WO2004037937A1 - A corrosion retarding polishing slurry for the chemical mechanical polishing of copper surfaces - Google Patents
A corrosion retarding polishing slurry for the chemical mechanical polishing of copper surfaces Download PDFInfo
- Publication number
- WO2004037937A1 WO2004037937A1 PCT/US2003/032691 US0332691W WO2004037937A1 WO 2004037937 A1 WO2004037937 A1 WO 2004037937A1 US 0332691 W US0332691 W US 0332691W WO 2004037937 A1 WO2004037937 A1 WO 2004037937A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- slurry
- polishing
- recited
- metal surface
- copper
- Prior art date
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 158
- 239000002002 slurry Substances 0.000 title claims abstract description 127
- 239000000126 substance Substances 0.000 title claims abstract description 12
- 239000010949 copper Substances 0.000 title claims description 35
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims description 33
- 229910052802 copper Inorganic materials 0.000 title claims description 33
- 230000007797 corrosion Effects 0.000 title claims description 19
- 238000005260 corrosion Methods 0.000 title claims description 19
- 230000000979 retarding effect Effects 0.000 title description 4
- 229910052751 metal Inorganic materials 0.000 claims abstract description 69
- 239000002184 metal Substances 0.000 claims abstract description 69
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- 239000003795 chemical substances by application Substances 0.000 claims description 42
- 238000002161 passivation Methods 0.000 claims description 25
- -1 aluminate salts Chemical class 0.000 claims description 23
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 22
- 235000012239 silicon dioxide Nutrition 0.000 claims description 18
- 239000000203 mixture Substances 0.000 claims description 17
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical class [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims description 14
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- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 5
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- 239000001230 potassium iodate Substances 0.000 claims description 2
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- 238000002474 experimental method Methods 0.000 description 8
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- 150000004706 metal oxides Chemical class 0.000 description 8
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- 125000004432 carbon atom Chemical group C* 0.000 description 6
- BERDEBHAJNAUOM-UHFFFAOYSA-N copper(I) oxide Inorganic materials [Cu]O[Cu] BERDEBHAJNAUOM-UHFFFAOYSA-N 0.000 description 6
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 5
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- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
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- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 238000010587 phase diagram Methods 0.000 description 4
- NLKNQRATVPKPDG-UHFFFAOYSA-M potassium iodide Chemical compound [K+].[I-] NLKNQRATVPKPDG-UHFFFAOYSA-M 0.000 description 4
- 239000004094 surface-active agent Substances 0.000 description 4
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- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
- B24B37/0056—Control means for lapping machines or devices taking regard of the pH-value of lapping agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
Definitions
- the colloidal particles comprise substantially spherical colloidal silica having an average diameter of less than about 1000 microns, and more preferably less about 100 nanometers, and even more preferably a uniform diameter between about 10 and about 50 nanometers .
- Preferred configurations of the slurry also include an oxidant and a passivation agent that serve to further modify the metal surface so as to facilitate polishing.
- Oxidants such as hydrogen peroxide (H 2 0 2 ) , iodates (XI0 3, where X is a Group 1 cation) or bromates (XBr0 3; where X is a Group 1 cation)
- passivation agents promote the oxidation of the metal surface
- passivation agents attenuate the extent of oxidation and reduce dissolution of the metal surface.
- passivation agents include benzotriazole (BTA) , thioureas, thiolates, or compounds having a nitrogen atom with lone pair electrons, such as polypyridyls .
- the reaction between the metal surface and KI0 3 results in the production of the passivation agent, I 2 .
- KI0 3 at a concentration of between about 0.1 M and about 10 M, and more preferably, between about 0.1 M and about 0.2 M, is added to the slurry.
- closed-cell foams of crosslinked copolymers comprising polyethylene and ethylene vinyl acetate include: VolaraTM and VolextraTM (from Voltek Corp.); Senflex EVATM (from Rogers Corp.); and J-foamTM (from JMS Plastics JMS Plastics Supply, Inc.).
