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USD323173S - Instrument for transferring boats for thermal treatment of semiconductor wafers - Google Patents

Instrument for transferring boats for thermal treatment of semiconductor wafers Download PDF

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Publication number
USD323173S
USD323173S US07301996 US30199689F USD323173S US D323173 S USD323173 S US D323173S US 07301996 US07301996 US 07301996 US 30199689 F US30199689 F US 30199689F US D323173 S USD323173 S US D323173S
Authority
US
Grant status
Grant
Patent type
Design
Prior art keywords
view
fig
elevational
instrument
transferring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US07301996
Inventor
Katsumi Ishii
Mitsuo Katoh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Sagami Ltd
Original Assignee
Tokyo Electron Sagami Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

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Description

FIG. 1 is a top, front and right side perspective view of an instrument for transferring boats for thermal treatment of semiconductor wafers showing our new design;

FIG. 2 is a left side elevational view;

FIG. 3 is a front elevational view, the rear elevational view being a mirror image;

FIG. 4 is a top plan view;

FIG. 5 is a bottom plan view; and

FIG. 6 is a right side elevational view thereof.

Claims (1)

  1. The ornamental design for an instrument for transferring boats for thermal treatment of semiconductor wafers, as shown and described.
US07301996 1988-07-25 1989-01-25 Instrument for transferring boats for thermal treatment of semiconductor wafers Expired - Lifetime USD323173S (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63-29831 1988-07-25

Publications (1)

Publication Number Publication Date
USD323173S true USD323173S (en) 1992-01-14

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