WO2002032201A1 - Method of jetting viscous medium - Google Patents

Abstract

The invention relates to a method of improving the performance of a jetting assembly in an apparatus for jetting droplets of viscous medium on the fly onto a substrate. The jetting assembly is releasably mounted in the apparatus and comprises a nozzle, an ejection mechanism connected to the nozzle, and a viscous medium container connect to the eject mechanism. Information relating to an XY-position and a Z-position is obtained together with information regarding the exit velocity a droplet of viscous medium has when it exits the nozzle. The information is used as a basis for adjusting a trigger position of the nozzle for the subsequent jetting of droplets. The invention also concerns such a jetting assembly comprising storage means arranged to receive and hold calibration information of properties of the assembly obtained during calibration measurements.

Description

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stant a droplet is jetted. Then, the resulting actual position of the deposits are measured and the offset between the actual position and an expected nominal position is determined. The offset is then used for calculat- ing the actual XY-position of the nozzle.

According to a preferred embodiment of the invention, information relating to the Z-position of the nozzle is obtained by first jetting one or more droplets of viscous medium at a nominally predetermined location on the calibration surface. The jetting is performed on the fly, i.e. with the nozzle moving parallel with and relative to the calibration surface. Then, the resulting actual position of the deposits are measured and the differences between the measured positions of the deposits and the actual XY-location of the nozzle when the droplets were ejected are calculated. Then, when knowledge of the exit velocity of the jetted droplets already have been obtained, these differences are used as a basis for calculating the Z-position of the nozzle, i.e. the dis- tance between the nozzle and the calibration surface.

According to one preferred embodiment, the exit velocity has been previously determined and is, preferably, stored in storing means of the jetting assembly.

However, according to another preferred embodiment of the invention, the exit velocity may not be known when the Z-position of the nozzle is to be determined. Then, the above mentioned jetting of viscous medium droplets on the fly, and the measurement of the resulting positions of the deposits, is followed by a further jetting of vis- cous medium droplets on the fly. However, this second jetting of droplets on the fly is performed following a accurately controlled change in Z-position of the nozzle. Then, the resulting actual position of the deposits are measured and the differences between the measured posi- tions of the deposits and the actual XY-location of the nozzle when the droplets were ejected are calculated. These resulting differences are compared to the differ- CQ rd ti

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Φ «. 1 ra A u i •ti Φ β SH A O SH 4-1 Φ Φ ϋ -ti Φ •ti ra xi o rd CQ

TJ rH N ti 0 A ti CQ β β Ti rti β 03 rd -ti β Φ 4-1 SH i > ra rti 4-J i _. φ > 4-J X! >

-ti rd 0 A Φ O •ti Φ a O ε 4H CQ ϋ ra β ti rH O rd ti 4-1 Φ X! rd A

Es O Φ υ CQ ε a ra ti A ε 0 SH ra 0 Φ β XI Φ ra Φ A > ti A SH SH 4-1 4H 1 β IS] A xi CQ 01 0 Φ •ti A Oi β ti 4-1 a X! ti Φ rd 4-J rd ti ti 0 0 rti Φ Ti rd ti A β a SH xi -. 03 Φ ra β CQ 4-J CO ra Es Φ rd 4H rti ti 4H ε 4H Q X! Φ Es ti rd > -ti ti 01 β A ^•n -ti 03 CQ T3 4-> ε SH Φ 0 a A SH 0 CQ £ 4-1 X! 0 0

«. xi tn Ti N CQ ti Φ A rd A β 0 Φ 4H . φ Φ ti X! ti β Φ 4-1 Φ rti 4H

4-J ϋ β 4H SH rd 0 xi 0 Φ 4-J 4-J 0 a SH 0 Ti xi A EN O 4-1 4-1 rd 0 Φ Xi β β ra -. ti

SH φ 0 0 Φ Φ ti EH Xi β Φ rd Φ ti Φ 4-1 rH U Φ ϋ > 4-1 0 Φ ra φ V £ β rd ε ti U X! ε A 0 4-1 ^■r-i A Ti CQ β 4-> Φ Φ rd SH rti 4H Φ SH ε rd rH ra 0 0

-ti tn U 4-> A . A Ex rd rd 0 rd Ti U 4-J 0 a U ti A Φ 0 φ xi -rH

Φ -. ε β «. ^' A CQ 4H Ti EN rti SH Φ φ rH β β rd φ n 0 0 ^• fa SH φ xi Ti 4-1

^H X! CQ SH - O TJ 4-> ti 0 φ rH 4H A xi ε A ti rd rd SH X! SH -. 4-J 4-J CQ CQ ti xi 4-J rd

© A β Φ A β Φ Φ -ti 0 β a •ti 4-J rd V 4-1 ti TJ SH CQ 4-J 0 ra 4-1 4-1 β ti CQ rd 4-> A 0 SH 4-> CQ EX ε Φ rti Φ O rti Φ CQ υ Es Φ rd 4-J β a rd 0 0 β 5 β Φ Φ Φ -ti rd 0 ti 4-1 rd A rd 4H X! 0 rd rH O 0 β > Xi ti Φ 1 Φ 4H X A Φ

•ti

© ε Ti ^■n 4-J Ti rH a a A ra 4-J U 0 4-J rH Ό N Ti rd β 0 Φ u 0 ε N ε 0 φ 4-J rd

O

the lowest point of the assembly is preferably measured when assembling the assembly, and this measurement information is distributed to the jetting apparatus in connection with the mounting of the assembly in the apparatus. Preferably, said measurement information is stored in storage means of the assembly and transmitted to the apparatus via a signal interface.

According to an embodiment of the invention, the calibration surface is provided at a calibration station in the jetting apparatus that is separate from the substrate .

Alternatively, the substrate onto which the viscous medium is to be applied includes a portion that is not intended to be provided with viscous medium deposits and is used as a calibration surface. In this embodiment, the height of the substrate, or at least the calibration surface thereof, is determined prior to the jetting of droplets onto the calibration surface. Said height determination is preferably performed using a vision device, pref- erably a camera in combination with suitable lighting.

