WO2000049688A1 - Device and method for tuning the wavelength of the light in an external cavity laser - Google Patents
Device and method for tuning the wavelength of the light in an external cavity laser Download PDFInfo
- Publication number
- WO2000049688A1 WO2000049688A1 PCT/SE2000/000336 SE0000336W WO0049688A1 WO 2000049688 A1 WO2000049688 A1 WO 2000049688A1 SE 0000336 W SE0000336 W SE 0000336W WO 0049688 A1 WO0049688 A1 WO 0049688A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- movable part
- light
- external cavity
- semiconductor chip
- cavity laser
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/14—External cavity lasers
- H01S5/141—External cavity lasers using a wavelength selective device, e.g. a grating or etalon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/14—External cavity lasers
- H01S5/141—External cavity lasers using a wavelength selective device, e.g. a grating or etalon
- H01S5/143—Littman-Metcalf configuration, e.g. laser - grating - mirror
Definitions
- the invention relates to a device and method for precise, fast and continuous tuning of a semiconductor external cavity laser, where the inherent limitations due to friction and mechanical wear are reduced to an absolute minimum.
- a conventional laser comprises an optically amplifying medium between a first and a second reflecting surface.
- these reflective surfaces are usually the end facets of the optically amplifying semiconductor chip.
- a fixed wavelength monolithic laser can be made tunable by providing an Anti-Reflection (AR) coating on the second semiconductor chip facet and arranging for an external movable second reflecting surface to provide wavelength selection.
- AR Anti-Reflection
- Another method takes advantage of the partly reflected light from the above said stationary grating.
- Wavelength selection in the semiconductor external cavity laser and thereby wavelength selection of the output light from the said external cavity laser is usually accomplished by changing the angle between the collimated beam, which originates at the AR coated semiconductor chip facet, and the surface normal of the diffraction grating. The collimation is normally obtained with a lens arrangement.
- the change of incident angle can be accomplished either by moving the diffraction grating itself or by changing the beam direction towards the diffraction grating by moving an auxiliary mirror. In both arrangements, continuous tuning is obtained by coordinating the translation and rotation of the moving part.
- additional disadvantages in known systems for tuning the wavelength of the light in external cavity lasers are for example mechanical wear, friction generated heat, play, variations in lubrication film thickness and lack of mechanical stiffness which are detrimental to the long-term reliability and system performance.
- the problem which is solved by the present invention is the difficulty to vary, at high speed and accuracy, the orientation and, if appropriate, the position of the optical elements which determine the wavelength of the light in the external cavity laser.
- the invention also makes it possible to vary the wavelength with a minimum of friction generated heat and a minimum of mechanical wear.
- the above described problem is solved with this invention by means of a method and a device for tuning the wavelength of the light in an external cavity laser comprising an optically amplifying semiconductor chip, a first reflecting surface, an AR coated semiconductor chip facet and a diffraction grating on which at least part of the beam originating from the AR coated semiconductor chip facet is incident and diffracted back to the optically amplifying semiconductor chip, means for collimating the light emitted from the AR coated semiconductor chip facet towards the diffraction grating, and a movable part by means of the movement of which said part the wavelength of the light can be tuned in the external cavity laser, wherein the movable part of the external cavity laser exhibits a rotational movement relative to the optical axis of the external cavity laser, the optical axis being defined by the center of the beam propagating between the first and the second reflecting surface, said movement being actuated by an electrodynamic force generated within an integral section of said movable part.
- the electrodynamic force can be used to directly influence the movement, and thus the wavelength of the light in the external cavity laser. In this way, there is no longer any need for intermediate gear devices and alike.
- the movable part of the external cavity laser is made to move with a minimum of friction, and its movement and thus the wavelength of the light in the external cavity laser can be tuned precisely, fast and continuously within a large wavelength range.
- the movable part of the device consists of a rotatable arm on which the diffraction grating of the device is arranged.
- the device can also comprise an auxiliary mirror on which at least part of the light diffracted from the diffraction grating is incident and reflected back towards the diffraction grating, in which device said movable part consists of a rotatable arm on which the auxiliary mirror is arranged
- the integral section of the movable part where an electrodynamic force is produced can comprise either a first magnet with the electrodynamic force being produced in interaction with a stationary first coil through which electrical current is passed, or a first coil through which electrical current is passed, with the electrodynamic force being produced in interaction with a stationary first magnet.
