USD712364S1 - EUV pod - Google Patents
EUV pod Download PDFInfo
- Publication number
- USD712364S1 USD712364S1 US29/420,457 US201229420457F USD712364S US D712364 S1 USD712364 S1 US D712364S1 US 201229420457 F US201229420457 F US 201229420457F US D712364 S USD712364 S US D712364S
- Authority
- US
- United States
- Prior art keywords
- euv pod
- euv
- pod
- view
- ornamental design
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Description
The broken line showing is for the purpose of illustrating portions of the article which form no part of the claimed design.
Claims (1)
- The ornamental design for an EUV pod, as shown and described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29/420,457 USD712364S1 (en) | 2012-05-09 | 2012-05-09 | EUV pod |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29/420,457 USD712364S1 (en) | 2012-05-09 | 2012-05-09 | EUV pod |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| USD712364S1 true USD712364S1 (en) | 2014-09-02 |
Family
ID=51400443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/420,457 Active USD712364S1 (en) | 2012-05-09 | 2012-05-09 | EUV pod |
Country Status (1)
| Country | Link |
|---|---|
| US (1) | USD712364S1 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD732093S1 (en) * | 2014-03-19 | 2015-06-16 | Veeco Ald Inc. | Gas tube assembly |
| USD732092S1 (en) * | 2014-03-19 | 2015-06-16 | Veeco Ald Inc. | Gas injection plate |
| USD964948S1 (en) * | 2019-08-02 | 2022-09-27 | Gudeng Precision Industrial Co., Ltd. | Upper cover for an ultraviolet light reticle transfer box |
| USD964950S1 (en) * | 2019-08-02 | 2022-09-27 | Gudeng Precision Industrial Co., Ltd. | Base for an ultraviolet light reticle transfer box |
| USD964949S1 (en) * | 2019-08-02 | 2022-09-27 | Gudeng Precision Industrial Co., Ltd. | Upper cover for an ultraviolet light reticle transfer box |
| USD965543S1 (en) * | 2019-08-02 | 2022-10-04 | Gudeng Precision Industrial Co., Ltd. | Base for an ultraviolet light reticle transfer box |
| USD1096169S1 (en) * | 2021-07-02 | 2025-10-07 | Gudeng Precision Industrial Co., Ltd. | Support for lower cover of reticle box |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6646720B2 (en) * | 2001-09-21 | 2003-11-11 | Intel Corporation | Euv reticle carrier with removable pellicle |
| US20030218728A1 (en) * | 2002-02-22 | 2003-11-27 | Asml Netherlands B.V. | System and method for using a two part cover for protecting a reticle |
| US20040005209A1 (en) * | 2002-07-05 | 2004-01-08 | Taiwan Semiconductor Manufacturing Co., Ltd. | Reticle pod |
| US20070206173A1 (en) * | 2004-10-29 | 2007-09-06 | Motoko Suzuki | Reticle protection member, reticle carrying device, exposure device and method for carrying reticle |
| US7400383B2 (en) * | 2005-04-04 | 2008-07-15 | Entegris, Inc. | Environmental control in a reticle SMIF pod |
| US7420655B2 (en) * | 2004-12-14 | 2008-09-02 | Miraial Co., Ltd. | Reticle-carrying container |
| US7477358B2 (en) * | 2004-09-28 | 2009-01-13 | Nikon Corporation | EUV reticle handling system and method |
| US7607543B2 (en) * | 2005-02-27 | 2009-10-27 | Entegris, Inc. | Reticle pod with isolation system |
| US20090301917A1 (en) * | 2005-09-27 | 2009-12-10 | Entegris, Inc. | Reticle pod |
| USD641720S1 (en) * | 2010-03-26 | 2011-07-19 | Advanced Micro Devices, Inc. | Circuit package lid |
| US8220630B1 (en) * | 2011-01-11 | 2012-07-17 | Gudeng Precision Industrial Co, Ltd | EUV pod with fastening structure |
| US8403143B2 (en) * | 2009-09-25 | 2013-03-26 | Gudeng Precision Industrial Co, Ltd | Reticle storing container |
-
2012
- 2012-05-09 US US29/420,457 patent/USD712364S1/en active Active
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6646720B2 (en) * | 2001-09-21 | 2003-11-11 | Intel Corporation | Euv reticle carrier with removable pellicle |
| US20030218728A1 (en) * | 2002-02-22 | 2003-11-27 | Asml Netherlands B.V. | System and method for using a two part cover for protecting a reticle |
| US20040005209A1 (en) * | 2002-07-05 | 2004-01-08 | Taiwan Semiconductor Manufacturing Co., Ltd. | Reticle pod |
| US7804583B2 (en) * | 2004-09-28 | 2010-09-28 | Nikon Corporation | EUV reticle handling system and method |
| US7477358B2 (en) * | 2004-09-28 | 2009-01-13 | Nikon Corporation | EUV reticle handling system and method |
| US20070206173A1 (en) * | 2004-10-29 | 2007-09-06 | Motoko Suzuki | Reticle protection member, reticle carrying device, exposure device and method for carrying reticle |
| US7420655B2 (en) * | 2004-12-14 | 2008-09-02 | Miraial Co., Ltd. | Reticle-carrying container |
| US7607543B2 (en) * | 2005-02-27 | 2009-10-27 | Entegris, Inc. | Reticle pod with isolation system |
| US7400383B2 (en) * | 2005-04-04 | 2008-07-15 | Entegris, Inc. | Environmental control in a reticle SMIF pod |
| US20090301917A1 (en) * | 2005-09-27 | 2009-12-10 | Entegris, Inc. | Reticle pod |
| US8403143B2 (en) * | 2009-09-25 | 2013-03-26 | Gudeng Precision Industrial Co, Ltd | Reticle storing container |
| USD641720S1 (en) * | 2010-03-26 | 2011-07-19 | Advanced Micro Devices, Inc. | Circuit package lid |
| US8220630B1 (en) * | 2011-01-11 | 2012-07-17 | Gudeng Precision Industrial Co, Ltd | EUV pod with fastening structure |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD732093S1 (en) * | 2014-03-19 | 2015-06-16 | Veeco Ald Inc. | Gas tube assembly |
| USD732092S1 (en) * | 2014-03-19 | 2015-06-16 | Veeco Ald Inc. | Gas injection plate |
| USD964948S1 (en) * | 2019-08-02 | 2022-09-27 | Gudeng Precision Industrial Co., Ltd. | Upper cover for an ultraviolet light reticle transfer box |
| USD964950S1 (en) * | 2019-08-02 | 2022-09-27 | Gudeng Precision Industrial Co., Ltd. | Base for an ultraviolet light reticle transfer box |
| USD964949S1 (en) * | 2019-08-02 | 2022-09-27 | Gudeng Precision Industrial Co., Ltd. | Upper cover for an ultraviolet light reticle transfer box |
| USD965543S1 (en) * | 2019-08-02 | 2022-10-04 | Gudeng Precision Industrial Co., Ltd. | Base for an ultraviolet light reticle transfer box |
| USD1096169S1 (en) * | 2021-07-02 | 2025-10-07 | Gudeng Precision Industrial Co., Ltd. | Support for lower cover of reticle box |
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