WO1985003954A1 - Controlled vacuum arc material deposition, method and apparatus - Google Patents
Controlled vacuum arc material deposition, method and apparatus Download PDFInfo
- Publication number
- WO1985003954A1 WO1985003954A1 PCT/US1985/000312 US8500312W WO8503954A1 WO 1985003954 A1 WO1985003954 A1 WO 1985003954A1 US 8500312 W US8500312 W US 8500312W WO 8503954 A1 WO8503954 A1 WO 8503954A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- cathode
- active surface
- anode
- electric arc
- head
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3266—Magnetic control means
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US58584584A | 1984-03-02 | 1984-03-02 | |
US585,845 | 1990-09-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1985003954A1 true WO1985003954A1 (en) | 1985-09-12 |
Family
ID=24343205
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1985/000312 WO1985003954A1 (en) | 1984-03-02 | 1985-02-27 | Controlled vacuum arc material deposition, method and apparatus |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0174977A4 (en) |
JP (1) | JPS61501328A (en) |
CA (1) | CA1247043A (en) |
WO (1) | WO1985003954A1 (en) |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0223975A2 (en) * | 1985-11-29 | 1987-06-03 | Materials Research Corporation | Diverter magnet arrangement for plasma processing system |
EP0227438A2 (en) * | 1985-12-19 | 1987-07-01 | Varian Associates, Inc. | Magnetron sputter device having separate confining magnetic fields to separate targets and magnetically enhanced R.F. bias |
EP0253435A1 (en) * | 1986-07-11 | 1988-01-20 | Hauzer Holding B.V. | Process and device for igniting an arc in an environment with reduced pressure |
EP0283095A1 (en) * | 1987-03-16 | 1988-09-21 | Hauzer Holding B.V. | Method and arrangement for mechanically moving of a magnetic field generating device in a cathode arc discharge evaporating device |
EP0285745A1 (en) * | 1987-03-06 | 1988-10-12 | Balzers Aktiengesellschaft | Process and apparatus for vacuum coating by means of an electric arc discharge |
WO1989001699A1 (en) * | 1987-08-18 | 1989-02-23 | Regents Of The University Of Minnesota | Steered arc coating with thick targets |
EP0306491B1 (en) * | 1986-04-04 | 1994-03-09 | The Regents Of The University Of Minnesota | Arc coating of refractory metal compounds |
WO1998003988A2 (en) * | 1996-07-24 | 1998-01-29 | Filplas Vacuum Technology Pte Ltd | Cathode arc source and graphite target |
US6036828A (en) * | 1997-08-30 | 2000-03-14 | United Technologies Corporation | Apparatus for steering the arc in a cathodic arc coater |
WO2002050864A1 (en) * | 2000-12-18 | 2002-06-27 | Shm, S.R.O. | Apparatus for evaporation of materials for coating of objects |
WO2003074754A2 (en) * | 2002-02-28 | 2003-09-12 | Ionedge Corporation | Coating method and apparatus |
SG111029A1 (en) * | 2000-09-18 | 2005-05-30 | Nissin Electric Co Ltd | Vacuum arc evaporator apparatus |
EP3133634A1 (en) * | 2015-08-09 | 2017-02-22 | ISA Installations-, Steuerungs- und Automatisierungssystem GmbH | Device for igniting a vacuum arc discharge and method for use thereof |
CN115074678A (en) * | 2022-06-20 | 2022-09-20 | 肇庆市科润真空设备有限公司 | Multi-arc target mechanism for continuous coating of stainless steel sheet and PVD coating device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0674497B2 (en) * | 1987-11-25 | 1994-09-21 | 株式会社神戸製鋼所 | Ceramic hard film coating method |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3625848A (en) * | 1968-12-26 | 1971-12-07 | Alvin A Snaper | Arc deposition process and apparatus |
US3783231A (en) * | 1972-03-22 | 1974-01-01 | V Gorbunov | Apparatus for vacuum-evaporation of metals under the action of an electric arc |
US3956093A (en) * | 1974-12-16 | 1976-05-11 | Airco, Inc. | Planar magnetron sputtering method and apparatus |
SU307666A1 (en) * | 1968-09-09 | 1979-01-08 | Sablev L P | Electric arc metal evaporator |
SU363375A1 (en) * | 1970-03-20 | 1979-01-10 | Sablev L P | Electric arc metal evaporator |
US4444643A (en) * | 1982-09-03 | 1984-04-24 | Gartek Systems, Inc. | Planar magnetron sputtering device |
US4448799A (en) * | 1983-04-21 | 1984-05-15 | Multi-Arc Vacuum Systems Inc. | Arc-initiating trigger apparatus and method for electric arc vapor deposition coating systems |
US4448659A (en) * | 1983-09-12 | 1984-05-15 | Vac-Tec Systems, Inc. | Method and apparatus for evaporation arc stabilization including initial target cleaning |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU711787A1 (en) * | 1978-06-17 | 1980-10-07 | Предприятие П/Я В-8851 | Electric arc evaporator of metals |
-
1985
- 1985-02-27 EP EP19850901674 patent/EP0174977A4/en not_active Ceased
- 1985-02-27 WO PCT/US1985/000312 patent/WO1985003954A1/en not_active Application Discontinuation
- 1985-02-27 JP JP50113685A patent/JPS61501328A/en active Granted
- 1985-02-28 CA CA000475374A patent/CA1247043A/en not_active Expired