- cell size is approximately equal to the mean cell diameter.
- cell diameter is a function of the EVA content of co-polymer bend, as disclosed by Perez et al . J. Appl. Polymer Sci, vol. 68, 1998 pp 1237-1244, incorporated by reference herein.
- bulk density and cell density are inversely related.
- the density of concave cells at the surface of the substrate ranges between 2.5 and about 100 cells/mm 2 , and more preferably, between about 60 and 100 cells/mm 2 .
- Cell density may be determined, for example, from visual inspection of microscopic images of the substrate's surface.
- the polishing agent 170 may comprise one or more ceramic compounds or one or more organic polymers, resulting from the grafting of the secondary reactants on the substrate's surface, as disclosed in U.S. Patent No. 6,579,604 or U.S. Patent No. 6,596,388, both to Obeng and Yokley, and both incorporated herein by reference.
- the ceramic polishing agents 170 may comprise an inorganic metal oxide resulting when an oxygen-containing organometallic compound is used as the secondary reactant to produce a grafted surface.
- the secondary plasma mixture may include a transition metal such as titanium, manganese, or tantalum.
- the secondary plasma reactant may include ozone, alkoxy silanes, water, ammonia, alcohols, mineral sprits or hydrogen peroxide.
- the secondary plasma reactant may be composed of titanium esters, tantalum alkoxides, including tantalum alkoxides wherein the alkoxide portion has 1-5 carbon atoms; manganese acetate solution in water; manganese alkoxide dissolved in mineral spirits; manganese acetate; manganese acetylacetonate; aluminum alkoxides; alkoxy aluminates; aluminum oxides; zirconium alkoxides, wherein the alkoxide has 1-5 carbon atoms; alkoxy zirconates; magnesium acetate; and magnesium acetylacetonate.
- Other embodiments are also contemplated for the secondary plasma reactant, for example, alkoxy silanes and ozone, alkoxy silanes
- the polishing agent 170 may comprise an organic polymer when organic compounds are used as the secondary plasma reactant.
- secondary reactants include: allyl alcohols; allyl amines; allyl alkylamines, where the alkyl groups contain 1-8 carbon atoms; allyl ethers; secondary amines, where the alkyl groups contain 1-8 carbon; alkyl hydrazines, where the alkyl groups contain 1-8 carbon atoms; acrylic acid; methacrylic acid; acrylic acid esters containing 1-8 carbon atoms; methacrylic esters containing 1-8 carbon atoms; or vinyl pyridine, and vinyl esters, for example, vinyl acetate.
- the polishing agent 170 may be selected from a group of polymers consisting of polyalcohols and polyamines .
- the coating of polishing agents 170 may advantageously alter the physical properties of the substrate comprising the polishing pad 120.
- the substrate after being coated with an organic polymer polishing agent, has peak Tan Delta at least about 40°C lower than the uncoated thermoplastic foam substrate.
- the peak loss modulus of the organic polymer coated substrate is at least about 10°C lower than for the uncoated substrate.
- the peak Tan Delta and peak Loss Modulus may be determined using techniques, such as Dynamic Mechanical Analysis, well known to those of ordinary skill in the art .
- thermoplastic foam substrate of the polishing body 150 is coupled to a stiff backing material 180.
- a stiff backing 180 limits the compressibility and elongation of the foam during polishing, which in turn, reduce erosion and dishing effects during metal polishing via CMP.
- the stiff backing material 180 may, in certain aspects, comprise a high density polyethylene (i.e., greater than about 0.98 gm/cc) , and more preferably, a condensed high density polyethylene.
- the coupling can be achieved via chemical bonding using a conventional adhesive 185, such as epoxy or other materials well known to those skilled in the art. In other embodiments, however, coupling is achieved via extrusion coating of the molten backing material 180 onto the foam 150. In still other embodiments the backing 180 is thermally welded to the foam 150.
- Advantageous configurations of the CMP system 100 further include a mechanically driven carrier head 190 and a polishing platen 195, wherein the polishing pad 120 is attached to the polishing platen 195.
