WO2004023490A3 - Fluid delivery for scanning probe microscopy - Google Patents

Fluid delivery for scanning probe microscopy Download PDF

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Publication number
WO2004023490A3
WO2004023490A3 PCT/US2003/028506 US0328506W WO2004023490A3 WO 2004023490 A3 WO2004023490 A3 WO 2004023490A3 US 0328506 W US0328506 W US 0328506W WO 2004023490 A3 WO2004023490 A3 WO 2004023490A3
Authority
WO
WIPO (PCT)
Prior art keywords
tip
fluid
layer
recess
work piece
Prior art date
Application number
PCT/US2003/028506
Other languages
French (fr)
Other versions
WO2004023490A2 (en
Inventor
Victor B Kley
Original Assignee
Gen Nanotechnology Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gen Nanotechnology Llc filed Critical Gen Nanotechnology Llc
Priority to JP2004534819A priority Critical patent/JP2005538855A/en
Priority to EP03752246A priority patent/EP1539637A4/en
Publication of WO2004023490A2 publication Critical patent/WO2004023490A2/en
Publication of WO2004023490A3 publication Critical patent/WO2004023490A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/12—Fluid environment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/12—Fluid environment
    • G01Q30/14—Liquid environment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y99/00—Subject matter not provided for in other groups of this subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q80/00—Applications, other than SPM, of scanning-probe techniques
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/855—Manufacture, treatment, or detection of nanostructure with scanning probe for manufacture of nanostructure
    • Y10S977/856—Manufacture, treatment, or detection of nanostructure with scanning probe for manufacture of nanostructure including etching/cutting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/53—Means to assemble or disassemble

Abstract

The following invention pertains to the introduction of a gas (or fluid) around a MEMS cantilever (f100) having an SPM probe or Nanotool (TM) to control chemical activity, e.g. oxygen to promote oxidation, argon to inhibit oxidation or clean dry air (CDA) to inhibit moisture to control static charging due to the action of the probe or Nanotools and to provide vacuum at and around the tip and substrate area. The invention can also produce electrical current for use with active electronic devices on, in or near the body of the device. In addition by use of a fluid like water, certain oils, and other liquids in conjunction with specific tip structure either electric discharge machining can be used at the tip area on the tip itself (in conjunction with a form structure on the work piece) or on a work piece beneath the tip to shape, polish and remove material at very small scales (10 microns to 1nm or less). The fluid handling strucutre includes gas channels (f101) formed in devide layer (f102). Each channel is fed via a recess (f105), shown in phantom, formed in the body of in the handle layer (f103) of the cantilever (f100). The recess is therefore in fluid communication with the channels (f101). As can be seen in the enlarged view, a cover seal, or cover layer (f104) can be provided to contain the gas pressure that can be developed at the tip.
PCT/US2003/028506 2002-09-09 2003-09-09 Fluid delivery for scanning probe microscopy WO2004023490A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004534819A JP2005538855A (en) 2002-09-09 2003-09-09 Fluid delivery of a scanning probe microscope
EP03752246A EP1539637A4 (en) 2002-09-09 2003-09-09 Fluid delivery for scanning probe microscopy

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US40940302P 2002-09-09 2002-09-09
US60/409,403 2002-09-09
US43324202P 2002-12-12 2002-12-12
US60/433,242 2002-12-12

Publications (2)

Publication Number Publication Date
WO2004023490A2 WO2004023490A2 (en) 2004-03-18
WO2004023490A3 true WO2004023490A3 (en) 2004-12-02

Family

ID=31981634

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/028506 WO2004023490A2 (en) 2002-09-09 2003-09-09 Fluid delivery for scanning probe microscopy

Country Status (4)

Country Link
US (5) US6998689B2 (en)
EP (1) EP1539637A4 (en)
JP (1) JP2005538855A (en)
WO (1) WO2004023490A2 (en)

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US20080315092A1 (en) * 1994-07-28 2008-12-25 General Nanotechnology Llc Scanning probe microscopy inspection and modification system
US6337479B1 (en) * 1994-07-28 2002-01-08 Victor B. Kley Object inspection and/or modification system and method
US7196328B1 (en) 2001-03-08 2007-03-27 General Nanotechnology Llc Nanomachining method and apparatus
EP1196939A4 (en) * 1999-07-01 2002-09-18 Gen Nanotechnology Llc Object inspection and/or modification system and method
US6813937B2 (en) * 2001-11-28 2004-11-09 General Nanotechnology Llc Method and apparatus for micromachines, microstructures, nanomachines and nanostructures
JP2005538855A (en) 2002-09-09 2005-12-22 ジェネラル ナノテクノロジー エルエルシー Fluid delivery of a scanning probe microscope
TWI232944B (en) * 2003-10-17 2005-05-21 Ind Tech Res Inst MEMS differential actuated scanning nano probe
US7323699B2 (en) 2005-02-02 2008-01-29 Rave, Llc Apparatus and method for modifying an object
US7485849B2 (en) * 2006-05-03 2009-02-03 The United States Of America As Represented By The Secretary Of The Army Light sensor protection and method for protecting a light sensor with laser radiation attenuating gas
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US8539905B2 (en) * 2008-11-07 2013-09-24 The Research Foundation For The State University Of New York Polymeric micro-cantilevers for ultra-low volume fluid and living cell deposition
KR101528558B1 (en) * 2014-03-14 2015-06-15 (재)한국나노기술원 manufacturing method of stimulus tip with monolithically integrated micro-chip and multifunctional stimulus tip
FR3039280B1 (en) * 2015-07-22 2019-05-17 Vmicro S.A.S PROBE FOR ATOMIC FORCE MICROSCOPY WITH LOW DIMENSIONS AND ATOMIC FORCE MICROSCOPE COMPRISING SUCH A PROBE
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WO2004023490A2 (en) 2004-03-18
US20040118192A1 (en) 2004-06-24
US9075082B2 (en) 2015-07-07
US7503206B2 (en) 2009-03-17
US7930766B2 (en) 2011-04-19
US20120066800A1 (en) 2012-03-15
EP1539637A2 (en) 2005-06-15
US6998689B2 (en) 2006-02-14
US20140082776A1 (en) 2014-03-20
US20060150721A1 (en) 2006-07-13
JP2005538855A (en) 2005-12-22
US20100132076A1 (en) 2010-05-27

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