To ascertain that the droplets impact at the correct position on the substrate, it is preferred that the actual position of the nozzle when the jetting of a droplet is triggered can be determined to a high degree. The ac- tual position of the nozzle includes not only the X position and the Y position, i.e. the position of the nozzle in a plane parallel to the plane of the substrate, but also the Z position, i.e. the height of the nozzle above the substrate. Preferably, for process stability reasons, a calibration of the assembly is desirably performed immediately following the mounting of the jetting assembly in a jetting apparatus. Furthermore, it is possible that some jetting properties of the jetting assembly can change during the lifetime of a jetting assembly, i.e. until the assembly is empty of viscous medium and needs to be exchanged. Therefore, a calibration may desirably be per- 4-> β , . | 1 CQ ti ra I . 1 SH

1 0 φ β β 1 EN SH 1 4-1 ti 1 4-J 1 1 ti Ex β Φ

90 a β Φ O 0 SH ti Φ υ β A u 1 SH Φ 1 σ. n υ ra 1 rd rH 4-J

0 X! SH Φ rd 4-J rd Ti ti A υ Φ A Φ -r-i -ti 1 β 1 0 rd O i rd f SH 4-1 0 A 4-1 CQ 1 β 4H Φ 0 0 Φ SH a rti rd •ti φ rH > SH ti Φ

© o 0 ra rd . ti φ CQ SH -ti 4-J ε -. SH Φ rd ^•5 SH Φ Φ rd Ex Φ 0 SH

A rd SH *. CQ Φ Ti Φ Φ β π5 SH 4J rd 0 -. CQ i U > 0 a X! > A a 4-J

© ra 01 ti SH Xi Ti 4-1 υ ft EN 0 SH 0 Φ xi 4-1 ra 4J Φ rH 4-J A a ra A

Φ •ti 0 Φ β 0 Φ SH X. 4-J > Oi CQ 4-1 EN Ti rH Φ A -ti rd u rd rd β

Xi ra rti rH 4-1 β 4-1 rd Φ

H EN -ti Φ SH CQ 4-1 β SH O XI 4H Es 0 SH -ti i rd U β 4-J t ti ft 0 ra • rH rti ti Es B Φ O ⁽ϋ 0 Φ 4H 0 X 01 rH Φ XI α. Φ Φ A υ φ 0 Φ Φ CQ β ra CQ Φ 05 0 o A Ti u A 4-> xi β Φ Ex β Φ Xi Ti

X i rd a SH X! Ti -ti Φ β SH K A ti SH 4-J EN U 4-1 SH rd Ex rH > 4-J rti φ • rd £ SH rrj TJ 4-1 rd ra υ O ti 03 Φ O n rH o3 o υ 4-1 Φ O 4-J rd XI TJ

4J rd Φ ε Φ Φ 0 CQ ft • Xi a β Φ "I 4H ti X! £ 4-J 4-J β O Φ

CQ a *. ε Ti 4H ti β 4-J 4-J ra 4-1 0 β SH 0 tn β V 4-1 Φ Φ ti •ti

CQ CQ a ra -rH Φ 0 CQ ti φ β rd -. ti SH rti ti ti Φ 4H 4H β 0 0 ra -ri X 01 υ 4H

Φ rd 4J 4-J 4-1 Ti ti ti SH Φ EN 4H A Φ a ti Ti CQ 0 rti •«. ra φ TJ β ra rH β 4-1 ra φ ti X! rH rti O rd ε • A Φ CQ Φ ti A Φ β rd Φ φ Φ rti

CQ Ti Φ Φ Ti Φ 4-1 A u Ti 0 -ti A Φ SH Oi EN υ υ rd β 4J ti rd > Φ X! φ TJ ti TJ ti SH Xi ε φ ^■n SH rd 4-J & β CQ 0 φ β rti β u rd 0 0 rd Ti SH Xi φ 4-J X! -ti •ti

A rd 4-J a ε β φ Φ SH υ rd ra Φ Φ ft rd 4H SH Φ -ti r A 4-1 EH xi 4-J > rd tn rd 01 TJ 4H ε 4-> ft 0 Φ υ ra CQ X! a SH A SH ti a X! ra β SH •ti 4-> β 0 4-> β ra

SH Φ β 0 ε 0 SH X! 0 ra 4-1 rd Φ A ti ti 4-J φ ti rti X -ti 01 ti A rd SH -ti _Ω SH TJ rd β ft 4-1 ft rd > φ υ 03 β > & O rd Φ Φ tn β a 0 Φ Ex a ε Φ SH 0 O rH β 01 Ol 0 ^■n u ε 0 4H 0 ε V U ε β 01 A rH a EN Φ 4-J Φ β rH rd φ Φ β β rd 0 ti 0 0 Φ -ti β Ti ra ti A o cd Φ rH Φ £ β A 0 Ti XI Xi CQ TJ T) A a υ Ex X! A rti SH β 0 A rd

H rH g SH Ti £ φ 0 rd ES β 4-J rti A Φ Φ T) β rd Oi 4-1 SH 4-1 rti A rd rd 4H u SH

01 Ti {__• φ Φ ti SH 4-J ti 0 rti A 01 β Φ rd SH β φ 0 xi 0 ti ti 01 Φ -rH Φ β φ XI SH ti TJ A X! rd Φ TJ CQ 4-1 Φ β 0 SH XI X! 4-J Oi 4-> β Φ 4H ti Φ ε φ X! Ti

CQ 4J a φ rd -ti SH SH φ rH rd 4H ^■n rd ra A 4-> •ti υ Φ > O SH SH 5

A ti ra 0 TJ SH SH rti A Φ SH rd X! Xi A ra Φ rti ti Φ B . rd X! 0 SH B Φ -3 ra

A Φ rd rd φ SH i rd Xi 4-J SH rd O ti Φ u 05 ti -. rH EN 4H £ Φ β o i 4H β

Φ Φ 0 β Φ -ti O rti 4-J O) _ 0 Φ Ti β υ 0 SH A A Φ 4-1 Φ 0 rd Φ 0 0

-n XI Ol 4J Ol -ti 4H rti rd β SH • β EN ε rd ε Φ rd rd Φ φ 01 4H SH SH υ u β β B Φ rd rd υ -. •ti Φ Φ Φ β 1 Φ SH ΠJ xi X! SH ra β rd 0 A 0 o φ

Φ Ol -ti Oi ti SH U EN B • 5-1 rd φ xi Φ Φ 4-> Φ 4-1 Φ Φ rd rd 4H rd 4-> ti rH φ

Xi β 4-J β Es Φ ft 4-1 Ti rH ti Φ ti EN 4-1 rH Φ xi SH A CQ X! O X! Ti Φ i ε CQ

A a

O 0 ra 4-J ti 4-J ra <: U Φ A SH & A

4-1 4-J 0 4-1 TJ 0 Φ 4-1 0 Es A rt ε

> Φ Ti rH Φ 0 Φ β β β 4H O -. υ H rd A O 4-1 ti fa A β o5 Φ SH 0 rd Φ rd ti

Φ rd ^■n SH rH TJ 4-1 β β Φ SH X! β rd Xi rd 4-1 Oi 0 φ Φ X! 4-1 ti A 4H 4-J xi X rd ε X! 0 0 Φ β SH rd ti Φ 0 4H Φ 4-1 rH 0 β • ti ε φ rH 4-1 0 ra ti β rd 4-1 Φ U

4H υ 4H SH 01 rd 0 rH o¹ ft .. ti ra Φ Ti rd 4-J CQ β X!

