WO2003014690A1 - Pressure sensor - Google Patents
Pressure sensor Download PDFInfo
- Publication number
- WO2003014690A1 WO2003014690A1 PCT/NO2002/000257 NO0200257W WO03014690A1 WO 2003014690 A1 WO2003014690 A1 WO 2003014690A1 NO 0200257 W NO0200257 W NO 0200257W WO 03014690 A1 WO03014690 A1 WO 03014690A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- measuring element
- cavity
- pressure gauge
- gauge according
- parts
- Prior art date
Links
- 238000000034 method Methods 0.000 claims abstract description 8
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 5
- 239000010703 silicon Substances 0.000 claims abstract description 5
- 230000000295 complement effect Effects 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims 1
- 210000000056 organ Anatomy 0.000 abstract description 12
- 239000011797 cavity material Substances 0.000 description 43
- 239000000543 intermediate Substances 0.000 description 5
- 239000012528 membrane Substances 0.000 description 5
- 238000001020 plasma etching Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical compound Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 description 2
- 229910052729 chemical element Inorganic materials 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 1
- 241000283068 Tapiridae Species 0.000 description 1
- 238000004873 anchoring Methods 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 208000002925 dental caries Diseases 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0026—Transmitting or indicating the displacement of flexible, deformable tubes by electric, electromechanical, magnetic or electromagnetic means
- G01L9/0027—Transmitting or indicating the displacement of flexible, deformable tubes by electric, electromechanical, magnetic or electromagnetic means using variations in ohmic resistance
Definitions
- the width is determi- i5 ned to a great extent by the sensor organs which shall be arranged on the outside of the measuring element. If piezo-resistive elements are used as sensor organs, a typical magnitude of the signals in the pressure range 0,5-1 OObar would be about 40 mV ⁇ /bar. This is an essential greater signal than what can be achieved with the known embodiment shown in Figs. 1-3, which has a maximum of
- the mounting of the measuring element may example given be performed as shown in Fig. 1 for the known sensor designed for very high pressures.
- the cavity 103 may be equipped with an internal partition for creation of two cavities.
- the two cavities form two single canals which run side by side in the longitudinal direction of the measuring element.
- the height of the cavities must be considerably greater than the sum of the width of the two cavities.
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT02746217T ATE312341T1 (en) | 2001-07-13 | 2002-07-11 | PRESSURE SENSOR |
EP02746217A EP1407240B1 (en) | 2001-07-13 | 2002-07-11 | Pressure sensor |
US10/483,398 US6966229B2 (en) | 2001-07-13 | 2002-07-11 | Pressure sensor |
DE60207864T DE60207864T2 (en) | 2001-07-13 | 2002-07-11 | PRESSURE SENSOR |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NO20013509 | 2001-07-13 | ||
NO20013509A NO314963B1 (en) | 2001-07-13 | 2001-07-13 | Pressure Sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2003014690A1 true WO2003014690A1 (en) | 2003-02-20 |
Family
ID=19912670
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/NO2002/000257 WO2003014690A1 (en) | 2001-07-13 | 2002-07-11 | Pressure sensor |
Country Status (6)
Country | Link |
---|---|
US (1) | US6966229B2 (en) |
EP (1) | EP1407240B1 (en) |
AT (1) | ATE312341T1 (en) |
DE (1) | DE60207864T2 (en) |
NO (1) | NO314963B1 (en) |
WO (1) | WO2003014690A1 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9010191B2 (en) | 2011-12-22 | 2015-04-21 | Rosemount Inc. | Pressure sensor module for sub-sea applications |
CA2866380C (en) | 2012-03-06 | 2017-01-17 | Rosemount, Inc. | Remote seal pressure measurement system for subsea use |
US9442031B2 (en) | 2013-06-28 | 2016-09-13 | Rosemount Inc. | High integrity process fluid pressure probe |
US9689769B2 (en) * | 2013-07-19 | 2017-06-27 | Rosemount Inc. | Pressure transmitter having an isolation assembly with a two-piece isolator plug |
US9234776B2 (en) | 2013-09-26 | 2016-01-12 | Rosemount Inc. | Multivariable process fluid transmitter for high pressure applications |
US9459170B2 (en) | 2013-09-26 | 2016-10-04 | Rosemount Inc. | Process fluid pressure sensing assembly for pressure transmitters subjected to high working pressure |
US9638600B2 (en) | 2014-09-30 | 2017-05-02 | Rosemount Inc. | Electrical interconnect for pressure sensor in a process variable transmitter |
US9683675B2 (en) | 2014-11-24 | 2017-06-20 | General Electric Company | Pressure modulator |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4481497A (en) * | 1982-10-27 | 1984-11-06 | Kulite Semiconductor Products, Inc. | Transducer structures employing ceramic substrates and diaphragms |
US4535631A (en) * | 1982-09-29 | 1985-08-20 | Schlumberger Technology Corporation | Surface acoustic wave sensors |
EP0373010A1 (en) * | 1988-10-27 | 1990-06-13 | Societe De Prospection Electrique Schlumberger | Pressure sensor usable in oil wells |
