USD645889S1 - Shaft portion of an apparatus for holding and heating semiconductor wafers or the like - Google Patents

Shaft portion of an apparatus for holding and heating semiconductor wafers or the like Download PDF

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Publication number
USD645889S1
USD645889S1 US29/323,536 US32353608F USD645889S US D645889 S1 USD645889 S1 US D645889S1 US 32353608 F US32353608 F US 32353608F US D645889 S USD645889 S US D645889S
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US
United States
Prior art keywords
holding
shaft portion
semiconductor wafers
heating semiconductor
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/323,536
Inventor
Taichi Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
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Filing date
Publication date
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Assigned to NGK INSULATORS, LTD. reassignment NGK INSULATORS, LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: NAKAMURA, TAICHI
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Publication of USD645889S1 publication Critical patent/USD645889S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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FIG. 1 is a perspective view of a shaft portion of an apparatus for holding and heating semiconductor wafers or the like;
FIG. 2 is a front view thereof, a rear view being the same image of a front view;
FIG. 3 is a right side view thereof, a left side view being the same image of a right side view;
FIG. 4 is a bottom plan view thereof; and,
FIG. 5 is a sectional view taken vertically at the center of the portion shown by 5-5 in FIG. 2.
The broken lines showing on the drawing disclosure are for illustrative purposes only and form no part of the claimed design. The lines consisting of long lines and dots indicate conceptual border lines between the claimed portions and the disclaimed portions.

Claims (1)

  1. The ornamental design for a shaft portion of an apparatus for holding and heating semiconductor wafers or the like, as shown and described.
US29/323,536 2008-02-29 2008-08-27 Shaft portion of an apparatus for holding and heating semiconductor wafers or the like Expired - Lifetime USD645889S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008-004938 2008-01-11
JP2008004938 2008-02-29

Publications (1)

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USD645889S1 true USD645889S1 (en) 2011-09-27

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US29/323,536 Expired - Lifetime USD645889S1 (en) 2008-02-29 2008-08-27 Shaft portion of an apparatus for holding and heating semiconductor wafers or the like

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Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD787871S1 (en) * 2014-12-02 2017-05-30 Urban Outdoor Company, LLC Foot for outdoor furniture
USD849810S1 (en) * 2015-11-24 2019-05-28 Ksm Component Co., Ltd Ceramic heater
USD947913S1 (en) * 2019-05-17 2022-04-05 Asm Ip Holding B.V. Susceptor shaft
USD965044S1 (en) * 2019-08-19 2022-09-27 Asm Ip Holding B.V. Susceptor shaft
USD975665S1 (en) * 2019-05-17 2023-01-17 Asm Ip Holding B.V. Susceptor shaft
USD1005093S1 (en) * 2019-11-09 2023-11-21 Society Brands, Inc. Chair locking mechanism
USD1012997S1 (en) * 2020-09-18 2024-01-30 Ksm Component Co., Ltd. Ceramic heater
USD1012998S1 (en) * 2020-09-18 2024-01-30 Ksm Component Co., Ltd. Ceramic heater
USD1013750S1 (en) * 2020-09-18 2024-02-06 Ksm Component Co., Ltd. Ceramic heater
USD1065275S1 (en) * 2020-09-18 2025-03-04 Ksm Component Co., Ltd. Ceramic heater
USD1066439S1 (en) * 2022-03-08 2025-03-11 Cricut, Inc. Material hold-down for laser crafting apparatus
USD1077769S1 (en) * 2021-12-02 2025-06-03 Ngk Insulators, Ltd. Ceramic heater
USD1077876S1 (en) * 2021-12-02 2025-06-03 Ngk Insulators, Ltd. Ceramic heater
USD1077761S1 (en) * 2021-12-02 2025-06-03 Ngk Insulators, Ltd. Ceramic heater
USD1080568S1 (en) * 2021-12-02 2025-06-24 Ngk Insulators, Ltd. Ceramic heater
USD1080701S1 (en) * 2021-12-02 2025-06-24 Ngk Insulators, Ltd. Ceramic heater