4-1 ti 0 J ft β rH t φ 4-> A ti ra Φ Xi Φ υ Es ti TJ tn 4-> a β rd A TJ f ε Φ Φ >. β -.

Φ Ti -ti ft SH ra SH X! rd rd rd SH 4-J SH -ti ra 0 A rH •ti rd A CQ t rti 4H ε *- Φ β φ rd Es

Xi 4-J Φ Φ rd TJ Φ Φ β O Ol SH ε rd ti ti rH rd i X Φ ε X! CQ 0

U 4H 01 • ε SH rd A Xi 0 4H A Φ ti 4H a rd 0 rH SH 0 rd 0 Φ ti 0 Φ ti 4J rd «. rH rd 03 β TJ SH tn 0 A A U a ε 01 XI Or¹ 0 rti ε Xi φ 0 rd Es rd Ti A TJ υ β Φ

Φ rd φ 0 β υ 0 Φ r β 4-J Φ 0 υ tn 4H a β Oi Φ O Ti T) Φ 0 A β i ε 4H υ 4-1 A «. • β 4-1 rd SH EN o Φ rd a β β β 4-> ti φ β SH 4-J -ti

Ti 0 U SH SH £ < £ 4-J TJ O H υ £ 4H β ε 4J Ti rd O O Ti Φ rd ε rd 0 03 A rti

Φ X 0 Φ 0 SH 0 Φ -ti 0 0 Ti rd rH β Φ ra A Φ rH υ 4-1 xi rd -ti

© ε A Φ 4H ft rH 0 Φ β ε A Ex rH rH rti Φ o5 ε 01 A β ti SH a ra «. CQ 4-> ε rd f SH rd SH rH β SH ft SH rH 01 ti SH rd u > SH β rd 0 ti SH 0 Ex ti ra SH 4-> c_ 0 SH β Φ ra 0 ti 4H 0 ti 0 0 β 0 0 ε ti TJ 0 -ti SH 0 Φ SH 4J 0 ti Φ β 0 Φ

4H Φ rd

© a -ti 4H ft B H 4H ti 4-J 4H S 4H ra Ti 05 4H A A A ε 4H Ti -ti V 4-1 A H 4H Ti

According to an embodiment of the invention, the information obtained through any or all of the above described calibration measurements may be stored in storing means of the jetting assembly. Thus, the calibration measurement results, as well as any other suitable characteristics of the assembly, may be used for later calibration procedures for the jetting assembly.

When having obtained the calibration information, the jetting parameters can be adjusted, for example the trigger positions can be adjusted on the basis of the obtained calibration information. By trigger position is meant the location of the nozzle when the a droplet is triggered, or the time window during which jetting of the droplet is triggered. It should be noted, that even though it is likely to be at least slight deviations in offset and alignment from one individual assembly to another, the same individual, however, is likely to reproduce well between successive mountings in the same machine. Thus, according to preferred embodiments of the invention, the information obtained from the calibration procedure is carried by the assembly itself. Preferably, the stored calibration information is related to the specific machine in which the assembly is mounted. In the embodiments where a portion of the substrate is used as a calibration surface, prior to obtaining the calibration information, fiducial markers or reference points on the substrate are detected and registered. According to one embodiment, only one marker is used. Then, only the position of the substrate is known.

According to a preferred embodiment, two markers are used. Then, compensation for a skewed or tilted substrate can be performed.

According to an even more preferred embodiment, three markers are used. Then, an error in the scaling can also be compensated for. φ 0 4-1 Φ 1 0 .

1 X! 1 A -. φ rd 1 4H Φ

90 xi 4H Φ ra 4-1 TJ σ. φ φ - 4-1 1 ra ti 4J β 1 Φ O 0 A Φ 4-J rti Φ Ti φ β φ rd 1 xi 1 Ti Ti rd 1 -ti Φ TJ ti β 0 Φ N Xi rd A Xi SH 0 ft 4- f 4-> TJ

© Φ ti β SH SH β Φ rd Φ rH 4-1 tn 4-1 Ti . rd SH 4H A SH -. Ol rd SH CQ 0 φ 0 X! Φ ti S 01 rH ε 01 N TJ >.. β 4H β Ti rd 0 ti φ rd β β φ ti XI 4H •ti > 0 4-1 β ti β N Φ T5 Ti 0 4-1 rd Φ ra rH φ 4-1 £ O C ω β ra Φ Xi A Es rH ti Φ V TJ 0 X β φ A rd β A ti Φ ft rd -rH m

! - 0 •ti CQ A ra 05 T3 rd A XI A 0 A β •ti 03 rH A β β A tn SH O SH 4J 4-> ti xi

0 SH SH Ti Φ υ υ A Ti π A 4H rH Φ o tn O ε Oi β ti SH 4-> 05 β 4- ςj A Φ X! ti A φ Φ Φ Φ φ Φ β £ Φ φ Φ O β SH rd A ft CQ Xi Φ Ex

0- 4-1 4J 4H ti -ti β β Φ xi SH υ ^■n φ Φ ^■ri xi rd rH SH A A Φ φ Ό A S rH £

CQ rd 0 rti XI 4-1 -ti β ft 4-1 N 4-J Φ •ti A O 4-J A 0 rd Φ ti Φ β XI

O SH o Φ rd B O 4-1 Ti Φ rH SH Φ A 4-1 N β Xi CQ A Φ Φ β 4H X! CQ ε rd β a 4J 4-> X! A U ti β 4H SH πJ Φ β ra xi rd O 0 4-1 O Φ ti Ti A ti A o SH O

CQ rd Φ β 0 01 Φ β ft 0 SH 4-J β υ a A IX ti φ CQ Φ Φ

Φ A β 4-1 4-J Φ A ra 0 β 4H EN 1 Ti φ 0 rH rd Φ X! A 4H xi ti ES 0 ra X! φ -ti 4-1 4H B Ex 0 4H £ Φ φ rd A N Φ A A rH ε SH 4-J CQ A Φ r

4-J ra 0 β 4-1 TJ ra β A -ti 0 rH 4-J . X! xi Φ rd rd SH β β Φ -P Φ 4-1 TJ β rH Ex CQ 4-> EN TJ TJ A X! ti A φ -. 4H ft β φ X φ 0 4H ra SH β i Φ -ti ε Φ rd tn A β XI Φ Φ 4-1 rd rd A X! Φ Ex Ti O i SH 0 -t -r-> Φ Φ β 0 «. β Es X B U ti A X rti Φ

4-1 rti 0 A xi 0 Ti xi X! A Ti Φ φ Tf 0 -H 0 ra Φ rti 4-1 Ti

SH rti 4H rd CQ ti 4-1 ft 0 Φ 4J A ti Ti Φ A 4-1 φ Φ rH 4H ti ε β 4-> CQ O rti rd rti β φ

