USD799768S1 - Roller for substrate cleaning - Google Patents

Roller for substrate cleaning Download PDF

Info

Publication number
USD799768S1
USD799768S1 US29/558,926 US201629558926F USD799768S US D799768 S1 USD799768 S1 US D799768S1 US 201629558926 F US201629558926 F US 201629558926F US D799768 S USD799768 S US D799768S
Authority
US
United States
Prior art keywords
roller
substrate cleaning
view
cleaning
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/558,926
Inventor
Tomoatsu Ishibashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Assigned to EBARA CORPORATION reassignment EBARA CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ISHIBASHI, TOMOATSU
Application granted granted Critical
Publication of USD799768S1 publication Critical patent/USD799768S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Description

FIG. 1 is a first perspective view observed from rear, right and top sides of a roller for substrate cleaning showing my new design;
FIG. 2 is a second perspective view observed from front, left and top sides thereof;
FIG. 3 is a front view thereof, a rear view being a mirror image thereof;
FIG. 4 is a top view thereof, a bottom view being identical thereto;
FIG. 5 is a right side view thereof; and,
FIG. 6 is a left side view thereof.
The broken lines depict environmental subject matter only and form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a roller for substrate cleaning, as shown and described.
US29/558,926 2015-09-24 2016-03-23 Roller for substrate cleaning Active USD799768S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPD2015-21002F JP1556809S (en) 2015-09-24 2015-09-24
JP2015-021002 2015-09-24

Publications (1)

Publication Number Publication Date
USD799768S1 true USD799768S1 (en) 2017-10-10

Family

ID=56687127

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/558,926 Active USD799768S1 (en) 2015-09-24 2016-03-23 Roller for substrate cleaning

Country Status (3)

Country Link
US (1) USD799768S1 (en)
JP (1) JP1556809S (en)
TW (1) TWD179918S (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD811454S1 (en) * 2016-08-25 2018-02-27 Sancilio & Company, Inc. Mold for a medical dosage form

Citations (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4566911A (en) * 1982-07-05 1986-01-28 Kanebo Limited Method for cleaning article by scrubbing with cleaning roll
US5401231A (en) * 1993-08-23 1995-03-28 Hebert; Jacques O. Texturing roller
US5414914A (en) * 1985-09-20 1995-05-16 Uni-Charm Corporation Process for producing apertured nonwoven fabric
US5675856A (en) * 1996-06-14 1997-10-14 Solid State Equipment Corp. Wafer scrubbing device
US5745945A (en) * 1996-06-28 1998-05-05 International Business Machines Corporation Brush conditioner for a semiconductor cleaning brush
US5966765A (en) * 1996-10-21 1999-10-19 Ebara Corporation Cleaning apparatus
US6004402A (en) * 1994-10-06 1999-12-21 Xomed Surgical Products, Inc. Method of cleaning silicon material with a sponge
US6027573A (en) * 1994-10-06 2000-02-22 Xomed Surgical Products, Inc. Industrial cleaning sponge apparatus and method for extracting residue from a sponge material
US6041465A (en) * 1997-12-19 2000-03-28 Speedfam Co., Ltd. Cleaning apparatus
US6080092A (en) * 1994-10-06 2000-06-27 Xomed Surgical Products, Inc. Industrial cleaning sponge
US6182323B1 (en) * 1998-03-27 2001-02-06 Rippey Corporation Ultraclean surface treatment device
US6202658B1 (en) * 1998-11-11 2001-03-20 Applied Materials, Inc. Method and apparatus for cleaning the edge of a thin disc
US6247197B1 (en) * 1998-07-09 2001-06-19 Lam Research Corporation Brush interflow distributor
US6299698B1 (en) * 1998-07-10 2001-10-09 Applied Materials, Inc. Wafer edge scrubber and method
US6308369B1 (en) * 1998-02-04 2001-10-30 Silikinetic Technology, Inc. Wafer cleaning system
USD456667S1 (en) * 2001-01-12 2002-05-07 World Kitchen, Inc. Handle sleeve
US6405399B1 (en) * 1999-06-25 2002-06-18 Lam Research Corporation Method and system of cleaning a wafer after chemical mechanical polishing or plasma processing
US20020100132A1 (en) * 2001-01-30 2002-08-01 Mcmullen Daniel T. Porous polymeric substrate treatment device and method
US20020121289A1 (en) * 2001-03-05 2002-09-05 Applied Materials, Inc. Spray bar
US6502273B1 (en) * 1996-11-08 2003-01-07 Kanebo, Ltd. Cleaning sponge roller
US6543084B2 (en) * 1999-12-03 2003-04-08 Lam Research Corporation Wafer scrubbing brush core
US6557202B1 (en) * 1999-12-03 2003-05-06 Lam Research Corporation Wafer scrubbing brush core having an internal motor and method of making the same
US6616516B1 (en) * 2001-12-13 2003-09-09 Lam Research Corporation Method and apparatus for asymmetric processing of front side and back side of semiconductor substrates
USD482566S1 (en) * 2001-05-21 2003-11-25 Mr. Bar-B-Q-, Inc. Hand grip for barbecue tool
US20050109371A1 (en) * 2003-10-27 2005-05-26 Applied Materials, Inc. Post CMP scrubbing of substrates
US6904637B2 (en) * 2001-10-03 2005-06-14 Applied Materials, Inc. Scrubber with sonic nozzle
US7735177B1 (en) * 2006-02-10 2010-06-15 Lam Research Corporation Brush core assembly
USD622920S1 (en) * 2007-05-02 2010-08-31 Entegris Corporation Cleaning sponge roller
US7955693B2 (en) * 2001-04-20 2011-06-07 Tolland Development Company, Llc Foam composition roller brush with embedded mandrel
USD682497S1 (en) * 2010-12-21 2013-05-14 Entegris, Inc. Substrate cleaning brush
US8496758B2 (en) * 2006-01-17 2013-07-30 Fujitsu Semiconductor Limited Cleaning apparatus and cleaning method for wafer
USD707408S1 (en) * 2011-04-20 2014-06-17 Ebara Corporation Roller for semiconductor wafer cleaning

