WO2000013266A3 - A diode-pumped cascade laser for deep uv generation - Google Patents

A diode-pumped cascade laser for deep uv generation Download PDF

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Publication number
WO2000013266A3
WO2000013266A3 PCT/US1999/019764 US9919764W WO0013266A3 WO 2000013266 A3 WO2000013266 A3 WO 2000013266A3 US 9919764 W US9919764 W US 9919764W WO 0013266 A3 WO0013266 A3 WO 0013266A3
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WO
WIPO (PCT)
Prior art keywords
diode
solid
deep uv
laser
uv generation
Prior art date
Application number
PCT/US1999/019764
Other languages
French (fr)
Other versions
WO2000013266A2 (en
Inventor
Ming Lai
Original Assignee
Ming Lai
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US9839898P priority Critical
Priority to US60/098,398 priority
Application filed by Ming Lai filed Critical Ming Lai
Publication of WO2000013266A2 publication Critical patent/WO2000013266A2/en
Publication of WO2000013266A3 publication Critical patent/WO2000013266A3/en

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Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11Pulse generation, e.g. Q-switching, mode locking
    • H01S3/115Q-switching using electro-optical devices
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/0941Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/0941Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
    • H01S3/09415Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode the pumping beam being parallel to the lasing mode of the pumped medium, e.g. end-pumping
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/04Cooling arrangements
    • H01S3/0405Conductive cooling, e.g. by heat sinks or thermo-electric elements
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/0602Crystal lasers or glass lasers
    • H01S3/061Crystal lasers or glass lasers with elliptical or circular cross-section and elongated shape, e.g. rod
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/081Construction or shape of optical resonators or components thereof comprising more than two reflectors
    • H01S3/0813Configuration of resonator
    • H01S3/0815Configuration of resonator having 3 reflectors, i.e. V-shaped resonators
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/094038End pumping
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/094084Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light with pump light recycling, i.e. with reinjection of the unused pump light, e.g. by reflectors or circulators
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling a device placed within the cavity
    • H01S3/108Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling a device placed within the cavity using a non-linear optical device, e.g. exhibiting Brillouin- or Raman-scattering
    • H01S3/109Frequency multiplying, e.g. harmonic generation
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11Pulse generation, e.g. Q-switching, mode locking
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11Pulse generation, e.g. Q-switching, mode locking
    • H01S3/117Q-switching using acousto-optical devices
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16Solid materials
    • H01S3/1601Solid materials characterised by an active (lasing) ion
    • H01S3/162Solid materials characterised by an active (lasing) ion transition metal
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media

Abstract

A two-step, diode-pumped solid-state laser is disclosed. A diode laser source (100) pumps a first solid-state laser (200). The first solid-state laser (200) in-turn pumps a second solid-state laser (300). The second solid-state laser (300) contains all the parameters suitable for efficient deep UV generation. A direct application of the diode-pumped solid-state cascade laser (10) is for deep UV generation for photo-refractive surgeries.
PCT/US1999/019764 1998-08-31 1999-08-27 A diode-pumped cascade laser for deep uv generation WO2000013266A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US9839898P true 1998-08-31 1998-08-31
US60/098,398 1998-08-31

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP99945290A EP1110281A4 (en) 1998-08-31 1999-08-27 A diode-pumped cascade laser for deep uv generation
JP2000568147A JP2004503918A (en) 1998-08-31 1999-08-27 Deep ultraviolet generating diode-pumped cascade laser

Publications (2)

Publication Number Publication Date
WO2000013266A2 WO2000013266A2 (en) 2000-03-09
WO2000013266A3 true WO2000013266A3 (en) 2000-06-02

Family

ID=22269109

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1999/019764 WO2000013266A2 (en) 1998-08-31 1999-08-27 A diode-pumped cascade laser for deep uv generation

Country Status (4)

Country Link
US (1) US6031854A (en)
EP (1) EP1110281A4 (en)
JP (1) JP2004503918A (en)
WO (1) WO2000013266A2 (en)