0 4H Φ φ SH Φ 0 o Xi Φ SH β rd CQ rti 4H Φ 0 CQ 4-> β ft Φ ft

SH 0 5 SH A >. φ g 4-1 01 Ti CQ 0 CQ SH 4-J rd 0 -. Xi CQ Φ Φ O ft

-ti A A φ υ Φ β β ra U B 0 4-1 Φ Φ 4H ε ft

SH Φ £ 4-1 4-J A 0 tn i rd -ti rd J Φ 01 CQ i rti ti rd SH β 4H rd φ υ ti a CQ XI SH Φ rH rd a CQ β 4-J ra Ti β 4-1 rd Φ 4-1 0 Φ ε

Ti 0 Φ < Φ XI Ό -. β ti 01 Φ rd Φ O ti U ft ra 4H SH φ A β CQ 4-1 Ti ti φ Φ Φ ra β > T5 A SH υ A η Ti r rd Es ti rH 0 Φ Φ SH β O -ti . Φ Φ ra u Ti υ Φ φ φ Φ rd O υ £ β S

Φ 0 rH rd SH β SH 4H SH 0 ti φ Ti 4-1 β β X! SH ti T5 T) SH rH o O Φ rd xi X 4H ft 0 Φ Φ Φ 0 A Ex 4-1 O Φ rd SH rd 4J rd Φ φ φ ra 4-1 ϋ CQ £ β Xi SH 4H 4-J υ rH rd CQ Φ xi 4J 0 4-1 Φ & SH SH X! SH Ti . Ti Ti r

Ti Φ T⁾ 4-J EH Φ 03 4-1 Φ A SH rH 4-J CQ CQ 4-1 i ε rd ti 4-1 SH 4H ra Φ Φ

X! Φ Φ Ti i β rd 4H SH rd SH rd A Φ TJ rd 4-J 0 rH ra SH rd rH SH 4-1

£ rH A β £ rd SH 0 ft > •ti SH ra ti CQ £ TJ φ TJ O ti rd . O O φ SH U rd Q rd rd XI TJ φ > T5 Φ A 0 0 ra CQ tn tn Φ φ SH X! CQ B Φ Φ β ra -. CQ -ti φ 4-1 rd TJ Φ 4H ti 4-J SH φ rd TJ 4-1 β Ti β ε ε SH 4-J ti 4H 4-1

CQ β 4-1 Ex U rti rti β TJ tn Φ CQ A 03 4H xi Φ φ φ -ti β rd rd ra Φ 4-1 Φ Φ 0

Φ SH rH a X) φ 0 SH β SH 05 4-1 SH β rH ti rd Φ CQ Ti SH Ti ra O £< 05 Φ A o £ ε 4-J π3 TJ ft φ CQ Φ υ a ti Φ Xi 4H ti Φ φ ft

SH a ε > CQ Φ φ A X! > 4-> .. β ε 0 CQ CQ Xi 4-1 Φ O υ 4-J i 05 A xi 4-1 Φ Φ ε ra φ 0 Φ Φ CQ SH tn t β β SH SH 03 β 4-> Xi SH rd rd β rd u X! A ti XI CQ ti • β tn CO Φ O Ti rH rd φ Φ T5 Φ 0 4H 4J φ SH CQ Φ β 4-> rd Φ 4-1 05 CQ Φ β ^■π -H 4H a 4-1 X! ra 4-J ε 4H 0 U u 4-J ti 0 φ rd SH TJ β A rd υ T3 rd • xi 0 SH 0 CQ EH φ Φ A 0 Ex SH ra O 4-1 tn ε 0 β β SH Ό β CQ Φ rd SH T5 rH 5 05 SH Ti SH EN 4-1 rH ti u A υ rd > rd Φ rd -ti ε 4-i 0 Φ Φ rd φ rH Ti i • Φ 0 PQ ra φ Φ rti 0 ti ra 01 ft φ • 4-1 SH SH U Xi β ti -. β ti β 4-1 EX ε 0 Ti ra 05 . Q ti CQ β SH TJ xi Ol TJ Ti TJ rH rd Φ Φ SH ti υ 4-1 •ti A β rd tn φ Ti O 05 rH • t 4H -i i Φ CQ a i t β 0 > 05

EH β Φ φ φ i υ t

CQ < B υ 0 rH β SH φ -ti SH Φ SH φ 1 4-J 4H A 0 SH Φ Ti E3 rH A ϋ 05 XI - ti rd •ti a rd 0 X A 4-> 4-J 0 rH N 0 ti 4-> X! A ti

© rti ra rH -ti 4H A 4-1 β β Φ 4-J ε -ti ra rd N rti Φ A U 4-J u 0 m rd Φ Φ SH u SH 0 0 4-1 Φ υ φ φ 4H ra XI SH Φ N 0 a Φ CQ rd Φ u -ti

JJ U ti X O X3 ti rd ti •ti Φ Xi Φ X! i SH O ti ti β O £ ε Xi CQ rH 4H A A -r

CQ Ti ra ra 4-J CQ -J 0 rd

© ε 4H A A Ti 4-J SH 4-J 4 a CQ Ό 0 β 4-J rd 4-J Φ > φ 0 Es A o

able lighting for detecting the height of measured points on the substrate . When having mapped the warpage of the substrate, the trigger positions are preferably adjusted in order to compensate for the warpage. According to an alternative embodiment, the Z position of the jetting assembly, i.e. Z position of the nozzle, is continuously adjusted such that the distance between the nozzle and the corresponding position of the warped substrate is kept constant . The present invention is particularly advantageous when used in combination for a jetting apparatus adapted for "drop-on-demand" jetting. Drop-on-demand jetting should be interpreted as a method of jet dispensing where individual drops of a medium are formed at the end by the forward momentum of a fluid being ejected out of a small orifice. The jet is formed by rapidly changing the volume of a chamber filled with the medium. With drop-on-demand jetting it is possible, as implied by the terminology, to eject or shoot a single droplet at any chosen time. Further objects and advantages of the present invention will be discussed below by means of exemplary embodiments .

Brief Description of the Accompanying Figures of Drawings Exemplifying embodiments of the invention will be described below with reference to the accompanying drawings, in which:

Fig. 1 is a schematic perspective view of an embodiment of the machine according to the present invention; Fig. 2 is a schematic perspective view from above of an embodiment of the docking device and assembly of the present invention;

Fig. 3 is a schematic perspective view from below and from one side of the assembly shown in Fig. 2 ; Fig. 4 is a schematic perspective view from below and from another side of the assembly shown in Fig. 2; Fig. 5 is a perspective view from above of the assembly of Fig. 2 and of an embodiment of the exchange assembly support of the present invention;

Fig. 6 is a schematic sectional view of the assembly shown in Fig. 2 ;

Fig. 7 is a flow chart illustrating an exchange and calibration procedure of the present invention;

Fig. 8 is a flow chart illustrating a calibration procedure according to an embodiment of the present in- vention; and

Fig. 9 is a flow chart illustrating an example of possible adjustments following the calibration procedure shown in Fig. 8.

