WO2002097850A3 - Uniform broad ion beam deposition - Google Patents

Uniform broad ion beam deposition Download PDF

Info

Publication number
WO2002097850A3
WO2002097850A3 PCT/GB2002/002544 GB0202544W WO02097850A3 WO 2002097850 A3 WO2002097850 A3 WO 2002097850A3 GB 0202544 W GB0202544 W GB 0202544W WO 02097850 A3 WO02097850 A3 WO 02097850A3
Authority
WO
WIPO (PCT)
Prior art keywords
ion beam
beam deposition
broad ion
discharge chamber
plasma
Prior art date
Application number
PCT/GB2002/002544
Other languages
French (fr)
Other versions
WO2002097850A2 (en
Inventor
Mervyn Howard Davis
Gary Proudfoot
Original Assignee
Nordiko Ltd
Mervyn Howard Davis
Gary Proudfoot
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nordiko Ltd, Mervyn Howard Davis, Gary Proudfoot filed Critical Nordiko Ltd
Priority to JP2003500939A priority Critical patent/JP4093955B2/en
Priority to US10/479,266 priority patent/US20060231759A1/en
Priority to AU2002304513A priority patent/AU2002304513A1/en
Priority to EP02732905A priority patent/EP1393340B1/en
Priority to DE60229515T priority patent/DE60229515D1/en
Publication of WO2002097850A2 publication Critical patent/WO2002097850A2/en
Publication of WO2002097850A3 publication Critical patent/WO2002097850A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

Apparatus for the generation of a plurality of ion beams for use in vacuum sputtering methods is disclosed comprising: a discharge chamber, defined by a plasma confinement vessel, for generation of a plasma therein; and a plurality of facets located on the discharge chamber, each facet comprising acceleration and extraction means for extracting ions from the plasma in the discharge chamber in an ion beam.
PCT/GB2002/002544 2001-06-01 2002-05-29 Uniform broad ion beam deposition WO2002097850A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2003500939A JP4093955B2 (en) 2001-06-01 2002-05-29 Ion beam generator and vapor deposition method
US10/479,266 US20060231759A1 (en) 2001-06-01 2002-05-29 Uniform broad ion beam deposition
AU2002304513A AU2002304513A1 (en) 2001-06-01 2002-05-29 Uniform broad ion beam deposition
EP02732905A EP1393340B1 (en) 2001-06-01 2002-05-29 Ion gun
DE60229515T DE60229515D1 (en) 2001-06-01 2002-05-29 ION BEAM DEVICE

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0113368.5 2001-06-01
GBGB0113368.5A GB0113368D0 (en) 2001-06-01 2001-06-01 Apparatus

Publications (2)

Publication Number Publication Date
WO2002097850A2 WO2002097850A2 (en) 2002-12-05
WO2002097850A3 true WO2002097850A3 (en) 2003-10-16

Family

ID=9915732

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2002/002544 WO2002097850A2 (en) 2001-06-01 2002-05-29 Uniform broad ion beam deposition

Country Status (7)

Country Link
US (1) US20060231759A1 (en)
EP (1) EP1393340B1 (en)
JP (1) JP4093955B2 (en)
AU (1) AU2002304513A1 (en)
DE (1) DE60229515D1 (en)
GB (1) GB0113368D0 (en)
WO (1) WO2002097850A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008009889A1 (en) 2006-07-20 2008-01-24 Aviza Technology Limited Ion deposition apparatus
US8354652B2 (en) 2006-07-20 2013-01-15 Aviza Technology Limited Ion source including separate support systems for accelerator grids
EP2044610B1 (en) 2006-07-20 2012-11-28 SPP Process Technology Systems UK Limited Plasma sources
JP5380263B2 (en) 2009-12-15 2014-01-08 キヤノンアネルバ株式会社 Ion beam generator

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4447773A (en) * 1981-06-22 1984-05-08 California Institute Of Technology Ion beam accelerator system
US4538067A (en) * 1982-12-09 1985-08-27 International Business Machines Corporation Single grid focussed ion beam source
EP0462165A1 (en) * 1989-03-06 1991-12-27 Atomic Energy Authority Uk Ion gun.
WO1998018150A1 (en) * 1996-10-24 1998-04-30 Nordiko Limited Ion gun
US6236163B1 (en) * 1999-10-18 2001-05-22 Yuri Maishev Multiple-beam ion-beam assembly

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4684848A (en) * 1983-09-26 1987-08-04 Kaufman & Robinson, Inc. Broad-beam electron source
US6214183B1 (en) * 1999-01-30 2001-04-10 Advanced Ion Technology, Inc. Combined ion-source and target-sputtering magnetron and a method for sputtering conductive and nonconductive materials

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4447773A (en) * 1981-06-22 1984-05-08 California Institute Of Technology Ion beam accelerator system
US4538067A (en) * 1982-12-09 1985-08-27 International Business Machines Corporation Single grid focussed ion beam source
EP0462165A1 (en) * 1989-03-06 1991-12-27 Atomic Energy Authority Uk Ion gun.
WO1998018150A1 (en) * 1996-10-24 1998-04-30 Nordiko Limited Ion gun
US6236163B1 (en) * 1999-10-18 2001-05-22 Yuri Maishev Multiple-beam ion-beam assembly

Also Published As

Publication number Publication date
WO2002097850A2 (en) 2002-12-05
JP4093955B2 (en) 2008-06-04
JP2005506656A (en) 2005-03-03
US20060231759A1 (en) 2006-10-19
AU2002304513A1 (en) 2002-12-09
EP1393340A2 (en) 2004-03-03
GB0113368D0 (en) 2001-07-25
DE60229515D1 (en) 2008-12-04
EP1393340B1 (en) 2008-10-22

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