USD712364S1 - EUV pod - Google Patents

EUV pod Download PDF

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Publication number
USD712364S1
USD712364S1 US29/420,457 US201229420457F USD712364S US D712364 S1 USD712364 S1 US D712364S1 US 201229420457 F US201229420457 F US 201229420457F US D712364 S USD712364 S US D712364S
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US
United States
Prior art keywords
euv pod
euv
pod
view
ornamental design
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/420,457
Inventor
Pao-Yi Lu
Cheng-Ju Lee
Chen-Wei KU
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gudeng Precision Industrial Co Ltd
Original Assignee
Gudeng Precision Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gudeng Precision Industrial Co Ltd filed Critical Gudeng Precision Industrial Co Ltd
Priority to US29/420,457 priority Critical patent/USD712364S1/en
Assigned to GUDENG PRECISION INDUSTRIAL CO., LTD. reassignment GUDENG PRECISION INDUSTRIAL CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KU, CHEN-WEI, LEE, CHENG-JU, LU, PAO-YI
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Publication of USD712364S1 publication Critical patent/USD712364S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Description

FIG. 1 is a perspective view of an EUV pod showing our new design;
FIG. 2 is a front view thereof;
FIG. 3 is a back view thereof;
FIG. 4 is a left side view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a top plan view thereof; and,
FIG. 7 is a bottom plan view thereof.
The broken line showing is for the purpose of illustrating portions of the article which form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for an EUV pod, as shown and described.
US29/420,457 2012-05-09 2012-05-09 EUV pod Active USD712364S1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US29/420,457 USD712364S1 (en) 2012-05-09 2012-05-09 EUV pod

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/420,457 USD712364S1 (en) 2012-05-09 2012-05-09 EUV pod

Publications (1)

Publication Number Publication Date
USD712364S1 true USD712364S1 (en) 2014-09-02

Family

ID=51400443

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/420,457 Active USD712364S1 (en) 2012-05-09 2012-05-09 EUV pod

Country Status (1)

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US (1) USD712364S1 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD732093S1 (en) * 2014-03-19 2015-06-16 Veeco Ald Inc. Gas tube assembly
USD732092S1 (en) * 2014-03-19 2015-06-16 Veeco Ald Inc. Gas injection plate
USD964948S1 (en) * 2019-08-02 2022-09-27 Gudeng Precision Industrial Co., Ltd. Upper cover for an ultraviolet light reticle transfer box
USD964950S1 (en) * 2019-08-02 2022-09-27 Gudeng Precision Industrial Co., Ltd. Base for an ultraviolet light reticle transfer box
USD964949S1 (en) * 2019-08-02 2022-09-27 Gudeng Precision Industrial Co., Ltd. Upper cover for an ultraviolet light reticle transfer box
USD965543S1 (en) * 2019-08-02 2022-10-04 Gudeng Precision Industrial Co., Ltd. Base for an ultraviolet light reticle transfer box
USD1096169S1 (en) * 2021-07-02 2025-10-07 Gudeng Precision Industrial Co., Ltd. Support for lower cover of reticle box

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6646720B2 (en) * 2001-09-21 2003-11-11 Intel Corporation Euv reticle carrier with removable pellicle
US20030218728A1 (en) * 2002-02-22 2003-11-27 Asml Netherlands B.V. System and method for using a two part cover for protecting a reticle
US20040005209A1 (en) * 2002-07-05 2004-01-08 Taiwan Semiconductor Manufacturing Co., Ltd. Reticle pod
US20070206173A1 (en) * 2004-10-29 2007-09-06 Motoko Suzuki Reticle protection member, reticle carrying device, exposure device and method for carrying reticle
US7400383B2 (en) * 2005-04-04 2008-07-15 Entegris, Inc. Environmental control in a reticle SMIF pod
US7420655B2 (en) * 2004-12-14 2008-09-02 Miraial Co., Ltd. Reticle-carrying container
US7477358B2 (en) * 2004-09-28 2009-01-13 Nikon Corporation EUV reticle handling system and method
US7607543B2 (en) * 2005-02-27 2009-10-27 Entegris, Inc. Reticle pod with isolation system
US20090301917A1 (en) * 2005-09-27 2009-12-10 Entegris, Inc. Reticle pod
USD641720S1 (en) * 2010-03-26 2011-07-19 Advanced Micro Devices, Inc. Circuit package lid
US8220630B1 (en) * 2011-01-11 2012-07-17 Gudeng Precision Industrial Co, Ltd EUV pod with fastening structure
US8403143B2 (en) * 2009-09-25 2013-03-26 Gudeng Precision Industrial Co, Ltd Reticle storing container

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6646720B2 (en) * 2001-09-21 2003-11-11 Intel Corporation Euv reticle carrier with removable pellicle
US20030218728A1 (en) * 2002-02-22 2003-11-27 Asml Netherlands B.V. System and method for using a two part cover for protecting a reticle
US20040005209A1 (en) * 2002-07-05 2004-01-08 Taiwan Semiconductor Manufacturing Co., Ltd. Reticle pod
US7804583B2 (en) * 2004-09-28 2010-09-28 Nikon Corporation EUV reticle handling system and method
US7477358B2 (en) * 2004-09-28 2009-01-13 Nikon Corporation EUV reticle handling system and method
US20070206173A1 (en) * 2004-10-29 2007-09-06 Motoko Suzuki Reticle protection member, reticle carrying device, exposure device and method for carrying reticle
US7420655B2 (en) * 2004-12-14 2008-09-02 Miraial Co., Ltd. Reticle-carrying container
US7607543B2 (en) * 2005-02-27 2009-10-27 Entegris, Inc. Reticle pod with isolation system
US7400383B2 (en) * 2005-04-04 2008-07-15 Entegris, Inc. Environmental control in a reticle SMIF pod
US20090301917A1 (en) * 2005-09-27 2009-12-10 Entegris, Inc. Reticle pod
US8403143B2 (en) * 2009-09-25 2013-03-26 Gudeng Precision Industrial Co, Ltd Reticle storing container
USD641720S1 (en) * 2010-03-26 2011-07-19 Advanced Micro Devices, Inc. Circuit package lid
US8220630B1 (en) * 2011-01-11 2012-07-17 Gudeng Precision Industrial Co, Ltd EUV pod with fastening structure

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD732093S1 (en) * 2014-03-19 2015-06-16 Veeco Ald Inc. Gas tube assembly
USD732092S1 (en) * 2014-03-19 2015-06-16 Veeco Ald Inc. Gas injection plate
USD964948S1 (en) * 2019-08-02 2022-09-27 Gudeng Precision Industrial Co., Ltd. Upper cover for an ultraviolet light reticle transfer box
USD964950S1 (en) * 2019-08-02 2022-09-27 Gudeng Precision Industrial Co., Ltd. Base for an ultraviolet light reticle transfer box
USD964949S1 (en) * 2019-08-02 2022-09-27 Gudeng Precision Industrial Co., Ltd. Upper cover for an ultraviolet light reticle transfer box
USD965543S1 (en) * 2019-08-02 2022-10-04 Gudeng Precision Industrial Co., Ltd. Base for an ultraviolet light reticle transfer box
USD1096169S1 (en) * 2021-07-02 2025-10-07 Gudeng Precision Industrial Co., Ltd. Support for lower cover of reticle box

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