Fig. 10 is a schematic illustration of an angular deviation in the direction of jetted droplets.

Description of Exemplary Embodiment

With reference to the accompanying figures, there will now be described an embodiment of the inventive method of the present invention. First, a jetting assembly and an apparatus for jetting for which the assembly is intended are described with reference to Fig. 1.

Fig. 1 illustrates a presently preferred embodiment of a machine 1 for providing a substrate 2 with deposits by jetting droplets of a viscous medium onto the substrate 2, in accordance with the present invention. Let us for simplicity assume that the viscous medium is solder paste, which is one alternative as defined above. In this embodiment the machine 1 is of a type comprising an X-beam 3 and an X-wagon 4 connected with the X-beam 3 via an X-rail 36 and reciprocatingly movable along the X-rail 36. The X-beam, in turn, is reciprocatingly movably connected with a Y-rail 37, thereby being movable perpendicularly to the X-rail 36. The Y-rail 37 is rigidly mounted in the machine 1. Generally, the movements are driven by linear motors (not shown) . rd EN 4-1 1 1 Ti Ex

Ol rH o Φ 1 Φ A SH > φ A rH X

90 CO Ti β A 1 rd 1 rd A φ X! 1 1 1 ra ti Φ Q β rd Φ π σ. oo β o rd SH & ε EN xi > EH rd 4H rd 1 β β ra 4-J

.H ε Xi g ε fS rd 4-J rH Q rd ε Φ tn rH EN 4-1 4-1 0 ε X! 0 φ rd Φ B in 4-1 φ ti

© SH 4-J o5 β Q rd Φ > O ti u X! Φ Φ Ti Ex ti CQ

0 _^ Φ Φ Φ ra TJ £ ε EN ti rd SH 4-J Φ EN ra 4J ti ε xi A Φ Ex β CQ TJ

© Ex rH -r~ι U rH A Φ T5 Φ A -ti SH rH X! rH • φ 0 4-1 ra A rH 0 rd φ

Φ φ ϋ XI CQ Xi A Φ Ti ti 4-1 4-J Φ Φ xi β tn Ex SH - φ π

Φ β ε

> SH in -ti -ti > CQ U TJ υ ε β CQ β xi 4-1 φ rd PQ β Φ β TJ £ Ti Φ

H β β Φ Φ A ti O rd φ rd rd rd Φ «. ϋ -ti EH xi £ o X Φ φ Φ φ Xi 4-J

U 0 XI T5 in EN ES V ti A ε U SH 4-1 A 4H ES • ti X! SH ra 4-> β

0- U A £ rH ra ft φ Es ti β SH rH ϋ . 0 X! σ. Ti rd EH a ra rti Φ υ 01 EN «. Φ Ol ti rd rd 0 Φ • rd ft rd CQ co φ ε rd a TJ SH rd rd CN β rH £ Φ TJ -. β - td XI ra X

ε < CQ 4-> Φ n • cd a rH Φ ε _Q Φ 4-J ∞ rd O ra CQ A 4-1 4-J Φ Φ 0 β ti X! φ β Φ Φ Φ rd ti 4 ra Φ X £ CQ CQ β X! Φ X! Φ rti rd ft 4J ϋ rd ra 4-1 β xi 0 4

Φ φ 4-1 ϋ Φ CQ rd •ti β ϋ ra EN ra ra Oi ra 4-> 4-J Xi rti Φ SH Φ rd 4-1 ra i - ra X! rd 0 CQ rd ft Φ 0 X φ rH A 0 β 0 0 4J 0 ε ra SH > SH xi SH •ti O T

•ti 4-1 SH TJ CQ SH φ 4-1 ti ti ft ft β £ 4H -ti Φ φ rd EH 4-1 CN 01

SH 4-J rd Φ SH • Φ A rti β ft Φ X Φ -ti 01 EN TJ T5 Φ ra β Φ • r ft X! ra rd Xi Φ CN xi rd β Q Φ £ ε Φ o Ti β CQ A CN β SH • A Φ A ra ε 01 A β EH Ti 4-> rd £U SH 0 X! φ TJ 4-1 rd ti 01 a Ti ti 4J 4-J ra β T

0 ti ti CQ rd rH Φ Φ ra Φ SH U •n 4-> xi φ Φ ti rti φ β Φ CQ rd rd rd 0 r υ 0 CQ Φ . 0 4-J X! CQ CQ ti 0 ϋ xi rti ti ti CQ 4-J ti ra 4-1 SH SH ti CQ Ti o CQ rd a

4-J β Φ CQ u rH o 01 4-J rti ti ti X Φ rd o X SH rd Φ 4J φ A rH A φ β rH SH 0 CQ rd £ β SH ti ti ti SH Φ υ X! CQ a SH rd X m 4-J X! ti rd 4H 4-J 4H -ti -ti in Φ Φ -ti 0 tn X rti 0 4-1 A 4H X O 4-J A 0 Φ U rti Φ 4-1 ft Φ 0 CQ 0 A ti SH β ti 4H β ra 0 ti •s A ra ti rH ti Ti 0 β CN ε ^ ϋ A rd ft Φ EN CQ SH 0 ϋ A CQ Φ rd 4H ra Ti rH rti SH

Oi o ra ti rH SH & XI rH A B TJ ^■3 φ 4-J 4H rti rd ti 0 X! ε φ 0 β 0 0

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required at certain locations, etc., the machine 1 is programmed to automatically exchange the assembly 5 for one of the further assemblies, or exchange assemblies, 9 stored at the exchange assembly support 7, and the appli- cation process will continue.

However, when acquiring a previously unknown assembly 9 from the exchange assembly support 7, the machine 1 will perform a calibration in order to ascertain that the dispensed droplets accurately will impact the substrate 2 at the predetermined locations. The reason for the calibration is that the position of an eject nozzle 25 of the assembly 5, see Fig. 3, may differ slightly from one assembly to the other, and the alignment of the assembly 5 at the docking device 10 may differ slightly from one docking to the other. It should be noted, that even though there is likely to be at least slight deviations in offset and alignment from one individual assembly to another, the same individual, however, is likely to reproduce well between successive mountings in the same ma- chine. Thus, the information obtained from the calibration procedure is preferably carried by the assembly itself. Of course, the stored calibration information is related to the specific machine in which the assembly is mounted. The exchange and calibration procedure will now be described in more detail with reference to the flow chart of Fig. 7.

