WO2003061339A1 - Electromechanical transducer element, method for forming an electromechanical transducer element and transducer formed by said method - Google Patents

Electromechanical transducer element, method for forming an electromechanical transducer element and transducer formed by said method Download PDF

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Publication number
WO2003061339A1
WO2003061339A1 PCT/FI2003/000035 FI0300035W WO03061339A1 WO 2003061339 A1 WO2003061339 A1 WO 2003061339A1 FI 0300035 W FI0300035 W FI 0300035W WO 03061339 A1 WO03061339 A1 WO 03061339A1
Authority
WO
WIPO (PCT)
Prior art keywords
transducer
film
additional material
elastic
electrode
Prior art date
Application number
PCT/FI2003/000035
Other languages
French (fr)
Inventor
Heikki RÄISÄNEN
Original Assignee
B-Band Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by B-Band Oy filed Critical B-Band Oy
Priority to AT03700125T priority Critical patent/ATE541412T1/en
Priority to EP03700125A priority patent/EP1466501B1/en
Publication of WO2003061339A1 publication Critical patent/WO2003061339A1/en
Priority to US10/894,417 priority patent/US7589439B2/en

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Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/01—Electrostatic transducers characterised by the use of electrets
    • H04R19/016—Electrostatic transducers characterised by the use of electrets for microphones

Definitions

  • Electromechanical transducer element method for forming an electromechanical transducer element and transducer formed by said method.
  • the present invention relates to an electromechanical transducer element for converting force and pressure changes and vibrations into electrical signals and to a method for its fabrication.
  • Present invention is especially useable as musical instrument transducer for converting vibrations into electrical signals and, in particular, to an flexible unitary under-saddle transducer element,
  • WO 97/39602 presents a stringed musical instrument transducer for converting string vibrations into electric signals, which transducer is composed of elastic, voided electret-film sheets and is capable of converting string vibrations into electric signals.
  • the electrodes required by the electromechanical sheet are disposed on the surface of one or more thin and flexible dielectric materials, said electrodes forming electrically conductive surfaces of the transducer for connecting the transducer to a signal processing device, and which transducer is constructed of a unitary, thin and flexible layered sheet structure.
  • signal and ground electrodes are arranged on the insulate sheet.
  • electrodes are printed with silver-paste, they are typically about 20 ⁇ m thick layers on the insulate sheets, which can be for example 100 ⁇ m thick polyester.
  • US4885783 pertains to electrical-to- mechanical transducers. More particularly, the application pertains to an electrostatic transducer in which an elastomeric dielectric material is disposed between a pair of opposed conductive plates across which an electrical potential difference is maintained. A plurality of strips, beads or nodules of elastomeric dielectric material are disposed between plates and in contact therewith, thereby separating plates by a distance "d" such that, for a given gas maintained between plates at a pressure "P", the product Pd is significantly less than the value required to achieve the Paschen minimum breakdown voltage of the gas.
  • the object of the present invention is to eliminate the drawbacks of prior art and achieve an improved transducer, in which a dielectric swelled cellular (voided) electret film is used to transform the mechanical stress into electric signals.
  • a layer of isolating material for example by screen-printing a lacquer layer, and partly onto the ground electrode is deposited another layer of silver- paste, which also can be dielectric lacquer .
  • the structure of the invention thus allows the application of an effective and economic production technique with significantly improved electrical properties.
  • Fig. 1a presents a cross-sectional view of the transducer, in this case a musical instrument transducer, according to the invention
  • Fig. 1b presents a cross-sectional view of the transducer according to the invention, which have been under high pressure
  • Fig. 2a presents a screen-print film for printing the signal and ground electrode layers of the transducer in Fig. 1a and 1 b.
  • Fig. 2b presents a screen-print film for printing the ground electrode layers of the transducer in Fig. 1a and 1b.
  • Fig. 2c presents, according the present invention, a screen-print film for printing the dielectric layers adjacent to signal electrode and additional silver-paste layers onto ground electrode layer
  • Fig. 2d presents, according the present invention, another screen-print film for printing the dielectric layers adjacent to signal electrode and additional silver-paste layers onto ground electrode layer
  • Fig. 3 presents a microscope picture of swelled dielectric cellular electret bubble film.
  • the transducers of invention in fig. 1a consists of a two plastic films, 101 and 102, for example polyester, with thickness typically 100 ⁇ m.
  • a ground electrode layer 103 On the upper side of the film 101 is printed a ground electrode layer 103, screen-printed according to Fig 2b, with thickness about 20 ⁇ m.
  • the signal electrode layer 104 and ground-loop electrode 105 Under the film 101 has first been printed at same time the signal electrode layer 104 and ground-loop electrode 105, accordingly to Fig 2a, both typically having thickness of 20 microns.
  • dielectric layer 106 accordingly to Fig 2c, also having thickness of about 20 ⁇ m.
  • 100 ⁇ m thick polyester film 102 has on upper side 20 ⁇ m ground electrode layer 107, printed with Fig 2b.
  • Fig. 2d shows another kind arrangement, where there comes additional, thin, for example about 0.3 mm wide, crossing lines 111 over both signal and ground electrodes. This kind arrangement is needed if the transducer has greater width in both x- and y- directions.
  • the films 109, 110 are active electromechanical films, being composed of permanently charged dielectric electret films 74 containing flat lens-like gas bubbles 75 or blisters (so called electret bubble film, fig. 3).
  • films 109, 110 have originally been about 50 ⁇ m elastic electric films with about 35% gas of the thickness, which further have been swelled to about 70 microns thickness (about 55% gas of the thickness) and charged.
  • the cross-sectional view in Fig. 1 b clearly shows how in the structure of the present invention, when the transducer is under high pressure, over the area of the signal electrode, there is a space for the voided transducer film not to compress entirely.
  • two layers of elastic electret films are used for higher output.
  • the two layers 108,109 can compress in the side areas 106, 107 down to about 65 ⁇ m. In the area of the signal electrode they can compress only down to about 105 ⁇ m. This will remain constant, significantly higher output level upon time under high pressure.
  • signal and ground electrodes can also be printed directly into elastic charged electret films which further can be laminated together.
  • Another embodiment of the invention is for example to take two sheets of elastic electret film and having signal electrode printed on one side of them and ground electrode on opposite sides.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Electrophonic Musical Instruments (AREA)