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US2154584A (en) * 1937-10-25 1939-04-18 Rossi Mariano Milk container
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US2252553A (en) * 1940-01-17 1941-08-12 Campbell Joseph Safety grip electric plug
US3384992A (en) * 1964-07-09 1968-05-28 G I Plastics Corp Plant shelter
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USD242745S (en) * 1974-11-11 1976-12-14 Coats & Clark, Inc. Yarn cone
US4015796A (en) * 1974-06-07 1977-04-05 The Firestone Tire & Rubber Company Vehicle sensitive inertial sensor for retractors and the like
US4440835A (en) * 1981-04-13 1984-04-03 Societe Les Piles Wonder Thin non-flat gas electrode, current collector and process of manufacture
US4627127A (en) * 1985-02-13 1986-12-09 Minnesota Mining And Manufacturing Company Cylindrical brush
USD311104S (en) * 1987-06-08 1990-10-09 Action Products Co., Inc. Seat pedestal
USD319524S (en) * 1989-01-23 1991-09-03 Tino Antonacci Ice cream cone
USD369648S (en) * 1994-12-27 1996-05-07 Compri Technic Pty. Ltd. Pneumatic gun nozzles
USD376935S (en) * 1996-03-11 1996-12-31 BBA Holdings, Inc. Occasional table
US5597022A (en) * 1994-09-23 1997-01-28 Reifers; Richard F. Device for loading trash bags
USD388501S (en) * 1995-08-10 1997-12-30 Gardena Kress + Kastner Gmbh Spray nozzle
US5718408A (en) * 1996-03-28 1998-02-17 Lin; Ching-Chi Adjustable supporting apparatus for supporting a workpiece feeding machine on a worktable
US5842655A (en) * 1997-06-30 1998-12-01 Mccarthy; Vivian Device for dispensing yarn and like material
US5897535A (en) * 1991-06-07 1999-04-27 Rtc, Inc. Non-contaminating probe and methods of making and using same
USD423340S (en) * 1998-09-17 2000-04-25 J. H. Smith Co., Inc. Bed riser support
USD424165S (en) * 1999-07-26 2000-05-02 Wen-Li Guo Sprayer nozzle
USD442670S1 (en) * 1999-11-22 2001-05-22 Joseph S. Kanfer Nozzle for dispensing fluids
USD458086S1 (en) * 2000-05-01 2002-06-04 Michael Howard Marks Self-contained warming and cooling vessel
USD465677S1 (en) * 2001-10-15 2002-11-19 Standex International Corp. Appliance or table leg
US20020175158A1 (en) * 2001-05-25 2002-11-28 Hughes Sanoner Electronic drinking mug
US20030104698A1 (en) * 2000-04-24 2003-06-05 Toru Taniguchi Method of manufacturing semiconductor wafer
US6695687B2 (en) * 2001-05-25 2004-02-24 Infineon Technologies Ag Semiconductor substrate holder for chemical-mechanical polishing containing a movable plate
US6870135B2 (en) * 2003-01-14 2005-03-22 Hlc Efficiency Products Llc Beverage container warmer
US20050199633A1 (en) * 2004-03-03 2005-09-15 Stanley Ellen E. Trash can with pull thruough bags
TWM298774U (en) 2006-01-26 2006-10-01 Forever Group Prec Ind Co Ltd Plate transportation device
US20070111490A1 (en) * 2003-03-31 2007-05-17 Hoya Corporation Mask blank, mask blank manufacturing method, transfer mask manufacturing method, and semiconductor device manufacturing method
TWD118408S1 (en) 2006-02-20 2007-08-01 東京威力科創股份有限公司 Processing tubes for semiconductor manufacturing
USD555682S1 (en) * 2006-05-26 2007-11-20 Foster Fred L Tool for driving a ground rod
US20080011738A1 (en) * 2006-07-14 2008-01-17 Oki Electric Industry Co., Ltd. Apparatus and method for manufacturing a semiconductor device with a sapphire substrate
USD562599S1 (en) * 2005-09-12 2008-02-26 Ashley Furniture Industries, Inc. Table
USD570953S1 (en) * 2007-02-22 2008-06-10 Conco Systems Inc Nozzle sleeve of a nozzle assembly for cleaning heat exchanger tubes
US20090098742A1 (en) * 2000-12-21 2009-04-16 Mattson Technology, Inc. System and Process for Heating Semiconductor Wafers by Optimizing Absorption of Electromagnetic Energy
US20090199684A1 (en) * 2008-02-08 2009-08-13 Kenneth Lee Reeves Metal lathe, core drill adaptor and rate of cut device for use with a standard drill press