- the device also comprise at least one second coil and, associated with it, at least one second magnet, either of the two preferably being arranged on the movable part of the device, the electromagnetic interaction of the second coil and the second magnet being used for detecting movement of the movable part.
- the second magnet will therefore also perform a movement in relation to the second coil or vice versa, as a result of which a voltage is induced in the second coil.
- This electromagnetic interaction between the second coil and the second magnet in other words, the voltage induced in the second coil, is used for detecting the movement of the movable part.
- the information regarding the movement of the movable part can in turn be used in a control system for improving the control of the wavelength of the light in the external cavity laser.
- Fig. 1 shows the principle of one variant of an external cavity laser.
- Fig. 2 shows the principle of another variant of external cavity laser in which the invention can be applied.
- Fig. 3 shows a basic diagram of a device according to the invention.
- Fig. 4 shows a block diagram of a control system which is used in a preferred embodiment of the invention.
- Fig. 1 shows a basic diagram of an external cavity laser (100) in which the invention can be applied.
- the external cavity laser (100) is constructed according to what is known as the Littman configuration, which will be explained below.
- the external cavity laser (100) comprises an optically amplifying semiconductor chip (110), a first reflecting surface (112), an AR coated semiconductor chip facet (114), a diffraction grating (130), a collimating lens arrangement (120) and an auxiliary mirror (150) arranged on a movable part.
- the light which is emitted through the AR coated semiconductor chip facet (114) of the optically amplifying semiconductor chip (110), will be incident on the diffraction grating (130), towards which the light is collimated by means of a lens arrangement (120).
- the light From the diffraction grating (130), the light will be completely or partly diffracted towards the auxiliary mirror (150) and completely or partly reflected back towards the optically amplifying semiconductor chip (110), via the diffraction grating (130) and the collimating lens arrangement (120).
- the auxiliary mirror (150) is arranged on a movable part, which rotates about the axis of rotation (140). By rotating the auxiliary mirror (150), about its axis of rotation (140) and in this way varying the angle and the distance between the auxiliary mirror (150) and the diffraction grating, it is possible to vary the wavelength of the light in the external cavity laser (100) and thereby also varying the wavelength ⁇ of the light in the output beam, indicated in Fig. 1 by an arrow in the direction in which the light is emitted from the laser (100).
- Fig. 2 shows an external cavity laser (200), which is designed according to what is known as the Littrow configuration, which will be described below.
- the external cavity laser (200) comprises optically amplifying medium (210), suitably an optically amplifying semiconductor chip.
- the optically amplifying semiconductor chip has a first reflecting surface (212), suitably a reflecting semiconductor chip facet, and an AR coated semiconductor chip facet (214).
- Light is emitted from the optically amplifying semiconductor chip (210) through the AR coated second semiconductor chip facet (214) towards a diffraction grating (230).
- the light towards the diffraction grating is collimated by means of a lens arrangement (220). From the grating (230), the light is completely or partly reflected back towards the optically amplifying semiconductor chip (210) via the lens arrangement (220), which also focuses the beam from the diffraction grating towards the optically amplifying semiconductor chip (210).
- the light from the optically amplifying semiconductor chip (210) is also accessible via the first reflecting surface (212), in this configuration suitably being partly reflecting and partly transmitting, of the optically amplifying semiconductor chip.
- the laser light from this first reflecting surface of the optically amplifying semiconductor chip is accessed in a well-known manner, for someone knowledgeable in the field, and will therefore not be described in greater detail here.
- the diffraction grating (230) is pivotable about an axis of rotation (240).
- the diffraction grating is arranged on a movable part, preferably an arm (not shown) in the device (200).
- an external cavity laser irrespective of whether it is designed according to the Littman or the Littrow configuration, or any other configuration, comprises a movable part, by means of the movement of which the wavelength of the laser light emitted by the laser can be tuned.
- the main field of the present invention relates to a device and a method for precise, fast and continuous tuning of a semiconductor external cavity laser, where the inherent limitations due to friction and mechanical wear are reduced to an absolute minimum. In both configurations mentioned above, continuous tuning is obtained by coordinating the translation and rotation of the moving part.
