WO2003001136A1

WO2003001136A1 - Cooling plate and method of producing the same

Info

Publication number: WO2003001136A1
Application number: PCT/JP2002/006143
Authority: WO
Inventors: Shigetoshi Jogan; Kiyoshi Tada
Original assignee: Showa Denko K.K.
Priority date: 2001-06-20
Filing date: 2002-06-20
Publication date: 2003-01-03
Also published as: TW530147B; KR20040012950A

Abstract

A cooling plate comprising two metal plates (2, 3) formed with cooling medium flow passageway forming grooves (2a, 3a) in their superposed surfaces, the metal plates being superposed and integrally joined, thereby internally forming cooling medium flow passageways (4), wherein at least the cooling medium flow passageway forming grooves (2a, 3a) in the superposed surface of the metal plates (2, 3) are preferably formed with anode oxidation films (10) throughout the superposed surfaces, and weld portions (20) are formed by friction stir joining so as to integrally join the two metal plates (2, 3). Thereby, the corrosion resistance of the cooling medium flow passageways is improved to provide high durability and long life for a cooling plate, thus making uniform cooling possible.

Description

Cooling plate and method of manufacturing the same

This application claims priority from Japanese Patent Application No. 2001-185859 filed on June 20, 2001 and US Provisional Application No. 60 / 330,927 filed on January 2, 2001. The content of the disclosure is

It forms part of the request.

Field

The present invention relates to a cooling plate used as a backing plate, a susceptor, a cooling plate for various temperature control, and the like in, for example, a sputtering device, a semiconductor manufacturing device, and an LCD manufacturing device.

In this specification, the term “aluminum” is used to include aluminum and its alloys.

Landscape: Technology

For example, a backing plate for attaching a target is used in a sputtering apparatus for manufacturing semiconductors. This backing plate (101) has a target (100) attached to the surface as shown in FIG. A cooling medium flow passage (102) is formed in the inside to cool the cooling medium. That is, the backing plate (101) is composed of a laminated plate in which two aluminum plates (103) and (104) are overlapped and joined, and the backing plate (101) is formed on the overlapping surface of both aluminum plates (103) and (104). The cooling medium flow passage forming grooves (105) and (106) are respectively formed, and the aluminum plates (103) and (104) are joined and integrated so that the positions of these grooves correspond to each other, thereby forming the backing plate (101). Circuit inside A cooling medium flow path (102) is formed.

By the way, in the conventional packing plate, the joining and integration of the two aluminum plates (103) (104) is performed in order to prevent the leakage of the cooling medium flowing through the cooling medium flow passage (102). This was generally done by brazing the mating surfaces.

However, in the above-mentioned conventional backing plate, the surface of the groove (105) (106) is in a state where the aluminum base is exposed as it is, so that water or the like as a cooling medium is exposed to the groove (105). If (106) was allowed to flow for a certain period of time, there was a problem that these grooves would be corroded, and thus the life of the backing plate was short. At present, for example, they are replaced with new ones in one to two years due to such deterioration due to corrosion.

The present invention has been made in view of such technical background, and an object of the present invention is to provide a cooling plate having a cooling medium circulation channel having excellent corrosion resistance and a long life, and having excellent cooling performance. .

Other objects of the present invention will be made clear by the following embodiments of the present invention. Disclosure of the invention

The above object is to provide a cooling plate having a cooling medium flow passage formed therein by superimposing and joining and integrating a plurality of metal plates each having a cooling medium flow passage forming groove formed on an overlapping surface. An anodic oxide film is formed on at least the groove for forming the cooling medium flow passage on the superposed surface of the metal plates, and the plurality of metal plates are integrally joined by friction stir welding. Achieved by boards.

