WO2004055377A1 - Vacuum pumping system and method of operating a vacuum pumping arrangement - Google Patents
Vacuum pumping system and method of operating a vacuum pumping arrangement Download PDFInfo
- Publication number
- WO2004055377A1 WO2004055377A1 PCT/GB2003/005380 GB0305380W WO2004055377A1 WO 2004055377 A1 WO2004055377 A1 WO 2004055377A1 GB 0305380 W GB0305380 W GB 0305380W WO 2004055377 A1 WO2004055377 A1 WO 2004055377A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- pumping
- pumping mechanism
- arrangement
- molecular
- pump
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/02—Surge control
- F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/85978—With pump
- Y10T137/86083—Vacuum pump
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Jet Pumps And Other Pumps (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
Description
Claims
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE60334732T DE60334732D1 (en) | 2002-12-17 | 2003-12-09 | VACUUM PUMP SYSTEM AND OPERATING METHOD OF A VACUUM PUMP SYSTEM |
US10/536,775 US7896625B2 (en) | 2002-12-17 | 2003-12-09 | Vacuum pumping system and method of operating a vacuum pumping arrangement |
EP03780371A EP1573205B1 (en) | 2002-12-17 | 2003-12-09 | Vacuum pumping system and method of operating a vacuum pumping arrangement |
AT03780371T ATE486221T1 (en) | 2002-12-17 | 2003-12-09 | VACUUM PUMPING SYSTEM AND OPERATING METHOD OF A VACUUM PUMPING SYSTEM |
AU2003288452A AU2003288452A1 (en) | 2002-12-17 | 2003-12-09 | Vacuum pumping system and method of operating a vacuum pumping arrangement |
JP2004559876A JP4567462B2 (en) | 2002-12-17 | 2003-12-09 | Vacuum pump discharge system and method of operating vacuum pump discharge device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0229353.8A GB0229353D0 (en) | 2002-12-17 | 2002-12-17 | Vacuum pumping system and method of operating a vacuum pumping arrangement |
GB0229353.8 | 2002-12-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2004055377A1 true WO2004055377A1 (en) | 2004-07-01 |
Family
ID=9949814
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/GB2003/005380 WO2004055377A1 (en) | 2002-12-17 | 2003-12-09 | Vacuum pumping system and method of operating a vacuum pumping arrangement |
Country Status (10)
Country | Link |
---|---|
US (1) | US7896625B2 (en) |
EP (1) | EP1573205B1 (en) |
JP (1) | JP4567462B2 (en) |
KR (1) | KR20050084359A (en) |
AT (1) | ATE486221T1 (en) |
AU (1) | AU2003288452A1 (en) |
DE (1) | DE60334732D1 (en) |
GB (1) | GB0229353D0 (en) |
TW (1) | TWI353419B (en) |
WO (1) | WO2004055377A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2568581A (en) * | 2017-09-20 | 2019-05-22 | Edwards Ltd | A set of vacuum pumps including a drag pump |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0409139D0 (en) * | 2003-09-30 | 2004-05-26 | Boc Group Plc | Vacuum pump |
DE102012003680A1 (en) * | 2012-02-23 | 2013-08-29 | Pfeiffer Vacuum Gmbh | vacuum pump |
DE102013108090A1 (en) * | 2013-07-29 | 2015-01-29 | Hella Kgaa Hueck & Co. | pump assembly |
GB2584160A (en) * | 2019-05-24 | 2020-11-25 | Edwards Ltd | Vacuum assembly and vacuum pump with an axial through passage |
