WO1999060275A1 - Reibungsvakuumpumpe mit stator und rotor - Google Patents
Reibungsvakuumpumpe mit stator und rotor Download PDFInfo
- Publication number
- WO1999060275A1 WO1999060275A1 PCT/EP1998/005802 EP9805802W WO9960275A1 WO 1999060275 A1 WO1999060275 A1 WO 1999060275A1 EP 9805802 W EP9805802 W EP 9805802W WO 9960275 A1 WO9960275 A1 WO 9960275A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- rotor
- vacuum pump
- pump
- friction vacuum
- stages
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
Definitions
- the invention relates to a friction vacuum pump with a stator and a rotor, which form at least two pump stages, each with a gas inlet, and with connection means for the pump stages, which are equipped with connection openings and serve to connect the gas inlets of the pump stages to devices to be evacuated.
- a friction vacuum pump of this type is known. It is preferably used for the evacuation of corpuscular blasting devices (e.g. mass spectrometers) with chambers separated from each other by screens, in which different pressures should prevail during operation of the corpuscular blasting device. It is known per se to use separate vacuum pumps to generate these pressures.
- DE-A-43 31 589 discloses using only one vacuum pump system to generate the various pressures required by the corpuscular jet device.
- the pump system comprises two turbomolecular and one molecular (Holweck) pump stage. These pump stages are arranged axially one behind the other. Each pump stage has a gas inlet (front gas passage area), which is connected to the associated chamber of the pump to be evacuated via connection means. connecting device.
- the housing itself and a laterally arranged additional housing serve as connection means.
- the housing itself is equipped with a connection opening on the end face for connecting the gas inlet of the first pump stage to the device to be evacuated.
- Connection lines are provided in the additional housing, which connect the associated inlets of the further pump stages to further connection openings. These in turn are each connected to the associated chambers in the device to be evacuated. Since the connection openings in the additional housing lie in a common plane (perpendicular to the rotor axis) with the connection opening of the first pump stage, the connecting lines located in the additional housing must be relatively long. This results in relatively large conductance losses in the connecting lines, which is particularly disadvantageous when a high pumping speed is desired, particularly in the area of an intermediate connection.
- the present invention is based on the object of designing a friction vacuum pump of the type mentioned at the outset in such a way that the pumping speed of the intermediate stages is not impaired by high conductance losses in connecting lines.
- connection openings lie in a plane which is located to the side of the pump stages, so that the distance between the connection openings and the rotor axis is as small as possible.
- the implementation of the measures according to the invention has the consequence that the gases to be conveyed have to be redirected in the inlet area of the first pump stage, that is to say precisely where the pressure is lowest.
- the resulting loss of conductivity can, however, be kept small, since the distance between the gas inlet and the level of the connection opening is still relatively small and, in addition, there is nothing to prevent larger diameters in this area.
- the main purpose of the first pump stage is to ensure a high compression ratio.
- the blade properties selected for the first pump stage must take this function into account. It is essential to separate the two working pressure ranges of the two pump stages.
- a high pumping speed is generally only required at the intermediate inlets or inlets. This goal can also be achieved by choosing special blade geometries.
- the application of the measures according to the invention ensures in this area in particular that losses in suction power are largely avoided.
- the accessibility of the gas molecules to the gas inlet is decisive for the pumping speed of a pump stage.
- the pump itself is denoted by 1, its housing by 2, its stator system by 3 and its rotor system by 4.
- the rotor system includes shaft 5, which in turn is supported by bearings 6, 7 in bearing housing 8, connected to pump housing 2.
- the drive motor 9, 10 is also located in the bearing housing.
- the axis of rotation of the rotor system 4 is designated by 15.
- a total of three pump stages 12, 13, 14 are provided, of which two (12, 13) are designed as turbomolecular vacuum pump stages and one (14) is designed as a molecular (Holweck) pump stage.
- the outlet of the pump 17 connects to the molecular pump stage 14.
- the first pump stage 12 located on the high vacuum side consists of four pairs of rotor blade rows 21 and stator blade rows 22. Its inlet, the effective gas passage area, is designated by 23.
- the first pump stage 12 is followed by the second pump stage 13, which consists of three pairs of a stator blade row 22 and a rotor blade row 21. Your entry is designated 28.
- the second pump stage 13 is spaced apart from the first pump stage 12.
- the selected distance (height) a ensures the free accessibility of the gas molecules to be conveyed to the gas inlet 28.
- the distance a is expediently greater than a quarter, preferably greater than a third, of the diameter of the rotor system 4.