According to this cooling plate, since the anodic oxide film is formed at least in the groove for forming the cooling medium flow passage, corrosion of the cooling medium flow passage is effectively prevented, and The durability is significantly improved. In addition, since the metal plates are joined by friction stir welding, the welded portions do not adversely affect the anodic oxide film after production, such as deterioration, and therefore the excellent corrosion prevention effect is sufficiently maintained. And a long-life cooling plate with excellent durability can be obtained. Furthermore, since the joining is performed by friction stir welding, the metal plates are joined to each other in an excellent state, whereby uniform cooling is performed as a cooling plate. ,

It is preferable that the anodized film is formed on the entire surface of the superposed surfaces of the metal plates, thereby preventing not only corrosion of the cooling medium flow passage but also corrosion of the entire superposed surface of the metal plates. The durability as a plate is further improved.

It is preferable that at least the peripheral portion near the cooling medium flow passage in the gap between the overlapping surfaces of the metal plates is sealed in a liquid-tight state by a sealing material. This can prevent the coolant such as water from leaking out of the cooling medium flow passage and staying there, so that the occurrence of crevice corrosion can be reliably prevented, and the durability of the cooling plate is improved. Further improve.

It is preferable to use a material made of a metal material or a material made of a water-resistant resin adhesive from the viewpoint of excellent joining (adhesion) durability.

As the above-mentioned water-resistant resin adhesive, use of an adhesive composed of one or more resins selected from the group consisting of an epoxy resin, a phenol resin and a polyolefin resin has an advantage in terms of adhesion durability. It is preferable because it is particularly excellent.

It is preferable to use an aluminum plate as the metal plate, whereby the weight can be reduced.

The method for manufacturing a cooling plate according to the present invention may further include: a first step of forming a cooling medium flow passage forming groove on each of the superposed surfaces of the plurality of metal plates; and anodizing treatment on the superposed surface of the metal plates. A second step of forming an anodized film by performing friction stir welding in a state where the superposed surfaces of the plurality of metal plates are superimposed on each other, and a third step of joining them together. It is characterized by including. Up Not only can the cooling plate of the present invention having the above-mentioned features be manufactured with high productivity, but also before the friction stir welding is performed, since the anodizing treatment is performed first, the anode An oxide film can be formed, and therefore, the reliability of preventing corrosion of the superposed surfaces of the metal plates can be enhanced, and there is an advantage that a high-quality cooling plate can be manufactured. Furthermore, since the metal plates are joined by friction stir welding, the joining can be performed without deteriorating the previously formed anodic oxide film at the time of joining, and the excellent corrosion prevention effect can be sufficiently maintained. Thus, a long-lasting cooling plate with excellent durability can be manufactured. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a perspective view showing a cooling plate according to one embodiment of the present invention.

FIG. 2 is a plan view of the cooling plate.

FIG. 3A is a sectional view taken along line AA in FIG.

FIG. 3B is an enlarged sectional view showing the cooling medium flow passage and its vicinity in FIG. 3A.

FIG. 4 is a perspective view showing the cooling plate in a separated state before joining.

FIG. 5 is a sectional view showing a cooling plate according to another embodiment.

FIG. 6 is a sectional view showing a conventional cooling plate. BEST MODE FOR CARRYING OUT THE INVENTION

FIGS. 1 to 3 show a cooling system according to an embodiment of the present invention. The cooling plate (1) is used as a backing plate of a sputtering apparatus, and is composed of a laminated plate in which two metal plates (2) and (3) are overlapped and joined together. In this embodiment, an aluminum plate is used as the metal plate (2) (3).

Each of the superposed surfaces of the two metal plates (2) and (3) has a semicircular cross section. The grooves (2a) and (3a) for forming the cooling medium flow passage are formed. That is, as shown in FIG. 4, in the superposed surface of the lower metal plate (3), after one groove formed from one end in the longitudinal direction is branched in three directions, these three The grooves extend parallel to the other end along the length direction, and the three grooves join at the other end to form a single groove for forming the cooling medium flow passage (3). a) is formed. In the upper metal plate (2), the cooling medium passage forming groove (2a) in exactly the same manner is formed. Then, as shown in FIG. 3A, the overlapping surfaces of the metal plates (2) and (3) are overlapped with each other so that the positions of the grooves (2a) and (3a) are aligned. As a result, a circuit-shaped cooling medium flow passage (4) is formed inside the cooling plate (1) (see Fig. 2).

