US8406038B2 - Semiconductor device - Google Patents
Semiconductor device Download PDFInfo
- Publication number
- US8406038B2 US8406038B2 US13/094,863 US201113094863A US8406038B2 US 8406038 B2 US8406038 B2 US 8406038B2 US 201113094863 A US201113094863 A US 201113094863A US 8406038 B2 US8406038 B2 US 8406038B2
- Authority
- US
- United States
- Prior art keywords
- semiconductor
- transistor
- electrode
- formation region
- channel formation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active, expires
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- 239000004065 semiconductors Substances 0.000 title claims abstract description 259
- 239000000463 materials Substances 0.000 claims abstract description 78
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 75
- 238000005755 formation reactions Methods 0.000 claims abstract description 75
- 239000010410 layers Substances 0.000 claims description 247
- AHKZTVQIVOEVFO-UHFFFAOYSA-N oxide(2-) Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [O-2] AHKZTVQIVOEVFO-UHFFFAOYSA-N 0.000 claims description 110
- 239000003990 capacitor Substances 0.000 claims description 41
- 229910007541 Zn O Inorganic materials 0.000 claims description 21
- 229910052710 silicon Inorganic materials 0.000 claims description 18
- 239000010703 silicon Substances 0.000 claims description 18
- 210000004027 cells Anatomy 0.000 description 78
- 238000010438 heat treatment Methods 0.000 description 43
- 239000000758 substrates Substances 0.000 description 26
- 229910052719 titanium Inorganic materials 0.000 description 24
- 239000010936 titanium Substances 0.000 description 24
- RTAQQCXQSZGOHL-UHFFFAOYSA-N titanium Chemical compound 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- NRTOMJZYCJJWKI-UHFFFAOYSA-N titanium nitride Chemical compound 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[Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound 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O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 229910052814 silicon oxides Inorganic materials 0.000 description 9
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound 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[W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 9
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- 239000010937 tungsten Substances 0.000 description 9
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- 238000010586 diagrams Methods 0.000 description 7
- XCCANNJCMHMXBZ-UHFFFAOYSA-N hydroxyiminosilicon Chemical compound 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ON=[Si] XCCANNJCMHMXBZ-UHFFFAOYSA-N 0.000 description 7
- 229910052751 metals Inorganic materials 0.000 description 7
- 239000011901 water Substances 0.000 description 7
- VCFZGYGRRNTEGX-UHFFFAOYSA-N Hafnium(IV) silicate Chemical compound 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- 239000011241 protective layers Substances 0.000 description 5
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum Chemical compound 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[Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 5
- 229910052715 tantalum Inorganic materials 0.000 description 5
- 239000011701 zinc Substances 0.000 description 5
- 229910001614 zinc oxide Inorganic materials 0.000 description 5
- 239000011787 zinc oxide Substances 0.000 description 5
- QZQVBEXLDFYHSR-UHFFFAOYSA-N Gallium(III) oxide Chemical compound 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O=[Ga]O[Ga]=O QZQVBEXLDFYHSR-UHFFFAOYSA-N 0.000 description 4
- CJNBYAVZURUTKZ-UHFFFAOYSA-N Hafnium(IV) oxide Chemical compound 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O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloys Inorganic materials 0.000 description 4
- 239000000956 alloys Substances 0.000 description 4
- 229910000129 gallium(III) oxide Inorganic materials 0.000 description 4
- 229910000449 hafnium oxide Inorganic materials 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injections Substances 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 229910052748 manganese Inorganic materials 0.000 description 4
- 238000000034 methods Methods 0.000 description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 4
- 230000003334 potential Effects 0.000 description 4
- 238000004151 rapid thermal annealing Methods 0.000 description 4
- VBJZVLUMGGDVMO-UHFFFAOYSA-N Hafnium Chemical compound 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[Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 3
- 229910019092 Mg-O Inorganic materials 0.000 description 3
- 229910019395 Mg—O Inorganic materials 0.000 description 3
- 241000109329 Rosa xanthina Species 0.000 description 3
- SMYKVLBUSSNXMV-UHFFFAOYSA-J aluminum;tetrahydroxide Chemical compound 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[OH-].[OH-].[OH-].[OH-].[Al+3] SMYKVLBUSSNXMV-UHFFFAOYSA-J 0.000 description 3
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic Chemical compound 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- 229910052785 arsenic Inorganic materials 0.000 description 3
- 238000006243 chemical reactions Methods 0.000 description 3
- 229910052803 cobalt Inorganic materials 0.000 description 3
- 230000000875 corresponding Effects 0.000 description 3
- 238000006297 dehydration reactions Methods 0.000 description 3
- 238000006356 dehydrogenation reactions Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000004744 fabrics Substances 0.000 description 3
- 229910052735 hafnium Inorganic materials 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium(0) Chemical compound 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[He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 239000011810 insulating materials Substances 0.000 description 3
- 239000011514 iron Substances 0.000 description 3
- PWHULOQIROXLJO-UHFFFAOYSA-N manganese Chemical compound 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[Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 3
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound 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[O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 3
- RUDFQVOCFDJEEF-UHFFFAOYSA-N oxygen(2-);yttrium(3+) Chemical compound 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[O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N phosphorus Chemical compound 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 N1[Si]O[Si]1 WKODDKLNZNVCSL-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound 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[Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- QEFYFXOXNSNQGX-UHFFFAOYSA-N Neodymium Chemical compound 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[Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 2
- 229910052779 Neodymium Inorganic materials 0.000 description 2
- 210000002381 Plasma Anatomy 0.000 description 2
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- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium(0) Chemical compound 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[Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N boron Chemical compound 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- 229910052804 chromium Inorganic materials 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N chromium Chemical compound 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[Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
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- FYYHWMGAXLPEAU-UHFFFAOYSA-N magnesium Chemical compound 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[Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N molybdenum Chemical compound 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[Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 229910052754 neon Inorganic materials 0.000 description 2
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- QCWXUUIWCKQGHC-UHFFFAOYSA-N zirconium Chemical compound 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[Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
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[C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium Chemical compound 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[Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- 239000011521 glasses Substances 0.000 description 1
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- 150000002367 halogens Chemical class 0.000 description 1
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- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound 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[Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 229910001507 metal halides Inorganic materials 0.000 description 1
- 229910001874 nitric oxide Inorganic materials 0.000 description 1
- 229910052813 nitrogen oxides Inorganic materials 0.000 description 1
- GQPLMRYTRLFLPF-UHFFFAOYSA-N nitrous Oxide Chemical compound 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- 230000007261 regionalization Effects 0.000 description 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium Chemical compound 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[Na] KEAYESYHFKHZAL-UHFFFAOYSA-N 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 230000003068 static Effects 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 229910001887 tin oxides Inorganic materials 0.000 description 1
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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Abstract
Description
1. Field of the Invention
An embodiment of the invention disclosed herein relates to a semiconductor device including a semiconductor element and a manufacturing method of the semiconductor device.