- the adjoining Holweck pump comprises a rotating cylinder section 29 which is opposed by stator elements 32, 33 equipped on the outside and inside in a known manner, each with a threaded groove 30, 31.
- the rotor-side parts of the pump stages 12, 13, 14 form a unit which is connected to the shaft 5 in the operational state.
- the shaft 5 passes through a central bore 25, so that there is no direct connection between the storage space and the space and thus the risk of back diffusion of lubricant vapors is eliminated.
- the flying bearing of the rotor system 4 also serves this purpose. Bearings arranged on the high vacuum side and components which impair the conductance (bearing bracket) can be dispensed with.
- the bell-shaped design of the part of the rotor system 4 close to the motor, however, keeps the distance of the bearings 6, 7 from the center of gravity of the rotor small.
- the back diffusion of lubricant vapors can also be avoided by using magnetic bearings, which can be arranged at a more convenient location.
- the housing 2 itself is used to implement the connection means according to the invention.
- it is designed such that the planes of all connection openings 36, 37 lie parallel to the rotor axis 15.
- the distance between the connection 37 and the associated gas inlet 28 is very small, so that conductance losses which impair the pumping speed of the pump stage 13 are negligible.
- This would also apply to every other connection that would be downstream of the intermediate connection 37/28. Otherwise, the diameter of the connection opening 37 exceeds the height a by approximately twice. This measure also serves to reduce the conductance losses between inlet 28 and connection opening 37.
- the pump 1 shown or its pump-effective elements are expediently designed such that a pressure of 10 ⁇ 4 to 10 ⁇ 7 , preferably 10 "5 to 10 " 6 , and in the area of the connection opening 36 A pressure of about 10 "2 to 10 ⁇ 4 mbar is generated in the area of the connection opening 37.
- the subsequent, two-stage Holweck pumping stage (29, 30; 29, 31) ensures high fore-vacuum resistance, so that the pumping speed of the second pumping stage is usually independent of the fore-vacuum pressure.
- this goal can be achieved by appropriately designing the blades of the first pump stage 12.
- Another possibility is to arrange an orifice 38 in front of the inlet 23 of the first pump stage, the inner diameter of which determines the desired pumping speed.
- the exemplary embodiment according to FIG. 2 differs from the exemplary embodiment according to FIG. 1 in that the diameter of the pump stages 13 and 14 following the first pump stage 12 is larger than the diameter of the pump stage 12.
- the level of the connection openings 36, 37 is adapted to this situation. It is like that Axis 15 of the rotor 4 is inclined so that the distance between the connection openings 36, 37 and the associated gas inlets 23, 28 is as small as possible.
- the angle of inclination ⁇ of the plane of the connection openings 36, 37 to the rotor axis 15 corresponds to the increase in the diameter of the pump stages. Optimally favorable distance ratios can be achieved in this way. In the illustrated embodiment, the angle of inclination is approximately 5 °.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Description
Claims
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU93481/98A AU754944B2 (en) | 1998-05-14 | 1998-09-11 | Friction vacuum pump with a stator and a rotor |
DE59808723T DE59808723D1 (de) | 1998-05-14 | 1998-09-11 | Reibungsvakuumpumpe mit stator und rotor |
US09/700,046 US6435811B1 (en) | 1998-05-14 | 1998-09-11 | Friction vacuum pump with a stator and a rotor |
