WO2001059504A3 - Stiction release mechanism - Google Patents
Stiction release mechanism Download PDFInfo
- Publication number
- WO2001059504A3 WO2001059504A3 PCT/US2001/004687 US0104687W WO0159504A3 WO 2001059504 A3 WO2001059504 A3 WO 2001059504A3 US 0104687 W US0104687 W US 0104687W WO 0159504 A3 WO0159504 A3 WO 0159504A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- movable electrode
- contact surface
- stiction
- released
- auxiliary electrodes
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2001236992A AU2001236992A1 (en) | 2000-02-11 | 2001-02-12 | Stiction release mechanism |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US18182900P | 2000-02-11 | 2000-02-11 | |
US60/181,829 | 2000-02-11 | ||
US61444100A | 2000-07-12 | 2000-07-12 | |
US09/614,441 | 2000-07-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2001059504A2 WO2001059504A2 (en) | 2001-08-16 |
WO2001059504A3 true WO2001059504A3 (en) | 2002-04-25 |
Family
ID=26877553
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/004687 WO2001059504A2 (en) | 2000-02-11 | 2001-02-12 | Stiction release mechanism |
Country Status (2)
Country | Link |
---|---|
AU (1) | AU2001236992A1 (en) |
WO (1) | WO2001059504A2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7969262B2 (en) | 2004-10-27 | 2011-06-28 | Epcos Ag | Reduction of air damping in MEMS device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5411769A (en) * | 1990-11-13 | 1995-05-02 | Texas Instruments Incorporated | Method of producing micromechanical devices |
US5679436A (en) * | 1994-08-23 | 1997-10-21 | Analog Devices, Inc. | Micromechanical structure with textured surface and method for making same |
US5784189A (en) * | 1991-03-06 | 1998-07-21 | Massachusetts Institute Of Technology | Spatial light modulator |
-
2001
- 2001-02-12 WO PCT/US2001/004687 patent/WO2001059504A2/en active Application Filing
- 2001-02-12 AU AU2001236992A patent/AU2001236992A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5411769A (en) * | 1990-11-13 | 1995-05-02 | Texas Instruments Incorporated | Method of producing micromechanical devices |
US5784189A (en) * | 1991-03-06 | 1998-07-21 | Massachusetts Institute Of Technology | Spatial light modulator |
US5679436A (en) * | 1994-08-23 | 1997-10-21 | Analog Devices, Inc. | Micromechanical structure with textured surface and method for making same |
Non-Patent Citations (1)
Title |
---|
MATSUMOTO Y ET AL: "Novel prevention method of stiction using silicon anodization for SOI structure", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 72, no. 2, 19 January 1999 (1999-01-19), pages 153 - 159, XP004155657, ISSN: 0924-4247 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7969262B2 (en) | 2004-10-27 | 2011-06-28 | Epcos Ag | Reduction of air damping in MEMS device |
Also Published As
Publication number | Publication date |
---|---|
AU2001236992A1 (en) | 2001-08-20 |
WO2001059504A2 (en) | 2001-08-16 |
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