2. Description of the Related Art
Memory devices including semiconductor elements are broadly classified into two categories: volatile memory devices that lose stored data when not powered, and nonvolatile memory devices that hold stored data even when not powered.
A typical example of volatile memory devices is a dynamic random access memory (DRAM). A DRAM stores data in such a manner that a transistor included in a storage element is selected and electric charge is stored in a capacitor.
When data is read from a DRAM, electric charge in a capacitor is lost according to the above-described principle; thus, another write operation is necessary every time data is read out. Moreover, a transistor included in a memory element has leakage current (off-state current) between a source and a drain in an off state or the like and electric charge flows into or out of the transistor even if the transistor is not selected, which makes a data holding period short. For that reason, write operation (refresh operation) is necessary at short intervals, and it is difficult to sufficiently reduce power consumption. Furthermore, since stored data is lost when power supply stops, another memory device utilizing a magnetic material or an optical material is needed in order to hold the data for a long time.
Another example of volatile memory devices is a static random access memory (SRAM). An SRAM holds stored data by using a circuit such as a flip-flop and thus does not need refresh operation, which is an advantage over a DRAM. However, cost per storage capacity is high because a circuit such as a flip-flop is used. Moreover, as in a DRAM, stored data in an SRAM is lost when power supply stops.
A typical example of nonvolatile memory devices is a flash memory. A flash memory includes a floating gate between a gate electrode and a channel formation region in a transistor and stores data by holding charge in the floating gate. Therefore, a flash memory has advantages in that the data holding period is extremely long (semi-permanent) and refresh operation which is necessary to volatile memory devices is not needed (e.g., see Patent Document 1).
However, in a flash memory, there is a problem in that a memory element becomes unable to function after a large number of repeated write operations because a gate insulating layer included in the memory element deteriorates due to tunneling current generated in the write operations. In order to alleviate this problem, a method in which the number of write operations is equalized among memory elements can be employed, for example, but a complex peripheral circuit is needed to realize this method. Moreover, even when such a method is employed, the fundamental problem of lifetime cannot be resolved. In other words, a flash memory is not suitable for applications in which data is frequently rewritten.
In addition, high voltage is necessary in order to inject charge into the floating gate or removing the charge. Furthermore, a circuit for that purpose is required. Moreover, it takes a relatively long time to inject or remove electric charge, and it is not easy to increase the speed of writing or erasing data.
[Reference]
[Patent Document 1] Japanese Published Patent Application No. S57-105889
In view of the foregoing problems, an object of one embodiment of the disclosed invention is to provide a semiconductor device with a novel structure where stored data can be held for a long time even when power is not supplied and where there is no limitation on the number of write cycles.
In one embodiment of the disclosed invention, a semiconductor device is formed using a material with which the off-state current of a transistor can be decreased, such as an oxide semiconductor. A transistor including an oxide semiconductor, particularly a purified oxide semiconductor, has an extremely small off-state current and thus can hold data for a long time. More specifically, the following structures can be employed, for example.
An embodiment of the disclosed invention is a semiconductor device which includes a plurality of memory cells including a first transistor and a second transistor, a reading circuit including an amplifier circuit and a switch element, and a refresh control circuit. The first transistor includes a first channel formation region, a first gate electrode, a first gate insulating layer between the first channel formation region and the first gate electrode, and a first source electrode and a first drain electrode electrically connected to the first channel formation region. The second transistor includes a second channel formation region, a second gate electrode, a second gate insulating layer between the second channel formation region and the second gate electrode, and a second source electrode and a second drain electrode electrically connected to the second channel formation region. The first channel formation region and the second channel formation region contain different materials as their respective main components. The first gate electrode is electrically connected to one of the second source electrode and the second drain electrode. The other of the second source electrode and the second drain electrode is electrically connected to one of input terminals of the amplifier circuit. An output terminal of the amplifier circuit is connected to the other of the second source electrode and the second drain electrode through the switch element. The refresh control circuit is configured to control whether the switch element is turned on or off.
The above semiconductor device may include a capacitor electrically connected to the first gate electrode. The refresh control circuit may have a function to turn on the switch element in accordance with the refresh timing for the memory cells. The refresh timing may be at a frequency of once every 103 or more seconds per memory cell (in other words, the refreshing may occur every 103 or more seconds).
In the above semiconductor device, the second channel formation region may contain a material having a wider band gap than a material contained in the first channel formation region. The first channel formation region may contain a material capable of increasing operation speed, and the second channel formation region may contain a material capable of decreasing off-state current. For example, in the above semiconductor device, the first channel formation region may include silicon as a main component, and the second channel formation region may contain an In—Ga—Zn—O-based oxide material.
Note that the term “main component” used in this specification and the like refers to a component whose content is the highest (at. %). For example, it can be said that the main component of a so-called silicon wafer is silicon.
Note that in this specification and the like, the term such as “over” or “below” does not necessarily mean that a component is placed “directly on” or “directly under” another component. For example, the expression “a gate electrode over a gate insulating layer” can mean the case where there is an additional component between the gate insulating layer and the gate electrode. Moreover, the terms such as “over” and “below” are used simply for convenience of explanation.
In addition, in this specification and the like, the term such as “electrode” or “wiring” does not limit a function of a component. For example, an “electrode” is sometimes used as part of a “wiring”, and vice versa. In addition, the term “electrode” or “wiring” can also mean a combination of a plurality of “electrodes” and “wirings”, for example.
Functions of a “source” and a “drain” are sometimes replaced with each other when a transistor of opposite polarity is used or when the direction of current flowing is changed in circuit operation, for example. Therefore, the terms “source” and “drain” can be replaced with each other in this specification.
Note that in this specification and the like, the term “electrically connected” includes the case where components are connected through an “object having any electric function”. There is no particular limitation on an “object having any electric function” as long as electric signals can be transmitted and received between components that are connected through the object. Examples of an “object having any electric function” are a switching element such as a transistor, a resistor, an inductor, a capacitor, and an element with a variety of functions as well as an electrode and a wiring.
