, are Pressure, Volume, and Temperature for chamber 2 (or load end). [0016] If we assume that the temperatures are equal, the equation is simplified to:
Figure imgf000007_0001
As already described above:
F = P A (4)
Where F, P, and A represent Force, Pressure, and Area, respectively. [0017] This demonstrates that the force exerted within the cylinder is a function of the pressure on that end of the piston times the effective area. The effective area of the cap end of the piston is simply the internal area of the cylinder, and is represented by:
Dt 2 - π
= A„ (5)
4
D, is the inner diameter of the cylinder and A-, is the area of the cap-end of the cylinder. [0018] The area for the load end of the piston is simply the equation above minus the area of the rod:
Figure imgf000007_0002
[0019] Now that the area of the piston is known, it follows that the volume of the chambers can be described as: For the cap end:
VC=A.-LC (7)
Lc is the length from the inside end of the cap end to the surface of the piston. For the load end:
VfAi-L, (8)
Lj is the length from the inside end of the cap end to the surface of the piston. Therefore, the volume of air in the cap end of the cylinder is:
Figure imgf000007_0003
And the volume of air in the load end of the cylinder is:
Figure imgf000008_0001
Combining this with equation 2 yields:
Figure imgf000008_0002
Finally, the pressures required to move the cylinder a certain distance are:
\( * - z> rp' (12)
(A2 - 2)
Referring now to Figure 1, implementation of the control method according to the present invention can be performed with a multi-valve configuration, such as a four-valve pack, coupled with two pressure transducers; i.e. one transducer for each port of the fluid operated cylinder. The transducers can be off-the-shelf parts, which are commercially available from vendors such as DigiKey. OpAmps can be used for signal conditioning in a standard circuit configuration, and feed into analog inputs of the valve pack. A position control system 10 according to the present invention is illustrated in Figure 1 for controlling a fluid operated cylinder 12 having at least one fluid chamber 14, 16 defined by a piston 18 located within a housing 20 for movement between first and second end limits of travel 22, 24. The system 10 can include at least two electrically actuated proportional flow valves 26, 28, 30, 32 connected to each port 34, 36 of the fluid operated cylinder 12 to be controlled. The valves 26, 28, 30, 32 selectively and proportionally control fluid flow into and out of the at least one fluid chamber 14, 16 of the fluid operated cylinder 12 to be controlled. At least one pressure sensor 38, 40 is provided for measuring fluid pressure with respect to each chamber 14, 16 of the fluid operated cylinder 12 to be controlled. At least one discreet position sensor 42 is located adjacent a midpoint of the fluid operated cylinder 12 to be controlled for sensing a discreet centered position of the piston 18 within the housing 20. A central processing unit 44 includes a control program and is operably connected to the at least two valves 26, 28, 30, 32, the at least one pressure sensor 38, 40, and the at least one position sensor 42 for controlling actuation of the at least two valves 26, 28, 30, 32 in response to pressure measured by the at least one pressure sensor, 38, 40 and location measured by the at least one position sensor 42.
[0021] The at least one discreet position sensor 42 can include a first position sensor 42 located adjacent a midpoint of the fluid operated cylinder, and a second position sensor 46 or 48 located adjacent one end of travel of the piston 18 in the housing 20 for providing soft stop deceleration of the piston 18 prior to contact with an end wall of the housing 20 defining the at least one chamber 14, 16. The at least one chamber 14, 16 can include a first expandable fluid chamber 14 adjacent one end of travel of the piston 18 in the housing 20 and a second expandable fluid chamber 16 adjacent another end of travel of the piston 18 in the housing 20. The at least two electrically actuated proportional flow valves 26, 28, 30, 32 can include a first valve 26 associated with the first expandable fluid chamber 14 for selectively and proportionally controlling fluid flow into the first expandable fluid chamber 14 and a second valve 28 associated with the first expandable fluid chamber 14 for selectively and proportionally controlling fluid flow out of the first expandable fluid chamber 14.