Abstract

Electromechanical transducer element for converting mechanical force, such as vibrations, into electrical signals and a method for fabricating the same, the transducer having a layered structure and comprising: signal and ground layers (103-105, 107) and dielectric layer(s) (109,110), the dielectric layers being permanently charged elastic cellular electret film layer(s), and wherein the transducer element is provided with additional material in order to improve the electric properties, and wherein in that the additional material (108, 106) is disposed in between the permanently charged elastic cellular electret film and at least one electrode of the element so that under compression the elastic electret film compresses most at the areas being directly against the additional material and less at the other areas of the element.

Description

Electromechanical transducer element, method for forming an electromechanical transducer element and transducer formed by said method.
Field of invention
The present invention relates to an electromechanical transducer element for converting force and pressure changes and vibrations into electrical signals and to a method for its fabrication. Present invention is especially useable as musical instrument transducer for converting vibrations into electrical signals and, in particular, to an flexible unitary under-saddle transducer element,
Prior art
WO 97/39602 presents a stringed musical instrument transducer for converting string vibrations into electric signals, which transducer is composed of elastic, voided electret-film sheets and is capable of converting string vibrations into electric signals. The electrodes required by the electromechanical sheet are disposed on the surface of one or more thin and flexible dielectric materials, said electrodes forming electrically conductive surfaces of the transducer for connecting the transducer to a signal processing device, and which transducer is constructed of a unitary, thin and flexible layered sheet structure.
In the transducer described in WO 97/39602, signal and ground electrodes are arranged on the insulate sheet. As electrodes are printed with silver-paste, they are typically about 20 μm thick layers on the insulate sheets, which can be for example 100 μm thick polyester. Lack of the prior art transducers where voided electret-film is used as electromechanical film, is that when the transducer is under continuous high pressure, which is the case in many applications like under-saddle transducer in acoustic guitar, the electromechanical film compresses constantly and its output gets lower and lower upon time. This happens because under high pressure the gas inside voids diffuses and therefore the elasticity of the film drops which further causes the distance of the layers with opposite charges inside film getting smaller.
For example from US4885783 it is known to use electrical insulating material in order to increase the gas breakdown voltage and to lessen the deleterious effects of accidentally exceeding the voltage. US4885783 pertains to electrical-to- mechanical transducers. More particularly, the application pertains to an electrostatic transducer in which an elastomeric dielectric material is disposed between a pair of opposed conductive plates across which an electrical potential difference is maintained. A plurality of strips, beads or nodules of elastomeric dielectric material are disposed between plates and in contact therewith, thereby separating plates by a distance "d" such that, for a given gas maintained between plates at a pressure "P", the product Pd is significantly less than the value required to achieve the Paschen minimum breakdown voltage of the gas.
Summary of the invention
The object of the present invention is to eliminate the drawbacks of prior art and achieve an improved transducer, in which a dielectric swelled cellular (voided) electret film is used to transform the mechanical stress into electric signals. In the present invention, adjacent to the signal electrode and/or possibly partly onto it, is deposited a layer of isolating material, for example by screen-printing a lacquer layer, and partly onto the ground electrode is deposited another layer of silver- paste, which also can be dielectric lacquer . This way arranging bosses or stripes against the elastic voided electromechanical film, the film , when the transducer is continuously under high pressure, like is the case with under the saddle transducers due the tension of the strings, compresses most only at the sides of the sensor. In the middle, over the actual signal electrode area, is left a area (space) where the voided film cannot compress entirely due the fact the thicker sides prevent from it to happen. With this construction the transducer generates much higher voltage output, typically about 6 dB more, which is essential for good signai-to-noise ratio and studio quality sound production, than with a conventional prior art transducer. Also, the output level remains better constant upon time.
