USD1027120S1 - Seal for an assembly in a vapor deposition chamber - Google Patents

Seal for an assembly in a vapor deposition chamber Download PDF

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Publication number
USD1027120S1
USD1027120S1 US29/762,536 US202029762536F USD1027120S US D1027120 S1 USD1027120 S1 US D1027120S1 US 202029762536 F US202029762536 F US 202029762536F US D1027120 S USD1027120 S US D1027120S
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United States
Prior art keywords
seal
assembly
vapor deposition
deposition chamber
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
US29/762,536
Inventor
Yao-Hung Yang
Eric Ruhland
Saurabh M. Chaudhari
Dien-Yeh Wu
Philip Wayne Nagle
Aniruddha Pal
Sudhir R. Gondhalekar
Siamak Salimian
Scott Lin
Boon Sen CHAN
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Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to US29/762,536 priority Critical patent/USD1027120S1/en
Assigned to APPLIED MATERIALS, INC. reassignment APPLIED MATERIALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: LIN, SCOTT, WU, DIEN-YEH, SALIMIAN, SIAMAK, CHAN, BOON SEN, GONDHALEKAR, SUDHIR R., PAL, ANIRUDDHA, YANG, YAO-HUNG, CHAUDHARI, Saurabh M., NAGLE, PHILIP WAYNE, RUHLAND, ERIC
Priority to TW110303141F priority patent/TWD219455S/en
Priority to JPD2021-13102F priority patent/JP1700651S/ja
Application granted granted Critical
Publication of USD1027120S1 publication Critical patent/USD1027120S1/en
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Description

FIG. 1 is top perspective view of a seal for an assembly in a vapor deposition chamber.
FIG. 2 is a bottom perspective view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 .
FIG. 3 is a top plan view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 .
FIG. 4 is a bottom plan view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 .
FIG. 5 is a front view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 .
FIG. 6 is a rear view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 .
FIG. 7 is a right side view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 .
FIG. 8 is a left side view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 .
FIG. 9 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 showing details of an outer segment of the seal.
FIG. 10 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 showing details of a central segment of the seal.
FIG. 11 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 1 showing details of an outer segment of the seal.
FIG. 12 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 2 showing details of an outer segment of the seal.
FIG. 13 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 3 showing details of a central segment of the seal.
FIG. 14 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 4 showing details of a central segment of the seal.
FIG. 15 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 6 showing details of an outer segment of the seal.
FIG. 16 is an enlarged sectional view of a portion of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 7 showing details of an outer segment of the seal; and,
FIG. 17 is a top plan view of the seal for an assembly in a vapor deposition chamber illustrated in FIG. 3 shown in a portion of an assembly (in phantom).
The broken and phantom lines in the Figures illustrate unclaimed parts of the seal for an assembly in a vapor deposition chamber and form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a seal for an assembly in a vapor deposition chamber, as shown and described.
US29/762,536 2020-12-17 2020-12-17 Seal for an assembly in a vapor deposition chamber Active USD1027120S1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US29/762,536 USD1027120S1 (en) 2020-12-17 2020-12-17 Seal for an assembly in a vapor deposition chamber
TW110303141F TWD219455S (en) 2020-12-17 2021-06-17 Seal in a vapor deposition chamber
JPD2021-13102F JP1700651S (en) 2020-12-17 2021-06-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/762,536 USD1027120S1 (en) 2020-12-17 2020-12-17 Seal for an assembly in a vapor deposition chamber

Publications (1)

Publication Number Publication Date
USD1027120S1 true USD1027120S1 (en) 2024-05-14

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US29/762,536 Active USD1027120S1 (en) 2020-12-17 2020-12-17 Seal for an assembly in a vapor deposition chamber

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US (1) USD1027120S1 (en)
JP (1) JP1700651S (en)
TW (1) TWD219455S (en)

Citations (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002130481A (en) 2000-10-25 2002-05-09 Nippon Valqua Ind Ltd Seal ring
US6435519B1 (en) 1999-05-14 2002-08-20 Patrick Michel White Stress-induced gasket
US6776875B2 (en) 2000-02-28 2004-08-17 Applied Materials Inc. Semiconductor substrate support assembly having lobed o-rings therein
US20060145428A1 (en) * 2004-12-30 2006-07-06 Dudman Richard L Gasket ring with sharp peaks
USD566228S1 (en) * 2007-03-09 2008-04-08 Speakman Company Shower
USD585968S1 (en) * 2008-03-06 2009-02-03 West Coast Washers, Inc. Pipe flashing
US20110076848A1 (en) 2009-06-30 2011-03-31 Amitava Datta Semiconductor process chamber and seal
USD641829S1 (en) * 2010-10-29 2011-07-19 Novellus Systems, Inc. Plasma reactor showerhead face plate having concentric ridge pattern
EP2746626A1 (en) 2011-08-19 2014-06-25 NOK Corporation Sealing structure
US20140366365A1 (en) * 2013-06-14 2014-12-18 Toko, Inc. Process for Producing Surface-Mount Inductor
USD723325S1 (en) * 2013-08-30 2015-03-03 Florian Enghard Mixing element for a food and/or beverage shaker
US9206928B2 (en) * 2012-09-21 2015-12-08 Lake Products Limited Sealing gland
TWD181803S (en) 2015-06-18 2017-03-11 應用材料股份有限公司 Portion of a physical vapor deposition chamber target
CN206573738U (en) 2017-03-16 2017-10-20 江苏亨通光导新材料有限公司 Low loss fiber
EP2981744B1 (en) 2013-04-04 2017-11-01 Federal-Mogul Burscheid GmbH Piston ring having wear indication
TWD191626S (en) 2016-09-30 2018-07-11 應用材料股份有限公司 Target profile for a physical vapor deposition chamber target
TWD197322S (en) 2017-12-11 2019-05-01 美商應用材料股份有限公司 Target profile for a physical vapor deposition chamber target
USD857878S1 (en) * 2017-07-14 2019-08-27 Arthur Blacketer Fan protection screen
US20200025292A1 (en) 2018-07-19 2020-01-23 Applied Materials, Inc. Multinode multi-use o-ring and method for forming a seal
USD936190S1 (en) * 2020-02-27 2021-11-16 Caterpillar Inc. Ripple seal
USD938573S1 (en) * 2019-11-27 2021-12-14 Jiangmen Keye Electric Appliances Manufacturing Co. Ltd Fan grille
TWD223430S (en) 2021-11-25 2023-02-01 日商大王製紙股份有限公司 Bag for packaging
USD980394S1 (en) * 2020-04-01 2023-03-07 Watermann Polyworks Gmbh Sealing apparatus
USD993386S1 (en) * 2020-12-16 2023-07-25 Vornado Air, Llc Fan grill