- the carrier head 190 is positionable against the polishing platen 195 to impart a polishing force against the polishing platen 195.
- Additional embodiments of the system 100 can include a conventional carrier ring 200 and adhesive 205 to couple the substrate 140 to the carrier head 190.
- the polishing pad 120 in cooperation with the slurry 110 is preferably capable of polishing a copper metal surface 130 on a wafer substrate 140 at a removal rate of at least about 2000 Angstroms/minute using a down force of about 20 kPa, a table speed between about 25 rpm and a carrier speed of about 40 rpm.
- the removal rate has a within wafer non-uniformity of less than about 14%.
- the removal rate of copper is at least about 1000 Angstroms/minute with a within wafer non-uniformity of less than about 4%.
- Stock slurry solutions were prepared by mixing two slurry packages together.
- the first slurry package included an abrasive such as colloidal silica "DAN Ascend 300" (Product Number Ascend Cu300, from DuPont Air Products, Carlsbad CA) , or alumina in "MSW2000” (Product Number MSW2000 from Rodel, Newark DE) .
- the second slurry package included an oxidant such as hydrogen peroxide and acid buffer such as glacial acidic acid.
- the second slurry package included a periodic acid- containing commercial oxidation package, such as MicroPlanar® CMP3550TM (EKC Dupont, Danville CA) .
- periodic acid may comprise ortho (H 5 I0 6 ) or para (HI0 4 ) forms, or mixtures thereof.
- first and second slurry packages Prior to polishing, the first and second slurry packages were mixed together so as to provide a slurry at the desired pH, as further described below.
- thermoplastic foam substrate was skived with a commercial cutting blade (Model number D5100 Kl, from Fecken-Kirfel, Aachen, Germany) and then manually cleaned with an aqueous/isopropyl alcohol solution.
- polishing agent comprising silicon dioxide
- the skived substrate was placed in the reaction chamber of a conventional commercial Radio Frequency Glow Discharge (RFGD) plasma reactor having a temperature controlled electrode configuration (Model PE-2; Advanced Energy Systems, Medford, NY) .
- RFGD Radio Frequency Glow Discharge
- the plasma treatment of the substrate was commenced by introducing the primary plasma reactant, Argon, for about 30 to about 120 seconds, depending on sample size and rotation speed, within the reaction chamber maintained at about 350 mTorr.
- the electrode temperature was maintained at about 30°C, and a RF operating power of about 100 to about 2500 Watts was used, depending on the sample and reaction chamber size.
- the secondary reactant was introduced for either 10 or 30 minutes at 0.10 SLM and consisted of the silicon dioxide metal ester precursor, tetraethoxysilane (TEOS) , mixed with He or Ar gas.
- the amount of precursor in the gas stream was governed by the vapor pressure (BP) of the secondary reactant monomer at the monomer reservoir temperature (MRT; 90 ⁇ 10°C) .
- Similar procedures were used to prepare polishing bodies coated with a polishing agent comprising Ti0 2 , using a secondary plasma reactant containing tetraorthotitinate .
- Copper polishing properties were assessed using a commercial polisher IPEC 472 (Product No. EP0222 from Ebara Technologies, Sacramento, CA, now owned by Novellus Systems Inc . , CA) . No preconditioning was performed on the pad prior to commencing the experiment. Unless otherwise noted, the removal rate of copper polishing was assessed using a down force of about 20 kPa (-3 psi), ' back side pressure of about 6.9 kPa (-1 psi) a table speed of about 25 rpm, a carrier speed of about 40 rpm and slurry flow rate of about 125 ml/min. About 10,000 Angstrom thick wafers having electroplated with an about 8,000 Angstrom thick copper layer were used for test polishing.
- the within wafer nonuniformity (WIWNU) of copper removal across the wafer's surface was assessed using the same polishing apparatus and conditions. Contour plots of the copper surfaces after polishing were measured electrically by measuring sheet resistance at 49 points distributed radially across the wafer. The average post- polishing depths of copper removed across the wafer, the standard deviation of the depth removed and the percent standard deviation of the depth removed (WIWNU) were calculated from the 49 measured of sheet resistance.