As shown enlarged in FIG. 3B, an anodized film (10) (10) is formed on the superposed surface of the two metal plates (2) and (3). That is, the anodic oxide films (10) and (10) are formed in the grooves (2a) and (3a) for forming the cooling medium flow passages, and the entire remaining surface of the superposed surface of the metal plates (2) and (3) is formed. Similarly, anodized films (10) and (10) are formed. Since the anodic oxide film is formed on the grooves (2a) and (3a) for forming the cooling medium flow passages, the corrosion of the cooling medium flow passages (4) can be effectively prevented. The durability of the cooling plate (1) can be significantly improved. In addition, since the anodized film is formed on the entire surface of the metal plates (2) and (3) including the grooves (2a) and (3a) for forming the cooling medium flow paths, the cooling medium flow paths are formed. In addition to the corrosion prevention of (4), it is possible to prevent the corrosion of the entire overlapping surface, and it is possible to further improve the durability of the cooling plate (1). As described above, the periphery of the cooling medium flow path (4) in the gap between the overlapping surfaces of the metal plates (2) and (3) is sealed in a liquid-tight state by the sealing material (11). I have. Generally, when a gap is formed between the superposed surfaces of the metal plates, crevice corrosion easily occurs due to a cooling medium such as water. Of the cooling medium flow path (4) is sealed with a sealing material, so that refrigerant such as water leaks out of the cooling medium flow path (4) and stays there. As a result, the occurrence of crevice corrosion can be reliably prevented, and the durability of the cooling plate (1) is further improved. Note that the entire gap 5 between the overlapping surfaces of the metal plates may be sealed with a sealing material.

The joining and integration of the two metal plates (2) and (3) are performed by friction stir welding. This friction stir welding is performed, for example, by inserting a rotating pin-shaped probe into a welding target portion, softening the contact portion with the probe with frictional heat, and stirring the probe while inserting the probe along the welding target portion. This is a joining method of welding by moving. It is a kind of solid-state joining method, so that dissimilar metals can be joined together. In this embodiment, as shown in FIG. 1, FIG. 2, and FIG. 3A, the metal plate (2) is friction stir welded from the upper surface side, and the position of the welded portion (20) is (2) A central portion sandwiched between the peripheral portion of (3) and the three grooves (2a), (2a), and (2a) arranged in parallel as described above.

5 Since the two metal plates (2) and (3) are joined by friction stir welding in this way, the anodic oxide film (10) deteriorates from such welds (20) after manufacturing. It does not have any adverse effect. Therefore, the excellent corrosion prevention effect can be sufficiently maintained, and a long-life cooling plate (1) with excellent durability can be obtained. Furthermore, since the joining is performed by friction stir welding, even if an anodic oxide film is present, the two metal plates (2) and (3) 0 are joined in a good state, and as a result, uniform cooling as the cooling plate (1) is achieved. It is possible.

In the present invention, as the sealing material (11), any material can be used as long as it can seal the gap between the superposed surfaces of the metal plates (2) and (3) in a liquid-tight state. Among them, it is preferable to use a sealing material made of a metal material (metal fitting) or a sealing material made of a five-water-resistant resin adhesive, since the bonding (adhesion) durability can be improved. The metal material constituting the sealing material (11) is not particularly limited, and examples thereof include aluminum and the like. The water-resistant resin adhesive constituting the sealing material (11) is not particularly limited, but is a group consisting of an epoxy-based resin, a phenol-based resin, and a polyolefin-based resin because of its particularly excellent adhesion durability. It is preferable to use an adhesive composed of one or more resins selected from among them.

The cooling plate (1) of the present invention is manufactured, for example, as follows. First, the overlapping surfaces of the two metal plates (2) and (3) are pressed by a molding die having a molding convex portion corresponding to the shape of the grooves (2a) and (3a). The grooves (2a) and (3a) for forming the coolant flow passage are formed on the surface (first step).