Patent Citations (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1432339A (en) * 1922-10-17 mary a
US989304A (en) * 1909-03-31 1911-04-11 William Mcintosh Hose-pipe.
US2154584A (en) * 1937-10-25 1939-04-18 Rossi Mariano Milk container
US2207003A (en) * 1938-06-14 1940-07-09 Sonoco Products Co Container
US2252553A (en) * 1940-01-17 1941-08-12 Campbell Joseph Safety grip electric plug
US3384992A (en) * 1964-07-09 1968-05-28 G I Plastics Corp Plant shelter
US3900168A (en) * 1973-11-21 1975-08-19 Texcone Limited Textile cone
US4015796A (en) * 1974-06-07 1977-04-05 The Firestone Tire & Rubber Company Vehicle sensitive inertial sensor for retractors and the like
USD242745S (en) * 1974-11-11 1976-12-14 Coats & Clark, Inc. Yarn cone
US4440835A (en) * 1981-04-13 1984-04-03 Societe Les Piles Wonder Thin non-flat gas electrode, current collector and process of manufacture
US4627127A (en) * 1985-02-13 1986-12-09 Minnesota Mining And Manufacturing Company Cylindrical brush
USD311104S (en) * 1987-06-08 1990-10-09 Action Products Co., Inc. Seat pedestal
USD319524S (en) * 1989-01-23 1991-09-03 Tino Antonacci Ice cream cone
US5897535A (en) * 1991-06-07 1999-04-27 Rtc, Inc. Non-contaminating probe and methods of making and using same
US5597022A (en) * 1994-09-23 1997-01-28 Reifers; Richard F. Device for loading trash bags
USD369648S (en) * 1994-12-27 1996-05-07 Compri Technic Pty. Ltd. Pneumatic gun nozzles
USD388501S (en) * 1995-08-10 1997-12-30 Gardena Kress + Kastner Gmbh Spray nozzle
USD376935S (en) * 1996-03-11 1996-12-31 BBA Holdings, Inc. Occasional table
US5718408A (en) * 1996-03-28 1998-02-17 Lin; Ching-Chi Adjustable supporting apparatus for supporting a workpiece feeding machine on a worktable
US5842655A (en) * 1997-06-30 1998-12-01 Mccarthy; Vivian Device for dispensing yarn and like material
USD423340S (en) * 1998-09-17 2000-04-25 J. H. Smith Co., Inc. Bed riser support
USD424165S (en) * 1999-07-26 2000-05-02 Wen-Li Guo Sprayer nozzle
USD442670S1 (en) * 1999-11-22 2001-05-22 Joseph S. Kanfer Nozzle for dispensing fluids
US20030104698A1 (en) * 2000-04-24 2003-06-05 Toru Taniguchi Method of manufacturing semiconductor wafer
USD458086S1 (en) * 2000-05-01 2002-06-04 Michael Howard Marks Self-contained warming and cooling vessel
US20090098742A1 (en) * 2000-12-21 2009-04-16 Mattson Technology, Inc. System and Process for Heating Semiconductor Wafers by Optimizing Absorption of Electromagnetic Energy
US20020175158A1 (en) * 2001-05-25 2002-11-28 Hughes Sanoner Electronic drinking mug
US6695687B2 (en) * 2001-05-25 2004-02-24 Infineon Technologies Ag Semiconductor substrate holder for chemical-mechanical polishing containing a movable plate
USD465677S1 (en) * 2001-10-15 2002-11-19 Standex International Corp. Appliance or table leg
US6870135B2 (en) * 2003-01-14 2005-03-22 Hlc Efficiency Products Llc Beverage container warmer
US20070111490A1 (en) * 2003-03-31 2007-05-17 Hoya Corporation Mask blank, mask blank manufacturing method, transfer mask manufacturing method, and semiconductor device manufacturing method
US20050199633A1 (en) * 2004-03-03 2005-09-15 Stanley Ellen E. Trash can with pull thruough bags
USD562599S1 (en) * 2005-09-12 2008-02-26 Ashley Furniture Industries, Inc. Table
TWM298774U (en) 2006-01-26 2006-10-01 Forever Group Prec Ind Co Ltd Plate transportation device
TWD118408S1 (en) 2006-02-20 2007-08-01 東京威力科創股份有限公司 Processing tubes for semiconductor manufacturing
USD555682S1 (en) * 2006-05-26 2007-11-20 Foster Fred L Tool for driving a ground rod
US20080011738A1 (en) * 2006-07-14 2008-01-17 Oki Electric Industry Co., Ltd. Apparatus and method for manufacturing a semiconductor device with a sapphire substrate
USD570953S1 (en) * 2007-02-22 2008-06-10 Conco Systems Inc Nozzle sleeve of a nozzle assembly for cleaning heat exchanger tubes
US20090199684A1 (en) * 2008-02-08 2009-08-13 Kenneth Lee Reeves Metal lathe, core drill adaptor and rate of cut device for use with a standard drill press