[0022] The at least one pressure sensor 38, 40 can include a first pressure sensor 38 associated with the first expandable fluid chamber 14 and a second pressure sensor 40 associated with the second expandable fluid chamber 16. A third pressure sensor 50 can be provided for monitoring the pressure of the pressurized fluid source. The at least one discreet position sensor 42 can include a first position sensor 42 located adjacent a midpoint of the fluid operated cylinder 12, a second position sensor 46 located adjacent one end of travel of the piston 18 in the housing 20 for providing soft stop deceleration of the piston 18 prior to contact with an end wall of the housing 20 defining the first chamber 14, and a third position sensor 48 located adjacent an opposite end of travel of the piston 18 in the housing 20 for providing soft stop deceleration of the piston prior to contact with an end wall of the housing 20 defining the second fluid chamber 16.
[0023] The control program according to the present invention can initialize a home position corresponding to the centered position of the piston 18 within the housing 20, when the piston 18 is sensed by the at least one discreet position sensor 42 located adjacent the midway position with respect to the housing 20. The control program according to the present invention can also calculate a value corresponding to an amount of pressure required in the at least one expandable fluid chamber 14, 16 for moving the piston 18 a desired distance within in the housing 20 from the discreet centered position located midway with respect to the housing 20. The control program can control the at least two electrically actuated proportional flow control valves 26, 28, and/or 30, 32 to obtain the calculated pressure within the at least one expandable fluid chamber 14, 16 corresponding to the desired distance of movement for the piston 18 within the housing 20. Various means can be provided for biasing the piston 18 toward the discreet centered position with respect to the housing 20. If only a single expandable fluid chamber is provided to be controlled by the present invention, the biasing means can include any suitable mechanical device, by way of example and not limitation, a return spring force. If two expandable fluid chambers 14, 16 are provided to be controlled by the system 10 according to the present invention, the biasing means corresponds to the second expandable fluid chamber. It should be recognized that the pressure calculations described in greater detail above can be modified to correspond to pressure acting against a mechanical spring force when determining the appropriate amount of pressure to provide in a single expandable fluid chamber, and that modifications to the pressure calculations could also be made to accommodate a dual piston rod configuration rather than the single rod piston configuration described in detail here.
[0024] The cylinder 12 preferably has two active expandable fluid chambers 14,
16 that effect a change in position and force of the piston 18 and connected rod. Two proportional control valves 26, 28 or 30, 32 are connected to each chamber 14, 16. One valve removes fluid, by way of example and not limitation, a fluid such as compressed air or hydraulic fluid, from the connected chamber, while the other valve supplies pressurized fluid to the connected chamber. The system includes control electronics 44, and preferably three pressure transducers, 40, 42, 48. The control electronics 44, along with the onboard software, control the four proportional control valves 26, 28, 30, 32 in response to commands from an external source, by way of example and not limitation, such as commands from a network or computer workstation. The pressure transducers 38, 40, 50 monitor the pressure of the pressurized fluid supply, and both expandable fluid chambers 14, 16 in an effort to control the dispensing of pressurized fluid to and from the expandable chambers 14, 16 to provide accurate positioning control of the piston 18 and connected rod output force. In the preferred configuration, the proportional control valves 26, 28, 30, 32 can be piezo-electric actuated control valves of a type similar to those described in U.S. Pat. No. 6,548,938 issued on April 15, 2003, or a piezo-electric actuator of the type similar to that disclosed in U.S. Design Pat. No. D483,335 issued on December 9, 2003, or PCT Published Application No. WO 04/006,349 published on July 3, 2003, or PCT Published Application No. WO 03/083,957 published on March 25, 2003, or PCT Published Application No. WO 03/067,674 published on January 22, 2003, or PCT Published Application No. WO 01/80,326 published on March 29, 2001, or PCT Published Application No. WO 01/79,731 published on March 29, 2001, all of which are incorporated by reference herein in their entireties. Preferably, by way of example and not limitation, the piezo-electric actuator is controlled for proportional valve operation by direct control of the voltage applied to the piezo, or by monitoring the amount of energy in the piezo-electric actuator and using a current charge control, which is different than pulse width modulation as used for proportional control of solenoid operated valves. Referring now to Figure 2, the software code controls both pairs of valves on each side of the cylinder simultaneously