KR1020007012771A KR20010025024A (ko) | 1998-05-14 | 1998-09-11 | 고정자 및 회전자를 가진 마찰 진공 펌프 |
EP98946450A EP1078166B2 (de) | 1998-05-14 | 1998-09-11 | Reibungsvakuumpumpe mit stator und rotor |
CA002332777A CA2332777C (en) | 1998-05-14 | 1998-09-11 | Friction vacuum pump with a stator and a rotor |
JP2000549859A JP4173637B2 (ja) | 1998-05-14 | 1998-09-11 | ステータとロータを備えた摩擦真空ポンプ |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19821634.3 | 1998-05-14 | ||
DE19821634A DE19821634A1 (de) | 1998-05-14 | 1998-05-14 | Reibungsvakuumpumpe mit Stator und Rotor |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1999060275A1 true WO1999060275A1 (de) | 1999-11-25 |
Family
ID=7867761
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP1998/005802 WO1999060275A1 (de) | 1998-05-14 | 1998-09-11 | Reibungsvakuumpumpe mit stator und rotor |
Country Status (10)
Country | Link |
---|---|
US (1) | US6435811B1 (de) |
EP (1) | EP1078166B2 (de) |
JP (1) | JP4173637B2 (de) |
KR (1) | KR20010025024A (de) |
CN (1) | CN1115488C (de) |
AU (1) | AU754944B2 (de) |
CA (1) | CA2332777C (de) |
DE (2) | DE19821634A1 (de) |
TW (1) | TW370594B (de) |
WO (1) | WO1999060275A1 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005047707A1 (de) * | 2003-11-13 | 2005-05-26 | Leybold Vacuum Gmbh | Mehrstufige reibungsvakuumpumpe |
US8757987B2 (en) | 2004-06-25 | 2014-06-24 | Edwards Limited | Vacuum pump for differentially pumping multiple chambers |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6090100A (en) | 1992-10-01 | 2000-07-18 | Chiron Technolas Gmbh Ophthalmologische Systeme | Excimer laser system for correction of vision with reduced thermal effects |
GB9921983D0 (en) * | 1999-09-16 | 1999-11-17 | Boc Group Plc | Improvements in vacuum pumps |
JP3777498B2 (ja) * | 2000-06-23 | 2006-05-24 | 株式会社荏原製作所 | ターボ分子ポンプ |
JP2002138987A (ja) * | 2000-10-31 | 2002-05-17 | Seiko Instruments Inc | 真空ポンプ |
DE10302764A1 (de) * | 2003-01-24 | 2004-07-29 | Pfeiffer Vacuum Gmbh | Vakuumpumpsystem |
GB0409139D0 (en) | 2003-09-30 | 2004-05-26 | Boc Group Plc | Vacuum pump |
GB0322883D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
GB0329839D0 (en) * | 2003-12-23 | 2004-01-28 | Boc Group Plc | Vacuum pump |
GB0503946D0 (en) * | 2005-02-25 | 2005-04-06 | Boc Group Plc | Vacuum pump |
DE202005019644U1 (de) * | 2005-12-16 | 2007-04-26 | Leybold Vacuum Gmbh | Turbomolekularpumpe |
JP2007231938A (ja) * | 2006-02-06 | 2007-09-13 | Boc Edwards Kk | 真空装置、真空装置における水蒸気分圧の急速低減方法、ロードロックチャンバー内の水蒸気分圧の上昇防止方法、および、真空装置用真空ポンプ |
DE102008024764A1 (de) * | 2008-05-23 | 2009-11-26 | Oerlikon Leybold Vacuum Gmbh | Mehrstufige Vakuumpumpe |
DE202009003880U1 (de) | 2009-03-19 | 2010-08-05 | Oerlikon Leybold Vacuum Gmbh | Multi-Inlet-Vakuumpumpe |
FR2984972A1 (fr) * | 2011-12-26 | 2013-06-28 | Adixen Vacuum Products | Adaptateur pour pompes a vide et dispositif de pompage associe |
EP2757266B1 (de) * | 2013-01-22 | 2016-03-16 | Agilent Technologies, Inc. | Rotationsvakuumpumpe |
DE102013109637A1 (de) * | 2013-09-04 | 2015-03-05 | Pfeiffer Vacuum Gmbh | Vakuumpumpe sowie Anordnung mit einer Vakuumpumpe |
DE102013114290A1 (de) | 2013-12-18 | 2015-06-18 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
JP6488898B2 (ja) * | 2015-06-09 | 2019-03-27 | 株式会社島津製作所 | 真空ポンプおよび質量分析装置 |
US10655638B2 (en) * | 2018-03-15 | 2020-05-19 | Lam Research Corporation | Turbomolecular pump deposition control and particle management |
US11519419B2 (en) | 2020-04-15 | 2022-12-06 | Kin-Chung Ray Chiu | Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface |
GB2601515B (en) * | 2020-12-02 | 2022-12-28 | Agilent Technologies Inc | Vacuum pump with elastic spacer |
EP4293232A1 (de) * | 2023-10-17 | 2023-12-20 | Pfeiffer Vacuum Technology AG | Pumpe |