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US6031854A (en) * 1998-08-31 2000-02-29 Ming; Lai Diode-pumped cascade laser for deep UV generation
US6363095B1 (en) * 1999-05-06 2002-03-26 Northrop Grumman Corporation Solid-state laser system using high-temperature semiconductor diode laser as an optical pump source
AT408589B (en) * 1999-07-07 2002-01-25 Femtolasers Produktions Gmbh laser device
JP2001352118A (en) * 2000-06-08 2001-12-21 Cyber Laser Kk Light source device and laser device using the same
DE10118793B4 (en) * 2000-12-01 2013-11-14 Crylas Crystal Laser Systems Gmbh UV solid state laser
US6587487B2 (en) * 2000-12-19 2003-07-01 Photonics Industries International, Inc. Harmonic laser
US6757310B2 (en) 2001-01-17 2004-06-29 Ming Lai Solid-state laser for customized cornea ablation
GB0122670D0 (en) * 2001-09-20 2001-11-14 Karpushko Fedor V Intracavity frequency conversion of laser
GB2385459B (en) * 2001-10-30 2005-06-15 Laser Quantum Ltd Laser Cavity
WO2003079505A2 (en) * 2002-03-11 2003-09-25 Salia Ming Lai Integrated laser oscillator-amplifier system
US6697391B2 (en) * 2002-03-28 2004-02-24 Lightwave Electronics Intracavity resonantly enhanced fourth-harmonic generation using uncoated brewster surfaces
US20050211680A1 (en) * 2003-05-23 2005-09-29 Mingwei Li Systems and methods for laser texturing of surfaces of a substrate
US20080269731A1 (en) * 2003-11-19 2008-10-30 Casimir Andrew Swinger Method and apparatus applying patient-verified prescription of high order aberrations
US6859335B1 (en) 2002-11-20 2005-02-22 Ming Lai Method of programmed displacement for prolong usage of optical elements under the irradiation of intensive laser beams
US7407285B2 (en) * 2002-11-20 2008-08-05 Ming Lai Method and apparatus for obtaining patient-verified prescription of high order aberrations
US7003005B1 (en) 2003-04-03 2006-02-21 Ming Lai Simplified laser oscillator-amplifier system
US7284862B1 (en) 2003-11-13 2007-10-23 Md Lasers & Instruments, Inc. Ophthalmic adaptive-optics device with a fast eye tracker and a slow deformable mirror
US7313155B1 (en) 2004-02-12 2007-12-25 Liyue Mu High power Q-switched laser for soft tissue ablation
US8137340B2 (en) * 2004-06-23 2012-03-20 Applied Harmonics Corporation Apparatus and method for soft tissue ablation employing high power diode-pumped laser
CN1301576C (en) * 2004-12-31 2007-02-21 西北大学 Laser diode pumping full-solid ultraviolet pulse laser
JP5189738B2 (en) * 2005-03-29 2013-04-24 ジェイディーエス ユニフェイズ コーポレーションJDS Uniphase Corporation Stabilization of the active q-switched laser
US7672342B2 (en) * 2005-05-24 2010-03-02 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Method and radiation source for generating pulsed coherent radiation
US7862556B2 (en) * 2005-06-17 2011-01-04 Applied Harmonics Corporation Surgical system that ablates soft tissue
US7535938B2 (en) * 2005-08-15 2009-05-19 Pavilion Integration Corporation Low-noise monolithic microchip lasers capable of producing wavelengths ranging from IR to UV based on efficient and cost-effective frequency conversion
US7643529B2 (en) * 2005-11-01 2010-01-05 Cymer, Inc. Laser system
US7999915B2 (en) * 2005-11-01 2011-08-16 Cymer, Inc. Laser system
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See also references of EP1110281A4 *

Also Published As

Publication number Publication date
US6031854A (en) 2000-02-29
EP1110281A4 (en) 2005-09-21
EP1110281A2 (en) 2001-06-27
WO2000013266A2 (en) 2000-03-09
JP2004503918A (en) 2004-02-05

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