Classifications

• • H—ELECTRICITY
  • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • H05G—X-RAY TECHNIQUE
  • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
  • H05G2/001—Production of X-ray radiation generated from plasma
  • H05G2/003—Production of X-ray radiation generated from plasma the plasma being generated from a material in a liquid or gas state
• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
  • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
  • G03F7/70—Microphotolithographic exposure; Apparatus therefor
  • G03F7/70008—Production of exposure light, i.e. light sources
  • G03F7/70033—Production of exposure light, i.e. light sources by plasma extreme ultraviolet [EUV] sources

Definitions

• the procedure is such that the ignition delay is reduced by increasing the gas pressure or increased by reducing the gas pressure.
• Such changes in the gas pressure are particularly easy to achieve if the gas flows through the area of the electrode system, for example in order to influence the repetition frequency, that is to say to be able to carry out the method with higher pulse frequencies.
• the ignition delay can be regulated in that the time between reaching the predetermined ignition voltage and the ignition point is measured and in that the gas pressure is adjusted according to the predetermined ignition delay by means of the measurement result.
• the time between reaching the predetermined ignition voltage and the ignition point is measured, for example, in an analog manner using an integrator or digitally using a counter.
• the time is fed to a controller as a measured variable, which accordingly adjusts the gas pressure to stabilize the ignition delay. It can be averaged over a series of discharge processes, that is over a predetermined number of pulses.
• the invention also relates to a device with the features of the preamble of claim 29.
• ionization can occur in the discharge space.
• the mobile ions in the electric field hit the trigger electrode and usually have sufficient energy to knock secondary electrons out of the metallic surface of the electrode. Because of the potential difference, these electrons reach the anode.
• a conductive channel can be formed between the anode and the trigger electrode without the desired breakdown having already occurred in the area of the openings of the electrodes. there a noticeable part of the energy storage can be discharged via the trigger circuit, which entails the risk of this circuit being destroyed.
• the above object is achieved by the features of the characterizing part of claim 29. If the carrier electrode is arranged outside a particle beam which is formed in the axis of symmetry, the particles or ions accelerated in this axis no longer strike the carrier electrode. The malfunctions described above are therefore at least considerably reduced. The same applies if the trigger electrode has a shield that prevents the formation of a conductive channel between the trigger electrode and the anode.
• the device in such a way that the trigger electrode is completely insulated at least from the space adjacent to the first electrode is.
• the production of the trigger electrode for such a device can be advantageously influenced by complete insulation or coating. Inhomogeneities in the field or discharge formation on the metal surfaces of the trigger electrode in the transition region between insulated and non-insulated metal surfaces are also eliminated.
• the trigger electrode is not to be located in the axis of symmetry, it is preferable to design the device in such a way that the trigger electrode is designed as a hollow cylinder surrounding the axis of symmetry.
• the device is exposed to considerable heat during its operation. It is therefore advisable to design them so that the shielding is made of temperature-resistant insulation material.
• the electrode 12 is designed as an anode with a central opening 15 which widens conically starting from an electrode gap 22.
• ignition of the plasma 17 is only possible when an ignition voltage U z has been reached.
• an ignition delay 18 occurs.
• the size of the ignition delay 18 is regulated by controlling the gas pressure. With typical durations, the size of the ignition delay ranges from a few microseconds to a few milliseconds. The ignition delay leads to an extension of the build-up of the conductive plasma. This improves the cylinder symmetry of the plasma 17.
• the electrode system shown in FIG. 6 is provided with a trigger device in the area of the electrode 11.
• the electrode 11 points in the axis of symmetry 13 a trigger electrode 19, which is held by an insulator 26 in the bottom 30 of the electrode 11.
• the insulator 26 serves to enable the trigger electrode 19 to be given a potential which is different from that of the electrode 11.
• the trigger electrode 19 has a parasitic capacitance 31 with respect to the electrode 11, measured in parallel with a switch 32, with which both electrodes 19, 11 can be brought to the same potential.
• the electrode 12 is usually designed as an anode and is grounded as shown. In contrast, the cathode is at a negative potential -V while the trigger electrode 19 is at a potential -V + Vt.
• the potential of the trigger electrode before the start of the triggering process is therefore somewhat higher than that of the electrode 11.
• a trigger pulse is triggered by closing the switch 32, the potential of the trigger electrode 19 being pulled down to that of the electrode 11.
• Typical time constants for a change in the potential of the trigger electrode 19 are advantageously in the range from a few nanoseconds to a few hundred nanoseconds.

Landscapes

• Physics & Mathematics (AREA)
• Engineering & Computer Science (AREA)
• Plasma & Fusion (AREA)
• General Physics & Mathematics (AREA)
• Optics & Photonics (AREA)
• Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
• X-Ray Techniques (AREA)
• Plasma Technology (AREA)
• Physical Or Chemical Processes And Apparatus (AREA)

Priority Applications (5)

Applications Claiming Priority (6)

Publications (1)

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ID=26009027

Family Applications (1)

Country Status (8)

Cited By (6)

Families Citing this family (20)

Citations (5)

Family Cites Families (5)

• 2001
  • 2001-08-11 DE DE10139677A patent/DE10139677A1/de not_active Withdrawn
  • 2001-10-29 DE DE50115489T patent/DE50115489D1/de not_active Expired - Lifetime
  • 2001-10-29 EP EP01125762A patent/EP1248499B1/de not_active Expired - Lifetime
  • 2001-10-29 AT AT01125762T patent/ATE469533T1/de not_active IP Right Cessation
• 2002
  • 2002-03-12 TW TW091104540A patent/TWI284916B/zh active
  • 2002-03-23 WO PCT/DE2002/001085 patent/WO2002082872A1/de not_active Ceased
  • 2002-03-23 JP JP2002580685A patent/JP4330344B2/ja not_active Expired - Fee Related
  • 2002-03-23 US US10/474,121 patent/US7126143B2/en not_active Expired - Fee Related
  • 2002-03-23 EP EP02729817A patent/EP1374650A1/de not_active Withdrawn
  • 2002-03-23 CN CNB02807825XA patent/CN1311716C/zh not_active Expired - Fee Related
  • 2002-03-23 DE DE10291549T patent/DE10291549D2/de not_active Expired - Fee Related

Patent Citations (5)

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