A semiconductor device according to one embodiment of the present invention does not require high voltage for writing data, and degradation of the element does not become a problem. For example, since there is no need to perform injection of electrons to a floating gate and extraction of electrons from the floating gate which are needed in a conventional nonvolatile memory, deterioration of a gate insulating layer does not occur. That is, the semiconductor device according to one embodiment of the present invention does not have a limit on the number of rewriting, which has been a problem of a conventional nonvolatile memory, and thus has significantly improved reliability. Furthermore, since data is written by turning on or off the transistor, high-speed operation can be easily realized. In addition, there is no need of operation for erasing data.
In particular, by forming the first channel formation region and the second channel formation region using different materials as their respective main components, a semiconductor device having highly excellent characteristics can be realized. For example, by using a material capable of increasing operation speed for the first channel formation region and using a material capable of decreasing off-state current for the second channel formation region, a semiconductor device having an unprecedented feature can be realized.
Examples of embodiments of the present invention will be described below with reference to the drawings. Note that the present invention is not limited to the following description and it will be readily appreciated by those skilled in the art that the modes and details of the present invention can be modified in various ways without departing from the spirit and the scope thereof. Therefore, the present invention should not be interpreted as being limited to the description in the following embodiments.
Note that the position, size, range, or the like of each component illustrated in drawings and the like is not accurately represented in some cases for easy understanding. Therefore, the disclosed invention is not necessarily limited by the position, size, range, or the like as disclosed in the drawings and the like.
Note that ordinal numbers such as “first”, “second”, and “third” in this specification and the like are used in order to avoid confusion among components, and the terms do not limit the components numerically.
In this embodiment, a basic circuit configuration and an operation of a semiconductor device according to one embodiment of the disclosed invention will be described with reference to
In a semiconductor device illustrated in
Here, for example, a transistor including an oxide semiconductor is used as the transistor 162. A transistor including an oxide semiconductor, particularly a purified oxide semiconductor, has a characteristic of a significantly small off-state current. For that reason, a potential of the gate electrode of the transistor 160 can be held for an extremely long period by turning off the transistor 162. By providing the capacitor 164, holding of charge applied to the gate electrode of the transistor 160 and reading of data held can be performed more easily.
Note that there is no particular limitation on the structure of the transistor 160 and the like. In terms of increasing the speed of reading data, it is preferable to use a transistor with high switching speed such as a transistor formed using single crystal silicon, for example.
Alternatively, a structure in which the capacitor 164 is not provided is also possible as illustrated in
The semiconductor device in
First of all, writing and holding of data will be described. First, the potential of the fourth wiring is set to a potential at which the transistor 162 is turned on, so that the transistor 162 is turned on. Accordingly, the potential of the third wiring is supplied to the gate electrode of the transistor 160 and to the capacitor 164. That is, predetermined charge is supplied to the gate electrode of the transistor 160 (writing). Here, one of two kinds of charges providing different potentials (hereinafter, a charge providing a low potential is referred to as charge QL and a charge providing a high potential is referred to as charge QH) is applied through the third wiring. Note that charges providing three or more different potentials may be applied to improve storage capacity.
After that, the potential of the fourth wiring is set to a potential at which the transistor 162 is turned off, so that the transistor 162 is turned off. Thus, the charge supplied to the gate electrode of the transistor 160 is held (holding). Since the off-state current of the transistor 162 is significantly small, the charge of the gate electrode of the transistor 160 is held for a long time.
Next, reading of data will be described. When an appropriate potential (a reading potential) is supplied to the fifth wiring while a predetermined potential (a constant potential) is supplied to the first wiring, the potential of the second wiring varies depending on the amount of charge held at the gate electrode of the transistor 160. This is because, in general, when the transistor 160 is an n-channel transistor, an apparent threshold voltage Vth
Note that in the case where memory cells are arrayed to be used, it is necessary that data of only a desired memory cell can be read. In order to read data of a predetermined memory cell and not to read data of the other memory cells, in the case where the transistors 160 of the memory cells are connected in parallel, fifth wirings in memory cells that are not a target for reading are supplied with a potential at which the transistors 160 are turned off regardless of the state of the gate electrodes, that is, a potential lower than Vth
Next, rewriting of data will be described. Rewriting of data is performed in a manner similar to that of the writing and holding of data. That is, the potential of the fourth wiring is set to a potential at which the transistor 162 is turned on, so that the transistor 162 is turned on. Accordingly, the potential of the third wiring (a potential for new data) is supplied to the gate electrode of the transistor 160 and to the capacitor 164. After that, the potential of the fourth wiring is set to a potential at which the transistor 162 is turned off, so that the transistor 162 is turned off. Accordingly, charge for new data is held at the gate electrode of the transistor 160.
In the semiconductor device according to one embodiment of the disclosed invention, data can be directly rewritten by overwriting data as described above. Therefore, extraction of charge from a floating gate with the use of a high voltage which is necessary for a flash memory or the like is not needed, and thus a decrease in operation speed due to erase operation can be suppressed. In other words, high-speed operation of the semiconductor device can be realized. Further, in that case, the problem of deterioration of a gate insulating film (tunnel insulating film), which is a problem of a conventional floating gate transistor, does not exist. That is, the problem of deterioration of a gate insulating film due to injection of electrons into a floating gate, which is a conventional problem, can be solved. This means that there is no limit on the number of write cycles in principle.
Note that the source electrode or the drain electrode of the transistor 162 is electrically connected to the gate electrode of the transistor 160 and therefore has a function similar to that of a floating gate of a floating gate transistor used for a nonvolatile memory element. Therefore, in drawings, a portion where the source electrode or the drain electrode of the transistor 162 is electrically connected to the gate electrode of the transistor 160 is called a node FG in some cases. When the transistor 162 is turned off, the node FG can be regarded as being embedded in an insulator and thus charge is held at the node FG The off-state current of the transistor 162 including an oxide semiconductor is smaller than or equal to 1/100000 of the off-state current of a transistor including a silicon semiconductor or the like; thus, loss of the charge accumulated in the node FG due to leakage in the transistor 162 is negligible. That is, with the transistor 162 including an oxide semiconductor, a substantially nonvolatile memory device which can store data without being supplied with power can be realized.
For example, when the off-state current of the transistor 162 at room temperature (25° C.) is 10 zA (1 zA (zeptoampere) is 1×10−21 A) or less and the capacitance of the capacitor 164 is approximately 10 fF, data can be held for 104 seconds or longer. It is needless to say that the holding time depends on transistor characteristics and capacitance.
Components such as transistors in the semiconductor device in
A charge holding period (also referred to as a data holding period) is determined mainly by the off-state current of the transistor 162 under the conditions where the gate leakage current of the transistor 162 is sufficiently small and R1 and R2 satisfy R1≧ROS and R2≧ROS, where ROS is the resistance (also referred to as effective resistance) between the source electrode and the drain electrode in a state where the transistor 162 is turned off.