GB2592346B (en) * | 2020-01-09 | 2022-11-02 | Edwards Ltd | Vacuum pump and vacuum pump set for evacuating a semiconductor processing chamber |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5020969A (en) | 1988-09-28 | 1991-06-04 | Hitachi, Ltd. | Turbo vacuum pump |
DE19913593A1 (en) * | 1999-03-24 | 2000-10-05 | Ilmvac Gmbh | Controlled pump assembly with high vacuum, pilot pumps has control unit that switches on pilot pump based on pilot pressure, opens valve when pilot pressure exceeds upper threshold |
DE10032607A1 (en) * | 2000-07-07 | 2002-01-24 | Leo Elektronenmikroskopie Gmbh | Particle beam device with a particle source to be operated in an ultra-high vacuum and cascade-shaped pump arrangement for such a particle beam device |
DE10043783A1 (en) * | 2000-09-06 | 2002-03-14 | Leybold Vakuum Gmbh | Method and device for regulating the vacuum in a chamber |
EP1234982A1 (en) | 2001-02-22 | 2002-08-28 | VARIAN S.p.A. | Vacuum pump |
US6446651B1 (en) * | 1999-06-28 | 2002-09-10 | Pfeiffer Vacuum Gmbh | Multi-chamber vacuum system and a method of operating the same |
US20020136643A1 (en) * | 2001-03-24 | 2002-09-26 | Wolfgang Eberl | Gas friction pump |
DE10114969A1 (en) * | 2001-03-27 | 2002-10-10 | Leybold Vakuum Gmbh | Turbo molecular pump |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3536418A (en) * | 1969-02-13 | 1970-10-27 | Onezime P Breaux | Cryogenic turbo-molecular vacuum pump |
US3649339A (en) * | 1969-09-05 | 1972-03-14 | Eugene C Smith | Apparatus and method for securing a high vacuum for particle coating process |
US4472962A (en) * | 1981-08-03 | 1984-09-25 | Balzers Aktiengesellschaft | Low pressure leak detector |
US4534314A (en) * | 1984-05-10 | 1985-08-13 | Varian Associates, Inc. | Load lock pumping mechanism |
US4577465A (en) * | 1984-05-11 | 1986-03-25 | Helix Technology Corporation | Oil free vacuum system |
DE3865012D1 (en) * | 1988-06-01 | 1991-10-24 | Leybold Ag | PUMP SYSTEM FOR A LEAK DETECTOR. |
JP3077285B2 (en) | 1991-07-26 | 2000-08-14 | 大同特殊鋼株式会社 | Vacuum metal heat treatment furnace |
GB9717400D0 (en) | 1997-08-15 | 1997-10-22 | Boc Group Plc | Vacuum pumping systems |
JPH11230086A (en) * | 1998-02-13 | 1999-08-24 | Ebara Corp | Vacuum pump and circulatory vacuum system therewith |
JP3929185B2 (en) * | 1998-05-20 | 2007-06-13 | 株式会社荏原製作所 | Vacuum exhaust apparatus and method |
GB9810872D0 (en) * | 1998-05-20 | 1998-07-22 | Boc Group Plc | Improved vacuum pump |
JP2002542396A (en) * | 1999-04-16 | 2002-12-10 | ユナキス・バルツェルス・アクチェンゲゼルシャフト | Vacuum processing method and vacuum processing device |
US6161576A (en) * | 1999-06-23 | 2000-12-19 | Mks Instruments, Inc. | Integrated turbo pump and control valve system |
GB9927493D0 (en) * | 1999-11-19 | 2000-01-19 | Boc Group Plc | Improved vacuum pumps |
JP3927388B2 (en) | 2000-09-27 | 2007-06-06 | 株式会社リコー | Image processing apparatus, image processing method, and recording medium |
US6598615B1 (en) * | 2000-11-07 | 2003-07-29 | Applied Materials, Inc. | Compact independent pressure control and vacuum isolation for a turbomolecular pumped plasma reaction chamber |
FR2822200B1 (en) * | 2001-03-19 | 2003-09-26 | Cit Alcatel | PUMPING SYSTEM FOR LOW THERMAL CONDUCTIVITY GASES |