It is also possible to otherwise generate bosses to the signal electrode and/or ground electrode to achieve the similar effect of the invention, for example by etching in case if pure metal electrodes are used.
The invention is in detail defined in the attached claims.
The structure of the invention thus allows the application of an effective and economic production technique with significantly improved electrical properties.
Brief description of the drawings
In the following, the invention is described in more detail by the aid of examples by referring to the attached drawings, in which
Fig. 1a presents a cross-sectional view of the transducer, in this case a musical instrument transducer, according to the invention,
Fig. 1b presents a cross-sectional view of the transducer according to the invention, which have been under high pressure
Fig. 2a presents a screen-print film for printing the signal and ground electrode layers of the transducer in Fig. 1a and 1 b.
Fig. 2b presents a screen-print film for printing the ground electrode layers of the transducer in Fig. 1a and 1b.
Fig. 2c presents, according the present invention, a screen-print film for printing the dielectric layers adjacent to signal electrode and additional silver-paste layers onto ground electrode layer
Fig. 2d presents, according the present invention, another screen-print film for printing the dielectric layers adjacent to signal electrode and additional silver-paste layers onto ground electrode layer
Fig. 3 presents a microscope picture of swelled dielectric cellular electret bubble film.
Detailed description
The transducers of invention in fig. 1a consists of a two plastic films, 101 and 102, for example polyester, with thickness typically 100 μm. On the upper side of the film 101 is printed a ground electrode layer 103, screen-printed according to Fig 2b, with thickness about 20 μm. Under the film 101 has first been printed at same time the signal electrode layer 104 and ground-loop electrode 105, accordingly to Fig 2a, both typically having thickness of 20 microns. Following this printing is printed dielectric layer 106 accordingly to Fig 2c, also having thickness of about 20 μm. 100 μm thick polyester film 102 has on upper side 20 μm ground electrode layer 107, printed with Fig 2b. Partly onto the ground electrode layer is printed another about 20 μm layer 108 with silver-paste, by using film as in Fig 2c. Fig. 2d shows another kind arrangement, where there comes additional, thin, for example about 0.3 mm wide, crossing lines 111 over both signal and ground electrodes. This kind arrangement is needed if the transducer has greater width in both x- and y- directions.
The films 109, 110 are active electromechanical films, being composed of permanently charged dielectric electret films 74 containing flat lens-like gas bubbles 75 or blisters (so called electret bubble film, fig. 3). In typical electromechanical transducer application films 109, 110 have originally been about 50 μm elastic electric films with about 35% gas of the thickness, which further have been swelled to about 70 microns thickness (about 55% gas of the thickness) and charged. The cross-sectional view in Fig. 1 b clearly shows how in the structure of the present invention, when the transducer is under high pressure, over the area of the signal electrode, there is a space for the voided transducer film not to compress entirely. Typically two layers of elastic electret films are used for higher output. If the total thickness of the two layers 108,109 is 140 μm, they can compress in the side areas 106, 107 down to about 65 μm. In the area of the signal electrode they can compress only down to about 105 μm. This will remain constant, significantly higher output level upon time under high pressure.
As is known in prior art transducers, number of electromechanical layers and their order can vary a lot. Signal and ground electrodes, as well as the additional isolation and/or conductive layers, can also be printed directly into elastic charged electret films which further can be laminated together. Another embodiment of the invention is for example to take two sheets of elastic electret film and having signal electrode printed on one side of them and ground electrode on opposite sides. By further printing the additional layers onto signal electrodes, to comprise the bosses or stripes, and laminating the two sheets of electret films together by having the signal electrodes against each other, extremely thin transducer can be achieved where no additional polyester or else layers are needed. Yet the structure will have same innovative benefit.
It is obvious to the person skilled in the art that different embodiments of the invention are not restricted to the examples described above, but that they can be varied within the scope of the claims presented below. The number of films and layers on top of each other can be chosen in accordance with the need in each case and the transducer can also have a shape other than rectangular in top view.