as described in the control flow chart. The control program according to the present invention can best be understood by reference to Figure 2. The control program can begin by initializing the system in step 100. During the initialization step 100, the control program locates a home or piston-centered position as indicated by a hall-effect sensor, and brings pressure on both sides of the piston 18 to be equal to one another so that there is no movement of the piston 18 within the housing. By way of example and not limitation, the control system can bring the pressure on both sides of the cylinder to 50 psi while at the centered position which can be verified by the signals received from the at least one position sensor 42 and the at least one pressure sensor 38, 40. Once the system is initialized in step 100, the control program continues to query 102 to determine if a change in position is desired. If a change in position is not desired, the control program returns to the beginning of query 102. If a change in position is desired, the control program continues to step 104 where the necessary pressure is calculated based on the desired movement. The control program then continues to query 106 where it is determined if the desired position is toward the cap end of the cylinder 12. If the desired position is toward the cap end, the program branches to step 108 where pressure is raised in the load end expandable fluid chamber of the cylinder 20. If the desired position is not toward the cap end in response to query 106, the control program branches to step 110 where pressure is raised in the cap end expandable fluid chamber of the cylinder 20.
[0026] After performing either step 108 or step 110, the program continues to query 112 where it is determined if the pressures on either side of the piston 18 are equal. If the pressures are not equal, the program branches to step 114 to monitor the at least one position sensor 42 and to reset the home centered position of the piston 18. After performing step 114, the control program returns to the beginning of query 112. If the pressures are equal in query 112, the control program continues to query 116 where it is determined if the desired position is toward the load end of the cylinder 20. If the desired position is toward the load end in response to query 116, the control program continues to step 118 where pressure is lowered in the load end expandable fluid chamber of the cylinder 20. If the desired position is not toward the load end in response to query 116, the control program continues to step 120 where the pressure is lowered in the cap end expandable fluid chamber of the cylinder 20.
[0027] After performing either step 118 or step 120, the program continues to query 122, where it is determined if the pressures on both sides of the piston 18 are equal. If the pressures on both sides of the piston 20 are not equal in response to query 122, the control program branches to step 124 to monitor the at least one position sensor 42 and to reset the home centered position of the piston 18 in the housing 20. After performing step 124, the control program returns to the beginning of query 122 to determine if the pressures on both sides of the piston 18 are equal. If the pressures on both sides of the piston 18 are equal in response to query 122, the control program continues to step 126 indicating that the piston 18 is done moving, since the piston has reached the desired position, and the current position is saved by the control program. After performing step 126, the control program returns to the beginning of query 102.
[0028] It should be recognized that the control program described in Figure 2 corresponds to a cylinder 12 having first and second expandable fluid chambers 14, 16 defined by a piston 18 located within a housing 20 for movement between first and second end limits of travel. If only a single expandable fluid chamber is provided, the control program illustrated in Figure 2 can be modified by eliminating query 116, steps 118, 120, query 122 and step 124. In this configuration, if the answer to query 112 is yes, the control program can continue directly to step 126 and continue as previously described. As previously described in greater detail above, this configuration can include mechanical means for biasing the piston 18 toward the home centered position with respect to the housing 20, by way of example and not limitation, such as a mechanical spring force.
[0029] While the invention has been described in connection with what is presently considered to be the most practical and preferred embodiment, it is to be understood that the invention is not to be limited to the disclosed embodiments but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims, which scope is to be accorded the broadest interpretation so as to encompass all such modifications and equivalent structures as is permitted under the law.