- FIG. 3 shows a device (300) according to the invention.
- the laser wavelength emitted by the device (300) is varied according to the Littrow configuration described above, but it will be understood that the invention can also be applied to an external cavity laser designed according to the Littman configuration.
- the device (300), an external cavity laser, comprises an optically amplifying semiconductor chip (310).
- the optically amplifying semiconductor chip (310) has a first reflecting surface (312), suitably a reflecting chip facet, and a non-reflecting AR coated semiconductor chip facet (314).
- the light which is emitted through the AR coated semiconductor chip facet is collimated by means of a lens arrangement (320) towards a diffraction grating (330), which is arranged on a movable part, suitably a pivotable or a rotatable arm (360), which rotates about an axis, with a center of rotation (340).
- the angle between the collimated beam and the surface normal of the diffraction grating (330), and the length of the optical path between the diffraction grating and the first reflecting surface (312) of the optically amplifying semiconductor chip can be varied simultaneously, as a result of which the wavelength of the laser light in the device can also be continuously varied.
- the light can be brought out of the device via, for example, a second lens (392) and a third lens (395), as shown in Fig. 3, by means of which the light is guided into an optical fiber (398).
- the light being guided into an optical fiber is of course only an example of an application of the device according to the invention, and other applications are possible.
- the movable arm (360) comprises a first magnet (370), which is arranged on the arm. Arranged around the first magnet is a stationary first coil (374). The first magnet (370) and the first coil (374) interact so as to produce an electrodynamic force, which in turn will cause the arm to move.
- the electrodynamic force is developed by passing current through the coil. By passing current through the first coil and generating an electrodynamic force, the first magnet, and thus the arm, can be caused to move around the center of rotation (340), which is used for tuning the wavelength of the light in the external cavity laser in a desired manner.
- a device according to the invention can be used to vary the wavelength emitted by an external cavity laser to an optional wavelength within a large interval, the interval being mainly defined by the properties of the optically amplifying medium used.
- the movable arm can instead comprise the coil, while the first magnet (370) is stationarily arranged to interact with the coil (374), without being arranged on the arm (360).
- the device (300) can also comprise a second magnet (372), which is arranged in a fixed manner on the movable arm (360). Arranged around the second magnet is a second coil (376). When the first coil (374) interacts electrodynamically with the first magnet (370) causing the arm to move, the second magnet (372) will also move in relation to the second coil (376). This movement of the second magnet (372) will, because of electromagnetic induction, generate a voltage in the second coil (376).
- the voltage in the second coil (376) will vary, depending on the velocity of the moving arm (360), the voltage in the second coil can be used for detecting the velocity of the moving arm, which can in turn be used in a control system for improving the control of the wavelength of the light in the device (300).
- an additional device is needed for detecting the position of the arm (360).
- These means preferably comprise a secondary light source (380), suitably a laser diode, and what is known as a PSD, Position Sensitive Detector, (385).
- the secondary light source (380) is arranged so that its emitted light is incident on the diffraction grating (330), and reflected towards the PSD (385).
- a PSD is a well-known device and will therefore not be described in greater detail here, but briefly, two currents are generated in the PSD when its surface is illuminated by a light beam. The difference between these two currents, divided by their sum, indicates where the light beam illuminates the surface of the PSD, which means that it is possible to obtain information from this regarding the position of the diffraction grating, and thus the position of the movable part.
- the information regarding the position of the arm is suitably used in the above mentioned control system together with the information regarding the velocity of the moving arm, so that it is possible to control rapidly and very accurately the position of the arm, and thus also the wavelength of the laser light emitted by the external cavity laser.
- Fig. 4 shows a block diagram of a control system (400) which is suitably used in the invention in order to control the movement of the arm by means of information regarding the position and the velocity of the arm.
- the control system (400) comprises a first summing node (420) and a second summation node (440), a first controller (430) and a second controller (450), a velocity sensor (470), a position sensor (480) and a motor (460).
- the velocity sensor (470) in the control system (400) is suitably the second coil (376) in interaction with the second magnet (372) which, according to the description above in connection with Fig 3, can be used for detecting movement of the movable part in a device according to the invention.
