WO2003027686A3 - Method and apparatus for temperature control of a device during testing - Google Patents

Method and apparatus for temperature control of a device during testing Download PDF

Info

Publication number
WO2003027686A3
WO2003027686A3 PCT/US2002/013441 US0213441W WO03027686A3 WO 2003027686 A3 WO2003027686 A3 WO 2003027686A3 US 0213441 W US0213441 W US 0213441W WO 03027686 A3 WO03027686 A3 WO 03027686A3
Authority
WO
WIPO (PCT)
Prior art keywords
power level
temperature control
device during
during testing
thermal head
Prior art date
Application number
PCT/US2002/013441
Other languages
French (fr)
Other versions
WO2003027686A2 (en
Inventor
Maxat Touzelbaev
Original Assignee
Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Priority to AU2002259063A priority Critical patent/AU2002259063A1/en
Publication of WO2003027686A2 publication Critical patent/WO2003027686A2/en
Publication of WO2003027686A3 publication Critical patent/WO2003027686A3/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433Sockets for IC's or transistors
    • G01R1/0441Details
    • G01R1/0458Details related to environmental aspects, e.g. temperature

Abstract

In the present method, a device under test (34) is maintained at a generally constant temperature. In furtherance thereof, a thermal head (30) is positioned adjacent the device (34), and a number of functional tests are run on the device (34), causing the power level of the device (34) to vary. The power level of the device (34) is monitored, and the power level of the thermal head (30) is varied so that the sum of the power level of the device under test (34) and the power level of the thermal head (30) remains generally constant.
PCT/US2002/013441 2001-09-27 2002-04-29 Method and apparatus for temperature control of a device during testing WO2003027686A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002259063A AU2002259063A1 (en) 2001-09-27 2002-04-29 Method and apparatus for temperature control of a device during testing

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US96517901A 2001-09-27 2001-09-27
US09/965,179 2001-09-27

Publications (2)

Publication Number Publication Date
WO2003027686A2 WO2003027686A2 (en) 2003-04-03
WO2003027686A3 true WO2003027686A3 (en) 2003-12-04

Family

ID=25509581

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/013441 WO2003027686A2 (en) 2001-09-27 2002-04-29 Method and apparatus for temperature control of a device during testing

Country Status (3)

Country Link
AU (1) AU2002259063A1 (en)
TW (1) TW564337B (en)
WO (1) WO2003027686A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6794620B1 (en) * 2001-11-07 2004-09-21 Advanced Micro Devices, Inc. Feedforward temperature control of device under test
DE102005001163B3 (en) 2005-01-10 2006-05-18 Erich Reitinger Semiconductor wafers` testing method, involves testing wafer by probes, and reducing heating energy with constant cooling efficiency, under consideration of detected increase of temperature of fluids flowing via tempered chuck device
TWI564578B (en) * 2014-12-05 2017-01-01 上海兆芯集成電路有限公司 Test head module and reconditioning method thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2180959A (en) * 1985-09-23 1987-04-08 Sharetree Ltd Apparatus for the burn-in of integrated circuits
EP0837335A1 (en) * 1996-10-21 1998-04-22 Schlumberger Technologies, Inc. Method and apparatus for temperature control of a device during testing
US5911897A (en) * 1997-01-13 1999-06-15 Micro Control Company Temperature control for high power burn-in for integrated circuits
WO2000004396A1 (en) * 1998-07-14 2000-01-27 Schlumberger Technologies, Inc. Apparatus, method and system of liquid-based, wide range, fast response temperature cycling control of electronic devices
WO2003041125A2 (en) * 2001-11-07 2003-05-15 Advanced Micro Devices, Inc. Voltage programmable power dissipater

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2180959A (en) * 1985-09-23 1987-04-08 Sharetree Ltd Apparatus for the burn-in of integrated circuits
EP0837335A1 (en) * 1996-10-21 1998-04-22 Schlumberger Technologies, Inc. Method and apparatus for temperature control of a device during testing
US5911897A (en) * 1997-01-13 1999-06-15 Micro Control Company Temperature control for high power burn-in for integrated circuits
WO2000004396A1 (en) * 1998-07-14 2000-01-27 Schlumberger Technologies, Inc. Apparatus, method and system of liquid-based, wide range, fast response temperature cycling control of electronic devices
WO2003041125A2 (en) * 2001-11-07 2003-05-15 Advanced Micro Devices, Inc. Voltage programmable power dissipater

Also Published As

Publication number Publication date
TW564337B (en) 2003-12-01
WO2003027686A2 (en) 2003-04-03
AU2002259063A1 (en) 2003-04-07

Similar Documents

Publication Publication Date Title
TW350915B (en) Method and apparatus for temperature control of a device during testing
TW358997B (en) Method and apparatus for performing operative testing on an IC
MY129902A (en) Method and apparatus for the management of forces in a wireless fixture
EP0933606A3 (en) Refrigerator testing
GB9503419D0 (en) Semiconductor device,production method therefor,method for testing semiconductor elements,test substrate for the method and method for producing the test
NO20020509D0 (en) Drill formation tests, apparatus and methods for testing and monitoring test status
MY125922A (en) Ic testing apparatus
WO2004040324A3 (en) A method of and apparatus for testing for integrated circuit contact defects
WO2004059331A3 (en) Apparatus and method for limiting over travel in a probe card assembly
EP1884789A3 (en) Test apparatus and test method
TW333678B (en) Method and apparatus for testing a semiconductor wafer
WO2001075463A1 (en) Method for analyzing failure of semiconductor integrated circuit and failure
WO2005010932A3 (en) Mask network design for scan-based integrated circuits
BR9604897A (en) Method and device for measuring standards on a surface that is at least partially heat-conducting
WO2002008773A3 (en) Apparatus and method for electrical testing of electrical circuits
EP1439397A3 (en) Method of performing a burn-in
ATE520012T1 (en) SPINDLE TEST APPARATUS AND METHOD
FR2785680B1 (en) DEVICE FOR TESTING ROCK SAMPLES AT RELATIVELY HIGH PRESSURE AND TEMPERATURE
EP0909037A4 (en) Method and device for compressing and expanding data pattern
WO2003027686A3 (en) Method and apparatus for temperature control of a device during testing
SG70647A1 (en) Test head positioner for semiconductor device testing apparatus
WO2006002334A3 (en) Intelligent probe chips/heads
EP1123639A4 (en) Wafer level burn-in and test thermal chuck and method
MY131476A (en) Gas collecting device, test head and ic device testing apparatus
WO2003096009A3 (en) Fluid tester

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BY BZ CA CH CN CO CR CU CZ DE DM DZ EC EE ES FI GB GD GE GH HR HU ID IL IN IS JP KE KG KP KR LC LK LR LS LT LU LV MA MD MG MN MW MX MZ NO NZ PH PL PT RO SD SE SG SI SK SL TJ TM TR TT TZ UG UZ VN YU ZA

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GH GM KE LS MW MZ SD SL SZ UG ZM ZW AM AZ BY KG KZ RU TJ TM AT BE CH CY DE DK FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GQ ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: JP

WWW Wipo information: withdrawn in national office

Country of ref document: JP