Claims

What is claimed is:
1. A position control system for a fluid operated cylinder having at least one fluid chamber defined by a piston located within a housing for movement between first and second end limits of travel, the system comprising: at least two electrically actuated proportional flow valves connected to each port of the fluid operated cylinder to be controlled for selectively and proportionally controlling fluid flow into and out of the at least one fluid chamber of the fluid operated cylinder to be controlled; at least one pressure sensor for measuring fluid pressure with respect to each chamber of the fluid operated cylinder to be controlled; at least one discrete position sensor located adjacent a midpoint of the fluid operated cylinder to be controlled for sensing a discrete centered position of the piston within the cylinder; and a control program operably connected to the at least two valves, the at least one pressure sensor, and the at least one position sensor for controlling actuation of the at least two valves in response to pressure measured by the at least one pressure sensor and location measured by the at least one position sensor.
2. The system of claim 1, wherein the at least one discrete position sensor further comprises: a first position sensor located adjacent a midpoint of the fluid operated cylinder; and a second position sensor located adjacent one end of travel of the piston in the housing for providing soft stop deceleration of the piston prior to contact with an end wall of the housing defining the at least one chamber.
3. The system of claim 1 further comprising: the at least two electrically actuated proportional flow valves including a first valve associated with the first expandable fluid chamber for selectively and proportionally controlling fluid flow into the first expandable fluid chamber and a second valve associated with the first expandable fluid chamber for selectively and proportionally controlling fluid flow out of the first expandable fluid chamber.
4. The system of claim 1 further comprising: the at least one expandable fluid chamber including a first expandable fluid chamber adjacent one end of travel of the piston in the housing and a second expandable fluid chamber adjacent another end of travel of the piston in the housing.
5. The system of claim 4 further comprising: the at least one pressure sensor includes a first pressure sensor associated with the first expandable fluid chamber and a second pressure sensor associated with the second expandable fluid chamber.
6. The system of claim 4 further comprising: the at least one discrete position sensor including a first position sensor located adjacent a midpoint of the fluid operated cylinder, a second position sensor located adjacent one end of travel of the piston in the housing for providing soft stop deceleration of the piston prior to contact with an end wall of the housing defining one chamber, and a third position sensor located adjacent an opposite end of travel of the piston in the housing for providing soft stop deceleration of the piston prior to contact with an end wall of the housing defining another chamber.
7. The system of claim 1 further comprising: the control program for initializing a home position when the piston is sensed by the at least one discrete position sensor located adjacent the midway position with respect to the housing.
8. The system of claim 1 further comprising: the control program for calculating a required pressure in the at least one expandable fluid chamber for moving the piston a desired distance within the housing from the discrete centered position located midway with respect to the housing, and for controlling the at least two electrically actuated proportional flow valves to obtain the calculated pressure within the at least one expandable fluid chamber corresponding to the desired distance of movement for the piston within the housing.
9. The system of claim 1 further comprising: means for biasing the piston toward the discrete centered position with respect to the housing.
10. A position control system for a fluid operated cylinder having at least one fluid chamber defined by a piston located within a housing for movement between first and second end limits of travel, the system comprising the steps of: selectively and proportionally controlling fluid flow into and out of the at least one fluid chamber of the fluid operated cylinder to be controlled with at least two electrically actuated proportional flow valves connected to each port of the fluid operated cylinder to be controlled; measuring fluid pressure with respect to each chamber of the fluid operated cylinder to be controlled with at least one pressure sensor; sensing a discrete centered position of the piston within the cylinder with at least one discrete position sensor located adjacent a midpoint of the fluid operated cylinder to be controlled; and controlling actuation of the at least two valves in response to pressure measured by the at least one pressure sensor and location measured by the at least one position sensor with a control program operably connected to the at least two valves, the at least one pressure sensor, and the at least one position sensor.
11. The system of claim 10, wherein the position sensing step with the at least one discrete position sensor further comprises the steps of: locating a first position sensor adjacent a midpoint of the fluid operated cylinder; and locating a second position sensor adjacent one end of travel of the piston in the housing; sensing a discrete position adjacent one end of travel of the piston with respect to the housing with the second position sensor; and decelerating the piston to a soft stop prior to contact with an end wall of the housing defining the at least one chamber with the control program in response to the second position sensor.
