USD490094S1 - Electrostatic chuck - Google Patents

Electrostatic chuck Download PDF

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Publication number
USD490094S1
USD490094S1 US29183942 US18394203F USD490094S US D490094 S1 USD490094 S1 US D490094S1 US 29183942 US29183942 US 29183942 US 18394203 F US18394203 F US 18394203F US D490094 S USD490094 S US D490094S
Authority
US
Grant status
Grant
Patent type
Design
Prior art keywords
fig
view
elevational
chuck
side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29183942
Inventor
Keisuke Okugawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Spark Plug Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

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Description

FIG. 1 is a perspective view of the top, front and right side of an electrostatic chuck showing my new design;

FIG. 2 is a front elevational view thereof, the rear elevational view being a mirror image thereof;

FIG. 3 is a right side elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof; and,

FIG. 7 is a sectional view taking along the line 7—7 in FIG. 5.

Claims (1)

  1. The ornamental design for a electrostatic chuck, as shown and described.
US29183942 2002-12-20 2003-06-20 Electrostatic chuck Expired - Lifetime USD490094S1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2002-035560 2002-12-20
JP2002035560 2002-12-20

Publications (1)

Publication Number Publication Date
USD490094S1 true USD490094S1 (en) 2004-05-18

Family

ID=32260106

Family Applications (1)

Application Number Title Priority Date Filing Date
US29183942 Expired - Lifetime USD490094S1 (en) 2002-12-20 2003-06-20 Electrostatic chuck

Country Status (1)

Country Link
US (1) USD490094S1 (en)

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