USD378873S - 300 mm microenvironment pod with door on side - Google Patents

300 mm microenvironment pod with door on side Download PDF

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Publication number
USD378873S
USD378873S US29045247 US04524795F USD378873S US D378873 S USD378873 S US D378873S US 29045247 US29045247 US 29045247 US 04524795 F US04524795 F US 04524795F US D378873 S USD378873 S US D378873S
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US
Grant status
Grant
Patent type
Design
Prior art keywords
fig
view
side
elevational
microenvironment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29045247
Inventor
Barry Gregerson
Brian Wiseman
Gary Gallagher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Empak Inc
Original Assignee
Empak Inc
Filing date
Publication date
Grant date

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Description

FIG. 1 is a perspective view of a 300 mm microenvironment pod with door on side, showing my new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof; and,

FIG. 7 is a bottom plan view thereof.

Claims (1)

  1. The ornamental design for a 300 mm microenvironment pod with door on side, as shown and described.
US29045247 1995-10-13 300 mm microenvironment pod with door on side Expired - Lifetime USD378873S (en)

Publications (1)

Publication Number Publication Date
USD378873S true USD378873S (en) 1997-04-22

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030025245A1 (en) * 1998-05-28 2003-02-06 Entegris, Inc. Composite substrate carrier
US6736268B2 (en) 1997-07-11 2004-05-18 Entegris, Inc. Transport module
US6808668B2 (en) 1998-05-28 2004-10-26 Entegris, Inc. Process for fabricating composite substrate carrier
US20080302700A1 (en) * 1997-07-11 2008-12-11 Nyseth David L Transport module
US20090127160A1 (en) * 2007-11-15 2009-05-21 Chin-Ming Lin Storage apparatus for storing semiconductor element or reticle
USD668865S1 (en) * 2010-10-19 2012-10-16 Entegris, Inc. Substrate container
USD740031S1 (en) * 2010-10-19 2015-10-06 Entegris, Inc. Substrate container

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7370764B2 (en) 1997-07-11 2008-05-13 Entegris, Inc. Transport module
US6736268B2 (en) 1997-07-11 2004-05-18 Entegris, Inc. Transport module
US20040206664A1 (en) * 1997-07-11 2004-10-21 Entegris, Inc. Transport module
US20080302700A1 (en) * 1997-07-11 2008-12-11 Nyseth David L Transport module
US20030025245A1 (en) * 1998-05-28 2003-02-06 Entegris, Inc. Composite substrate carrier
US20050167312A1 (en) * 1998-05-28 2005-08-04 Entegris, Inc. Composite substrate carrier
US7168564B2 (en) 1998-05-28 2007-01-30 Entegris, Inc. Composite substrate carrier
US6871741B2 (en) 1998-05-28 2005-03-29 Entegris, Inc. Composite substrate carrier
US6808668B2 (en) 1998-05-28 2004-10-26 Entegris, Inc. Process for fabricating composite substrate carrier
US8734698B2 (en) 1998-05-28 2014-05-27 Entegris, Inc. Composite substrate carrier
US20100236970A1 (en) * 1998-05-28 2010-09-23 Entegris, Inc. Composite substrate carrier
US20100126905A1 (en) * 2007-11-15 2010-05-27 Chin-Ming Lin Storage apparatus for storing semiconductor element or reticle
US20090127160A1 (en) * 2007-11-15 2009-05-21 Chin-Ming Lin Storage apparatus for storing semiconductor element or reticle
USD668865S1 (en) * 2010-10-19 2012-10-16 Entegris, Inc. Substrate container
USD740031S1 (en) * 2010-10-19 2015-10-06 Entegris, Inc. Substrate container

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