While jetting, at step 100, it is determined at step 101 whether an assembly exchange is required. This is done by checking whether the assembly 5 runs out of solder paste, whether another type of nozzle is required, or whether another type of medium is required. If an assembly exchange is required, the procedure is continued at step 102 by performing an assembly exchange. This is done by moving the X-wagon to the exchange assembly support 7, releasing the assembly 5 from the docking device 10 and putting it at an available place of the exchange assembly β .. 1 1 Ex £ SH .

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sition in a plane parallel to the plane of the substrate 2 or the calibration surface. Consequently, the variable Z denotes the position perpendicular to the plane of the substrate 2 or calibration surface, i.e. the vertical po- sition or the height.

First, at step 201, a fiducial mark on the calibration surface is located. This is achieved by positioning a vision device 6 over the fiducial mark and reading the encoders values. The positions are then stored as vari- ables X₀ and Y₀. If a calibration station in the apparatus is used, these variables are already stored in storing means of the apparatus .

At step 202, the nominal nozzle offset is retrieved. This information can either be default values stored in the apparatus and used for every assembly, or this information can be carried by the assembly and stored in storing means in the assembly. If the information is carried by the assembly, a more flexible system is achieved. These values are stored as variables X_N, Y_N, and Z_N. At step 203, the nozzle 25 is positioned over a desired location. This implies moving the axes until the encoders shows the readings: X₀-XN-X*. YO-YN-Y*. Z_NI where X* and Y* are chosen so as to position the nozzle 25 over the calibration surface. At step 204, at least one droplet is jetted, the droplet forming a deposit on the calibration surface. If a plurality of deposits are deposited, any stochastic contribution to the jet direction can be averaged out to achieve better accuracy. At step 205, the axes are moved to the location

X₀-X*, Y₀-Y*. This would place the centre of the camera over the nominal position where the deposit has been placed.

At step 206, the offset of the deposit from the cen- tre of the camera is determined. The results are stored as variables ΔX and ΔY. It should be noted that it is not difficult to achieve mechanical tolerances such that the deviation from the nominal position is within the field of view of the vision device 6.

Then, at step 207, the true nozzle offset can be calculated as: X₀F_F = _N + ΔX and Y₀FF = YN + ΔY. At step 208, the nozzle 25 is made to travel over the calibration surface at a constant velocity. For ease of description, we assume that this velocity is in the X- direction only and that it is equal to v_x. A relatively large velocity is preferred from a smaller one since, with the larger velocity, a change of the nozzle position in the Z direction has a greater influence on the resulting X position of the deposit, which facilitates the determination of ΔX₂-ΔXχ, as described below.

At step 209, a predetermined number of deposits (at least one, in this case n number of deposits) is obtained through the jetting of droplets, starting at a position XO-XOFF-X*/ Yo-YoFF-Y*-Yarb. where Y_arb is chosen so as to position the nozzle 25 over another position on the calibration surface. The X positions of these deposits should be

Xi = X₀ - XOFF - X* + v_x/v_out*hι + i*v/f

where v_out is the exit velocity of the jet from the nozzle 25, hi is the distance from the nozzle 25 to the calibration surface when the Z position equals Z_N, f is the frequency with which the jets are ejected, and i takes the values 0,1,.., n-1.

At step 210, the nozzle position is altered in the Z direction a predetermined amount Δh. Preferably, the nozzle 25 is raised in order to avoid any risk of contact between any part of the assembly and the calibration surface. In order to get a sufficient difference, a substantially large alteration is preferred. However, if the nozzle 25 is raised too much, the stochastic angular deviation in jet direction will have a greater impact on the jetting result due to the longer time in flight. A typical value could be 1 mm.

At step 211, the nozzle 25 is made to travel over the calibration surface at said constant velocity. At step 212, a predetermined number of deposits (at least one, in this case n number of deposits) is obtained through the jetting of droplets, starting at a position XO-XOFF-X*/ Yo-YoFF-Y*-2Y_arb- The X positions of these deposits should be

Xo X ^■,OFF X* + v_x/v_out*h₂ + j*v_x/f

where h2-hl=Δh and j takes the values 0,1,.., n-1.

At step 213, all Xi and Xj are determined using the vision device 6.

At step 214, v_x/v_out*hι = ΔX_X is defined as the mean value of Xi- (X₀~ X_0FF - X* + i*v_x/f) .

Also, at step 214, v_x/v_out*h₂ = ΔX₂ is defined as the mean value of Xj - (X₀ - XO_FF - X* + j*v_x/f) . At step 215, the exit velocity of the jetted droplet is calculated as v_out = _v_x*Δh/ ( ΔX₂-ΔXι) , which is deducted from v_x/v_out*h₂ - v_x/v₀ut*hι = ΔX₂-ΔX..

Finally, at step 216, we can now calculate the distance from the nozzle 25 to the calibration surface when the Z encoder shows the value Z_N. This is defined as hi = ΔXx* v_out/v_x = Δh*ΔX_x/(ΔX₂-ΔXι) .

If it turns out that the exit velocity does not change over time, the exit velocity can be measured after assembly refill, prior to mounting of the assembly in the jetting apparatus, and the exit velocity information stored in the assembly. In that case, the procedure above can be simplified.

Once the nozzle offset in the plane parallel to the plane of the substrate 2, the nozzle height, and the exit velocity of the droplet have been determined the trigger positions can be adjusted accordingly. For instance, if a deposit is desired at position X, Y on a substrate 2, X and Y being measured in the co-ordinate system of the substrate 2, one could proceed as follows, with reference to Fig. 9.

At step 301, the position in machine co-ordinates of at least one fiducial marker on the substrate 2 is determined. If only one marker is used, only the position of the substrate 2 is known. If two markers are used, compensation for a skewed substrate 2 can be performed. If three markers are used, also an error in the scales can be taken care of. For ease of description, we assume that the board is perfectly aligned and scaled, but translated so that x = y = 0 in substrate co-ordinates corresponds to machine co-ordinates X = X₀, Y = Y₀. Thus, the desired deposit location is X₀+x, Yo+y in machine co-ordinates. Machine co-ordinates is here understood as encoder readings when the centre of the camera is at a specific position.

Then, at step 302, the velocity the machine will have when passing over the desired deposit location is retrieved. In this specific case, this data has been previously compiled. The reason for this previous compilation is to achieve an optimal path along the substrate 2.

At step 303, the height of the substrate 2 is retrieved. This can be done either by measuring it with the vision device 6 or retrieving the information from a database operatively connected to or located in the machine. Note that the height that is measured is the distance from the vision device 6 to the substrate 2. If sufficient planarity of the substrate can be guaranteed, a more accurate measurement of nominal Z position can be performed when the machine is assembled. In that case, the difference in height from the calibration surface to the nominal work piece surface is preferably measured. At step 304, a desired nozzle height over the sub- strate 2 is chosen, for example the height h. Using the value of h_x described above and the known height of the substrate 2, a suitable Z encoder reading can be calcu- 1 1 1 o TJ

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components not only in the Z, but also in the X and the Y direction.