On the other hand, in the case where the above conditions are not satisfied, it is difficult to secure a sufficient holding period even if the off-state current of the transistor 162 is sufficiently small. This is because a leakage current other than the off-state current of the transistor 162 (e.g., a leakage current generated between the source electrode and the gate electrode of the transistor 160) is large. Accordingly, it can be said that the semiconductor device disclosed in this embodiment preferably satisfies the above relationships.
Meanwhile, it is desirable that C1 and C2 satisfy C1≧C2. This is because if C1 is large, when the potential of the node FG is controlled by the fifth wiring, the potential of the fifth wiring can be efficiently supplied to the node FG and the difference between potentials supplied to the fifth wiring (e.g., a reading potential and a non-reading potential) can be kept small.
When the above relationships are satisfied, a more favorable semiconductor device can be realized. Note that R1 and R2 depend on the gate insulating layer of the transistor 160 and the insulating layer of the capacitor 164. The same applies to C1 and C2. Therefore, the material, the thickness, and the like of the gate insulating layer are preferably set as appropriate to satisfy the above relationships.
In the semiconductor device described in this embodiment, the node FG has a function similar to a floating gate of a floating gate transistor of a flash memory or the like, but the node FG of this embodiment has a feature which is essentially different from that of the floating gate of the flash memory or the like. In the case of a flash memory, since a high voltage is applied to a control gate, it is necessary to keep a proper distance between cells in order to prevent the potential of the control gate from affecting a floating gate of an adjacent cell. This is one factor inhibiting higher integration of the semiconductor device. The factor is attributed to a basic principle of a flash memory, in which a tunneling current is generated by applying a high electric field.
On the other hand, the semiconductor device according to this embodiment is operated by switching of a transistor including an oxide semiconductor and does not use the above-described principle of charge injection by a tunneling current. That is, a high electric field for charge injection is not necessary, unlike a flash memory. Accordingly, it is not necessary to consider an influence of a high electric field from a control gate on an adjacent cell, and this facilitates higher integration.
In addition, the semiconductor device according to this embodiment is advantageous over a flash memory also in that a high electric field is not necessary and a large peripheral circuit (such as a step-up circuit) is not necessary. For example, the highest voltage applied to the memory cell according to this embodiment (the difference between the highest potential and the lowest potential applied to respective terminals of the memory cell at the same time) can be 5 V or less, preferably 3 V or less, in each memory cell in the case where two-level (one-bit) data is written.
Note that in addition to the increase in the degree of integration, a multilevel technique can be employed to increase the storage capacity of the semiconductor device. For example, three or more levels of data are written to one memory cell, whereby the storage capacity can be increased as compared to the case where two-level data is written. The multilevel technique can be achieved by, for example, supplying charge Q providing a potential to the gate electrode of the transistor 160, in addition to charge QL providing a low potential and charge QH providing a high potential as described above. In this case, enough storage capacity can be ensured even in a circuit structure where the area occupied by a memory cell cannot be sufficiently decreased.
Note that an n-type transistor (n-channel transistor) in which electrons are majority carriers is used in the above description; it is needless to say that a p-type transistor (p-channel transistor) in which holes are majority carriers can be used instead of the n-type transistor.
The structures, methods, and the like described in this embodiment can be combined as appropriate with any of the structures, methods, and the like described in the other embodiments.
In this embodiment, an example of application of the semiconductor device described in the above embodiment will be described. Specifically, an example of a semiconductor device including a plurality of semiconductor devices described in the above embodiment will be described with reference to
<Circuit Configuration of Semiconductor Device>
The semiconductor device according to one embodiment of the present invention includes a memory cell array 1100, a reading circuit 1102, a first driver circuit 1104, a second driver circuit 1106, a refresh control circuit 1110, a command control circuit 1112, an address control circuit 1114, and a divider circuit 1116 (see
The memory cell array 1100 is a data storage region. The reading circuit 1102 is electrically connected to the memory cell array 1100 and functions to read data from the memory cell array 1100 and output the data as a data signal OUTPUT to the outside. The reading circuit 1102 also functions to refresh the memory cell array 1100. The first driver circuit 1104 is electrically connected to the memory cell array 1100 through the reading circuit 1102, and the second driver circuit 1106 is electrically connected to the memory cell array 1100. The command control circuit 1112 outputs a signal based on a first clock signal PRE_CLK, a write enable signal WE, and an output enable signal OE to the reading circuit 1102, the refresh control circuit 1110, the address control circuit 1114, and the like. The divider circuit 1116 supplies a second clock signal CLK based on the first clock signal PRE_CLK to the refresh control circuit 1110. The refresh control circuit 1110 supplies a signal related to refresh timing, which is based on the signal from the command control circuit 1112 and the second clock signal CLK from the divider circuit 1116, to the address control circuit 1114. The address control circuit 1114 supplies a signal based on the signal from the refresh control circuit 1110, the signal from the command control circuit 1112, and the address signal ADDR to the first driver circuit 1104 and the second driver circuit 1106. Then, in accordance with that signal, the first driver circuit 1104 and the second driver circuit 1106 specify an address for data writing, reading, and the like.
The memory cell array 1100 is a memory cell array with m rows and n columns and includes semiconductor devices each corresponding to
Each of the memory cells 1200 includes a first transistor, a second transistor, and a capacitor. In each of the memory cells 1200, a gate electrode of the first transistor, one of a source electrode and a drain electrode of the second transistor, and one of electrodes of the capacitor are electrically connected to each other, and the source line and a source electrode (a source region) of the first transistor are electrically connected to each other. Furthermore, the bit line, the other of the source electrode and the drain electrode of the second transistor, and a drain electrode of the first transistor are electrically connected to each other. The word line and the other of the electrodes of the capacitor are electrically connected to each other. The signal line and the gate electrode of the second transistor are electrically connected to each other. In other words, the source line corresponds to the first wiring (1st Line) in the configuration illustrated in
The reading circuit 1102 includes n amplifier circuits 1204 and n switch elements 1206 (see
Details of the above reading circuit 1102 are illustrated in
Details of the refresh control circuit 1110 and circuits related to the refresh control circuit 1110 are illustrated in
Note that the disclosed invention should not be construed as being limited to the above-described specific configurations of the refresh control circuit 1110 and the like.
<Operation 1 of Semiconductor Device>
Next, an example of write, read, and refresh operations of the above-described semiconductor device will be described. Note that the operation of the semiconductor device which includes a memory cell array with two rows and two columns is described here for easy understanding; the disclosed invention is not limited to this structure.