Next, an anodizing treatment is performed on the superposed surfaces of the metal plates (2) and (3) to form an anodized film (second step). .

Next, the superposed surfaces of the metal plates (2) and (3) are overlapped so that the positions of the cooling medium flow passage forming grooves (2a) and (3a) coincide with each other, and friction stir welding is performed in this state. The metal plates (2) and (3) are joined and integrated (third step).

According to this manufacturing method, since the anodic oxidation treatment is first performed before the friction stir welding is performed, it is possible to form the anodic oxide film in a good state even to the details of the superposed surfaces of the metal plates (2) and (3). it can. Therefore, it is possible to improve the certainty of preventing the corrosion of the superposed surfaces of the metal plates (2) and (3). In addition, since friction stir welding is used as the joining method after the formation of the anodic oxide film, there is an advantage that the anodic oxide film previously formed during the joining is not deteriorated.

In the above embodiment, the anodic oxide film (10) is formed on the superposed surface of the metal plates (2) and (3). (Rear surface).

In the above-described embodiment, the two metal plates (2) and (3) are overlapped and joined. Of course, this two-piece joint integrated structure is a basic structure, and one or more sheets are added to this structure. In combination with the above, a configuration in which three or more metal plates are joined in a configuration having the same gist as that of the above-described embodiment may be adopted, and the invention described in the claims of the present application is as described above. It also includes various configurations.

In the above embodiment, the cross-sectional shape of the cooling medium flow path (4) is circular, but is not particularly limited to this. Further, the circuit configuration of the cooling medium flow passage (4) is not limited to the branching or merging configuration as in the above embodiment, but may be, for example, a meandering circuit. . Further, in the above embodiment, the friction stir welding is performed from the upper surface side of the metal plate (2). However, for example, as shown in FIG. 5, the friction stir welding is performed from the side surface side of the metal plate (2) (3). It may be.

Further, in the above embodiment, the cooling plate (1) of the present invention has been described as being used as a backing plate of a sputtering apparatus. However, the use of the cooling plate (1) of the present invention is not particularly limited. It can be used as a packing plate, a susceptor, or a cooling plate for various temperature control in an apparatus or an LCD manufacturing apparatus.

Next, specific examples of the present invention will be described.

Example 1

Two aluminum plates having grooves as shown in FIG. 4 were prepared, and anodizing treatment (current density: 1.3 AX dm ² Anodization and boiling water sealing were performed by AC electrolysis for 15 minutes to form an anodized film with a thickness of 6 m.

The groove forming surfaces of the aluminum plates were overlapped with each other in such a manner as to match the positions of the grooves, and in this state, friction stir welding was performed to join and integrate the aluminum plates to obtain a cooling plate.

Example 2

In the gap between the superposed surfaces of the aluminum plates (anodic oxide films) A cooling plate was obtained in the same manner as in Example 1 except that the vicinity of the cooling medium flow passage was sealed in a liquid-tight state with a sealing material made of aluminum.

Example 3

Example 1 except that the peripheral portion near the cooling medium flow path in the gap between the overlapping surfaces of the aluminum plates (anodic oxide films) was sealed in a liquid-tight state with a sealing material made of an epoxy resin adhesive. A cooling plate was obtained in the same manner as in 1.

Example 4

Except that the peripheral portion near the cooling medium flow passage in the gap between the overlapping surfaces of the aluminum plates (anodic oxide films) was sealed in a liquid-tight state with a sealing material made of a phenolic resin adhesive. A cooling plate was obtained in the same manner as in Example 1.

Example 5

Except that the peripheral portion near the cooling medium flow path in the gap between the overlapping surfaces of the aluminum plates (anodized films) was sealed in a liquid-tight state with a sealing material made of a polyolefin resin adhesive. A cooling plate was obtained in the same manner as in Example 1.