The three velocity vector components can thus be written as v_out,_x = v_out*sinθ*cosφ, v_out/y = v_ou*sinθ*sinφ, v_out,_z = v_out*cosθ, respectively. The velocity component along the X-axis will result in different results in dependence of whether the wagon velocity, v_x, is applied in the positive or negative direction in steps 208 and 211 described above. The velocity component along the Y-axis will not result in any shift in step 208 described above since this deviation is absorbed in the offset calculated in step 207. However, when jetting from the second height h₂, the deposits will shift from the expected position because of the velocity along Y and the change of the time that the droplet is in flight. According to this embodiment of the invention, by jetting droplets while moving in both the positive and the negative X direction, respectively, and by detecting a shift in Y position correlated to a change in the nozzle height, one can deter- mine the two new unknown parameters θ and φ.

As an alternative to the above described procedure, the angular deviation can according to one embodiment be obtained by the following procedure.

First, at least one droplet is jetted, the droplet forming a deposit on the calibration surface. Again, a plurality of deposits may be deposited to achieve better accuracy. Preferably, each droplet is jetted when the nozzle is standing still, i.e. there is no relative movement between the nozzle and the calibration surface. The resulting position of said first deposit (s) on the substrate is determined with the camera and stored.

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device, constituted by a spring 16, exerting a force on one of the legs 35, and a pneumatically operable assembly locking element, here constituted by a locking piston 17 exerting a force on the wall 36. Further, the assembly 5 comprises a viscous medium container, or solder paste container, 23, a nozzle 25, and an eject mechanism 55, see Fig. 6, connected to the container 23 and the nozzle 25. The eject mechanism 55 is arranged for feeding solder paste from the container 23 and ejecting it through the nozzle 25 in a way which is defined as jetting or non-contact dispensing.

The eject mechanism 55 will now be further described. It is similar to the one disclosed in the above- mentioned International patent publication WO 00/61297, which is incorporated herein in its entirety by reference. The eject mechanism 55 from the outside is hidden by assembly holder 24 and by a cooling flange 30. In the cross sectional view in Fig. 6, a proposed outline of the eject mechanism 55 is shown. The solder paste is forced by means of pressurised air out of a hole 51 in the bottom of the solder paste container 23. The pressurised air is supplied through a nipple 52, a hose and a suitable connector (not shown) in the container 23. The feed hole 51 is connected to a hole in a motor support 50 and in a motor axis 42 of a stepper motor 41. A feed screw 44 is mounted on the motor axis 42. The feed screw 44 has an axial bore 53 through which the solder paste flows. The solder paste is further transported by the feed screw 44 rotated by the motor 41. The feed screw 44 rotates in a stack of o-rings 45. These o-rings 45 prohibit undesired smearing of the solder balls in the paste. The feed screw 44 transports the paste into an active chamber formed by the end of the feed screw 44, the nozzle 25 and a bushing 54. In order to eject droplets, an actuator 31 is rapidly discharged, thus moving the nozzle 25 towards the feed screw 44 and diminishing the volume of said active chamber. The actuator 31 is pre-loaded with a cup spring 48 and an actuator support 49. The assembly 5 uses pressurised air for several tasks, e.g. providing a slight overpressure for forcing the solder paste into the eject mechanism 55, cooling of the actuator 31, and cooling of the stepper motor 41. The pressurised air is supplied via a pneumatic interface comprising inlets 26, positioned to interface with complementary pneumatic interface comprising nipples 20, of the docking device 10. Cooling of the actuator 31 is realised with the aid of the cooling flange 30 providing a slit between its walls and the actuator 31 where cooling air can flow freely. Furthermore, in order to obtain a stable temperature during the jetting procedure, the cooling of the actuator 31 is combined with a heater 47, which is regulated by the meas- urement results from a thermometer 48.

Signal connections are provided as interface at the assembly 5 and connectable to complementary signal interface of the docking device 10. These connections of the assembly 5, inter alia, are for supplying the stepper mo- tor 41, the actuator 31 via leads 28, for measuring temperature via leads 29 and the thermometer 46, which constitutes a Pt-100 sensor or the like. Said signal interface is implemented as a male contact 27 and interfaces the corresponding signal interface implemented as a fe- male contact 19 at the docking device 10. The male contact 27 is in this embodiment a reinforced part of a flexible circuit board. Not previously mentioned signals that can be provided via this interface are heater current, assembly identity information, and driving signals for the stepper motor 41. Extensions of this list are obvious for those skilled in the art. In excess to the above mentioned female contact 19, signal connections at the docking device 10 comprise a flexible circuit board 18, connected to control electronics (not shown) located on the X-wagon 4.

The nipples 20 of the complementary pneumatic interface of the docking device 10 are connected, via internal ω to t H> ti- o Ul o σi o LΠ

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Claims

1. A method of improving the performance of a jetting assembly in an apparatus for jetting droplets of viscous medium on the fly onto a substrate, said jetting assembly being releasably mounted in said apparatus for performing said jetting, said jetting assembly comprising a nozzle, an ejection mechanism connected to the nozzle, and a viscous medium container connected to the eject mechanism, the method comprising the steps of:

- obtaining information relating to an XY-position of the nozzle in relation to a calibration surface, the XY-position being the position of the nozzle in a plane parallel to the plane of the calibration surface, - obtaining information relating to a Z-position of the nozzle, the Z-position being the distance between the nozzle and the calibration surface,

- obtaining velocity information relating to the exit velocity a droplet of viscous medium has when said droplet exits said nozzle, and

- adjusting, on the basis of said information relating to an XY-position of the nozzle, said information relating to a Z-position of the nozzle and said velocity information, a trigger position of the nozzle for the subsequent jetting of droplets.

2. The method as claimed in claim 1, wherein the step of obtaining information relating to an XY-position of the nozzle comprises: - jetting at least one first droplet at a nominally predetermined location on said calibration surface, said at least one first droplet thereby forming at least one first deposit on said calibration surface, and

- determining the offset of the location (s) of said at least one first deposit in relation to said nominally predetermined location, and - determining, based on said determined offset, the XY-position of the nozzle.

3. The method as claimed in claim 1 or 2, wherein the step of obtaining velocity information comprises:

- retrieving said velocity information from information storing means in which said velocity information has been previously stored.