Writing data to the memory cell 1200 (1,1) in the first row and the first column and the memory cell 1200 (1,2) in the first row and the second column and reading data from the memory cell 1200 (1,1) in the first row and the first column and the memory cell 1200 (1,2) in the first row and the second column will be described. Note that data written to the memory cell 1200 (1,1) is “1” and data written to the memory cell 1200 (1,2) is “0” in the following description.
Writing will be described. First, a potential V1 is supplied to the signal line S_1 in the first row, whereby the second transistors in the first row are turned on. Further, a potential of 0 V is supplied to the signal line S_2 in the second row, whereby the second transistors in the second row are turned off. Further, a potential V2 is supplied to the bit line BL_1 in the first column, and the potential of 0 V is supplied to the bit line BL_2 in the second column. As a result, a potential V2 and a potential of 0 V are supplied to the node FG of the memory cell 1200 (1,1) and the node FG of the memory cell 1200 (1,2), respectively. When read operation is performed here, the potential V2 is set so as to generate a potential difference which is larger than the threshold voltage of the first transistor. It is preferable that the potential V2 be substantially equal to the potential V1 or lower than or equal to the potential V1.
Then, the potential of the signal line S_1 in the first row is set to 0 V, whereby the second transistors in the first row are turned off; thus, writing is completed. Note that the word line WL_1 in the first row and the word line WL_2 in the second row are at a potential of 0 V during the write operation. At the end of the write operation, before the potential of the bit line BL_1 in the first column is changed, the potential of the signal line S_1 in the first row is set to 0 V.
After the write operation, the threshold value of a memory cell is Vw0 in the case where data “0” has been written and Vw1 in the case where data “1” has been written.
Here, the threshold value of the memory cell means the potential of the word line WL, which changes resistance between the source electrode and the drain electrode of the first transistor. Note that Vw0>0>Vw1 is satisfied here.
Next, the read operation will be described. The potential 0 V and the potential VL are supplied to the word line WL_1 in the first row and the word line WL_2 in the second row, respectively. The potential VL is lower than the threshold value Vw1. When the word line WL_1 is at a potential of 0 V, in the first row, the first transistor of the memory cell in which data “0” is held is turned off, and the first transistor of the memory cell in which data “1” is held is turned on. When the word line WL_2 is at the potential
VL, in the second row, the first transistors of the memory cells in which either data “0” or data “1” is held are turned off.
As a result, the resistance between the bit line BL_1 and the source line SL is low because the first transistor in the memory cell 1200 (1,1) is on, and the resistance between the bit line BL_2 and the source line SL is high because the first transistor in the memory cell 1200 (1,2) is off. The reading circuit connected to the bit line BL_1 and the bit line BL_2 can read data on the basis of a difference in resistance among the bit lines.
Note that, during the read operation, the potential of 0 V and the potential VL are supplied to the signal line S_1 and the signal line S_2, respectively, whereby all the second transistors are off. The potential of the node FG of each memory cell in the first row is 0 V or V2; thus, all the second transistors can be turned off by setting the potential of the signal line S_1 to 0 V. On the other hand, when the potential VL is supplied to the word line WL_2, the potential of the nodes FG in the second row becomes lower than the potential right after data writing. Therefore, in order to prevent the second transistors from being turned on, the signal line S_2 is set at the potential (the potential VL) as that of the word line WL_2. That is, the potentials of the signal line S and the word line WL in the row where data is not read are set to the same potential (the potential VL). Thus, all the second transistors can be turned off.
In the case where the circuit illustrated in
Next, an example of refresh operation will be described. Note that the semiconductor device according to one embodiment of the disclosed invention can hold data for a significantly long time; thus, the frequency of refresh operation is 1/1000 or less, preferably 1/10000 or less, of that of a typical DRAM or the like, for example. Specifically, in the semiconductor device according to one embodiment of the disclosed invention, it is possible that the refresh operation per memory cell be performed every 103 or more seconds, preferably every 104 or more seconds. Therefore, the semiconductor device according to one embodiment of the disclosed invention can sufficiently suppress power consumption resulting from refresh operation.
First, the switch element 1202 of the bit line BL connected to the memory cell 1200 that is a target for refreshing is turned on, and the bit line BL is precharged. Note that although the bit line BL is precharged here using a wiring which is separate from the reading circuit, the bit line BL may be precharged from the reading circuit 1102 side by using a wiring shared with the reading circuit 1102. For example, in the case where the circuit illustrated in
Next, the switch element 1202 is turned off, and the bit line BL is set floating. In this state, a potential at which the second transistor of the memory cell 1200 that is the target for refreshing is turned on is supplied to the signal line connected to the memory cell 1200 that is the target for refreshing. Then, the potential of the bit line changes depending on the amount of charge held at the node FG The amplifier circuit 1204 of the reading circuit 1102 amplifies this change and outputs a potential of 0 V or the potential V2.
Here, when the switch element 1206 for connecting the output terminal of the amplifier circuit 1204 and the bit line is turned on, the potential of 0 V or the potential V2 is supplied to the bit line. Because the second transistor of the memory cell 1200 that is the target for refreshing is on, the same data is written again to the memory cell 1200 that is the target for refreshing, in accordance with the charge held at the node FG.
<Operation 2 of Semiconductor Device>
Next, another example of operation of the semiconductor device will be described. Note that the operation of the semiconductor device, which includes a memory cell array with two rows and two columns, is described here for easy understanding. The data to be written is the same as that in the above write operation.
In the write operation described in <Operation 1 of Semiconductor Device>(i.e., writing to the first row), the potential of the word line WL_2 at the time of writing is set to a potential of 0 V; thus, for example, in the case where data which has been written to the memory cell 1200 (2,1) or the memory cell 1200 (2,2) is data “1”, steady-state current might flow between the bit line BL_1 and the bit line BL_2. This is because at the time of the writing to the first row, the first transistors in the memory cells in the second row are turned on, whereby the bit line BL_1 and the bit line BL_2 are connected at low resistance through the source line. In the write operation described here, such steady-state current is less likely to be generated.
First, a potential V1 is supplied to the signal line S_1 in the first row, whereby the second transistors in the first row are turned on. Further, a potential of 0 V is supplied to the signal line S_2 in the second row, whereby the second transistors in the second row are turned off. Further, a potential V2 is supplied to the bit line BL_1 in the first column, and the potential of 0 V is supplied to the bit line BL_2 in the second column. As a result, the potential V2 and the potential of 0 V are supplied to the node FG of the memory cell 1200 (1,1) and the node FG of the memory cell 1200 (1,2), respectively. Here, the potential V2 is set so as to generate a potential difference which is larger than the threshold voltage of the first transistor. Then, the potential of the signal line S_1 in the first row is set to 0 V, whereby the second transistors in the first row are turned off; thus, writing is completed.