Example 6

Example 1 except that the peripheral portion near the cooling medium flow passage in the gap between the overlapping surfaces of the aluminum plates (anodized films) was sealed in a liquid-tight state with a sealing material made of an acryl resin adhesive. A cooling plate was obtained in the same manner as in 1.

Comparative Example 1

A cooling plate was obtained in the same manner as in Example 1, except that the anodic oxide film was not formed.

Comparative Example 2

A cooling plate was obtained in the same manner as in Comparative Example 1, except that TIG welding was used instead of friction stir welding.

The corrosion resistance (corrosion prevention) of each cooling plate obtained as described above was evaluated by the following test method. Corrosion resistance (corrosion prevention) test method

After passing a corrosion test solution (aqueous solution) composed of the following composition through the cooling medium flow path of each cooling plate for 30 hours at a flow rate of 30 LZ and a liquid temperature of 90 to 95 ° C for 500 hours, the cooling medium flow path and stacking were performed. Observe the gaps between the mating surfaces, and mark "〇" for those without corrosion, "△" for those with minimal corrosion, and "〇" for those with significant corrosion. x ”. In addition, the evaluation of “△ to 〇” in Table 1 indicates that although there was basically no corrosion, rarely a small degree of corrosion was observed. In contrast, the evaluation of “〇” Indicates a state in which the occurrence of corrosion is reliably suppressed.

Corrosion test solution _{(NaC 1: 234mgZL, Na 2} S0 4: 89mgZL, C uC 12 · 2 H2O: 2. 7mg / L, F e C 12 · 6H 2 0: 145mg / L)

With / without sealing Anodized film Corrosion resistance (corrosion resistance) Joining method and type With / without cooling medium flow passage *) Joining gap Example 1 Friction stir welding No Yes (6) 〇 Δ Example 2 Friction stir welding Yes ( A 1) Yes (6) 〇実施 Example 3 Friction stir welding Yes (Ethoxy resin) Yes (6 m) 〇実施 Example 4 Friction stir welding Yes (X-nor resin) Yes (6 )) 〇〇 Example 5 With friction stir welding Yes (polyolefin resin) Yes (6) 〇〇 Example 6 Friction stir welding Yes (acrylic resin) Yes (6 πι) ■ 〇 △ ~ 〇 Comparative Example 1 Friction Stir welding None None X △ Comparative Example 2 TIG welding None None XX

*) Joint gap: gap between overlapping surfaces

As is clear from Table 1, the cooling plates of Examples 1 to 6 of the present invention were excellent in corrosion resistance in both the cooling medium flow paths and the gaps between the overlapping surfaces. In particular, in Examples 2 to 6, in which the gaps between the superposed surfaces were sealed with the sealing material, no corrosion occurred. On the other hand, the cooling plates of Comparative Examples 1 and 2 were inferior in corrosion resistance.

As described above, in the cooling plate of the present invention, since the cathodic oxide film is formed at least in the groove for forming the cooling medium flow passage, corrosion of the cooling medium flow passage can be effectively prevented, and the durability of the cooling plate can be improved. In addition to the fact that the metal plates are joined by friction stir welding, the welds may have a negative effect on the anodic oxide coating over time after production, such as deterioration. Therefore, it is possible to maintain the initially excellent corrosion prevention effect over a long period of time, and a synergistic action of these can provide a durable and long-lasting cooling plate. Furthermore, since the metal plates are joined in a favorable state by friction stir welding, uniform cooling without variation at any position on the surface is possible.

When the anodic oxide film is formed on the entire superposed surface of the metal plate, the durability of the cooling plate can be further improved.

If at least the peripheral portion of the gap between the overlapping surfaces of the metal plates near the cooling medium flow passage is sealed in a liquid-tight state with a sealing material, the occurrence of crevice corrosion can be reliably prevented. Can be further improved in durability.

When the sealing material is made of a metal material or a water-resistant resin adhesive, the joining durability can be further improved, and the reliability of the sealing can be improved.

When the water-resistant resin adhesive is composed of one or more resins selected from the group consisting of epoxy resin, phenol resin and polyolefin resin, the adhesive durability is remarkable. Thus, the sealing can be reliably performed for a long time, and the durability of the cooling plate can be further improved.