4. The method as claimed in claim 1 or 2 , wherein the step of obtaining velocity information comprises:

- moving the nozzle relative the calibration surface at a first predetermined relative velocity in a plane parallel to the plane of said calibration surface, - jetting, during said movement, at least one second droplet, said jetting being performed by triggering said ejection means when said nozzle is at (a) predetermined location (s), said at least one second droplet thereby forming at least one second deposit on said calibration surface,

- determining the location (s) of said at least one second deposit,

- calculating the difference between said predetermined and said determined locations, - altering the distance between the nozzle and the calibration surface with a predetermined distance,

- moving the nozzle relative the calibration surface at a second predetermined relative velocity in a plane parallel to the plane of said calibration surface, - jetting, during said movement, at least one third droplet, said jetting being performed by triggering said ejection means when said nozzle is at (a) predetermined location (s), said at least one third droplet thereby forming at least one third deposit on said calibration surface,

- determining the location (s) of said at least one third deposit, - calculating the differences between said predetermined and said determined locations, and

- determining, based on said calculated differences between said predetermined and said determined locations of said at least one second and at least one third deposits, the exit velocity a droplet of viscous medium has when said droplet exits said nozzle.

5. The method as claimed in claim 4, wherein said first and second predetermined relative velocities are the same .

6. The method as claimed in any one of the preceding claims, wherein the Z-position of the nozzle is obtained by determining said Z-position by mechanical means.

7. The method as claimed in any one of the preceding claims, wherein the Z-position of the nozzle is obtained by determining said Z-position by electrical sensor means .

8. The method as claimed in any one of claims 1-3, wherein the step of obtaining information relating to a Z-position of the nozzle comprises: - moving the nozzle relative the calibration surface at a first predetermined relative velocity in a plane parallel to the plane of said calibration surface,

- jetting, during said movement, at least one second droplet, said jetting being performed by triggering said ejection means when said nozzle is at (a) predetermined location(s), said at least one second droplet thereby forming at least one second deposit on said calibration surface,

- determining the location (s) of said at least one second deposit,

- calculating the difference between said predetermined and said determined locations, and - determining, based on said calculated difference and said obtained velocity information, the Z-position of the nozzle.

9. The method as claimed in claim 4 or 5 , wherein the step of obtaining information relating to a Z-position of the nozzle comprises:

- determining said Z-position of the nozzle is based on said velocity information together with said calcu- lated difference between said predetermined and said determined locations of said at least one second deposit or of said at least one third deposit .

10. The method as claimed in any one of the preced- ing claims, further comprising the steps of:

- obtaining angular deviation information relating to the angular deviation of the actual jetting direction of said droplets from a nominal jetting direction, said nominal jetting direction being essentially perpendicular to the plane of the calibration surface, and

- using also said angular deviation information as basis for said adjustment of the trigger position for the subsequent jetting of droplets.

11. The method as claimed in claim 10, wherein the step of obtaining said angular deviation information comprises :

- jetting at least one first droplet at a nominally predetermined location on said calibration surface, said at least one first droplet thereby forming at least one first deposit on said calibration surface,

- determining the offset of the location (s) of said at least one first deposit in relation to said nominally predetermined location, - altering the distance between the nozzle and the calibration surface with a predetermined value, - jetting at least one second droplet at a nominally predetermined location on said calibration surface, said at least one second droplet thereby forming at least one second deposit on said calibration surface, - determining the offset of the location (s) of said at least one second deposit in relation to said nominally predetermined location,

- calculating the difference in offset between said at least one first deposit and said at least one second deposit, and

- determining, based on said determined calculated difference, said angular deviation of the actual jetting direction of said droplets from the nominal jetting direction.

12. The method as claimed in claim 11, wherein the nozzle does not move relative the calibration surface during the jetting of each of said at least one first and said at least one second droplets.

13. The method as claimed in claim 4, 5 or 9, further comprising the steps of:

- moving the nozzle relative the calibration surface at a predetermined velocity in a plane parallel to the plane of said calibration surface, said relative velocity being different from the relative velocity when jetting said second or third droplets,

- jetting, during said relative movement, at least one fourth droplet, said jetting being performed by trig- gering said ejection means when said nozzle is at (a) predetermined location (s), said at least one fourth droplet thereby forming at least one fourth deposit on said calibration surface,

- determining the location of said fourth deposit, - calculating the difference between said predetermined and said determined locations, and - determining, based on said calculated differences between said predetermined and said determined locations of said at least one fourth deposits and said at least one second or at least one third deposits, the angular deviation for the jetting direction of said droplets from a nominal jetting direction, said nominal jetting direction being essentially perpendicular to the plane of the calibration surface.

14. The method as claimed in any one of the preceding claims, wherein the calibration surface is a surface on said substrate.

15. The method as claimed in any one of claims 1-13, wherein the calibration surface is a portion of said apparatus and is separate from said substrate.

16. The method as claimed in any one of the preceding claims, further comprising the step of: - obtaining calibration surface information relating to characteristics of the calibration surface, said calibration surface information being obtained through the use of vision means provided in said apparatus.

17. The method as claimed in claim 15, further comprising the step of:

- retrieving calibration surface information relating to characteristics of the calibration surface, said calibration surface information being stored in said ap- paratus .

18. The method as claimed in any one of the preceding claims, further comprising the step of:

- determining and mapping any warpage of the sub- strate, and

- adjusting jetting parameters to compensate for said warping.

19. The method as claimed in claim 18, wherein said step of adjusting jetting parameters comprises the step of: - continuously adjusting the height of the nozzle relative said substrate, such that said nozzle is kept at a constant distance from said substrate during said jetting of viscous medium.

20. The method as claimed in claim 18, wherein said step of adjusting jetting parameters comprises the step of:

- continuously adjusting trigger positions of the nozzle from a nominal trigger position thereof, such that the variation due to said warpage in the distance between the nozzle and the substrate resulting from the relative movement between the nozzle and the warped substrate is compensated for.

21. A jetting assembly, said assembly being releas- ably mountable in an apparatus for jetting droplets of viscous medium on the fly onto a substrate, said assembly comprising an assembly holder having first holder portions mating with an assembly support of a docking device of the apparatus, a nozzle, an eject mechanism connected to the nozzle, a viscous medium container connected to the eject mechanism, a signal interface for communication with the apparatus, and storage means holding information about properties of the assembly, such as assembly iden- tity, type of viscous medium contained, nominal mechanical offset of the nozzle, wherein said storage means is further arranged to receive and hold calibration information of properties of the assembly obtained during calibration measurements.

22. The assembly as claimed in claim 21, wherein said storage means holds calibration information obtained from calibration of the assembly prior to mounting the assembly in the apparatus.

23. The assembly as claimed in claim 21 or 22, wherein said storage means holds calibration information obtained from calibration of the assembly when the assembly is mounted in the apparatus.

24. The assembly as claimed in any one of claims 21-23, wherein said calibration information comprises at least one of information relating to an XY-position of the nozzle, information relating to a Z-position of the nozzle, the exit velocity a droplet of viscous medium has when said droplet exits said nozzle, and the angular de- viation for the jetting direction of said droplets from a nominal jetting direction.

25. Use of information stored in a jetting assembly for calibrating said assembly in a jetting apparatus.