Claims

1. Electromechanical transducer element for converting mechanical force changes, such as vibrations, into electrical signals, the transducer having a layered struc- ture and comprising:
signal and ground layers (103-105, 107) and dielectric layer(s) (109,110),
the dielectric layers being permanently charged elastic cellular electret film layer(s), and
wherein the transducer element is provided with additional material in order to improve the electric properties,
characterised in that the additional material (108, 106) is disposed in between the permanently charged elastic cellular electret film and at least one electrode of the element so that under compression the elastic electret film compresses most at the areas being directly against the additional material and less at the other areas of the element.
2. Transducer according to claim 1 , wherein the additional material is bosses, stripes, nodules or alike, and wherein the elastic electret film inside the transducer film element, when under pressure, is suppressed more in the areas against the additional material area than elsewhere in the signal/ground electrode area in order to improve the electrical properties.
3. Transducer according to claim 1 , wherein adjacent to the signal electrode and/or possibly partly onto it, is deposited a layer of isolating material
4. Transducer according to claim 1 , wherein partly onto the ground electrode is deposited another layer of conductive layer material, such as silver-paste.
5. Transducer according to claim 1 , wherein elastic dielectric cellular electret films are biaxially oriented foamed film layers comprising essentially flat gas bubbles.
6. Transducer according to claim 5, wherein biaxially oriented foamed film layers, comprising essentially flat gas bubbles, are swelled.
7. Method for forming an electromechanical transducer element for converting mechanical force into electrical signals, the transducer having at least one transducer film (109,110) of permanently charged elastic dielectric cellular electret film, the method comprising following steps:
arranging at least one signal electrode (104) and at least one ground electrode (105, 107) on surfaces of a transducer film element; and
arranging additional material in order to improve the electric properties,
•10 characterised in that the additional material (108, 106) is disposed in between the permanently charged elastic dielectric cellular electret film and at least one electrode so that under compression the elastic electret film is suppressed more at the areas being directly against the additional material than elsewhere in the sig- 15 nal/ground ejectrode area.
8. Method according to claim 7, wherein the additional material is bosses, stripes, nodules or alike, and wherein the transducer film element, when under pressure, is suppressed more on the additional material area than elsewhere in the sig-
20 nal/ground electrode area in order to improve the electrical properties.
9. Transducer according to claim 7, wherein adjacent to the signal electrode and/or possibly partly onto it, is deposited a layer of isolating material
25 10. Transducer according to claim 7, wherein partly onto the ground electrode is deposited another layer of conductive layer material, such as silver-paste.
PCT/FI2003/000035 2002-01-17 2003-01-17 Electromechanical transducer element, method for forming an electromechanical transducer element and transducer formed by said method WO2003061339A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
AT03700125T ATE541412T1 (en) 2002-01-17 2003-01-17 ELECTROMECHANICAL TRANSDUCER ELEMENT, METHOD FOR FORMING AN ELECTROMECHANICAL TRANSDUCER ELEMENT, AND TRANSDUCER FORMED BY THE METHOD
EP03700125A EP1466501B1 (en) 2002-01-17 2003-01-17 Electromechanical transducer element, method for forming an electromechanical transducer element and transducer formed by said method
US10/894,417 US7589439B2 (en) 2002-01-17 2004-07-14 Electromechanical transducer element, method for forming an electromechanical transducer element and transducer formed by said method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20020092A FI118622B (en) 2002-01-17 2002-01-17 Musical instrument converter and method of making it
FI20020092 2002-01-17

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US10/894,417 Continuation US7589439B2 (en) 2002-01-17 2004-07-14 Electromechanical transducer element, method for forming an electromechanical transducer element and transducer formed by said method

Publications (1)

Publication Number Publication Date
WO2003061339A1 true WO2003061339A1 (en) 2003-07-24

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US (1) US7589439B2 (en)
EP (1) EP1466501B1 (en)
AT (1) ATE541412T1 (en)
FI (1) FI118622B (en)
WO (1) WO2003061339A1 (en)

