WO1999065061A3 - A portable laser cleaning device for semiconductor packaging machines - Google Patents

A portable laser cleaning device for semiconductor packaging machines Download PDF

Info

Publication number
WO1999065061A3
WO1999065061A3 PCT/SG1999/000053 SG9900053W WO9965061A3 WO 1999065061 A3 WO1999065061 A3 WO 1999065061A3 SG 9900053 W SG9900053 W SG 9900053W WO 9965061 A3 WO9965061 A3 WO 9965061A3
Authority
WO
WIPO (PCT)
Prior art keywords
cleaning device
semiconductor packaging
portable laser
laser cleaning
packaging machines
Prior art date
Application number
PCT/SG1999/000053
Other languages
French (fr)
Other versions
WO1999065061A2 (en
Inventor
Yongfeng Lu
Wendong Song
Qiong Chen
Sim Yak Hui Jason
Original Assignee
Advanced Systems Automation Li
Inst Data Storage
Yongfeng Lu
Wendong Song
Qiong Chen
Sim Yak Hui Jason
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Systems Automation Li, Inst Data Storage, Yongfeng Lu, Wendong Song, Qiong Chen, Sim Yak Hui Jason filed Critical Advanced Systems Automation Li
Publication of WO1999065061A2 publication Critical patent/WO1999065061A2/en
Publication of WO1999065061A3 publication Critical patent/WO1999065061A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/035—Aligning the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/70—Maintenance
    • B29C33/72—Cleaning
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814—Conductive parts
    • H01L21/4821—Flat leads, e.g. lead frames with or without insulating supports
    • H01L21/4835—Cleaning, e.g. removing of solder

Abstract

A portable laser cleaning device which can be steered next to any semiconductor encapsulating tool having multiple moulds in one or more presses. The cleaning device basically includes a base, laser generator, optical pipe, and cleaning head. The laser generator fixedly rests on the base which is firmly attached to the encapsulating tool. The optical pipe is fixed within the encapsulating tool and delivers a beam of laser to the cleaning head. The cleaning head moves on a rail and precisely delivers the beam onto the surface of the mould to remove substantially all of the surface contaminants associated with semiconductor packaging.
PCT/SG1999/000053 1998-06-08 1999-06-03 A portable laser cleaning device for semiconductor packaging machines WO1999065061A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SG9801257-8 1998-06-08
SG9801257 1998-06-08

Publications (2)

Publication Number Publication Date
WO1999065061A2 WO1999065061A2 (en) 1999-12-16
WO1999065061A3 true WO1999065061A3 (en) 2000-01-27

Family

ID=20430019

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/SG1999/000053 WO1999065061A2 (en) 1998-06-08 1999-06-03 A portable laser cleaning device for semiconductor packaging machines

Country Status (1)

Country Link
WO (1) WO1999065061A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG96648A1 (en) 2001-10-01 2003-06-16 Inst Data Storage Method and apparatus for deflashing of integrated circuit packages
SG143180A1 (en) 2006-11-22 2008-06-27 Apic Yamada Corporaton Resin molding machine and method of resin molding
TWI719764B (en) * 2019-12-17 2021-02-21 鈦昇科技股份有限公司 Mold cleaning machine
CN114762858B (en) * 2021-05-24 2023-05-12 北京劲吾新能源科技有限公司 Method for removing color photovoltaic module ink and application thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0297506A2 (en) * 1987-07-02 1989-01-04 Ibm Deutschland Gmbh Removal of particles from solid-state surfaces by laser bombardement
US5023434A (en) * 1988-07-23 1991-06-11 R. Stahl Fordertechnik Gmbh Position indicating apparatus for transporters on tracks
US5373140A (en) * 1993-03-16 1994-12-13 Vernay Laboratories, Inc. System for cleaning molding equipment using a laser
US5643367A (en) * 1993-10-26 1997-07-01 Saint Gobain Emballage Method and device for cleaning solid elements
EP0792731A2 (en) * 1996-03-01 1997-09-03 PIRELLI COORDINAMENTO PNEUMATICI S.p.A. Method and apparatus for cleaning vulcanization moulds for elastomer material articles

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0297506A2 (en) * 1987-07-02 1989-01-04 Ibm Deutschland Gmbh Removal of particles from solid-state surfaces by laser bombardement
US5023434A (en) * 1988-07-23 1991-06-11 R. Stahl Fordertechnik Gmbh Position indicating apparatus for transporters on tracks
US5373140A (en) * 1993-03-16 1994-12-13 Vernay Laboratories, Inc. System for cleaning molding equipment using a laser
US5643367A (en) * 1993-10-26 1997-07-01 Saint Gobain Emballage Method and device for cleaning solid elements
EP0792731A2 (en) * 1996-03-01 1997-09-03 PIRELLI COORDINAMENTO PNEUMATICI S.p.A. Method and apparatus for cleaning vulcanization moulds for elastomer material articles

Also Published As

Publication number Publication date
WO1999065061A2 (en) 1999-12-16

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