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USD441348S1 - Process chamber lid - Google Patents

Process chamber lid Download PDF

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Publication number
USD441348S1
USD441348S1 US29114741 US11474199F USD441348S US D441348 S1 USD441348 S1 US D441348S1 US 29114741 US29114741 US 29114741 US 11474199 F US11474199 F US 11474199F US D441348 S USD441348 S US D441348S
Authority
US
Grant status
Grant
Patent type
Design
Prior art keywords
view
fig
elevational
chamber
lid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29114741
Inventor
Craig B. Todd
James E. Yu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

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Description

FIG. 1 is a top perspective view of a process chamber lid showing our new design;

FIG. 2 is a top plan view thereof;

FIG. 3 is a side elevational view thereof;

FIG. 4 is an opposite side elevational view thereof;

FIG. 5 is an enlarged end elevational view thereof;

FIG. 6 is an enlarged opposite end elevational view thereof; and,

FIG. 7 is a bottom plan view thereof.

Claims (1)

  1. The ornamental design for a process chamber lid, as shown and described.
US29114741 1999-11-30 1999-11-30 Process chamber lid Expired - Lifetime USD441348S1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US29114741 USD441348S1 (en) 1999-11-30 1999-11-30 Process chamber lid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29114741 USD441348S1 (en) 1999-11-30 1999-11-30 Process chamber lid

Publications (1)

Publication Number Publication Date
USD441348S1 true USD441348S1 (en) 2001-05-01

Family

ID=22357149

Family Applications (1)

Application Number Title Priority Date Filing Date
US29114741 Expired - Lifetime USD441348S1 (en) 1999-11-30 1999-11-30 Process chamber lid

Country Status (1)

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US (1) USD441348S1 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100003824A1 (en) * 2008-07-07 2010-01-07 Lam Research Corporation Clamped showerhead electrode assembly
US20100252197A1 (en) * 2009-04-07 2010-10-07 Lam Reseach Corporation Showerhead electrode with centering feature
US20110070740A1 (en) * 2009-09-18 2011-03-24 Lam Research Corporation Clamped monolithic showerhead electrode
US20110083809A1 (en) * 2009-10-13 2011-04-14 Lam Research Corporation Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly
US8206506B2 (en) 2008-07-07 2012-06-26 Lam Research Corporation Showerhead electrode
US8221582B2 (en) 2008-07-07 2012-07-17 Lam Research Corporation Clamped monolithic showerhead electrode
US8272346B2 (en) 2009-04-10 2012-09-25 Lam Research Corporation Gasket with positioning feature for clamped monolithic showerhead electrode
US8573152B2 (en) 2010-09-03 2013-11-05 Lam Research Corporation Showerhead electrode

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8221582B2 (en) 2008-07-07 2012-07-17 Lam Research Corporation Clamped monolithic showerhead electrode
US8796153B2 (en) 2008-07-07 2014-08-05 Lam Research Corporation Clamped monolithic showerhead electrode
US8414719B2 (en) 2008-07-07 2013-04-09 Lam Research Corporation Clamped monolithic showerhead electrode
US8313805B2 (en) 2008-07-07 2012-11-20 Lam Research Corporation Clamped showerhead electrode assembly
US8161906B2 (en) 2008-07-07 2012-04-24 Lam Research Corporation Clamped showerhead electrode assembly
US8206506B2 (en) 2008-07-07 2012-06-26 Lam Research Corporation Showerhead electrode
US20100003824A1 (en) * 2008-07-07 2010-01-07 Lam Research Corporation Clamped showerhead electrode assembly
US20100252197A1 (en) * 2009-04-07 2010-10-07 Lam Reseach Corporation Showerhead electrode with centering feature
US8402918B2 (en) 2009-04-07 2013-03-26 Lam Research Corporation Showerhead electrode with centering feature
US8272346B2 (en) 2009-04-10 2012-09-25 Lam Research Corporation Gasket with positioning feature for clamped monolithic showerhead electrode
US8536071B2 (en) 2009-04-10 2013-09-17 Lam Research Corporation Gasket with positioning feature for clamped monolithic showerhead electrode
US20110070740A1 (en) * 2009-09-18 2011-03-24 Lam Research Corporation Clamped monolithic showerhead electrode
US8419959B2 (en) 2009-09-18 2013-04-16 Lam Research Corporation Clamped monolithic showerhead electrode
US20110083809A1 (en) * 2009-10-13 2011-04-14 Lam Research Corporation Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly
US9245716B2 (en) 2009-10-13 2016-01-26 Lam Research Corporation Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly
US8573152B2 (en) 2010-09-03 2013-11-05 Lam Research Corporation Showerhead electrode

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