Note that the word line WL_1 in the first row and the word line WL_2 in the second row are at the potential of 0 V and the potential VL, respectively, during the write operation. When the word line WL_2 in the second row is at the potential VL, in the second row, the first transistors of the memory cells in which either data “0” or data “1” is held are turned off. Further, the potential V2 is supplied to the source line SL during the write operation. In the case where all the written data are data “0”, a potential of 0 V may be supplied to the source line.
At the end of the write operation, before the potential of the bit line BL_1 in the first column is changed, the potential of the signal line S_1 in the first row is set to 0 V. After the write operation, the threshold value of a memory cell is Vw0 in the case where data “0” has been written and Vw1 in the case where data “1” has been written. Note that Vw0>0>Vw1 is satisfied here.
In the write operation, the first transistors in the memory cells in the row to which data is not written (in this case, the second row) are off. Thus, only the memory cells in the row to which data is written have a problem with steady-state current between the bit line and the source line. In the case where data “0” is written to the memory cell of the row to which data is written, the first transistor in the memory cell is off; thus, the problem of steady-state current does not arise. On the other hand, in the case where data “1” is written to the memory cell of the row to which data is written, the first transistor in the memory cell is on; thus, steady-state current is generated if there is a potential difference between the source line SL and the bit line BL (in this case, the bit line BL_1). The potential of the source line SL is thus set equal to the potential V2 of the bit line BL_1, whereby steady-state current between the bit line and the source line can be prevented.
As described above, generation of steady-state current at the time of writing can be prevented in the write operation. In other words, power consumed at the time of the write operation can be sufficiently reduced in the above write operation.
Note that the read operation and the refresh operation are performed in a manner similar to those of the above read operation and refresh operation.
With the use of a material capable of decreasing off-state current, such as an oxide semiconductor, stored data can be held for a significantly long time. Accordingly, the frequency of refresh operation can be drastically lowered, and therefore, power consumption can be sufficiently reduced. Moreover, stored data can be held for a long time even in a situation where power is not supplied.
The above-described semiconductor device does not require high voltage for writing data and does not have the problem of degradation of the element. Therefore, there is no limitation on the number of times data can be rewritten, which is a problem of a conventional nonvolatile memory, and the reliability thereof is drastically improved. Furthermore, since data is written by turning on or off the transistor, high-speed operation can be easily realized. Additionally, there is an advantage in that operation for erasing data is not needed.
With the use of a transistor containing a semiconductor material capable of realizing high-speed operation in combination with a transistor containing a semiconductor material capable of decreasing off-state current, a semiconductor device can perform operations (e.g., data read operation) at sufficiently high speed. Further, a transistor containing a semiconductor material capable of realizing high-speed operation can favorably realize a variety of circuits (e.g., a logic circuit or a driver circuit) which needs to be able to operate at high speed.
The structures, methods, and the like described in this embodiment can be combined as appropriate with any of the structures, methods, and the like described in the other embodiments.
In this embodiment, a structure and a manufacturing method of a semiconductor device according to one embodiment of the present invention will be described with reference to
<Cross-sectional Structure and Planar Structure of Semiconductor Device>
Although both of the above transistors are n-channel transistors in the following description, it is needless to say that p-channel transistors can be used. Since the technical nature of the disclosed invention is to use a semiconductor material with which off-state current can be sufficiently decreased, such as an oxide semiconductor, in the transistor 162 so that data can be stored, it is not necessary to limit a specific structure of the semiconductor device, such as a material of the semiconductor device or a structure of the semiconductor device, to the structure described here.
The transistor 160 in
An electrode 126 is connected to part of the metal compound region 124 of the transistor 160. Here, the electrode 126 functions as a source electrode or a drain electrode of the transistor 160. Further, an element isolation insulating layer 106 is formed over the substrate 100 so as to surround the transistor 160, and an insulating layer 128 is formed to cover the transistor 160. Note that in order to realize higher integration, the transistor 160 preferably has a structure without a sidewall insulating layer as illustrated in
The transistor 162 illustrated in
Here, the oxide semiconductor layer 144 is preferably an oxide semiconductor layer which is purified by sufficiently removing an impurity such as hydrogen therefrom or by sufficiently supplying oxygen thereto. The carrier concentration of the oxide semiconductor layer 144, in which hydrogen is reduced to a sufficiently low concentration so that the oxide semiconductor layer is purified and in which defect states in an energy gap due to oxygen deficiency are reduced by sufficiently supplying oxygen, is less than 1×1012/cm3, preferably less than 1×1011/cm3, more preferably less than 1.45×1010/cm3. For example, the off-state current (per unit channel width (1 μm), here) at room temperature (25° C.) is 10 zA (1 zA (zeptoampere) is 1×10−21 A) or less, preferably 1 zA or less. In this manner, by using an i-type (intrinsic) or substantially i-type oxide semiconductor, the transistor 162 which has extremely favorable off-state current characteristics can be obtained.
A capacitor 164 in
In the capacitor 164 of
In the structure described in this embodiment, the transistor 160 and the transistor 162 are provided so as to at least partly overlap each other. In addition, the transistor 162 and the capacitor 164 are provided so as to overlap with the transistor 160. For example, the electrode 149 of the capacitor 164 is provided to overlap with at least part of the gate electrode 148 of the transistor 162. Further, the electrode 149 of the capacitor 164 may be provided to overlap with at least part of the gate electrode 110 of the transistor 160. By employing such a planar layout, high integration can be realized. For example, given that the minimum feature size is F, the area occupied by a memory cell can be approximately 9 F2 to 25 F2.
The insulating layer 150 is provided so as to cover the gate electrode 148, an insulating layer 151 is provided over the transistor 162 and the capacitor 164, and an insulating layer 152 is provided over the insulating layer 151. An electrode 154 is provided in an opening formed in the gate insulating layer 146, the insulating layer 150, the insulating layer 151, the insulating layer 152, and the like, and a wiring 156 is formed over the insulating layer 152 and connected to the electrode 154. The wiring 156 electrically connects one memory cell to another memory cell. Although the metal compound region 124, the source or drain electrode 142 b, and the wiring 156 are connected by the electrode 126 and the electrode 154 in
Note that in
<Method for Manufacturing Semiconductor Device>
Next, an example of a method for manufacturing the semiconductor device will be described. First, a method for manufacturing the transistor 160 in the lower portion will be described below with reference to
<Method for Manufacturing Transistor in Lower Portion>
First, the substrate 100 containing the first semiconductor material is prepared (see
Note that it is preferable that a single crystal semiconductor substrate of silicon or the like be particularly used as the substrate 100 containing the first semiconductor material because the speed of read operation of the semiconductor device can be increased.