12. The system of claim 10, wherein the controlling fluid flow step with at least two electrically actuated proportional flow valves further comprises the steps of: providing a first valve associated with the first expandable fluid chamber for selectively and proportionally controlling fluid flow into the first expandable fluid chamber; and providing a second valve associated with the first expandable fluid chamber for selectively and proportionally controlling fluid flow out of the first expandable fluid chamber.
13. The system of claim 10 wherein the at least one expandable fluid chamber further comprises the steps of: providing a first expandable fluid chamber adjacent one end of travel of the piston in the housing; and providing a second expandable fluid chamber adjacent another end of travel of the piston in the housing.
14. The system of claim 13, wherein the pressure sensing step with at least one pressure sensor further comprises the steps of: providing a first pressure sensor associated with the first expandable fluid chamber; and providing a second pressure sensor associated with the second expandable fluid chamber.
15. The system of claim 13, wherein the position sensing step with at least one discrete position sensor further comprises the steps of: providing a first position sensor located adjacent a midpoint of the fluid operated cylinder; providing a second position sensor located adjacent one end of travel of the piston in the housing for providing soft stop deceleration of the piston prior to contact with an end wall of the housing defining one chamber; and providing a third position sensor located adjacent an opposite end of travel of the piston in the housing for providing soft stop deceleration of the piston prior to contact with an end wall of the housing defining another chamber.
16. The system of claim 10, wherein the controlling step with a control program further comprises the step of: initializing a home position when the piston is sensed by the at least one discrete position sensor to be located at the discrete centered position with respect to the housing.
17. The system of claim 10, wherein the controlling step with a control program further comprises the steps of: calculating a required pressure in the at least one expandable fluid chamber for moving the piston a desired distance within the housing from the discrete centered position located midway with respect to the housing; and controlling the at least two electrically actuated proportional flow valves to obtain the calculated pressure within the at least one expandable fluid chamber corresponding to the desired distance of movement for the piston within the housing.
18. The system of claim 10 further comprising the step of: biasing the piston toward the discrete centered position with respect to the housing.
19. A position control system for a fluid operated cylinder having two fluid chambers defined by a piston located within a housing for movement between first and second end limits of travel, the system comprising: four electrically actuated proportional flow valves, two valves connected to each port of the fluid operated cylinder to be controlled for selectively and proportionally controlling fluid flow into and out of the two fluid chambers of the fluid operated cylinder to be controlled; two pressure sensors, one pressure sensor for measuring fluid pressure with respect to each chamber of the fluid operated cylinder to be controlled; at least one discrete position sensor located adjacent a midpoint of the fluid operated cylinder to be controlled for sensing a discrete centered position of the piston within the cylinder; and a control program operably connected to the four valves, the two pressure sensors, and the at least one position sensor for controlling actuation of the four valves in response to pressure measured by the two pressure sensors and location measured by the at least one position sensor.
20. The system of claim 19 further comprising: the at least one discrete position sensor including a first position sensor located adjacent a midpoint of the fluid operated cylinder, a second position sensor located adjacent one end of travel of the piston in the housing for providing soft stop deceleration of the piston prior to contact with an end wall of the housing defining the first chamber, and a third position sensor located adjacent an opposite end of travel of the piston in the housing for providing soft stop deceleration of the piston prior to contact with an end wall of the housing defining the second chamber.
21. The system of claim 19 further comprising: the control program for initializing a home position when the piston is sensed by the at least one discrete position sensor located adjacent the midway position with respect to the housing.
22. The system of claim 19 further comprising: the control program for calculating a required pressure in each of the first and second expandable fluid chambers for moving the piston a desired distance within the housing from the discrete centered position located midway with respect to the housing, and for controlling the four electrically actuated proportional flow valves to obtain the calculated pressure within each of the first and second expandable fluid chambers corresponding to the desired distance of movement for the piston within the housing.
PCT/US2004/001853 2003-01-23 2004-01-23 Accurate fluid operated cylinder positioning system WO2004065798A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP04704847A EP1595079A1 (en) 2003-01-24 2004-01-23 Accurate fluid operated cylinder positioning system
CA2513707A CA2513707C (en) 2003-01-24 2004-01-23 Accurate fluid operated cylinder positioning system
JP2006501113A JP4690309B2 (en) 2003-01-23 2004-01-23 Position control system for fluid operated cylinders