- the motor (460) in the control system (400) suitably consists of the first coil (374) in interaction with the first magnet (370) which, according to the description above in connection with Fig. 3, can be used for causing the movable part to move in a device according to the invention.
- the position sensor (480) in the control system (400) suitably consists of a PSD, the functioning of which has been described above in connection with Fig. 3.
- the position of the movable part in the device is detected by the position sensor (480) and is used as input data to the first summing node (420).
- a desired value for the position of the movable part in the device according to the invention is used as additional input data to the first summing node (420).
- the output from the first summing node (420) is therefore a position error between the desired position and the actual position of the movable part in the device, which is used as input data to a first controller (430).
- Output data from the first controller (430) is used as input data to a second summing node (440).
- the value from the velocity sensor (470) is used as additional input data to the second summing node (440).
- the differential value, from the second summing node (440), forming a velocity error value, is used as input data to second controller (450), which controls the motor (460).
- the control system (400) can therefore be considered to consist of a control loop which itself comprises a nested control loop (410), where the internal control loop (410) handles the velocity of the movable part in the device.
- the invention is not limited to the examples of embodiments described above, but can be varied freely within the scope of the patent claims below.
- the electrodynamic forces which form part of the invention can be brought about in a great many ways within the scope of the invention.
- the optically amplifying medium included in the external cavity laser has throughout been described as an optically amplifying semiconductor chip, with one AR coated semiconductor chip facet, but other types of optically amplifying media are of course possible. If other types of optically amplifying media are used, the first reflecting surface can also, for example, be arranged mechanically separately from the optically amplifying medium.
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
Abstract
Description
Claims
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP00909871A EP1159775B1 (en) | 1999-02-19 | 2000-02-18 | Device and method for tuning the wavelength of the light in an external cavity laser |
AU32049/00A AU3204900A (en) | 1999-02-19 | 2000-02-18 | Device and method for tuning the wavelength of the light in an external cavity laser |
DE60013412T DE60013412T2 (en) | 1999-02-19 | 2000-02-18 | DEVICE AND METHOD FOR TUNING THE WAVELENGTH IN A LASER WITH EXTERNAL RESONATOR |
CA002363560A CA2363560C (en) | 1999-02-19 | 2000-02-18 | Device and method for tuning the wavelength of the light in an external cavity laser |
JP2000600330A JP4731691B2 (en) | 1999-02-19 | 2000-02-18 | Apparatus and method for tuning the wavelength of light in an external cavity laser |
US09/931,403 US6597710B2 (en) | 1999-02-19 | 2001-08-17 | Device and method for tuning the wavelength of the light in an external cavity laser |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9900602A SE9900602D0 (en) | 1999-02-19 | 1999-02-19 | Device and method for varying the wavelength delivered from an external cavity laser |
SE9900602-5 | 1999-02-19 | ||
US18341500P | 2000-02-18 | 2000-02-18 | |
US60/183,415 | 2000-02-18 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/931,403 Continuation US6597710B2 (en) | 1999-02-19 | 2001-08-17 | Device and method for tuning the wavelength of the light in an external cavity laser |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2000049688A1 true WO2000049688A1 (en) | 2000-08-24 |
Family
ID=26663511