A protective layer 102 serving as a mask for forming an element isolation insulating layer is formed over the substrate 100 (see
Next, part of the substrate 100 in a region not covered with the protective layer 102 (i.e., in an exposed region) is removed by etching using the protective layer 102 as a mask. Thus, a semiconductor region 104 isolated from the other semiconductor regions is formed (see
Then, an insulating layer is formed so as to cover the semiconductor region 104, and the insulating layer in a region overlapping with the semiconductor region 104 is selectively removed; thus, the element isolation insulating layer 106 is formed (see FIG. 6C). The insulating layer is formed using silicon oxide, silicon nitride, silicon oxynitride, or the like. As a method for removing the insulating layer, any of etching treatment, polishing treatment such as chemical mechanical polishing (CMP), and the like can be employed. Note that the protective layer 102 is removed after the formation of the semiconductor region 104 or after the formation of the element isolation insulating layer 106.
The CMP treatment is a method for planarizing a surface of an object to be processed by a combination of chemical and mechanical actions. More specifically, the CMP treatment is a method in which a polishing cloth is attached to a polishing stage, the polishing stage and an object to be processed are each rotated or swung while a slurry (an abrasive) is supplied between the object to be processed and the polishing cloth, and the surface of the object to be processed is polished by a chemical reaction between the slurry and the surface of the object to be processed and by a mechanical polishing action of the polishing cloth on the object to be processed.
Note that as a method for forming the element isolation insulating layer 106, a method in which an insulating region is formed by introduction of oxygen, or the like can be used instead of the method in which the insulating layer is selectively etched.
Next, an insulating layer is formed over a surface of the semiconductor region 104, and a layer including a conductive material is formed over the insulating layer.
The insulating layer is processed into a gate insulating layer later and can be formed by, for example, heat treatment (thermal oxidation treatment, thermal nitridation treatment, or the like) of the surface of the semiconductor region 104. Instead of heat treatment, high-density plasma treatment may be employed. The high-density plasma treatment can be performed using, for example, a mixed gas of any of a rare gas such as He, Ar, Kr, or Xe, oxygen, nitrogen oxide, ammonia, nitrogen, hydrogen, and the like. It is needless to say that the insulating layer may be formed by a CVD method, a sputtering method, or the like. The insulating layer preferably has a single-layer structure or a stacked-layer structure with a film including silicon oxide, silicon oxynitride, silicon nitride, hafnium oxide, aluminum oxide, tantalum oxide, yttrium oxide, hafnium silicate (HfSixOy (x>0, y>0)), hafnium silicate (HfSixOy (x>0, y>0)) to which nitrogen is added, hafnium aluminate (HfAlxOy (x>0, y>0)) to which nitrogen is added, or the like. The insulating layer can have a thickness of 1 nm to 100 nm, preferably, 10 nm to 50 nm, for example.
The layer including a conductive material can be formed using a metal material such as aluminum, copper, titanium, tantalum, or tungsten. The layer including a conductive material may be formed using a semiconductor material such as polycrystalline silicon. There is no particular limitation on the method for forming the layer including a conductive material, and a variety of film formation methods such as an evaporation method, a CVD method, a sputtering method, or a spin coating method can be employed. Note that this embodiment shows an example of the case where the layer including a conductive material is formed using a metal material.
After that, the insulating layer and the layer including a conductive material are selectively etched; thus, the gate insulating layer 108 and the gate electrode 110 are formed (see
Next, phosphorus (P), arsenic (As), or the like is added to the semiconductor region 104, whereby the channel formation region 116 and the impurity regions 120 are formed (see
Note that a sidewall insulating layer may be formed around the gate electrode 110, and impurity regions to which the impurity element is added at a different concentration may be formed.
Next, a metal layer 122 is formed so as to cover the gate electrode 110, the impurity regions 120, and the like (see
Next, heat treatment is performed so that the metal layer 122 reacts with the semiconductor material. Thus, the metal compound regions 124 that are in contact with the impurity regions 120 are formed (see
As the heat treatment, irradiation with a flash lamp can be employed, for example. Although it is needless to say that another heat treatment method may be used, a method by which heat treatment can be achieved in an extremely short time is preferably used in order to improve the controllability of chemical reaction for formation of the metal compound. Note that the metal compound regions are formed by reaction of the metal material and the semiconductor material and have sufficiently high conductivity. The formation of the metal compound regions can properly reduce the electric resistance and improve element characteristics. Note that the metal layer 122 is removed after the metal compound regions 124 are formed.
Next, the electrode 126 is formed in a region in contact with part of the metal compound region 124 (see
Alternatively, the electrode 126 can be formed by forming an opening reaching the metal compound region 124 in the insulating layer 128 after the formation of the insulating layer 128 and then by filling the opening.
In such a case, for example, it is possible to employ a method in which a thin titanium film is formed by a PVD method and a thin titanium nitride film is formed by a CVD method in a region including the opening, and then a tungsten film is formed so as to fill the opening. Here, the titanium film formed by a PVD method functions to reduce an oxide film (e.g., a natural oxide film) formed on a surface where the titanium film is formed, and to decrease the contact resistance with a lower electrode or the like (here, the metal compound region 124). The titanium nitride film formed after the formation of the titanium film has a bather function for suppressing diffusion of the conductive material. A copper film may be formed by a plating method after the formation of a barrier film of titanium, titanium nitride, or the like.
Next, the insulating layer 128 is formed so as to cover the components formed in the above steps (see
Through the above steps, the transistor 160 is formed with the use of the substrate 100 containing the first semiconductor material (see
After that, as treatment performed before the transistor 162 and the capacitor 164 are formed, CMP treatment of the insulating layer 128 is performed so that upper surfaces of the gate electrode 110 and the electrode 126 are exposed (see
Note that before or after each of the above steps, a step of forming an electrode, a wiring, a semiconductor layer, an insulating layer, or the like may be further performed. For example, when the wiring has a multi-layer structure of a stacked-layer structure including insulating layers and conductive layers, a highly integrated semiconductor device can be realized.