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US44219103P 2003-01-24 2003-01-24
US60/442,191 2003-01-24
US46054903P 2003-04-04 2003-04-04
US60/460,549 2003-04-04
US47103103P 2003-05-16 2003-05-16
US60/471,031 2003-05-16

Publications (2)

Publication Number Publication Date
WO2004065798A1 true WO2004065798A1 (en) 2004-08-05
WO2004065798A8 WO2004065798A8 (en) 2004-11-11

Family

ID=32777022

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/001853 WO2004065798A1 (en) 2003-01-23 2004-01-23 Accurate fluid operated cylinder positioning system

Country Status (4)

Country Link
EP (1) EP1595079A1 (en)
JP (1) JP4690309B2 (en)
CA (1) CA2513707C (en)
WO (1) WO2004065798A1 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100462883C (en) * 2006-02-23 2009-02-18 上海交通大学 Mesa ball X-Y trace pneumatic controller
WO2017182325A1 (en) * 2016-04-21 2017-10-26 Festo Ag & Co. Kg Method for the supply of compressed air to a compressed-air consumer, valve device and data carrier having a computer program
WO2018152069A1 (en) 2017-02-15 2018-08-23 Nikon Corporation Dual valve fluid actuator assembly
EP2839169B1 (en) 2012-04-20 2020-04-01 Bimba Manufacturing Company Actuator predictive system
US11224931B2 (en) 2016-05-20 2022-01-18 Nasarc Technologies Inc. Motion control method and system for servicing of welding torch

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6962944B2 (en) * 2019-01-08 2021-11-05 Ckd株式会社 Fluid pressure actuator movement amount detection device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4628499A (en) * 1984-06-01 1986-12-09 Scientific-Atlanta, Inc. Linear servoactuator with integrated transformer position sensor
GB2203195A (en) * 1987-03-19 1988-10-12 Festo Kg Circuit for operating a fluid-pressure driven piston
US5424941A (en) * 1991-08-02 1995-06-13 Mosier Industries, Inc. Apparatus and method for positioning a pneumatic actuator
US5431086A (en) * 1992-11-25 1995-07-11 Canon Kabushiki Kaisha Method of controlling cylinder apparatus
US6085632A (en) * 1998-01-16 2000-07-11 Festo Ag & Co. Apparatus for the damped positioning of a piston
DE10122297C1 (en) * 2001-05-08 2002-06-27 Festo Ag & Co Hydraulic circuit and control system for moving piston and locking it in position has proximity switches measuring cylinder position and sending signals to control circuit

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4925362A (en) * 1972-06-30 1974-03-06
JPS63176801A (en) * 1987-01-13 1988-07-21 Kashio Denki Kk Control method for positioning of air cylinder
JPH0442561Y2 (en) * 1987-05-26 1992-10-08
JPH02229902A (en) * 1989-03-01 1990-09-12 Matsushita Electric Ind Co Ltd Pneumatic driving unit
JPH044301A (en) * 1990-04-18 1992-01-08 Matsushita Electric Ind Co Ltd Air pressure driving device
JPH07317701A (en) * 1994-05-24 1995-12-08 Sugimoto Seiki Kk Electromagnetic controller for cylinder and its controlling method
US6289259B1 (en) * 1998-10-16 2001-09-11 Husky Injection Molding Systems Ltd. Intelligent hydraulic manifold used in an injection molding machine

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4628499A (en) * 1984-06-01 1986-12-09 Scientific-Atlanta, Inc. Linear servoactuator with integrated transformer position sensor
GB2203195A (en) * 1987-03-19 1988-10-12 Festo Kg Circuit for operating a fluid-pressure driven piston
US5424941A (en) * 1991-08-02 1995-06-13 Mosier Industries, Inc. Apparatus and method for positioning a pneumatic actuator
US5431086A (en) * 1992-11-25 1995-07-11 Canon Kabushiki Kaisha Method of controlling cylinder apparatus
US6085632A (en) * 1998-01-16 2000-07-11 Festo Ag & Co. Apparatus for the damped positioning of a piston
DE10122297C1 (en) * 2001-05-08 2002-06-27 Festo Ag & Co Hydraulic circuit and control system for moving piston and locking it in position has proximity switches measuring cylinder position and sending signals to control circuit