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/SE2000/000336 WO2000049688A1 (en) | 1999-02-19 | 2000-02-18 | Device and method for tuning the wavelength of the light in an external cavity laser |
Country Status (6)
Country | Link |
---|---|
US (1) | US6597710B2 (en) |
EP (1) | EP1159775B1 (en) |
AU (1) | AU3204900A (en) |
CA (1) | CA2363560C (en) |
DE (1) | DE60013412T2 (en) |
WO (1) | WO2000049688A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1229617A2 (en) * | 2000-12-21 | 2002-08-07 | Ando Electric Co., Ltd. | Wavelength tunable light source |
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Publication number | Priority date | Publication date | Assignee | Title |
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US6625183B1 (en) * | 2000-01-31 | 2003-09-23 | New Focus, Inc. | External cavity laser apparatus |
EP1231684A1 (en) * | 2001-09-07 | 2002-08-14 | Agilent Technologies, Inc. (a Delaware corporation) | Tuning a laser |
US6862301B2 (en) * | 2001-12-31 | 2005-03-01 | Finisar Corporation | Tunable laser assembly |
US7330835B2 (en) * | 2002-10-31 | 2008-02-12 | Federal Reserve Bank Of Minneapolis | Method and system for tracking and reporting automated clearing house transaction status |
US7031353B2 (en) | 2003-02-25 | 2006-04-18 | Clifford Jr George M | Apparatus and method for adjusting external-cavity lasers |
US20050163172A1 (en) * | 2004-01-27 | 2005-07-28 | Joachim Sacher | High-power laser diode arrangement with external resonator |
WO2006112971A2 (en) * | 2005-04-13 | 2006-10-26 | Corning Incorporated | Mode-matching system for tunable external cavity laser |
US7492806B2 (en) * | 2005-06-15 | 2009-02-17 | Daylight Solutions, Inc. | Compact mid-IR laser |
US7535656B2 (en) | 2005-06-15 | 2009-05-19 | Daylight Solutions, Inc. | Lenses, optical sources, and their couplings |
US7456593B1 (en) * | 2006-04-10 | 2008-11-25 | Anorad Corporation | Direct drive transport system |
JP2008152116A (en) * | 2006-12-19 | 2008-07-03 | Lasertec Corp | Lighting device and method |
US7848382B2 (en) | 2008-01-17 | 2010-12-07 | Daylight Solutions, Inc. | Laser source that generates a plurality of alternative wavelength output beams |
US8565275B2 (en) | 2008-04-29 | 2013-10-22 | Daylight Solutions, Inc. | Multi-wavelength high output laser source assembly with precision output beam |
US7733925B2 (en) * | 2008-07-07 | 2010-06-08 | Daylight Solutions, Inc. | Continuous wavelength tunable laser source with optimum positioning of pivot axis for grating |
US7822096B2 (en) | 2008-12-12 | 2010-10-26 | Corning Incorporated | Alignment and wavelength selection in external cavity lasers |
US9032880B2 (en) | 2009-01-23 | 2015-05-19 | Magnemotion, Inc. | Transport system powered by short block linear synchronous motors and switching mechanism |
US8616134B2 (en) | 2009-01-23 | 2013-12-31 | Magnemotion, Inc. | Transport system powered by short block linear synchronous motors |
US8774244B2 (en) | 2009-04-21 | 2014-07-08 | Daylight Solutions, Inc. | Thermal pointer |
WO2011081212A1 (en) * | 2009-12-30 | 2011-07-07 | 国立大学法人千葉大学 | External resonator laser |
WO2011156033A2 (en) * | 2010-03-15 | 2011-12-15 | Daylight Solutions, Inc. | Laser source that generates a rapidly changing output beam |
US8335413B2 (en) | 2010-05-14 | 2012-12-18 | Daylight Solutions, Inc. | Optical switch |
US8467430B2 (en) | 2010-09-23 | 2013-06-18 | Daylight Solutions, Inc. | Continuous wavelength tunable laser source with optimum orientation of grating and gain medium |
US9225148B2 (en) | 2010-09-23 | 2015-12-29 | Daylight Solutions, Inc. | Laser source assembly with thermal control and mechanically stable mounting |
US9042688B2 (en) | 2011-01-26 | 2015-05-26 | Daylight Solutions, Inc. | Multiple port, multiple state optical switch |
US9147995B2 (en) * | 2013-03-15 | 2015-09-29 | Daylight Solutions, Inc. | Rapidly tunable laser source assembly with long stroke grating mover |
JP6633516B2 (en) | 2013-09-21 | 2020-01-22 | マグネモーション インコーポレイテッド | Linear motor transport for packaging and other applications |
