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Confocal optical apparatus

Info

Publication number
WO1997037264A1
WO1997037264A1 PCT/JP1997/001095 JP9701095W WO1997037264A1 WO 1997037264 A1 WO1997037264 A1 WO 1997037264A1 JP 9701095 W JP9701095 W JP 9701095W WO 1997037264 A1 WO1997037264 A1 WO 1997037264A1
Authority
WO
Grant status
Application
Patent type
Prior art keywords
reflected
pinholes
light
optical
array
Prior art date
Application number
PCT/JP1997/001095
Other languages
French (fr)
Inventor
Hideyuki Wakai
Hiroyuki Mizukami
Toru Suzuki
Masato Moriya
Original Assignee
Komatsu Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/24Measuring arrangements characterised by the use of optical means for measuring contours or curvatures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Instruments as specified in the subgroups and characterised by the use of optical measuring means
    • G01B9/04Measuring microscopes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036Scanning details, e.g. scanning stages
    • G02B21/004Scanning details, e.g. scanning stages fixed arrays, e.g. switchable aperture arrays

Abstract

A confocal optical apparatus provided with a confocal optical system including relay lenses (7, 7a, 7b), a pinhole array (4) in which pinholes (4a) are linearly or two-dimensionally arranged, and a photodetector array (8), and adapted to measure the intensities of light beams reflected from an object and passing through the pinholes, via the relay lenses. A diffusion member (20) adapted to diffuse at random the reflected light which has passed through the pinholes, is disposed in the vicinity of the reflected light focal point, whereby the reflected light which has passed through the pinholes is directed to the photodetecting portion of the photodetector array uniformly with a constant probability.
PCT/JP1997/001095 1996-03-29 1997-03-28 Confocal optical apparatus WO1997037264A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP8/76668 1996-03-29
JP7666896A JPH09264720A (en) 1996-03-29 1996-03-29 Cofocal optical device

Publications (1)

Publication Number Publication Date
WO1997037264A1 true true WO1997037264A1 (en) 1997-10-09

Family

ID=13611805

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP1997/001095 WO1997037264A1 (en) 1996-03-29 1997-03-28 Confocal optical apparatus

Country Status (2)

Country Link
JP (1) JPH09264720A (en)
WO (1) WO1997037264A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000008415A1 (en) * 1998-08-05 2000-02-17 Cadent Ltd. Imaging a three-dimensional structure by confocal focussing an array of light beams

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5118580B2 (en) * 2008-08-22 2013-01-16 株式会社ディスコ Height position detecting device and the height position detecting method

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5791445A (en) * 1980-10-08 1982-06-07 Zeiss Stiftung Luster microscopic spectrochemical analysis method of and apparatus for spatial distribution of sample parameter
JPS61272714A (en) * 1985-05-28 1986-12-03 Olympus Optical Co Ltd Scanning type optical microscope
US4806004A (en) * 1987-07-10 1989-02-21 California Institute Of Technology Scanning microscopy
JPH01503493A (en) * 1987-03-27 1989-11-22
JPH02267512A (en) * 1989-04-10 1990-11-01 Hitachi Ltd Con-focal scanning type optical microscope
JPH04505061A (en) * 1990-01-11 1992-09-03
JPH04265918A (en) * 1990-11-10 1992-09-22 Carl Zeiss:Fa Optical device with identical focusing optical path for three-dimensionally inspecting body to be inspected
JPH04274365A (en) * 1991-03-01 1992-09-30 Nec Corp Solid-state image sensing device
JPH07181023A (en) * 1993-09-30 1995-07-18 Komatsu Ltd Cofocal optical system
JPH08152308A (en) * 1994-09-30 1996-06-11 Komatsu Ltd Confocal optical apparatus
JPH08233544A (en) * 1995-02-28 1996-09-13 Komatsu Ltd Confocal optical apparatus

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5791445A (en) * 1980-10-08 1982-06-07 Zeiss Stiftung Luster microscopic spectrochemical analysis method of and apparatus for spatial distribution of sample parameter
JPS61272714A (en) * 1985-05-28 1986-12-03 Olympus Optical Co Ltd Scanning type optical microscope
JPH01503493A (en) * 1987-03-27 1989-11-22
US4806004A (en) * 1987-07-10 1989-02-21 California Institute Of Technology Scanning microscopy
JPH02267512A (en) * 1989-04-10 1990-11-01 Hitachi Ltd Con-focal scanning type optical microscope
JPH04505061A (en) * 1990-01-11 1992-09-03
JPH04265918A (en) * 1990-11-10 1992-09-22 Carl Zeiss:Fa Optical device with identical focusing optical path for three-dimensionally inspecting body to be inspected
JPH04274365A (en) * 1991-03-01 1992-09-30 Nec Corp Solid-state image sensing device
JPH07181023A (en) * 1993-09-30 1995-07-18 Komatsu Ltd Cofocal optical system
JPH08152308A (en) * 1994-09-30 1996-06-11 Komatsu Ltd Confocal optical apparatus
JPH08233544A (en) * 1995-02-28 1996-09-13 Komatsu Ltd Confocal optical apparatus

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000008415A1 (en) * 1998-08-05 2000-02-17 Cadent Ltd. Imaging a three-dimensional structure by confocal focussing an array of light beams
EP1327851A1 (en) * 1998-08-05 2003-07-16 Cadent Ltd. Imaging a three-dimensional structure by confocal focussing an array of light beams
US6697164B1 (en) 1998-08-05 2004-02-24 Cadent Ltd. Imaging a three-dimensional structure by confocal focussing an array of light beams
US6940611B2 (en) 1998-08-05 2005-09-06 Cadent Ltd. Imaging a three-dimensional structure by confocal focussing an array of light beams
US7092107B2 (en) 1998-08-05 2006-08-15 Cadent Ltd. Method and apparatus for imaging three-dimensional structure
US7230725B2 (en) 1998-08-05 2007-06-12 Cadent Ltd Method and apparatus for imaging three-dimensional structure
US7477402B2 (en) 1998-08-05 2009-01-13 Cadent Ltd. Method and apparatus for imaging three-dimensional structure
US7630089B2 (en) 1998-08-05 2009-12-08 Cadent Ltd. Method and apparatus for imaging three-dimensional structure
US7796277B2 (en) 1998-08-05 2010-09-14 Cadent Ltd. Method and apparatus for imaging three-dimensional structure
US7944569B2 (en) 1998-08-05 2011-05-17 Cadent Ltd. Method and apparatus for imaging three-dimensional structure
US7990548B2 (en) 1998-08-05 2011-08-02 Cadent Ltd. Method and apparatus for imaging three-dimensional structure
US8310683B2 (en) 1998-08-05 2012-11-13 Cadent Ltd. Method and apparatus for imaging three-dimensional structure
US8638447B2 (en) 1998-08-05 2014-01-28 Cadent Ltd. Method and apparatus for imaging three-dimensional structure
US8638448B2 (en) 1998-08-05 2014-01-28 Cadent Ltd. Method and apparatus for imaging three-dimensional structure
US9089277B2 (en) 1998-08-05 2015-07-28 Align Technology, Inc. Method and apparatus for imaging three-dimensional structure
US9615901B2 (en) 1998-08-05 2017-04-11 Align Technology, Inc. Method and apparatus for imaging three-dimensional structure

Also Published As

Publication number Publication date Type
JPH09264720A (en) 1997-10-07 application

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