WO2002041329A3 - Elektromechanisch regelbares elektrisches widerstandselement - Google Patents

Elektromechanisch regelbares elektrisches widerstandselement Download PDF

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Publication number
WO2002041329A3
WO2002041329A3 PCT/DE2001/004364 DE0104364W WO0241329A3 WO 2002041329 A3 WO2002041329 A3 WO 2002041329A3 DE 0104364 W DE0104364 W DE 0104364W WO 0241329 A3 WO0241329 A3 WO 0241329A3
Authority
WO
WIPO (PCT)
Prior art keywords
layer
electric resistance
electric
electromechanically
regulated
Prior art date
Application number
PCT/DE2001/004364
Other languages
English (en)
French (fr)
Other versions
WO2002041329A2 (de
Inventor
Carl-Friedrich Meyer
Hans-Joachim Scheibe
Original Assignee
Fraunhofer Ges Forschung
Carl-Friedrich Meyer
Hans-Joachim Scheibe
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung, Carl-Friedrich Meyer, Hans-Joachim Scheibe filed Critical Fraunhofer Ges Forschung
Priority to US10/432,133 priority Critical patent/US6788187B2/en
Publication of WO2002041329A2 publication Critical patent/WO2002041329A2/de
Publication of WO2002041329A3 publication Critical patent/WO2002041329A3/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C10/00—Adjustable resistors
    • H01C10/30—Adjustable resistors the contact sliding along resistive element
    • H01C10/308—Adjustable resistors the contact sliding along resistive element consisting of a thin film
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C10/00—Adjustable resistors
    • H01C10/30—Adjustable resistors the contact sliding along resistive element
    • H01C10/305—Adjustable resistors the contact sliding along resistive element consisting of a thick film

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Adjustable Resistors (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Push-Button Switches (AREA)

Abstract

Die Erfindung betrifft ein elektromechanisch regelbares elektrisches Widerstandselement. Dabei ist auf einem Substrat eine Schicht aus einem elektrisch leitenden Material mit konstantem spezifischem elektrischen Widerstand mit vorgebbarer Breite und Dicke angeordnet. Zusätzlich ist mindestens ein elektrischer Kontaktanschluss vorhanden und ein elektrisches Kontaktelement kann entlang der Oberfläche dieser Schicht mechanisch bewegt werden. Mit der Erfindung soll ein entsprechendes Widerstandselement zur Verfügung gestellt werden, das kostengünstig, mit reproduzierbaren elektrischen Eigenschaften hergestellt werden kann und eine hohe Verschleissbeständigkeit aufweist, wobei dies auch ohne zusätzliche Schmierung erreicht werden soll. Erfindungsgemäss wird hierzu auf der elektrisch leitenden Schicht auf dem Substrat eine ausschliesslich aus diamantähnlichem Kohlenstoff gebildete verschleissbeständige Schicht konstanter Dicke und höherem spezifischen elektrischen Widerstand, als dem der Schicht ausgebildet. Die diamantähnliche Kohlenstoffschicht steht dann in berührendem Kontakt mit dem mechanisch beweglichen Kontaktelement.
PCT/DE2001/004364 2000-11-18 2001-11-17 Elektromechanisch regelbares elektrisches widerstandselement WO2002041329A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US10/432,133 US6788187B2 (en) 2000-11-18 2001-11-17 Electric resistance element, which can be electromechanically regulated

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10058581.7 2000-11-18
DE10058581A DE10058581C1 (de) 2000-11-18 2000-11-18 Elektromechanisch regelbares elektrisches Widerstandselement

Publications (2)

Publication Number Publication Date
WO2002041329A2 WO2002041329A2 (de) 2002-05-23
WO2002041329A3 true WO2002041329A3 (de) 2003-04-24

Family

ID=7664654

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2001/004364 WO2002041329A2 (de) 2000-11-18 2001-11-17 Elektromechanisch regelbares elektrisches widerstandselement

Country Status (3)

Country Link
US (1) US6788187B2 (de)
DE (1) DE10058581C1 (de)
WO (1) WO2002041329A2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201414811D0 (en) * 2014-08-20 2014-10-01 Ibm Electromechanical switching device with electrodes comprising 2D layered materials having distinct functional areas
WO2018160490A1 (en) * 2017-02-28 2018-09-07 Ecolab Usa Inc. Alkaline cleaning composition comprising a hydroxyphosphono carboxylic acid and methods of reducing metal corrosion

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0391267A1 (de) * 1989-04-06 1990-10-10 Horst Siedle Kg Potentiometer
US5093647A (en) * 1989-10-06 1992-03-03 Kabushiki Kaisha Toyota Chuo Kenkyusho Sliding electric parts
FR2704314A1 (fr) * 1993-02-17 1994-10-28 Acfg Capteur, son procédé de fabrication et son application à la mesure.
WO1999062077A1 (en) * 1998-05-22 1999-12-02 N.V. Bekaert S.A. Resistors with low temperature coefficient of resistance and methods of making
US6046758A (en) * 1998-03-10 2000-04-04 Diamonex, Incorporated Highly wear-resistant thermal print heads with silicon-doped diamond-like carbon protective coatings

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4345236A (en) * 1980-12-29 1982-08-17 General Electric Company Abrasion-resistant screen-printed potentiometer
JP2775903B2 (ja) * 1989-10-04 1998-07-16 住友電気工業株式会社 ダイヤモンド半導体素子
US5111178A (en) * 1990-06-15 1992-05-05 Bourns, Inc. Electrically conductive polymer thick film of improved wear characteristics and extended life
US5133321A (en) * 1991-05-10 1992-07-28 Hering Charles A Integrated throttle control and idle validation sensor
DE4243410C2 (de) * 1992-12-17 1996-05-15 Mannesmann Ag Verfahren zur Herstellung eines Dünnfilmmeßwiderstandes
JP2889792B2 (ja) * 1993-07-01 1999-05-10 アルプス電気株式会社 可変抵抗器
US5543775A (en) * 1994-03-03 1996-08-06 Mannesmann Aktiengesellschaft Thin-film measurement resistor and process for producing same
EP1110234B1 (de) * 1998-08-26 2006-12-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und verfahren zur beschichtung von substraten im vakuum
AU2968600A (en) * 1999-01-20 2000-08-07 N.V. Bekaert S.A. Wear-resistant electromechanical contacts

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0391267A1 (de) * 1989-04-06 1990-10-10 Horst Siedle Kg Potentiometer
US5093647A (en) * 1989-10-06 1992-03-03 Kabushiki Kaisha Toyota Chuo Kenkyusho Sliding electric parts
FR2704314A1 (fr) * 1993-02-17 1994-10-28 Acfg Capteur, son procédé de fabrication et son application à la mesure.
US6046758A (en) * 1998-03-10 2000-04-04 Diamonex, Incorporated Highly wear-resistant thermal print heads with silicon-doped diamond-like carbon protective coatings
WO1999062077A1 (en) * 1998-05-22 1999-12-02 N.V. Bekaert S.A. Resistors with low temperature coefficient of resistance and methods of making

Also Published As

Publication number Publication date
US20040041686A1 (en) 2004-03-04
DE10058581C1 (de) 2002-03-14
US6788187B2 (en) 2004-09-07
WO2002041329A2 (de) 2002-05-23

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