US4984467A (en) * | 1988-03-15 | 1991-01-15 | Pfister Gmbh | Transducer for pressures and/or vibrations and method for manufacturing thereof |
US5107710A (en) * | 1990-01-08 | 1992-04-28 | Degussa | Pressure sensor |
WO1997032190A1 (en) * | 1996-02-27 | 1997-09-04 | Nyfotek A/S | Pressure sensor |
US5744727A (en) * | 1994-03-07 | 1998-04-28 | Sinvent A/S | Pressure gauge |
US5861558A (en) * | 1996-02-28 | 1999-01-19 | Sigma-Netics, Inc. | Strain gauge and method of manufacture |
-
2001
- 2001-07-13 NO NO20013509A patent/NO314963B1/en not_active IP Right Cessation
-
2002
- 2002-07-11 AT AT02746217T patent/ATE312341T1/en not_active IP Right Cessation
- 2002-07-11 US US10/483,398 patent/US6966229B2/en not_active Expired - Lifetime
- 2002-07-11 EP EP02746217A patent/EP1407240B1/en not_active Expired - Lifetime
- 2002-07-11 WO PCT/NO2002/000257 patent/WO2003014690A1/en not_active Application Discontinuation
- 2002-07-11 DE DE60207864T patent/DE60207864T2/en not_active Expired - Lifetime
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4535631A (en) * | 1982-09-29 | 1985-08-20 | Schlumberger Technology Corporation | Surface acoustic wave sensors |
US4481497A (en) * | 1982-10-27 | 1984-11-06 | Kulite Semiconductor Products, Inc. | Transducer structures employing ceramic substrates and diaphragms |
US4984467A (en) * | 1988-03-15 | 1991-01-15 | Pfister Gmbh | Transducer for pressures and/or vibrations and method for manufacturing thereof |
EP0373010A1 (en) * | 1988-10-27 | 1990-06-13 | Societe De Prospection Electrique Schlumberger | Pressure sensor usable in oil wells |
US5107710A (en) * | 1990-01-08 | 1992-04-28 | Degussa | Pressure sensor |
US5744727A (en) * | 1994-03-07 | 1998-04-28 | Sinvent A/S | Pressure gauge |
WO1997032190A1 (en) * | 1996-02-27 | 1997-09-04 | Nyfotek A/S | Pressure sensor |
US5861558A (en) * | 1996-02-28 | 1999-01-19 | Sigma-Netics, Inc. | Strain gauge and method of manufacture |
Also Published As
Publication number | Publication date |
---|---|
NO314963B1 (en) | 2003-06-16 |
EP1407240B1 (en) | 2005-12-07 |
EP1407240A1 (en) | 2004-04-14 |
US20040159160A1 (en) | 2004-08-19 |
DE60207864T2 (en) | 2006-08-17 |
ATE312341T1 (en) | 2005-12-15 |
NO20013509L (en) | 2003-01-14 |
US6966229B2 (en) | 2005-11-22 |
NO20013509D0 (en) | 2001-07-13 |
DE60207864D1 (en) | 2006-01-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4879903A (en) | Three part low cost sensor housing | |
EP3364166B1 (en) | Microelectromechanical scalable bulk-type piezoresistive force/pressure sensor | |
US7685881B2 (en) | Sensor element and sensor assembly provided with a casing | |
US7562580B2 (en) | Ruggedized pressure sensor | |
KR100319538B1 (en) | Integrated Force Sensor | |
CA2288957A1 (en) | Multiparameter fiber optic sensor for use in harsh environments | |
US6966229B2 (en) | Pressure sensor | |
US5844141A (en) | Pressure sensor having stress sensitive member | |
IT201800002367A1 (en) | MEMS PRESSURE SENSOR WITH MULTIPLE SENSITIVITY AND REDUCED DIMENSIONS | |
US7409865B2 (en) | Diaphragm structure | |
US7401521B2 (en) | Pressure sensor with integrated structure | |
EP1012554B1 (en) | Pressure sensor | |
JP7113487B2 (en) | pulse wave sensor | |
Melvås et al. | A free-hanging strain-gauge for ultraminiaturized pressure sensors | |
US5744727A (en) | Pressure gauge | |
JPS63217671A (en) | Semiconductor pressure sensor | |
GB2307744A (en) | Pressure sensor | |
JP2002022562A (en) | Infinitesimal force measuring method and infinitesimal force measuring instrument | |
JP2019148511A (en) | Biological information acquisition device | |
CS264751B1 (en) | Pressure sensing element |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ OM PH PL PT RO RU SD SE SG SI SK SL TJ TM TN TR TT TZ UA UG US UZ VN YU ZA ZM ZW Kind code of ref document: A1 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BY BZ CA CH CN CO CR CU CZ DE DM DZ EC EE ES FI GB GD GE GH HR HU ID IL IN IS JP KE KG KP KR LC LK LR LS LT LU LV MA MD MG MN MW MX MZ NO NZ OM PH PL PT RU SD SE SG SI SK SL TJ TM TN TR TZ UA UG US UZ VN YU ZA ZM |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LU MC NL PT SE SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG Kind code of ref document: A1 Designated state(s): GH GM KE LS MW MZ SD SL SZ UG ZM ZW AM AZ BY KG KZ RU TJ TM AT BE BG CH CY CZ DK EE ES FI FR GB GR IE IT LU MC PT SE SK TR BF BJ CF CG CI GA GN GQ GW ML MR NE SN TD TG |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
WWE | Wipo information: entry into national phase |
Ref document number: 2002746217 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 10483398 Country of ref document: US |
|
WWP | Wipo information: published in national office |
Ref document number: 2002746217 Country of ref document: EP |
|
REG | Reference to national code |
Ref country code: DE Ref legal event code: 8642 |
|
WWG | Wipo information: grant in national office |
Ref document number: 2002746217 Country of ref document: EP |
|
NENP | Non-entry into the national phase |
Ref country code: JP |
|
WWW | Wipo information: withdrawn in national office |
Country of ref document: JP |