WO2003093165A3 - Thermal micro-actuator based on selective electrical excitation - Google Patents

Thermal micro-actuator based on selective electrical excitation

Info

Publication number
WO2003093165A3
WO2003093165A3 PCT/US2003/011876 US0311876W WO2003093165A3 WO 2003093165 A3 WO2003093165 A3 WO 2003093165A3 US 0311876 W US0311876 W US 0311876W WO 2003093165 A3 WO2003093165 A3 WO 2003093165A3
Authority
WO
Grant status
Application
Patent type
Prior art keywords
arm
hot
thermal
cold
actuator
Prior art date
Application number
PCT/US2003/011876
Other languages
French (fr)
Other versions
WO2003093165A2 (en )
Inventor
Susan C Bromley
Eniko T Enikov
Kamal Deep Mothilal
Bradley J Nelson
Arunkumar Subramanian
Karl Vollmers
Original Assignee
Adc Telecommunications Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00Electrothermal relays
    • H01H61/04Electrothermal relays wherein the thermally-sensitive member is only heated directly
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0024Transducers for transforming thermal into mechanical energy or vice versa, e.g. thermal or bimorph actuators
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01BMACHINES OR ENGINES, IN GENERAL OR OF POSITIVE-DISPLACEMENT TYPE, e.g. STEAM ENGINES
    • F01B29/00Machines or engines with pertinent characteristics other than those provided for in preceding main groups
    • F01B29/08Reciprocating-piston machines or engines not otherwise provided for
    • F01B29/10Engines
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02GHOT GAS OR COMBUSTION-PRODUCT POSITIVE-DISPLACEMENT ENGINE PLANTS; USE OF WASTE HEAT OF COMBUSTION ENGINES; NOT OTHERWISE PROVIDED FOR
    • F02G1/00Hot gas positive-displacement engine plants
    • F02G1/04Hot gas positive-displacement engine plants of closed-cycle type
    • F02G1/043Hot gas positive-displacement engine plants of closed-cycle type the engine being operated by expansion and contraction of a mass of working gas which is heated and cooled in one of a plurality of constantly communicating expansible chambers, e.g. Stirling cycle type engines
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING WEIGHT AND MISCELLANEOUS MOTORS; PRODUCING MECHANICAL POWER; OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03GSPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
    • F03G7/00Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
    • F03G7/06Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N10/00Electric motors using thermal effects
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/03Microengines and actuators
    • B81B2201/031Thermal actuators
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02GHOT GAS OR COMBUSTION-PRODUCT POSITIVE-DISPLACEMENT ENGINE PLANTS; USE OF WASTE HEAT OF COMBUSTION ENGINES; NOT OTHERWISE PROVIDED FOR
    • F02G2250/00Special cycles or special engines
    • F02G2250/31Nano- or microengines
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00Contacts
    • H01H1/0036Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0063Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00Electrothermal relays
    • H01H2061/006Micromechanical thermal relay
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00Electrothermal relays
    • H01H2061/006Micromechanical thermal relay
    • H01H2061/008Micromechanical actuator with a cold and a hot arm, coupled together at one end

Abstract

A thermal microactuator is provided that can be deflected in multiple positions. The actuator has a hot arm and a cold arm coupled together at their distal ends suspended above a reference plane of a substrate. A potential difference is applied across the hot arm so that a current circulates through the hot arm but not the cold arm.
PCT/US2003/011876 2002-04-30 2003-04-17 Thermal micro-actuator based on selective electrical excitation WO2003093165A3 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US10137771 US6739132B2 (en) 2002-04-30 2002-04-30 Thermal micro-actuator based on selective electrical excitation
US10/137,771 2002-04-30

Publications (2)

Publication Number Publication Date
WO2003093165A2 true WO2003093165A2 (en) 2003-11-13
WO2003093165A3 true true WO2003093165A3 (en) 2004-04-08

Family

ID=29249758

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/011876 WO2003093165A3 (en) 2002-04-30 2003-04-17 Thermal micro-actuator based on selective electrical excitation

Country Status (2)