GB0212757D0 (en) * | 2002-05-31 | 2002-07-10 | Boc Group Plc | A vacuum pumping system and method of controlling the same |
DE10302987A1 (en) * | 2003-01-25 | 2004-08-05 | Inficon Gmbh | Leak detector with an inlet |
-
2002
- 2002-12-17 GB GBGB0229353.8A patent/GB0229353D0/en not_active Ceased
-
2003
- 2003-12-09 KR KR1020057011130A patent/KR20050084359A/en not_active Application Discontinuation
- 2003-12-09 WO PCT/GB2003/005380 patent/WO2004055377A1/en active Application Filing
- 2003-12-09 JP JP2004559876A patent/JP4567462B2/en not_active Expired - Fee Related
- 2003-12-09 DE DE60334732T patent/DE60334732D1/en not_active Expired - Lifetime
- 2003-12-09 US US10/536,775 patent/US7896625B2/en not_active Expired - Fee Related
- 2003-12-09 EP EP03780371A patent/EP1573205B1/en not_active Expired - Lifetime
- 2003-12-09 AT AT03780371T patent/ATE486221T1/en not_active IP Right Cessation
- 2003-12-09 AU AU2003288452A patent/AU2003288452A1/en not_active Abandoned
- 2003-12-17 TW TW092135760A patent/TWI353419B/en not_active IP Right Cessation
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5020969A (en) | 1988-09-28 | 1991-06-04 | Hitachi, Ltd. | Turbo vacuum pump |
DE19913593A1 (en) * | 1999-03-24 | 2000-10-05 | Ilmvac Gmbh | Controlled pump assembly with high vacuum, pilot pumps has control unit that switches on pilot pump based on pilot pressure, opens valve when pilot pressure exceeds upper threshold |
US6446651B1 (en) * | 1999-06-28 | 2002-09-10 | Pfeiffer Vacuum Gmbh | Multi-chamber vacuum system and a method of operating the same |
DE10032607A1 (en) * | 2000-07-07 | 2002-01-24 | Leo Elektronenmikroskopie Gmbh | Particle beam device with a particle source to be operated in an ultra-high vacuum and cascade-shaped pump arrangement for such a particle beam device |
DE10043783A1 (en) * | 2000-09-06 | 2002-03-14 | Leybold Vakuum Gmbh | Method and device for regulating the vacuum in a chamber |
EP1234982A1 (en) | 2001-02-22 | 2002-08-28 | VARIAN S.p.A. | Vacuum pump |
US20020136643A1 (en) * | 2001-03-24 | 2002-09-26 | Wolfgang Eberl | Gas friction pump |
DE10114969A1 (en) * | 2001-03-27 | 2002-10-10 | Leybold Vakuum Gmbh | Turbo molecular pump |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2568581A (en) * | 2017-09-20 | 2019-05-22 | Edwards Ltd | A set of vacuum pumps including a drag pump |
GB2568581B (en) * | 2017-09-20 | 2020-09-09 | Edwards Ltd | A set of vacuum pumps including a drag pump |
US11143191B2 (en) | 2017-09-20 | 2021-10-12 | Edwards Limited | Drag pump and a set of vacuum pumps including a drag pump |
Also Published As
Publication number | Publication date |
---|---|
ATE486221T1 (en) | 2010-11-15 |
EP1573205A1 (en) | 2005-09-14 |
KR20050084359A (en) | 2005-08-26 |
GB0229353D0 (en) | 2003-01-22 |
US7896625B2 (en) | 2011-03-01 |
DE60334732D1 (en) | 2010-12-09 |
AU2003288452A1 (en) | 2004-07-09 |
JP2006509955A (en) | 2006-03-23 |
TWI353419B (en) | 2011-12-01 |
JP4567462B2 (en) | 2010-10-20 |
US20060153715A1 (en) | 2006-07-13 |
EP1573205B1 (en) | 2010-10-27 |
TW200420837A (en) | 2004-10-16 |
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