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD787871S1 (en) * 2014-12-02 2017-05-30 Urban Outdoor Company, LLC Foot for outdoor furniture
USD849810S1 (en) * 2015-11-24 2019-05-28 Ksm Component Co., Ltd Ceramic heater
USD947913S1 (en) * 2019-05-17 2022-04-05 Asm Ip Holding B.V. Susceptor shaft
USD975665S1 (en) * 2019-05-17 2023-01-17 Asm Ip Holding B.V. Susceptor shaft
USD965044S1 (en) * 2019-08-19 2022-09-27 Asm Ip Holding B.V. Susceptor shaft
USD1005093S1 (en) * 2019-11-09 2023-11-21 Society Brands, Inc. Chair locking mechanism
USD1013750S1 (en) * 2020-09-18 2024-02-06 Ksm Component Co., Ltd. Ceramic heater
USD1012998S1 (en) * 2020-09-18 2024-01-30 Ksm Component Co., Ltd. Ceramic heater
USD1012997S1 (en) * 2020-09-18 2024-01-30 Ksm Component Co., Ltd. Ceramic heater
USD1065275S1 (en) * 2020-09-18 2025-03-04 Ksm Component Co., Ltd. Ceramic heater
USD1077769S1 (en) * 2021-12-02 2025-06-03 Ngk Insulators, Ltd. Ceramic heater
USD1077876S1 (en) * 2021-12-02 2025-06-03 Ngk Insulators, Ltd. Ceramic heater
USD1077761S1 (en) * 2021-12-02 2025-06-03 Ngk Insulators, Ltd. Ceramic heater
USD1080568S1 (en) * 2021-12-02 2025-06-24 Ngk Insulators, Ltd. Ceramic heater
USD1080701S1 (en) * 2021-12-02 2025-06-24 Ngk Insulators, Ltd. Ceramic heater
USD1066439S1 (en) * 2022-03-08 2025-03-11 Cricut, Inc. Material hold-down for laser crafting apparatus

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