USD600222S1 - Wafer boat - Google Patents

Wafer boat Download PDF

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Publication number
USD600222S1
USD600222S1 US29309701 US30970108F USD600222S US D600222 S1 USD600222 S1 US D600222S1 US 29309701 US29309701 US 29309701 US 30970108 F US30970108 F US 30970108F US D600222 S USD600222 S US D600222S
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US
Grant status
Grant
Patent type
Design
Prior art keywords
fig
view
wafer
shown
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29309701
Inventor
Izumi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

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Description

FIG. 1 is a front view;

FIG. 2 is a partial enlarged perspective view of a bottom along 22 of the frontal view shown in FIG. 1;

FIG. 3 is an enlarged bottom view;

FIG. 4 is a rear view;

FIG. 5 is a left side view the right side being a mirror image thereof;

FIG. 6 is a plan view;

FIG. 7 is a bottom view; and,

FIG. 8 is a partial, enlarged view, along 22 of a front view shown in FIG. 1 of the wafer boat in use.

Salients are formed on a bottom board of a wafer boat to get into reentrants of a heat insulating cylinder for manufacturing a semiconductor wafer, and stabilize it in a setting condition. The portion shown in solid lines is my claimed design. The broken line showing in the figures is for illustrative purposes only and forms no part of the claimed design.

Claims (1)

  1. The ornamental design for a wafer boat, as shown and described.
US29309701 2008-03-28 2008-09-26 Wafer boat Active USD600222S1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008007857 2008-03-28

Publications (1)

Publication Number Publication Date
USD600222S1 true USD600222S1 (en) 2009-09-15

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ID=41059236

Family Applications (1)

Application Number Title Priority Date Filing Date
US29309701 Active USD600222S1 (en) 2008-03-28 2008-09-26 Wafer boat

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US (1) USD600222S1 (en)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080000851A1 (en) * 2006-06-02 2008-01-03 Rohm And Haas Electronic Materials Llc Apparatus with fillet radius joints
US20110017763A1 (en) * 2005-07-14 2011-01-27 Colelli Robert P Merchandise dispensing apparatus providing theft deterrence
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
USD737785S1 (en) * 2013-07-29 2015-09-01 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD738329S1 (en) * 2013-07-29 2015-09-08 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD739831S1 (en) * 2013-03-22 2015-09-29 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD740769S1 (en) * 2013-03-22 2015-10-13 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD747279S1 (en) * 2013-07-29 2016-01-12 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD748593S1 (en) * 2014-03-05 2016-02-02 Hzo, Inc. Boat for use in a material deposition apparatus
USD763807S1 (en) * 2014-05-22 2016-08-16 Hzo, Inc. Boat for a deposition apparatus
USD769201S1 (en) * 2014-11-20 2016-10-18 Tokyo Electron Limited Wafer boat
USD772183S1 (en) * 2014-11-20 2016-11-22 Tokyo Electron Limited Wafer boat
USD789310S1 (en) * 2014-11-20 2017-06-13 Tokyo Electron Limited Wafer boat
USD791721S1 (en) * 2014-11-20 2017-07-11 Tokyo Electron Limited Wafer boat

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110017763A1 (en) * 2005-07-14 2011-01-27 Colelli Robert P Merchandise dispensing apparatus providing theft deterrence
US8727179B2 (en) * 2005-07-14 2014-05-20 Rtc Industries, Inc. Merchandise dispensing apparatus providing theft deterrence
US20080000851A1 (en) * 2006-06-02 2008-01-03 Rohm And Haas Electronic Materials Llc Apparatus with fillet radius joints
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
USD739831S1 (en) * 2013-03-22 2015-09-29 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD740769S1 (en) * 2013-03-22 2015-10-13 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD738329S1 (en) * 2013-07-29 2015-09-08 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD737785S1 (en) * 2013-07-29 2015-09-01 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD747279S1 (en) * 2013-07-29 2016-01-12 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD748593S1 (en) * 2014-03-05 2016-02-02 Hzo, Inc. Boat for use in a material deposition apparatus
USD763807S1 (en) * 2014-05-22 2016-08-16 Hzo, Inc. Boat for a deposition apparatus
USD769201S1 (en) * 2014-11-20 2016-10-18 Tokyo Electron Limited Wafer boat
USD772183S1 (en) * 2014-11-20 2016-11-22 Tokyo Electron Limited Wafer boat
USD789310S1 (en) * 2014-11-20 2017-06-13 Tokyo Electron Limited Wafer boat
USD791721S1 (en) * 2014-11-20 2017-07-11 Tokyo Electron Limited Wafer boat

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