USD459254S1 - Multi-chamber processing apparatus - Google Patents

Multi-chamber processing apparatus Download PDF

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Publication number
USD459254S1
USD459254S1 US29/131,294 US13129400F USD459254S US D459254 S1 USD459254 S1 US D459254S1 US 13129400 F US13129400 F US 13129400F US D459254 S USD459254 S US D459254S
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US
United States
Prior art keywords
processing apparatus
chamber processing
view
chamber
design
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/131,294
Inventor
Jun Hirose
Eiji Hirose
Jun Ozawa
Takaaki Hirooka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HIROOKA, TAKAAKI, HIROSE, EIJI, HIROSE, JUN, OZAWA, JUN
Application granted granted Critical
Publication of USD459254S1 publication Critical patent/USD459254S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is a front view of a first embodiment of a multi-chamber processing apparatus embodying our design;
FIG. 2 is a back view thereof;
FIG. 3 is a left-side view thereof;
FIG. 4 is a right-side view thereof;
FIG. 5 is a plan view thereof;
FIG. 6 is a bottom view thereof;
FIG. 7 is a front view of a second embodiment of a multi-chamber processing apparatus embodying our design;
FIG. 8 is a back view thereof;
FIG. 9 is a left-side view thereof;
FIG. 10 is a right-side view thereof;
FIG. 11 is a plan view thereof;
FIG. 12 is a bottom view thereof;
FIG. 13 is a front view of a third embodiment of a multi-chamber processing apparatus embodying our design;
FIG. 14 is back view thereof;
FIG. 15 is a left-side view thereof;
FIG. 16 is a right-side view thereof;
FIG. 17 is a plan view thereof;
FIG. 18 is a bottom view thereof;
FIG. 19 is a front view of a fourth embodiment of a multi-chamber processing apparatus embodying our design;
FIG. 20 is back view thereof;
FIG. 21 is a left-side view thereof;
FIG. 22 is a right-side view thereof;
FIG. 23 is a plan view thereof;
FIG. 24 is a bottom view thereof;
FIG. 25 is a front view of a fifth embodiment of a multi-chamber processing apparatus embodying our design;
FIG. 26 is a back view thereof;
FIG. 27 is a left-side view thereof;
FIG. 28 is a right-side view thereof;
FIG. 29 is a plan view thereof; and,
FIG. 30 is a bottom view thereof.
The broken line showing is for illustrative purposes only and forms no part of the claimed design.

Claims (1)

  1. The ornamental design for a multi-chamber processig apparatus, as shown and described.
US29/131,294 2000-04-19 2000-10-19 Multi-chamber processing apparatus Expired - Lifetime USD459254S1 (en)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP2000-010286 2000-04-19
JP2000-010249 2000-04-19
JP2000010286 2000-04-19
JP2000010248 2000-04-19
JP2000-010248 2000-04-19
JP2000010287 2000-04-19
JP2000010249 2000-04-19
JP2000010288 2000-04-19
JP2000-010288 2000-04-19
JP2000-010287 2000-04-19

Publications (1)

Publication Number Publication Date
USD459254S1 true USD459254S1 (en) 2002-06-25

Family

ID=27531380

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/131,294 Expired - Lifetime USD459254S1 (en) 2000-04-19 2000-10-19 Multi-chamber processing apparatus

Country Status (1)

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US (1) USD459254S1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD991067S1 (en) * 2020-10-17 2023-07-04 Honeywell International Inc. Modular aspirated smoke, gas, and air quality monitoring system device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD991067S1 (en) * 2020-10-17 2023-07-04 Honeywell International Inc. Modular aspirated smoke, gas, and air quality monitoring system device
USD1031463S1 (en) 2020-10-17 2024-06-18 Honeywell International Inc. Modular aspirated smoke, gas, and air quality monitoring system device

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