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* Cited by examiner, † Cited by third party
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US7280014B2 (en) * 2001-03-13 2007-10-09 Rochester Institute Of Technology Micro-electro-mechanical switch and a method of using and making thereof
US7195393B2 (en) * 2001-05-31 2007-03-27 Rochester Institute Of Technology Micro fluidic valves, agitators, and pumps and methods thereof
US7211923B2 (en) * 2001-10-26 2007-05-01 Nth Tech Corporation Rotational motion based, electrostatic power source and methods thereof
US7378775B2 (en) * 2001-10-26 2008-05-27 Nth Tech Corporation Motion based, electrostatic power source and methods thereof
US7287328B2 (en) * 2003-08-29 2007-10-30 Rochester Institute Of Technology Methods for distributed electrode injection
US7217582B2 (en) * 2003-08-29 2007-05-15 Rochester Institute Of Technology Method for non-damaging charge injection and a system thereof
US8581308B2 (en) * 2004-02-19 2013-11-12 Rochester Institute Of Technology High temperature embedded charge devices and methods thereof
US20070074731A1 (en) * 2005-10-05 2007-04-05 Nth Tech Corporation Bio-implantable energy harvester systems and methods thereof
US9453774B2 (en) * 2013-12-17 2016-09-27 The Board Of Trustees Of The Leland Stanford Junior University Surface area-based pressure sensing
KR20170069806A (en) * 2015-12-11 2017-06-21 현대자동차주식회사 Manufacturing method of micro electro mechanical system sensor
CN108702576B (en) * 2016-08-22 2021-05-18 潍坊歌尔微电子有限公司 Capacitive MEMS microphone and electronic device
US9865527B1 (en) 2016-12-22 2018-01-09 Texas Instruments Incorporated Packaged semiconductor device having nanoparticle adhesion layer patterned into zones of electrical conductance and insulation
US9941194B1 (en) 2017-02-21 2018-04-10 Texas Instruments Incorporated Packaged semiconductor device having patterned conductance dual-material nanoparticle adhesion layer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6078006A (en) * 1996-04-17 2000-06-20 Emf Acoustics Oy Ltd. Stringed musical instrument transducer and procedure for its fabrication
WO2002051202A1 (en) * 2000-12-19 2002-06-27 Emfitech Oy Electromechanical transducer and method for manufacturing an electromechanical transducer

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2472901A1 (en) * 1979-12-28 1981-07-03 Thomson Csf BIMORPHIC TRANSDUCER IN POLYMER MATERIAL
NL8004351A (en) * 1980-07-30 1982-03-01 Philips Nv ELECTRIC CONVERTER.
US4533794A (en) * 1983-05-23 1985-08-06 Beveridge Harold N Electrode for electrostatic transducer
AT382490B (en) 1984-12-03 1987-02-25 Akg Akustische Kino Geraete LARGE ELECTROSTATIC SPEAKER
CA1277415C (en) * 1986-04-11 1990-12-04 Lorne A. Whitehead Elastomer membrane enhanced electrostatic transducer
US5682075A (en) * 1993-07-14 1997-10-28 The University Of British Columbia Porous gas reservoir electrostatic transducer
FI98714C (en) 1994-08-29 1997-08-11 Valtion Teknillinen A method of making a foamed plastic product
FI116873B (en) * 1996-02-26 2006-03-15 Panphonics Oy Acoustic element and sound processing method
FI962386A0 (en) 1996-06-07 1996-06-07 Kari Johannes Pirk Kirjavainen Electroacoustic omvandlare
FI115598B (en) 1998-04-27 2005-05-31 Panphonics Oy Acoustic element
FI108986B (en) 1999-07-01 2002-04-30 Emfitech Oy Process for producing a sensor element and a sensor element
FI116605B (en) 1999-11-05 2005-12-30 Panphonics Oy Acoustic element
FI108204B (en) * 1999-11-25 2001-11-30 Kari Johannes Kirjavainen A film for converting energies
FI20010766A0 (en) 2001-04-11 2001-04-11 Panphonics Oy Electromechanical converter and method of energy conversion

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6078006A (en) * 1996-04-17 2000-06-20 Emf Acoustics Oy Ltd. Stringed musical instrument transducer and procedure for its fabrication
WO2002051202A1 (en) * 2000-12-19 2002-06-27 Emfitech Oy Electromechanical transducer and method for manufacturing an electromechanical transducer

Also Published As

Publication number Publication date
ATE541412T1 (en) 2012-01-15
FI20020092A (en) 2003-07-18
FI118622B (en) 2008-01-15
FI20020092A0 (en) 2002-01-17
EP1466501B1 (en) 2012-01-11
EP1466501A1 (en) 2004-10-13
US20050035683A1 (en) 2005-02-17
US7589439B2 (en) 2009-09-15

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