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Vertical color filter detector group and array

Info

Publication number
WO2002027804A3
WO2002027804A3 PCT/US2001/029488 US0129488W WO2002027804A3 WO 2002027804 A3 WO2002027804 A3 WO 2002027804A3 US 0129488 W US0129488 W US 0129488W WO 2002027804 A3 WO2002027804 A3 WO 2002027804A3
Authority
WO
Grant status
Application
Patent type
Prior art keywords
detector
layers
layer
semiconductor
type
Prior art date
Application number
PCT/US2001/029488
Other languages
French (fr)
Other versions
WO2002027804A2 (en )
Inventor
Richard B Merrill
Original Assignee
Foveon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

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Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14643Photodiode arrays; MOS imagers
    • H01L27/14645Colour imagers
    • H01L27/14647Multicolour imagers having a stacked pixel-element structure, e.g. npn, npnpn or MQW elements
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • H01L27/1462Coatings
    • H01L27/14621Colour filter arrangements

Abstract

A vertical color filter detector group according to the present invention is formed on a semiconductor substrate and comprises at least six layers of alternating p-type and n-typed doped regions. PN junctions between the layers operate as photodiodes with spectral sensitivities that depend on the absorption depth versus wavelength of light in the semiconductor. Alternate layers, preferably the n-type layers, are detector layers to collect photo-generated carriers, while the intervening layers, preferably p-type, are reference layers and are connected in common to a reference potential referred to as ground. Each detector group includes a blue-sensitive detector layer at an n-type layer at the surface of the semiconductor, a green-sensitive detector layer at an n-type layer deeper in the semiconductor, and a red-sensitive detector layer at the n-type layer deepest in the semiconductor. The blue-sensitive detector layer at the surface of the semiconductor may have a reference layer only below it, while the red- and green-sensitive detector layers have reference layers above and below them. Three sets of active pixel sensor circuitry are coupled to the three detector layers, such that three active pixel sensors are formed using the group of three co-located detectors of the vertical color filter detector group.
PCT/US2001/029488 2000-09-25 2001-09-20 Vertical color filter detector group and array WO2002027804A3 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US23524900 true 2000-09-25 2000-09-25
US60/235,249 2000-09-25
US09884863 US6727521B2 (en) 2000-09-25 2001-06-18 Vertical color filter detector group and array
US09/884,863 2001-06-18

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE2001639627 DE60139627D1 (en) 2000-09-25 2001-09-20 manufacturing processes detector array with vertical color filter and her
EP20010973289 EP1320893B1 (en) 2000-09-25 2001-09-20 Vertical color filter array and its method of manufacturing
KR20037004327A KR100791752B1 (en) 2000-09-25 2001-09-20 Vertical color filter detector group and array
JP2002531499A JP5201776B2 (en) 2000-09-25 2001-09-20 Vertical color filter detector group and array

Publications (2)

Publication Number Publication Date
WO2002027804A2 true WO2002027804A2 (en) 2002-04-04
WO2002027804A3 true true WO2002027804A3 (en) 2003-02-20

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/029488 WO2002027804A3 (en) 2000-09-25 2001-09-20 Vertical color filter detector group and array

Country Status (6)

Country Link
US (3) US6727521B2 (en)
JP (1) JP5201776B2 (en)
KR (1) KR100791752B1 (en)
DE (1) DE60139627D1 (en)
EP (1) EP1320893B1 (en)
WO (1) WO2002027804A3 (en)

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