- the DAN Ascend 300 abrasive package was mixed with a second oxidant package containing H 2 0 2 , to provide a slurry having a final H 2 0 2 concentration of either 5% or 10% (vol/vol) and a pH of -7.6.
- DAN Ascend 300 includes BTA.
- the DAN Ascend 300 abrasive package was also mixed with sufficient glacial acetic acid to provide a slurry having a pH of about 4.0.
- a second commercial abrasive package, MSW2000 includes potassium iodide (KI) and is provided at a pH of about pH 2.0.
- Exemplary copper removal rates (RR) using these slurries are presented in TABLE 1.
- the results in TABLE 1 illustrate a dramatic increase in the polishing rates for slurries having acidic pHs and, in particular, as the pH of the slurry is decreased below about 4, with even higher rates obtained and a pH equal to about 2.
- the observation of haze on the polished surface at higher pHs indicates the presence of undesirable corrosion by-products on the metal surface post-polishing.
- FIGURES 2 and 3 illustrate, respectively, exemplary copper removal rates (RR) and within wafer nonuniformity of copper removal (WIWNU) as a function of slurry pH.
- the removal rate of copper decreases from about 4000 Angstroms per minute for a slurry pH of about 1, to less than about 500 Angstroms per minute for a slurry pH equal to about 6 pH .
- a narrower pH range between about 2.5 and about 4.0 there was a surprizingly good combination of high removal rate and uniformity.
- the WIWNU had a minimum of less than less than 14% and removal rate between about 2500 and about 1000 Angstroms per minute. Even narrower pH ranges provide a number of unexpected advantages.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2003282852A AU2003282852A1 (en) | 2002-10-22 | 2003-10-14 | A corrosion retarding polishing slurry for the chemical mechanical polishing of copper surfaces |
JP2004546879A JP2006504270A (en) | 2002-10-22 | 2003-10-14 | Corrosion-inhibiting polishing slurry for chemical mechanical polishing of copper surfaces |
EP03774847A EP1567606A1 (en) | 2002-10-22 | 2003-10-14 | A corrosion retarding polishing slurry for the chemical mechanical polishing of copper surfaces |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US42037102P | 2002-10-22 | 2002-10-22 | |
US60/420,371 | 2002-10-22 |
Publications (1)
Publication Number | Publication Date |
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WO2004037937A1 true WO2004037937A1 (en) | 2004-05-06 |
Family
ID=32176559
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2003/032691 WO2004037937A1 (en) | 2002-10-22 | 2003-10-14 | A corrosion retarding polishing slurry for the chemical mechanical polishing of copper surfaces |
Country Status (5)
Country | Link |
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EP (1) | EP1567606A1 (en) |
JP (1) | JP2006504270A (en) |
CN (1) | CN1705725A (en) |
AU (1) | AU2003282852A1 (en) |
WO (1) | WO2004037937A1 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006009640A1 (en) * | 2004-06-18 | 2006-01-26 | Cabot Microelectronics | Cmp composition for improved oxide removal rate |
WO2006041727A1 (en) * | 2004-10-08 | 2006-04-20 | Dan Marks | A chemical mechanical polishing pad and method for selective metal and barrier polishing |
WO2006042466A1 (en) * | 2004-10-20 | 2006-04-27 | Anji Microelectronics (Shanghai) Co., Ltd. | The system, method and abrasive slurry for chemical mechanical polishing |
FR2979069A1 (en) * | 2011-08-15 | 2013-02-22 | Rohm & Haas Elect Mat | METHOD FOR CHEMICAL MECHANICAL POLISHING OF TUNGSTEN |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5234916B2 (en) * | 2007-01-30 | 2013-07-10 | 東レ株式会社 | Laminated polishing pad |
Citations (7)