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US4426155A (en) * | 1981-10-08 | 1984-01-17 | Monchalin Jean Pierre | Method and apparatus for the interferometric wavelength measurement of frequency tunable C.W. lasers |
US5491714A (en) * | 1994-02-28 | 1996-02-13 | Ando Electric Co., Ltd. | Wavelength-variable semiconductor laser light source |
US5493575A (en) * | 1993-09-27 | 1996-02-20 | Ando Electric Co., Ltd. | External resonator type frequency-variable semiconductor laser light source |
US5548609A (en) * | 1994-02-28 | 1996-08-20 | Ando Electric Co., Ltd. | External resonator type wavelength-variable semiconductor laser light source |
US5862162A (en) * | 1996-03-25 | 1999-01-19 | Ando Electric Co., Ltd. | External resonator type wavelength- tunable light source |
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SE463181B (en) * | 1989-09-07 | 1990-10-15 | Radians Innova Ab | SAID THAT SEASONAL COUNTERFUL RECONCILIATION OF THE RESONANCE FREQUENCY AND Q-VALUE OF AN OPTICAL RESONATOR AND DEVICE BEFORE EXERCISING THE SET |
DE69200586T2 (en) * | 1992-01-24 | 1995-05-24 | Hewlett Packard Gmbh | Method and apparatus for tuning the wavelength in an optical device and its use in a laser. |
FR2690012B1 (en) * | 1992-04-13 | 1994-07-08 | France Telecom | METHOD FOR ADJUSTING A CONTINUOUSLY TUNABLE LIGHT SOURCE. |
US5319668A (en) * | 1992-09-30 | 1994-06-07 | New Focus, Inc. | Tuning system for external cavity diode laser |
US5379310A (en) * | 1993-05-06 | 1995-01-03 | Board Of Trustees Of The University Of Illinois | External cavity, multiple wavelength laser transmitter |
FR2724496B1 (en) * | 1994-09-13 | 1996-12-20 | Photonetics | SINGLE-MODE LASER SOURCE TUNABLE IN WAVELENGTH WITH SELF-ALIGNED EXTERNAL CAVITY |
US5867512A (en) * | 1997-02-10 | 1999-02-02 | Sacher; Joachim | Tuning arrangement for a semiconductor diode laser with an external resonator |
JPH10341057A (en) * | 1997-06-06 | 1998-12-22 | Ando Electric Co Ltd | External resonator type wavelength-variable semiconductor laser optical source and wavelength variable method therefor |
-
2000
- 2000-02-18 EP EP00909871A patent/EP1159775B1/en not_active Expired - Lifetime
- 2000-02-18 CA CA002363560A patent/CA2363560C/en not_active Expired - Lifetime
- 2000-02-18 AU AU32049/00A patent/AU3204900A/en not_active Abandoned
- 2000-02-18 WO PCT/SE2000/000336 patent/WO2000049688A1/en active IP Right Grant
- 2000-02-18 DE DE60013412T patent/DE60013412T2/en not_active Expired - Lifetime
-
2001
- 2001-08-17 US US09/931,403 patent/US6597710B2/en not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4426155A (en) * | 1981-10-08 | 1984-01-17 | Monchalin Jean Pierre | Method and apparatus for the interferometric wavelength measurement of frequency tunable C.W. lasers |
US5493575A (en) * | 1993-09-27 | 1996-02-20 | Ando Electric Co., Ltd. | External resonator type frequency-variable semiconductor laser light source |
US5491714A (en) * | 1994-02-28 | 1996-02-13 | Ando Electric Co., Ltd. | Wavelength-variable semiconductor laser light source |
US5548609A (en) * | 1994-02-28 | 1996-08-20 | Ando Electric Co., Ltd. | External resonator type wavelength-variable semiconductor laser light source |
US5862162A (en) * | 1996-03-25 | 1999-01-19 | Ando Electric Co., Ltd. | External resonator type wavelength- tunable light source |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1229617A2 (en) * | 2000-12-21 | 2002-08-07 | Ando Electric Co., Ltd. | Wavelength tunable light source |
EP1229617A3 (en) * | 2000-12-21 | 2004-01-21 | Ando Electric Co., Ltd. | Wavelength tunable light source |
Also Published As
Publication number | Publication date |
---|---|
DE60013412T2 (en) | 2005-09-08 |
DE60013412D1 (en) | 2004-10-07 |
EP1159775A1 (en) | 2001-12-05 |
AU3204900A (en) | 2000-09-04 |
US6597710B2 (en) | 2003-07-22 |
EP1159775B1 (en) | 2004-09-01 |
CA2363560A1 (en) | 2000-08-24 |
US20020024979A1 (en) | 2002-02-28 |
CA2363560C (en) | 2008-09-02 |
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