USD602882S1 - Wafer carrying-in/out apparatus - Google Patents

Wafer carrying-in/out apparatus Download PDF

Info

Publication number
USD602882S1
USD602882S1 US29/322,398 US32239808F USD602882S US D602882 S1 USD602882 S1 US D602882S1 US 32239808 F US32239808 F US 32239808F US D602882 S USD602882 S US D602882S
Authority
US
United States
Prior art keywords
out apparatus
wafer carrying
wafer
carrying
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/322,398
Inventor
Hiroki Hosaka
Shuji Akiyama
Tadashi Obikane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to US29/322,398 priority Critical patent/USD602882S1/en
Application granted granted Critical
Publication of USD602882S1 publication Critical patent/USD602882S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Description

FIG. 1 is a front elevational view of a wafer carrying-in/out apparatus showing our design;
FIG. 2 is a left side elevational view thereof;
FIG. 3 is a right side elevational view thereof;
FIG. 4 is a rear elevational view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof;
FIG. 7 is a top, front and right side perspective view thereof; and,
FIG. 8 is a top, front and right side perspective view thereof shown with the doors thereof in an open position.

Claims (1)

    CLAIM
  1. The ornamental design for a wafer carrying-in/out apparatus or the like, as shown and described.
US29/322,398 2006-03-30 2008-08-04 Wafer carrying-in/out apparatus Expired - Lifetime USD602882S1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US29/322,398 USD602882S1 (en) 2006-03-30 2008-08-04 Wafer carrying-in/out apparatus

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2006-008283 2006-03-30
JP2006008283 2006-03-30
US29/266,907 USD607424S1 (en) 2006-03-30 2006-10-02 Wafer carrying-in/out apparatus
US29/322,398 USD602882S1 (en) 2006-03-30 2008-08-04 Wafer carrying-in/out apparatus

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US29/266,907 Division USD607424S1 (en) 2006-03-30 2006-10-02 Wafer carrying-in/out apparatus

Publications (1)

Publication Number Publication Date
USD602882S1 true USD602882S1 (en) 2009-10-27

Family

ID=41211418

Family Applications (2)

Application Number Title Priority Date Filing Date
US29/266,907 Expired - Lifetime USD607424S1 (en) 2006-03-30 2006-10-02 Wafer carrying-in/out apparatus
US29/322,398 Expired - Lifetime USD602882S1 (en) 2006-03-30 2008-08-04 Wafer carrying-in/out apparatus

Family Applications Before (1)

Application Number Title Priority Date Filing Date
US29/266,907 Expired - Lifetime USD607424S1 (en) 2006-03-30 2006-10-02 Wafer carrying-in/out apparatus

Country Status (2)

Country Link
US (2) USD607424S1 (en)
TW (1) TWD119731S1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD652395S1 (en) * 2010-06-01 2012-01-17 Hitachi Kokusai Electric Inc. Semiconductor manufacturing equipment
TWD143036S1 (en) * 2010-06-01 2011-10-01 日立國際電氣股份有限公司 Semiconductor manufacturing machine
JP1728449S (en) * 2022-03-30 2022-10-27 Substrate processing equipment

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5364222A (en) 1992-02-05 1994-11-15 Tokyo Electron Limited Apparatus for processing wafer-shaped substrates
US5498199A (en) * 1992-06-15 1996-03-12 Speedfam Corporation Wafer polishing method and apparatus
US5628828A (en) 1994-03-04 1997-05-13 Hitachi , Ltd. Processing method and equipment for processing a semiconductor device having holder/carrier with flattened surface
US6033521A (en) 1997-06-04 2000-03-07 Speedfam-Ipec Corporation Tilt mechanism for wafer cassette
US20020028399A1 (en) 2000-06-27 2002-03-07 Mamoru Nakasuji Inspection system by charged particle beam and method of manufacturing devices using the system
US6405610B1 (en) 1995-11-14 2002-06-18 Nikon Corporation Wafer inspection apparatus
US6580087B1 (en) 1999-10-15 2003-06-17 Sony Corporation Inspection apparatus
US20030169916A1 (en) 2002-02-19 2003-09-11 Toshiba Ceramics Co., Ltd. Wafer inspection apparatus
US20040095575A1 (en) 2002-11-19 2004-05-20 Jai-Young Woo Apparatus for inspecting a wafer
US20040141831A1 (en) 2002-07-22 2004-07-22 Ulysses Gilchrist Substrate loading and uploading station with buffer
US20040146378A1 (en) 2002-12-30 2004-07-29 Tdk Corporation Wafer processing apparatus having dust proof function
US7109483B2 (en) 2000-11-17 2006-09-19 Ebara Corporation Method for inspecting substrate, substrate inspecting system and electron beam apparatus
US20070031236A1 (en) 2005-08-05 2007-02-08 Advanced Micro-Fabrication Equipment, Inc. Asia Semiconductor processing system; a semiconductor processing chamber; and a method for loading, unloading and exchanging semiconductor work pieces from a semiconductor processing chamber
US20070098527A1 (en) 2005-07-11 2007-05-03 Hall Daniel A Equipment storage for substrate processing apparatus