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100462883C (en) * 2006-02-23 2009-02-18 上海交通大学 Mesa ball X-Y trace pneumatic controller
EP2839169B1 (en) 2012-04-20 2020-04-01 Bimba Manufacturing Company Actuator predictive system
US11572904B2 (en) 2012-04-20 2023-02-07 Bimba Llc Actuator predictive system
US11879484B2 (en) 2012-04-20 2024-01-23 Bimba Llc Actuator predictive system
WO2017182325A1 (en) * 2016-04-21 2017-10-26 Festo Ag & Co. Kg Method for the supply of compressed air to a compressed-air consumer, valve device and data carrier having a computer program
US10808738B2 (en) 2016-04-21 2020-10-20 Festo Se & Co. Kg Method for the supply of compressed air to a compressed-air consumer, valve device and data carrier with a computer program
US11224931B2 (en) 2016-05-20 2022-01-18 Nasarc Technologies Inc. Motion control method and system for servicing of welding torch
WO2018152069A1 (en) 2017-02-15 2018-08-23 Nikon Corporation Dual valve fluid actuator assembly
CN110914554A (en) * 2017-02-15 2020-03-24 株式会社尼康 Dual valve fluid actuator assembly
EP3583322A4 (en) * 2017-02-15 2020-12-16 Nikon Corporation Dual valve fluid actuator assembly
US11092170B2 (en) 2017-02-15 2021-08-17 Nikon Corporation Dual valve fluid actuator assembly
CN110914554B (en) * 2017-02-15 2022-07-19 株式会社尼康 Dual valve fluid actuator assembly

Also Published As

Publication number Publication date
CA2513707C (en) 2011-10-11
JP4690309B2 (en) 2011-06-01
EP1595079A1 (en) 2005-11-16
JP2006515409A (en) 2006-05-25
WO2004065798A8 (en) 2004-11-11
CA2513707A1 (en) 2004-08-05

Similar Documents

Publication Publication Date Title
US7021191B2 (en) Accurate fluid operated cylinder positioning system
US9394897B2 (en) Apparatus using electronically-controlled valves
CN102483079B (en) Position measuring device for capturing the position of at least one actuator of a fluidic system without a position sensor
US7191593B1 (en) Electro-hydraulic actuator system
Gulati et al. A globally stable, load-independent pressure observer for the servo control of pneumatic actuators
JPH02161183A (en) Hydraulic circuit-controlling
CN103233932B (en) High integration hydraulic driving unit structure
JPS63167102A (en) Air actuator device
US8991169B2 (en) Method for adapting stiffness in a variable stiffness actuator
CA2513707C (en) Accurate fluid operated cylinder positioning system
US20120199768A1 (en) Mesofluidic digital valve
JPH0357324B2 (en)
US5678846A (en) Vehicle suspension device
US8616237B2 (en) Mesofluidic two stage digital valve
JP7195557B2 (en) hydraulic drive
CN1742161A (en) Accurate fluid operated cylinder positioning system
Stoll et al. A compliant, high precision, pneumatic rotary drive for robotics
JP4614544B2 (en) Actuator device
NO345199B1 (en) Flow measuring device
SU798365A1 (en) Positioning apparatus
EP0251603A2 (en) Hydraulic actuator controlled by servovalve
Campana et al. Low Cost Robotic Arm Manipulator Controller With Single Stage Fluid Valves
Sindrey et al. Position Tracking Control of Miniature Low Pressure Water Hydraulic Cylinders
GB2392505A (en) System for measuring force in fluid powered actuators
JPH09126332A (en) Spool valve

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): BW GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

CFP Corrected version of a pamphlet front page
CR1 Correction of entry in section i

Free format text: IN PCT GAZETTE 32/2004 UNDER (30) REPLACE "23 JANUARY 2003 (23.01.03)" BY "24 JANUARY 2003 (24.01.03)"

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 2513707

Country of ref document: CA

WWE Wipo information: entry into national phase

Ref document number: 2006501113

Country of ref document: JP

Ref document number: 20048026557

Country of ref document: CN

WWE Wipo information: entry into national phase

Ref document number: 2004704847

Country of ref document: EP

WWP Wipo information: published in national office

Ref document number: 2004704847

Country of ref document: EP