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU307666A1 (en) * | 1968-09-09 | 1979-01-08 | Sablev L P | Electric arc metal evaporator |
US3625848A (en) * | 1968-12-26 | 1971-12-07 | Alvin A Snaper | Arc deposition process and apparatus |
SU363375A1 (en) * | 1970-03-20 | 1979-01-10 | Sablev L P | Electric arc metal evaporator |
US3783231A (en) * | 1972-03-22 | 1974-01-01 | V Gorbunov | Apparatus for vacuum-evaporation of metals under the action of an electric arc |
US3956093A (en) * | 1974-12-16 | 1976-05-11 | Airco, Inc. | Planar magnetron sputtering method and apparatus |
US4444643A (en) * | 1982-09-03 | 1984-04-24 | Gartek Systems, Inc. | Planar magnetron sputtering device |
US4448799A (en) * | 1983-04-21 | 1984-05-15 | Multi-Arc Vacuum Systems Inc. | Arc-initiating trigger apparatus and method for electric arc vapor deposition coating systems |
US4448659A (en) * | 1983-09-12 | 1984-05-15 | Vac-Tec Systems, Inc. | Method and apparatus for evaporation arc stabilization including initial target cleaning |
Non-Patent Citations (1)
Title |
---|
See also references of EP0174977A4 * |
Cited By (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0223975A2 (en) * | 1985-11-29 | 1987-06-03 | Materials Research Corporation | Diverter magnet arrangement for plasma processing system |
EP0223975A3 (en) * | 1985-11-29 | 1989-02-08 | Materials Research Corporation | Diverter magnet arrangement for plasma processing system |
EP0227438A2 (en) * | 1985-12-19 | 1987-07-01 | Varian Associates, Inc. | Magnetron sputter device having separate confining magnetic fields to separate targets and magnetically enhanced R.F. bias |
EP0227438A3 (en) * | 1985-12-19 | 1989-02-01 | Varian Associates, Inc. | Magnetron sputter device having separate confining magnetic fields to separate targets and magnetically enhanced r.f. bias |
EP0306491B1 (en) * | 1986-04-04 | 1994-03-09 | The Regents Of The University Of Minnesota | Arc coating of refractory metal compounds |
EP0253435A1 (en) * | 1986-07-11 | 1988-01-20 | Hauzer Holding B.V. | Process and device for igniting an arc in an environment with reduced pressure |
EP0285745A1 (en) * | 1987-03-06 | 1988-10-12 | Balzers Aktiengesellschaft | Process and apparatus for vacuum coating by means of an electric arc discharge |
US4919968A (en) * | 1987-03-06 | 1990-04-24 | Balzers Aktiengesellschaft | Method and apparatus for vacuum vapor deposition |
EP0283095A1 (en) * | 1987-03-16 | 1988-09-21 | Hauzer Holding B.V. | Method and arrangement for mechanically moving of a magnetic field generating device in a cathode arc discharge evaporating device |
US4902931A (en) * | 1987-03-16 | 1990-02-20 | Hauzer Holding B.V. | Method and arrangement for mechanically moving of a magnetic field generating device in a cathode arc discharge evaporating device |
WO1989001699A1 (en) * | 1987-08-18 | 1989-02-23 | Regents Of The University Of Minnesota | Steered arc coating with thick targets |
WO1998003988A3 (en) * | 1996-07-24 | 1998-03-26 | Univ Nanyang | Cathode arc source and graphite target |
WO1998003988A2 (en) * | 1996-07-24 | 1998-01-29 | Filplas Vacuum Technology Pte Ltd | Cathode arc source and graphite target |
US6761805B1 (en) | 1996-07-24 | 2004-07-13 | Filplas Vacuum Technology Pte. Ltd. | Cathode arc source with magnetic field generating means positioned above and below the cathode |
US6036828A (en) * | 1997-08-30 | 2000-03-14 | United Technologies Corporation | Apparatus for steering the arc in a cathodic arc coater |
US6224726B1 (en) | 1997-08-30 | 2001-05-01 | United Technologies Corporation | Cathodic arc coating apparatus |
SG111029A1 (en) * | 2000-09-18 | 2005-05-30 | Nissin Electric Co Ltd | Vacuum arc evaporator apparatus |
WO2002050864A1 (en) * | 2000-12-18 | 2002-06-27 | Shm, S.R.O. | Apparatus for evaporation of materials for coating of objects |
WO2002050865A1 (en) * | 2000-12-18 | 2002-06-27 | Platit Ag | Apparatus for evaporation of materials for coating of objects |
WO2003074754A2 (en) * | 2002-02-28 | 2003-09-12 | Ionedge Corporation | Coating method and apparatus |
WO2003074754A3 (en) * | 2002-02-28 | 2004-03-25 | Ionedge Corp | Coating method and apparatus |
US6936145B2 (en) | 2002-02-28 | 2005-08-30 | Ionedge Corporation | Coating method and apparatus |
EP3133634A1 (en) * | 2015-08-09 | 2017-02-22 | ISA Installations-, Steuerungs- und Automatisierungssystem GmbH | Device for igniting a vacuum arc discharge and method for use thereof |
CN115074678A (en) * | 2022-06-20 | 2022-09-20 | 肇庆市科润真空设备有限公司 | Multi-arc target mechanism for continuous coating of stainless steel sheet and PVD coating device |
Also Published As
Publication number | Publication date |
---|---|
EP0174977A4 (en) | 1987-02-12 |
JPS61501328A (en) | 1986-07-03 |
JPH0548298B2 (en) | 1993-07-21 |
CA1247043A (en) | 1988-12-20 |
EP0174977A1 (en) | 1986-03-26 |
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