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5364222A (en) 1992-02-05 1994-11-15 Tokyo Electron Limited Apparatus for processing wafer-shaped substrates
US5498199A (en) * 1992-06-15 1996-03-12 Speedfam Corporation Wafer polishing method and apparatus
US5628828A (en) 1994-03-04 1997-05-13 Hitachi , Ltd. Processing method and equipment for processing a semiconductor device having holder/carrier with flattened surface
US6405610B1 (en) 1995-11-14 2002-06-18 Nikon Corporation Wafer inspection apparatus
US6033521A (en) 1997-06-04 2000-03-07 Speedfam-Ipec Corporation Tilt mechanism for wafer cassette
US6580087B1 (en) 1999-10-15 2003-06-17 Sony Corporation Inspection apparatus
US20020028399A1 (en) 2000-06-27 2002-03-07 Mamoru Nakasuji Inspection system by charged particle beam and method of manufacturing devices using the system
US7109483B2 (en) 2000-11-17 2006-09-19 Ebara Corporation Method for inspecting substrate, substrate inspecting system and electron beam apparatus
US20030169916A1 (en) 2002-02-19 2003-09-11 Toshiba Ceramics Co., Ltd. Wafer inspection apparatus
US20040141831A1 (en) 2002-07-22 2004-07-22 Ulysses Gilchrist Substrate loading and uploading station with buffer
US20040095575A1 (en) 2002-11-19 2004-05-20 Jai-Young Woo Apparatus for inspecting a wafer
US20040146378A1 (en) 2002-12-30 2004-07-29 Tdk Corporation Wafer processing apparatus having dust proof function
US20070098527A1 (en) 2005-07-11 2007-05-03 Hall Daniel A Equipment storage for substrate processing apparatus
US20070031236A1 (en) 2005-08-05 2007-02-08 Advanced Micro-Fabrication Equipment, Inc. Asia Semiconductor processing system; a semiconductor processing chamber; and a method for loading, unloading and exchanging semiconductor work pieces from a semiconductor processing chamber

Also Published As

Publication number Publication date
USD607424S1 (en) 2010-01-05
TWD119731S1 (en) 2007-11-01

Similar Documents

Publication Publication Date Title
USD569706S1 (en) Door hold
USD586677S1 (en) Breathalyzer
USD584708S1 (en) Handset
USD594346S1 (en) Bottle
USD544953S1 (en) Air deodorizing apparatus
USD545186S1 (en) Container
USD606577S1 (en) Eyeglasses
USD563222S1 (en) Container
USD572425S1 (en) Travel safe
USD589932S1 (en) Headphone
USD647112S1 (en) Freezer
USD523033S1 (en) Refrigerator
USD525993S1 (en) Refrigerator
USD593085S1 (en) Computer
USD524832S1 (en) Refrigerator
USD607716S1 (en) Panel wall clip
USD586350S1 (en) Anti-glare hood for display
USD527398S1 (en) Refrigerator
USD562778S1 (en) Door opener
USD548249S1 (en) Refrigerator
USD527745S1 (en) Refrigerator
USD614945S1 (en) Panel wall clip
USD548968S1 (en) Hinged container
USD528135S1 (en) Refrigerator
USD553473S1 (en) Closing device for chains