Country Link
US (1) US6739132B2 (en)
WO (1) WO2003093165A3 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7028474B2 (en) * 1998-10-16 2006-04-18 Silverbook Research Pty Ltd Micro-electromechanical actuator with control logic circuitry
EP1121249B1 (en) * 1998-10-16 2007-07-25 Silverbrook Research Pty. Limited Process of forming a nozzle for an inkjet printhead
US7480432B2 (en) * 2006-02-28 2009-01-20 Corning Incorporated Glass-based micropositioning systems and methods
GB0610392D0 (en) * 2006-05-25 2006-07-05 Univ Durham Electro-mechanical actuator and apparatus incorporating such device
US7724121B2 (en) * 2006-09-07 2010-05-25 Innovative Micro Technology Singly attached MEMS thermal device and method of manufacture
US8120133B2 (en) 2006-09-11 2012-02-21 Alcatel Lucent Micro-actuator and locking switch
US20080197964A1 (en) * 2007-02-21 2008-08-21 Simpler Networks Inc. Mems actuators and switches
US8154378B2 (en) * 2007-08-10 2012-04-10 Alcatel Lucent Thermal actuator for a MEMS-based relay switch
US20150123417A1 (en) * 2013-11-01 2015-05-07 Sabanci University Variable Negative Stiffness Actuation

Citations (3)

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US20010010488A1 (en) * 1999-03-26 2001-08-02 Minners R. Sjhon Bistable micro-switch and method of manufacturing the same
US6275325B1 (en) * 2000-04-07 2001-08-14 Microsoft Corporation Thermally activated microelectromechanical systems actuator
WO2002023574A1 (en) * 2000-09-12 2002-03-21 3M Innovative Properties Company Direct acting vertical thermal actuator

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US4423401A (en) 1982-07-21 1983-12-27 Tektronix, Inc. Thin-film electrothermal device
US5347485A (en) 1992-03-03 1994-09-13 Mitsubishi Denki Kabushiki Kaisha Magnetic thin film memory
US5343422A (en) 1993-02-23 1994-08-30 International Business Machines Corporation Nonvolatile magnetoresistive storage device using spin valve effect
US6275411B1 (en) 1993-07-23 2001-08-14 Nonvolatile Electronics, Incorporated Spin dependent tunneling memory
US5477482A (en) 1993-10-01 1995-12-19 The United States Of America As Represented By The Secretary Of The Navy Ultra high density, non-volatile ferromagnetic random access memory
US5541868A (en) 1995-02-21 1996-07-30 The United States Of America As Represented By The Secretary Of The Navy Annular GMR-based memory element
FR2743930B1 (en) 1996-01-19 2000-04-07 Fujitsu Ltd magnetic sensor for reading record carriers
US5640343A (en) 1996-03-18 1997-06-17 International Business Machines Corporation Magnetic memory array using magnetic tunnel junction devices in the memory cells
US5650958A (en) 1996-03-18 1997-07-22 International Business Machines Corporation Magnetic tunnel junctions with controlled magnetic response
US6021065A (en) 1996-09-06 2000-02-01 Nonvolatile Electronics Incorporated Spin dependent tunneling memory
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US6147900A (en) 1997-11-06 2000-11-14 Nonvolatile Electronics, Incorporated Spin dependent tunneling memory
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US5734605A (en) 1996-09-10 1998-03-31 Motorola, Inc. Multi-layer magnetic tunneling junction memory cells
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010010488A1 (en) * 1999-03-26 2001-08-02 Minners R. Sjhon Bistable micro-switch and method of manufacturing the same
US6275325B1 (en) * 2000-04-07 2001-08-14 Microsoft Corporation Thermally activated microelectromechanical systems actuator
WO2002023574A1 (en) * 2000-09-12 2002-03-21 3M Innovative Properties Company Direct acting vertical thermal actuator

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
HOFFMANN M ET AL: "Bistable micromechanical fiber-optic switches on silicon with thermal actuators", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 78, no. 1, January 1999 (1999-01-01), pages 28 - 35, XP004244577, ISSN: 0924-4247 *
KOLESAR E S ET AL: "In-plane tip deflection and force achieved with asymmetrical polysilicon electrothermal microactuators", THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, vol. 377-378, 1 December 2000 (2000-12-01), pages 719 - 726, XP004226779, ISSN: 0040-6090 *
MATOBA H ET AL: "A bistable snapping microactuator", MICRO ELECTRO MECHANICAL SYSTEMS, 1994, MEMS '94, PROCEEDINGS, IEEE WORKSHOP ON OISO, JAPAN 25-28 JAN. 1994, NEW YORK, NY, USA,IEEE, PAGE(S) 45-50, ISBN: 0-7803-1833-1, XP010207742 *

Also Published As

Publication number Publication date Type
US20030200749A1 (en) 2003-10-30 application
WO2003093165A2 (en) 2003-11-13 application
US6739132B2 (en) 2004-05-25 grant

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