USD450070S1 - Sputtering chamber coil - Google Patents

Sputtering chamber coil Download PDF

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Publication number
USD450070S1
USD450070S1 US29/090,618 US9061898F USD450070S US D450070 S1 USD450070 S1 US D450070S1 US 9061898 F US9061898 F US 9061898F US D450070 S USD450070 S US D450070S
Authority
US
United States
Prior art keywords
sputtering chamber
chamber coil
coil
sputtering
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/090,618
Inventor
Praburam Gopalraja
Zheng Xu
Michael Rosenstein
John C. Forster
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to US29/090,618 priority Critical patent/USD450070S1/en
Assigned to APPLIED MATERIALS, INC. reassignment APPLIED MATERIALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: FORSTER, JOHN C., XU, ZHENG, GOPALRAJA, PRABURAM, ROSENSTEIN, MICHAEL
Application granted granted Critical
Publication of USD450070S1 publication Critical patent/USD450070S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is a front elevational view;
FIG. 2 is a top view;
FIG. 3 is a right side elevational view;
FIG. 4 is a bottom view; and,
FIG. 5 is a rear elevational view of our sputtering chamber coil.
The left side elevation view (not shown) is the same as the right side elevational view (FIG. 3) because of coil symmetry.

Claims (1)

  1. The design for sputtering chamber coil, as shown and described.
US29/090,618 1998-07-13 1998-07-13 Sputtering chamber coil Expired - Lifetime USD450070S1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US29/090,618 USD450070S1 (en) 1998-07-13 1998-07-13 Sputtering chamber coil

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/090,618 USD450070S1 (en) 1998-07-13 1998-07-13 Sputtering chamber coil

Publications (1)

Publication Number Publication Date
USD450070S1 true USD450070S1 (en) 2001-11-06

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ID=22223560

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/090,618 Expired - Lifetime USD450070S1 (en) 1998-07-13 1998-07-13 Sputtering chamber coil

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US (1) USD450070S1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6660134B1 (en) * 1998-07-10 2003-12-09 Applied Materials, Inc. Feedthrough overlap coil
USD804981S1 (en) * 2015-01-26 2017-12-12 Maag Automatik Gmbh Curved filter screen

Non-Patent Citations (9)

* Cited by examiner, † Cited by third party
Title
Applied Materials, Inc., Exhibit A, Dated Prior to Jul. 13, 1998, the filing date of the present application.(Exhibit A is a drawing of a prior art coil design which is prior to the design of the present application.).
Search report in PCT/US98/10058 issued 4Nov98.
U.S Patent Application Serial No. 08/559,345 filed Nov. 15, 1995 (Atty Dkt 938.X1/4479).
U.S. Patent Application Serial No. 08/730,722 filed Oct. 8, 1996 (Atty Dkt 1207/4784).
U.S. Patent Application Serial No. 09/049,276 Mar. 27, 1998 (Atty Dkt 938.D2/5703).
U.S. Patent Application Serial No. 09/049,839 Mar. 27, 1998 (Atty Dkt 938.D1/5702).
U.S. Patent Application Serial No. 29/109,870 (Atty. Dkt. 3980/PVD/DV).
U.S. Patent Application Serial No. 29/109,892 (Atty. Dkt. 3979D/PVD/DV).
U.S. Patent Application Serial No. 29/109,893 (Atty. Dkt. 3981/PVD/DV).

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6660134B1 (en) * 1998-07-10 2003-12-09 Applied Materials, Inc. Feedthrough overlap coil
USD804981S1 (en) * 2015-01-26 2017-12-12 Maag Automatik Gmbh Curved filter screen

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