Patent Citations (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4566911A (en) * 1982-07-05 1986-01-28 Kanebo Limited Method for cleaning article by scrubbing with cleaning roll
US5414914A (en) * 1985-09-20 1995-05-16 Uni-Charm Corporation Process for producing apertured nonwoven fabric
US5401231A (en) * 1993-08-23 1995-03-28 Hebert; Jacques O. Texturing roller
US6004402A (en) * 1994-10-06 1999-12-21 Xomed Surgical Products, Inc. Method of cleaning silicon material with a sponge
US6027573A (en) * 1994-10-06 2000-02-22 Xomed Surgical Products, Inc. Industrial cleaning sponge apparatus and method for extracting residue from a sponge material
US6080092A (en) * 1994-10-06 2000-06-27 Xomed Surgical Products, Inc. Industrial cleaning sponge
US5675856A (en) * 1996-06-14 1997-10-14 Solid State Equipment Corp. Wafer scrubbing device
US5745945A (en) * 1996-06-28 1998-05-05 International Business Machines Corporation Brush conditioner for a semiconductor cleaning brush
US5966765A (en) * 1996-10-21 1999-10-19 Ebara Corporation Cleaning apparatus
US6502273B1 (en) * 1996-11-08 2003-01-07 Kanebo, Ltd. Cleaning sponge roller
US6041465A (en) * 1997-12-19 2000-03-28 Speedfam Co., Ltd. Cleaning apparatus
US6308369B1 (en) * 1998-02-04 2001-10-30 Silikinetic Technology, Inc. Wafer cleaning system
US6182323B1 (en) * 1998-03-27 2001-02-06 Rippey Corporation Ultraclean surface treatment device
US6247197B1 (en) * 1998-07-09 2001-06-19 Lam Research Corporation Brush interflow distributor
US6299698B1 (en) * 1998-07-10 2001-10-09 Applied Materials, Inc. Wafer edge scrubber and method
US6202658B1 (en) * 1998-11-11 2001-03-20 Applied Materials, Inc. Method and apparatus for cleaning the edge of a thin disc
US6405399B1 (en) * 1999-06-25 2002-06-18 Lam Research Corporation Method and system of cleaning a wafer after chemical mechanical polishing or plasma processing
US6543084B2 (en) * 1999-12-03 2003-04-08 Lam Research Corporation Wafer scrubbing brush core
US6557202B1 (en) * 1999-12-03 2003-05-06 Lam Research Corporation Wafer scrubbing brush core having an internal motor and method of making the same
USD456667S1 (en) * 2001-01-12 2002-05-07 World Kitchen, Inc. Handle sleeve
US20020100132A1 (en) * 2001-01-30 2002-08-01 Mcmullen Daniel T. Porous polymeric substrate treatment device and method
US20020121289A1 (en) * 2001-03-05 2002-09-05 Applied Materials, Inc. Spray bar
US7955693B2 (en) * 2001-04-20 2011-06-07 Tolland Development Company, Llc Foam composition roller brush with embedded mandrel
USD482566S1 (en) * 2001-05-21 2003-11-25 Mr. Bar-B-Q-, Inc. Hand grip for barbecue tool
US6904637B2 (en) * 2001-10-03 2005-06-14 Applied Materials, Inc. Scrubber with sonic nozzle
US6616516B1 (en) * 2001-12-13 2003-09-09 Lam Research Corporation Method and apparatus for asymmetric processing of front side and back side of semiconductor substrates
US20050109371A1 (en) * 2003-10-27 2005-05-26 Applied Materials, Inc. Post CMP scrubbing of substrates
US8496758B2 (en) * 2006-01-17 2013-07-30 Fujitsu Semiconductor Limited Cleaning apparatus and cleaning method for wafer
US7735177B1 (en) * 2006-02-10 2010-06-15 Lam Research Corporation Brush core assembly
USD622920S1 (en) * 2007-05-02 2010-08-31 Entegris Corporation Cleaning sponge roller
USD682497S1 (en) * 2010-12-21 2013-05-14 Entegris, Inc. Substrate cleaning brush
USD707408S1 (en) * 2011-04-20 2014-06-17 Ebara Corporation Roller for semiconductor wafer cleaning

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD811454S1 (en) * 2016-08-25 2018-02-27 Sancilio & Company, Inc. Mold for a medical dosage form
USRE48019E1 (en) * 2016-08-25 2020-06-02 Therapeuticsmd, Inc. Mold for a medical dosage form

Also Published As

Publication number Publication date
JP1556809S (en) 2016-08-22
TWD179918S (en) 2016-12-01

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