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USD363464S - Electrode for a semiconductor processing apparatus - Google Patents

Electrode for a semiconductor processing apparatus Download PDF

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Publication number
USD363464S
USD363464S US29005246 US00524693F USD363464S US D363464 S USD363464 S US D363464S US 29005246 US29005246 US 29005246 US 00524693 F US00524693 F US 00524693F US D363464 S USD363464 S US D363464S
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US
Grant status
Grant
Patent type
Design
Prior art keywords
fig
view
elevational
semiconductor
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29005246
Inventor
Kazuo Fukasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Yamanashi Ltd
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Filing date
Publication date
Grant date

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Description

FIG. 1 is a front elevational view of an electrode for a semiconductor processing apparatus showing my new design;

FIG. 2 is a right side elevational view thereof; a left side elevational view being a mirror image thereof;

FIG. 3 is a top plan view thereof; a bottom plan view being a mirror image thereof;

FIG. 4 is a rear elevational view thereof;

FIG. 5 is an enlarged cross-sectional view taken along line 5--5 of FIG. 1; and,

FIG. 6 is an enlarged cross-sectional view taken along line 6--6 of FIG. 1.

Claims (1)

  1. The ornamental design for an electrode for a semiconductor processing apparatus, as shown and described.
US29005246 1992-08-27 1993-02-26 Electrode for a semiconductor processing apparatus Expired - Lifetime USD363464S (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25414/92 1992-08-27

Publications (1)

Publication Number Publication Date
USD363464S true USD363464S (en) 1995-10-24

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Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8161906B2 (en) 2008-07-07 2012-04-24 Lam Research Corporation Clamped showerhead electrode assembly
US8206506B2 (en) 2008-07-07 2012-06-26 Lam Research Corporation Showerhead electrode
US8221582B2 (en) 2008-07-07 2012-07-17 Lam Research Corporation Clamped monolithic showerhead electrode
US8272346B2 (en) 2009-04-10 2012-09-25 Lam Research Corporation Gasket with positioning feature for clamped monolithic showerhead electrode
US8402918B2 (en) 2009-04-07 2013-03-26 Lam Research Corporation Showerhead electrode with centering feature
US8419959B2 (en) 2009-09-18 2013-04-16 Lam Research Corporation Clamped monolithic showerhead electrode
US8470127B2 (en) 2011-01-06 2013-06-25 Lam Research Corporation Cam-locked showerhead electrode and assembly
US8573152B2 (en) 2010-09-03 2013-11-05 Lam Research Corporation Showerhead electrode
USD734377S1 (en) * 2013-03-28 2015-07-14 Hirata Corporation Top cover of a load lock chamber
US9245716B2 (en) 2009-10-13 2016-01-26 Lam Research Corporation Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly
USD787458S1 (en) * 2015-11-18 2017-05-23 Asm Ip Holding B.V. Gas supply plate for semiconductor manufacturing apparatus
USD789888S1 (en) * 2016-01-08 2017-06-20 Asm Ip Holding B.V. Electrode plate for semiconductor manufacturing apparatus
USD793572S1 (en) * 2015-06-10 2017-08-01 Tokyo Electron Limited Electrode plate for plasma processing apparatus
USD795208S1 (en) * 2015-08-18 2017-08-22 Tokyo Electron Limited Electrostatic chuck for semiconductor manufacturing equipment
USD799646S1 (en) * 2016-08-30 2017-10-10 Asm Ip Holding B.V. Heater block
USD802472S1 (en) * 2015-08-06 2017-11-14 Tokyo Electron Limited Electrostatic chuck for semiconductor manufacturing equipment
USD803802S1 (en) * 2015-08-18 2017-11-28 Tokyo Electron Limited Electrostatic chuck for semiconductor manufacturing equipment

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8796153B2 (en) 2008-07-07 2014-08-05 Lam Research Corporation Clamped monolithic showerhead electrode
US8206506B2 (en) 2008-07-07 2012-06-26 Lam Research Corporation Showerhead electrode
US8221582B2 (en) 2008-07-07 2012-07-17 Lam Research Corporation Clamped monolithic showerhead electrode
US8313805B2 (en) 2008-07-07 2012-11-20 Lam Research Corporation Clamped showerhead electrode assembly
US8414719B2 (en) 2008-07-07 2013-04-09 Lam Research Corporation Clamped monolithic showerhead electrode
US8161906B2 (en) 2008-07-07 2012-04-24 Lam Research Corporation Clamped showerhead electrode assembly
US8402918B2 (en) 2009-04-07 2013-03-26 Lam Research Corporation Showerhead electrode with centering feature
US8272346B2 (en) 2009-04-10 2012-09-25 Lam Research Corporation Gasket with positioning feature for clamped monolithic showerhead electrode
US8536071B2 (en) 2009-04-10 2013-09-17 Lam Research Corporation Gasket with positioning feature for clamped monolithic showerhead electrode
US8419959B2 (en) 2009-09-18 2013-04-16 Lam Research Corporation Clamped monolithic showerhead electrode
US9245716B2 (en) 2009-10-13 2016-01-26 Lam Research Corporation Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly
US8573152B2 (en) 2010-09-03 2013-11-05 Lam Research Corporation Showerhead electrode
US8470127B2 (en) 2011-01-06 2013-06-25 Lam Research Corporation Cam-locked showerhead electrode and assembly
USD734377S1 (en) * 2013-03-28 2015-07-14 Hirata Corporation Top cover of a load lock chamber
USD793572S1 (en) * 2015-06-10 2017-08-01 Tokyo Electron Limited Electrode plate for plasma processing apparatus
USD802472S1 (en) * 2015-08-06 2017-11-14 Tokyo Electron Limited Electrostatic chuck for semiconductor manufacturing equipment
USD803802S1 (en) * 2015-08-18 2017-11-28 Tokyo Electron Limited Electrostatic chuck for semiconductor manufacturing equipment
USD795208S1 (en) * 2015-08-18 2017-08-22 Tokyo Electron Limited Electrostatic chuck for semiconductor manufacturing equipment
USD787458S1 (en) * 2015-11-18 2017-05-23 Asm Ip Holding B.V. Gas supply plate for semiconductor manufacturing apparatus
USD789888S1 (en) * 2016-01-08 2017-06-20 Asm Ip Holding B.V. Electrode plate for semiconductor manufacturing apparatus
USD799646S1 (en) * 2016-08-30 2017-10-10 Asm Ip Holding B.V. Heater block

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