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JPH09132661A (en) * | 1995-11-08 | 1997-05-20 | Hitachi Chem Co Ltd | Production of foam for cmp pad |
EP0831136A2 (en) * | 1996-09-24 | 1998-03-25 | Cabot Corporation | Multi-oxidizer slurry for chemical mechanical polishing |
WO1998044061A1 (en) * | 1997-04-02 | 1998-10-08 | Advanced Chemical Systems International, Inc. | Planarization composition for removing metal films |
EP1046690A1 (en) * | 1999-04-22 | 2000-10-25 | Clariant (France) S.A. | Composition for mechanical chemical polishing of layers in an insulating material based on a polymer with a low dielectric constant |
US6178585B1 (en) * | 1993-11-03 | 2001-01-30 | Intel Corporation | Slurries for chemical mechanical polishing |
WO2002061824A2 (en) * | 2000-11-16 | 2002-08-08 | Intel Corporation | Slurry and method for chemical mechanical polishing of copper |
EP1323798A1 (en) * | 2001-12-27 | 2003-07-02 | Bayer Aktiengesellschaft | Composition for chemical mechanical polishing of metal and metal-dielectrics structures |
-
2003
- 2003-10-14 WO PCT/US2003/032691 patent/WO2004037937A1/en active Search and Examination
- 2003-10-14 CN CN 200380101871 patent/CN1705725A/en active Pending
- 2003-10-14 EP EP03774847A patent/EP1567606A1/en not_active Withdrawn
- 2003-10-14 AU AU2003282852A patent/AU2003282852A1/en not_active Abandoned
- 2003-10-14 JP JP2004546879A patent/JP2006504270A/en not_active Withdrawn
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
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US6178585B1 (en) * | 1993-11-03 | 2001-01-30 | Intel Corporation | Slurries for chemical mechanical polishing |
JPH09132661A (en) * | 1995-11-08 | 1997-05-20 | Hitachi Chem Co Ltd | Production of foam for cmp pad |
EP0831136A2 (en) * | 1996-09-24 | 1998-03-25 | Cabot Corporation | Multi-oxidizer slurry for chemical mechanical polishing |
WO1998044061A1 (en) * | 1997-04-02 | 1998-10-08 | Advanced Chemical Systems International, Inc. | Planarization composition for removing metal films |
EP1046690A1 (en) * | 1999-04-22 | 2000-10-25 | Clariant (France) S.A. | Composition for mechanical chemical polishing of layers in an insulating material based on a polymer with a low dielectric constant |
WO2002061824A2 (en) * | 2000-11-16 | 2002-08-08 | Intel Corporation | Slurry and method for chemical mechanical polishing of copper |
EP1323798A1 (en) * | 2001-12-27 | 2003-07-02 | Bayer Aktiengesellschaft | Composition for chemical mechanical polishing of metal and metal-dielectrics structures |
Non-Patent Citations (1)
Title |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006009640A1 (en) * | 2004-06-18 | 2006-01-26 | Cabot Microelectronics | Cmp composition for improved oxide removal rate |
CN101379154B (en) * | 2004-06-18 | 2011-07-13 | 卡伯特微电子公司 | CMP composition for improved oxide removal rate |
WO2006041727A1 (en) * | 2004-10-08 | 2006-04-20 | Dan Marks | A chemical mechanical polishing pad and method for selective metal and barrier polishing |
WO2006042466A1 (en) * | 2004-10-20 | 2006-04-27 | Anji Microelectronics (Shanghai) Co., Ltd. | The system, method and abrasive slurry for chemical mechanical polishing |
FR2979069A1 (en) * | 2011-08-15 | 2013-02-22 | Rohm & Haas Elect Mat | METHOD FOR CHEMICAL MECHANICAL POLISHING OF TUNGSTEN |
US8865013B2 (en) | 2011-08-15 | 2014-10-21 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Method for chemical mechanical polishing tungsten |
Also Published As
Publication number | Publication date |
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JP2006504270A (en) | 2006-02-02 |
EP1567606A1 (en) | 2005-08-31 |
CN1705725A (en) | 2005-12-07 |
AU2003282852A1 (en) | 2004-05-13 |
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