EP4379216A1 (de) * | 2024-04-22 | 2024-06-05 | Pfeiffer Vacuum Technology AG | Turbomolekularvakuumpumpe mit kompakter bauform |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3189264A (en) * | 1963-06-04 | 1965-06-15 | Arthur Pfeiffer Company | Vacuum pump drive and seal arrangement |
DE1809902A1 (de) * | 1968-11-20 | 1970-06-04 | Pfeiffer Vakuumtechnik | Turbo-Molekularpumpe mit Fluteinrichtung |
US3628894A (en) * | 1970-09-15 | 1971-12-21 | Bendix Corp | High-vacuum mechanical pump |
EP0603694A1 (de) * | 1992-12-24 | 1994-06-29 | BALZERS-PFEIFFER GmbH | Vakuumpumpsystem |
DE4331589A1 (de) | 1992-12-24 | 1994-06-30 | Balzers Pfeiffer Gmbh | Vakuumpumpsystem |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2442614A1 (de) † | 1974-09-04 | 1976-03-18 | Siemens Ag | Turbomolekularpumpe |
DE3826710A1 (de) * | 1987-08-07 | 1989-02-16 | Japan Atomic Energy Res Inst | Vakuumpumpe |
US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
DE29516599U1 (de) * | 1995-10-20 | 1995-12-07 | Leybold AG, 50968 Köln | Reibungsvakuumpumpe mit Zwischeneinlaß |
GB9725146D0 (en) * | 1997-11-27 | 1998-01-28 | Boc Group Plc | Improvements in vacuum pumps |
US6193461B1 (en) * | 1999-02-02 | 2001-02-27 | Varian Inc. | Dual inlet vacuum pumps |
-
1998
- 1998-05-14 DE DE19821634A patent/DE19821634A1/de not_active Withdrawn
- 1998-09-11 AU AU93481/98A patent/AU754944B2/en not_active Ceased
- 1998-09-11 EP EP98946450A patent/EP1078166B2/de not_active Expired - Lifetime
- 1998-09-11 CA CA002332777A patent/CA2332777C/en not_active Expired - Fee Related
- 1998-09-11 DE DE59808723T patent/DE59808723D1/de not_active Expired - Lifetime
- 1998-09-11 WO PCT/EP1998/005802 patent/WO1999060275A1/de not_active Application Discontinuation
- 1998-09-11 US US09/700,046 patent/US6435811B1/en not_active Expired - Lifetime
- 1998-09-11 JP JP2000549859A patent/JP4173637B2/ja not_active Expired - Fee Related
- 1998-09-11 KR KR1020007012771A patent/KR20010025024A/ko not_active Application Discontinuation
- 1998-09-11 CN CN98814028A patent/CN1115488C/zh not_active Expired - Fee Related
- 1998-10-19 TW TW087117262A patent/TW370594B/zh not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3189264A (en) * | 1963-06-04 | 1965-06-15 | Arthur Pfeiffer Company | Vacuum pump drive and seal arrangement |
DE1809902A1 (de) * | 1968-11-20 | 1970-06-04 | Pfeiffer Vakuumtechnik | Turbo-Molekularpumpe mit Fluteinrichtung |
US3628894A (en) * | 1970-09-15 | 1971-12-21 | Bendix Corp | High-vacuum mechanical pump |
EP0603694A1 (de) * | 1992-12-24 | 1994-06-29 | BALZERS-PFEIFFER GmbH | Vakuumpumpsystem |
DE4331589A1 (de) | 1992-12-24 | 1994-06-30 | Balzers Pfeiffer Gmbh | Vakuumpumpsystem |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005047707A1 (de) * | 2003-11-13 | 2005-05-26 | Leybold Vacuum Gmbh | Mehrstufige reibungsvakuumpumpe |
CN100453817C (zh) * | 2003-11-13 | 2009-01-21 | 莱博尔德真空技术有限责任公司 | 多级摩擦真空泵 |
US8757987B2 (en) | 2004-06-25 | 2014-06-24 | Edwards Limited | Vacuum pump for differentially pumping multiple chambers |
Also Published As
Publication number | Publication date |
---|---|
DE59808723D1 (de) | 2003-07-17 |
KR20010025024A (ko) | 2001-03-26 |
CN1292851A (zh) | 2001-04-25 |
US6435811B1 (en) | 2002-08-20 |
AU9348198A (en) | 1999-12-06 |
DE19821634A1 (de) | 1999-11-18 |
CA2332777C (en) | 2007-11-06 |
EP1078166B2 (de) | 2007-09-05 |
JP4173637B2 (ja) | 2008-10-29 |
EP1078166A1 (de) | 2001-02-28 |
JP2002515568A (ja) | 2002-05-28 |
AU754944B2 (en) | 2002-11-28 |
TW370594B (en) | 1999-09-21 |
CN1115488C (zh) | 2003-07-23 |
EP1078166B1 (de) | 2003-06-11 |
CA2332777A1 (en) | 1999-11-25 |
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