WO1994029493A3 - Recubrimientos ceramicos producidos mediante lampara excimera de descarga silenciosa - Google Patents

Recubrimientos ceramicos producidos mediante lampara excimera de descarga silenciosa Download PDF

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Publication number
WO1994029493A3
WO1994029493A3 PCT/ES1994/000058 ES9400058W WO9429493A3 WO 1994029493 A3 WO1994029493 A3 WO 1994029493A3 ES 9400058 W ES9400058 W ES 9400058W WO 9429493 A3 WO9429493 A3 WO 9429493A3
Authority
WO
WIPO (PCT)
Prior art keywords
ceramic coatings
excimer lamp
coatings produced
silent discharge
discharge excimer
Prior art date
Application number
PCT/ES1994/000058
Other languages
English (en)
French (fr)
Other versions
WO1994029493A2 (es
Inventor
Fernandez Pio Manuel Gonzalez
Parada Eduardo Garcia
Saracho Juan Maria Pou
Fernandez Maria Dolo Fernandez
Rodriguez Julia Serra
Fong Betty Mireya Leon
Y Perez-Amor Ma Perez-Martinez
Original Assignee
Univ Vigo
Fernandez Pio Manuel Gonzalez
Parada Eduardo Garcia
Saracho Juan Maria Pou
Fernandez Maria Dolo Fernandez
Rodriguez Julia Serra
Fong Betty Mireya Leon
Y Perez-Amor Ma Perez-Martinez
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to ES9301284A priority Critical patent/ES2067410B1/es
Priority to ESP9301284 priority
Application filed by Univ Vigo, Fernandez Pio Manuel Gonzalez, Parada Eduardo Garcia, Saracho Juan Maria Pou, Fernandez Maria Dolo Fernandez, Rodriguez Julia Serra, Fong Betty Mireya Leon, Y Perez-Amor Ma Perez-Martinez filed Critical Univ Vigo
Publication of WO1994029493A2 publication Critical patent/WO1994029493A2/es
Publication of WO1994029493A3 publication Critical patent/WO1994029493A3/es

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
    • C23C16/401Oxides containing silicon
    • C23C16/402Silicon dioxide
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32Carbides
    • C23C16/325Silicon carbide
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34Nitrides
    • C23C16/345Silicon nitride
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
    • C23C16/482Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation using incoherent light, UV to IR, e.g. lamps

Abstract

Recubrimientos cerámicos dentro del sistema Si-O-N-C, pueden ser aplicados sobre diferentes materiales y componentes por medio de un método basado en la Deposición Química a partir de Vapor inducida por Lámpara (Lamp-CVD). La flexibilidad de este método permite controlar las propiedades físico-químicas de los recubrimientos, siendo de especial aplicación en los campos de la microelectrónica, optoelectrónica, células solares y protección de materiales.
PCT/ES1994/000058 1993-06-10 1994-06-09 Recubrimientos ceramicos producidos mediante lampara excimera de descarga silenciosa WO1994029493A2 (es)

Priority Applications (2)

Application Number Priority Date Filing Date Title
ES9301284A ES2067410B1 (es) 1993-06-10 1993-06-10 Recubrimientos de nitruro de silicio producidos mediante lampara excimera de descarga silenciosa.
ESP9301284 1993-06-10

Publications (2)

Publication Number Publication Date
WO1994029493A2 WO1994029493A2 (es) 1994-12-22
WO1994029493A3 true WO1994029493A3 (es) 1995-02-09

Family

ID=8282143

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/ES1994/000058 WO1994029493A2 (es) 1993-06-10 1994-06-09 Recubrimientos ceramicos producidos mediante lampara excimera de descarga silenciosa

Country Status (2)

Country Link
ES (1) ES2067410B1 (es)
WO (1) WO1994029493A2 (es)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200424343A (en) * 2002-09-05 2004-11-16 Asml Us Inc Low temperature deposition of silicon based thin films by single-wafer hot-wall rapid thermal chemical vapor deposition

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4631199A (en) * 1985-07-22 1986-12-23 Hughes Aircraft Company Photochemical vapor deposition process for depositing oxide layers
JPS6274084A (en) * 1985-09-27 1987-04-04 Sanyo Electric Co Ltd Production of periodic structure film
EP0402798A2 (de) * 1989-06-15 1990-12-19 Heraeus Noblelight GmbH Beschichtungsvorrichtung
EP0421834A1 (fr) * 1989-09-14 1991-04-10 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Procédé pour la réalisation d'un dépot d'un revêtement protecteur inorganique et amorphe sur un substrat polymérique organique

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0174743A3 (en) * 1984-09-05 1988-06-08 Morton Thiokol, Inc. Process for transition metal nitrides thin film deposition
US4910043A (en) * 1987-07-16 1990-03-20 Texas Instruments Incorporated Processing apparatus and method
JP2637265B2 (ja) * 1990-06-28 1997-08-06 株式会社東芝 窒化珪素膜の形成方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4631199A (en) * 1985-07-22 1986-12-23 Hughes Aircraft Company Photochemical vapor deposition process for depositing oxide layers
JPS6274084A (en) * 1985-09-27 1987-04-04 Sanyo Electric Co Ltd Production of periodic structure film
EP0402798A2 (de) * 1989-06-15 1990-12-19 Heraeus Noblelight GmbH Beschichtungsvorrichtung
EP0421834A1 (fr) * 1989-09-14 1991-04-10 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Procédé pour la réalisation d'un dépot d'un revêtement protecteur inorganique et amorphe sur un substrat polymérique organique

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
BERGONZO P ET AL: "Development of a novel large area excimer lamp for direct photodeposition of thin films", LASER SURFACE PROCESSING AND CHARACTERIZATION. SYMPOSIUM E OF THE 1991 E-MRS SPRING CONFERENCE, STRASBOURG, FRANCE, 28-31 MAY 1991, ISSN 0169-4332, APPLIED SURFACE SCIENCE, JAN. 1992, NETHERLANDS, PAGE(S) 424 - 429 *
BERGONZO P ET AL: "Direct photolamp-deposition of silicon dioxide films using a xenon excimer lamp", LASER, LAMP AND SYNCHROTRON ASSISTED MATERIALS SURFACE PROCESSING: SYMPOSIUM B OF THE E-MRS SPRING CONFERENCE, STRASBOURG, FRANCE, 2-5 JUNE 1992, ISSN 0169-4332, APPLIED SURFACE SCIENCE, MAY 1993, NETHERLANDS, PAGE(S) 393 - 397 *
HANABUSA M: "Photoinduced deposition of thin films", MATERIAL SCIENCE REPORTS, MAY 1987, NETHERLANDS, VOL. 2, NR. 2, PAGE(S) 51 - 98, ISSN 0920-2307 *
KOGELSCHATZ U: "Silent-discharge driven excimer UV sources and their applications", LASER SURFACE PROCESSING AND CHARACTERIZATION. SYMPOSIUM E OF THE 1991 E-MRS SPRING CONFERENCE, STRASBOURG, FRANCE, 28-31 MAY 1991, ISSN 0169-4332, APPLIED SURFACE SCIENCE, JAN. 1992, NETHERLANDS, PAGE(S) 410 - 423 *
PATENT ABSTRACTS OF JAPAN vol. 011, no. 273 (C - 445) 4 September 1987 (1987-09-04) *

Also Published As

Publication number Publication date
WO1994029493A2 (es) 1994-12-22
ES2067410B1 (es) 1995-11-01
ES2067410A1 (es) 1995-03-16

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