Patent Citations (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6435519B1 (en) 1999-05-14 2002-08-20 Patrick Michel White Stress-induced gasket
US6776875B2 (en) 2000-02-28 2004-08-17 Applied Materials Inc. Semiconductor substrate support assembly having lobed o-rings therein
JP2002130481A (en) 2000-10-25 2002-05-09 Nippon Valqua Ind Ltd Seal ring
US20060145428A1 (en) * 2004-12-30 2006-07-06 Dudman Richard L Gasket ring with sharp peaks
USD566228S1 (en) * 2007-03-09 2008-04-08 Speakman Company Shower
USD585968S1 (en) * 2008-03-06 2009-02-03 West Coast Washers, Inc. Pipe flashing
US20110076848A1 (en) 2009-06-30 2011-03-31 Amitava Datta Semiconductor process chamber and seal
USD641829S1 (en) * 2010-10-29 2011-07-19 Novellus Systems, Inc. Plasma reactor showerhead face plate having concentric ridge pattern
EP2746626A1 (en) 2011-08-19 2014-06-25 NOK Corporation Sealing structure
US9206928B2 (en) * 2012-09-21 2015-12-08 Lake Products Limited Sealing gland
EP2981744B1 (en) 2013-04-04 2017-11-01 Federal-Mogul Burscheid GmbH Piston ring having wear indication
US20140366365A1 (en) * 2013-06-14 2014-12-18 Toko, Inc. Process for Producing Surface-Mount Inductor
USD723325S1 (en) * 2013-08-30 2015-03-03 Florian Enghard Mixing element for a food and/or beverage shaker
TWD181803S (en) 2015-06-18 2017-03-11 應用材料股份有限公司 Portion of a physical vapor deposition chamber target
TWD191626S (en) 2016-09-30 2018-07-11 應用材料股份有限公司 Target profile for a physical vapor deposition chamber target
CN206573738U (en) 2017-03-16 2017-10-20 江苏亨通光导新材料有限公司 Low loss fiber
USD857878S1 (en) * 2017-07-14 2019-08-27 Arthur Blacketer Fan protection screen
TWD197322S (en) 2017-12-11 2019-05-01 美商應用材料股份有限公司 Target profile for a physical vapor deposition chamber target
US20200025292A1 (en) 2018-07-19 2020-01-23 Applied Materials, Inc. Multinode multi-use o-ring and method for forming a seal
USD938573S1 (en) * 2019-11-27 2021-12-14 Jiangmen Keye Electric Appliances Manufacturing Co. Ltd Fan grille
USD936190S1 (en) * 2020-02-27 2021-11-16 Caterpillar Inc. Ripple seal
USD980394S1 (en) * 2020-04-01 2023-03-07 Watermann Polyworks Gmbh Sealing apparatus
USD993386S1 (en) * 2020-12-16 2023-07-25 Vornado Air, Llc Fan grill
TWD223430S (en) 2021-11-25 2023-02-01 日商大王製紙股份有限公司 Bag for packaging

Non-Patent Citations (7)

* Cited by examiner, † Cited by third party
Title
Cold Smoke Generator, Aug. 12, 2019, amazon.com, Sep. 6, 2023, URL: https://www.amazon.com/kucoolou-Generator-Salmon-Smoking-Smoker/dp/B07FY4TFQG/ (Year: 2023). *
Dovetail o-ring grovoe design, <http://www.sealanddesign.com/page/o-ring-groove-design-dovetail>, retrieved Apr. 18, 2019.
International Search Report and Written Opinion for PCT/US2019/038018, dated Oct. 4, 2019.
Korean Office Action dated Apr. 27, 2022 for Application No. 30-2021-0028891.
Quad rings, <http://standard-rubber.com/quad-rings.htm>, retrieved Apr. 18, 2019.
Taiwan Office Action dated Nov. 15, 2021 for Application No. 110303141.
The Performance Advantages of a Quad-Ring vs. an O-ring, <https://www.gallagherseals.com/blog/the-performance-advantages-of-a-quad-ring-vs-an-o-ring/>, retrieved Apr. 18, 2019.

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Publication number Publication date
TWD219455S (en) 2022-06-21
JP1700651S (en) 2021-11-29

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