When the metal plate is an aluminum plate, it is excellent in lightness. In addition, the method for manufacturing a cooling plate according to the present invention can produce the cooling plate with high productivity and, since the anodizing treatment is first performed before performing the friction stir welding, the details of the superposed surface of the metal plate can be obtained. The anodized film can be formed, and therefore, the reliability of preventing corrosion of the superposed surfaces of the metal plates can be enhanced, and a high-quality cooling plate can be manufactured. In addition, since the friction stir welding is used, the anodized film formed earlier during the welding does not deteriorate, and therefore, in combination with the above-described effect of improving the reliability of the corrosion prevention, a high durability with high durability can be obtained. A long-lasting cooling plate can be manufactured.

The terms and descriptions used herein are used to describe the embodiments according to the present invention, and the present invention is not limited to these. The present invention allows for any design changes within the scope of the claims without departing from the spirit thereof. Industrial applicability

As described above, the cooling plate of the present invention enables uniform cooling, has excellent durability, and has a long life. Therefore, for example, a backing plate, a susceptor, a variety of types in a sputtering device, a semiconductor manufacturing device, an LCD manufacturing device, etc. It is suitable as a cooling plate for temperature control.

Claims

The scope of the claims

1. A plurality of metal plates (2) and (3) having grooves (2a) and (3a) for cooling medium flow passages formed on the superimposed surface are superimposed and joined together to form an internal structure.

In the cooling plate with the cooling medium passage (4) formed in 5,

An anodic oxide film (10) is formed at least in the cooling medium flow path forming grooves (2a) and (3a) on the superposed surface of the metal plates (2) and (3), and the plurality of metal plates are formed. (2) A cooling plate characterized in that (3) is joined and integrated by friction stir welding.

0

2. The cooling plate according to claim 1, wherein an anodic oxide film (10) is formed on the entire superposed surface of the metal plates (2) and (3).

3. At least the peripheral portion near the cooling medium passage (4) in the gap between the superposed surfaces of the metal plates (2) and (3) is sealed in a liquid-tight state by the sealing material (11). 2. The cooling plate according to claim 1, wherein

4. The cooling plate according to claim 3, wherein the sealing material (11) is made of a metal material. 0

5. The cooling plate according to claim 3, wherein the sealing material (11) is made of a water-resistant resin adhesive.

6. The water-resistant resin adhesive according to claim 5, wherein the water-resistant resin adhesive is composed of one or more resins selected from the group consisting of an epoxy resin, a phenol resin, and a polyolefin resin. Cooling plate.

7. The cooling plate according to claim 1, wherein said metal plates (2) and (3) are aluminum plates.

8. An anodic oxide film (10) is formed on the entire surface of the superposed surfaces of the metal plates (2) and (3), and at least a gap between the superposed surfaces of the metal plates (2) and (3) is formed. The peripheral portion near the cooling medium flow passage (4) is sealed in a liquid-tight state by a sealing material (11), and an aluminum plate is used as the metal plate (2) (3). The cooling plate according to item 1 above.

9. The cooling plate according to claim 8, wherein the sealing material (11) is made of a metal material.

10. The cooling plate according to claim 8, wherein the sealing material (11) is made of a water-resistant resin adhesive.

11. The method according to claim 10, wherein the water-resistant resin adhesive is composed of one or more resins selected from the group consisting of an epoxy resin, a phenol resin, and a polyolefin resin. Cooling plate.

12. a first step of forming grooves (2a) and (3a) for forming a cooling medium flow passage in each of the superposed surfaces of the plurality of metal plates (2) and (3);

A second step of subjecting the superposed surfaces of the metal plates (2) and (3) to anodizing treatment to form an anodized film (10);

And a third step of joining the metal plates (2) and (3) by friction-stir welding in a state where the overlapping surfaces of the metal plates (2) and (3) are overlapped with each other. Manufacturing method of cooling plate.