<Method for Manufacturing Transistor in Upper Portion>
Next, a conductive layer is formed over the gate electrode 110, the electrode 126, the insulating layer 128, and the like, and the source or drain electrode 142 a and the source or drain electrode 142 b are formed by selectively etching the conductive layer (see
The conductive layer can be formed by a PVD method such as a sputtering method, or a CVD method such as a plasma CVD method. As a material of the conductive layer, an element selected from aluminum, chromium, copper, tantalum, titanium, molybdenum, and tungsten, an alloy including any of these elements as a component, or the like can be used. A material including one of manganese, magnesium, zirconium, beryllium, neodymium, and scandium or a combination of a plurality of these elements may be used.
The conductive layer may have a single-layer structure or a stacked-layer structure including two or more layers. For example, the conductive layer may have a single-layer structure of a titanium film or a titanium nitride film, a single-layer structure of an aluminum film including silicon, a two-layer structure in which a titanium film is stacked over an aluminum film, a two-layer structure in which a titanium film is stacked over a titanium nitride film, a three-layer structure in which a titanium film, an aluminum film, and a titanium film are stacked in this order, or the like. Note that the conductive layer having a single-layer structure of a titanium film or a titanium nitride film has an advantage in that it can be easily processed into the source or drain electrode 142 a and the source or drain electrode 142 b having a tapered shape.
The conductive layer may be formed using a conductive metal oxide. As the conductive metal oxide, indium oxide (In2O3), tin oxide (SnO2), zinc oxide (ZnO), an indium oxide-tin oxide alloy (In2O3—SnO2, which is abbreviated to ITO in some cases), an indium oxide-zinc oxide alloy (In2O3—ZnO), or any of these metal oxide materials including silicon or silicon oxide can be used.
The conductive layer is preferably etched such that the source or drain electrode 142 a and the source or drain electrode 142 b are formed to have tapered end portions. Here, the taper angle is preferably 30° to 60°, for example. When the source or drain electrode 142 a and the source or drain electrode 142 b are formed by etching so as to have tapered end portions, coverage of the source or drain electrode 142 a and the source or drain electrode 142 b with the gate insulating layer 146 which is formed later can be improved and disconnection of the gate insulating layer 146 can be prevented.
The channel length (L) of the transistor in the upper portion is determined by a distance between lower edge portions of the source or drain electrode 142 a and the source or drain electrode 142 b. Note that for light exposure for forming a mask in the case of manufacturing a transistor with a channel length (L) of less than 25 nm, light exposure is preferably performed with extreme ultraviolet light whose wavelength is several nanometers to several tens of nanometers, which is extremely short. For these reasons, the channel length (L) of the transistor to be formed later can be set in the range of 10 nm to 1000 nm (1 μm), and the circuit can operate at higher speed. In addition, power consumption of the semiconductor device can be reduced by miniaturization.
Note that an insulating layer functioning as a base may be provided over the insulating layer 128. The insulating layer can be formed by a PVD method, a CVD method, or the like.
Further, an insulating layer may be formed over each of the source or drain electrode 142 a and the source or drain electrode 142 b. The insulating layer is formed so as to overlap with part of a gate electrode which is formed later. With such insulating layers, capacitance between the gate electrode and the source or drain electrodes can be reduced.
Next, the oxide semiconductor layer 144 is formed by forming an oxide semiconductor layer so as to cover the source or drain electrode 142 a and the source or drain electrode 142 b and then by selectively etching the oxide semiconductor layer (see
The oxide semiconductor layer can be formed using a four-component metal oxide such as an In—Sn—Ga—Zn—O-based oxide semiconductor, a three-component metal oxide such as an In—Ga—Zn—O-based oxide semiconductor, an In—Sn—Zn—O-based oxide semiconductor, an In—Al—Zn—O-based oxide semiconductor, a Sn—Ga—Zn—O-based oxide semiconductor, an Al—Ga—Zn—O-based oxide semiconductor, or a Sn—Al—Zn—O-based oxide semiconductor, a two-component metal oxide such as an In—Zn—O-based oxide semiconductor, an In—Ga—O-based oxide semiconductor, a Sn—Zn—O-based oxide semiconductor, an Al—Zn—O-based oxide semiconductor, a Zn—Mg—O-based oxide semiconductor, a Sn—Mg—O-based oxide semiconductor, or an In—Mg—O-based oxide semiconductor, a single-component metal oxide such as an In—O-based oxide semiconductor, a Sn—O-based oxide semiconductor, or a Zn—O-based oxide semiconductor, or the like.
In particular, an In—Ga—Zn—O-based oxide semiconductor material has sufficiently high resistance when there is no electric field and thus off-state current can be sufficiently reduced. In addition, also having high field-effect mobility, the In—Ga—Zn—O-based oxide semiconductor material is suitable for a semiconductor material used in a semiconductor device.
As a typical example of the In—Ga—Zn—O-based oxide semiconductor material, an oxide semiconductor material represented by InGaO3(ZnO)m (m>0) is given. Using M instead of Ga, there is an oxide semiconductor material represented by InMO2(ZnO)m (m>0). Here, M denotes one or more metal elements selected from gallium (Ga), aluminum (Al), iron (Fe), nickel (Ni), manganese (Mn), cobalt (Co), or the like. For example, M may be Ga, Ga and Al, Ga and Fe, Ga and Ni, Ga and Mn, Ga and Co, or the like. Note that the above-described compositions are derived from the crystal structures that the oxide semiconductor material can have and are mere examples.
As a target used for forming the oxide semiconductor layer by a sputtering method, a target having a composition ratio of In:Ga:Zn=1:x:y (x is greater than or equal to 0 and y is greater than or equal to 0.5 and less than or equal to 5) is preferably used. For example, a target for oxide semiconductor deposition which has a composition ratio of In2O3:Ga2O3:ZnO32 1:1:2 [molar ratio] (x=1, y=1) or the like can be used. Alternatively, a target for oxide semiconductor deposition which has a composition ratio of In2O3:Ga2O3:ZnO=1:1:1 [molar ratio] (x=1, y=0.5), a target for oxide semiconductor deposition which has a composition ratio of In2O3:Ga2O3:ZnO32 1:1:4 [molar ratio] (x=1, y=2), or a target for oxide semiconductor deposition which has a composition ratio of In2O3:Ga2O3:ZnO=1:0:2 [molar ratio] (x=0, y=1) can be used.
In this embodiment, an oxide semiconductor layer having an amorphous structure is formed by a sputtering method with the use of a target for In—Ga—Zn—O-based oxide semiconductor deposition.
In the case where an In—Zn—O-based material is used as an oxide semiconductor, a target therefor has a composition ratio of In:Zn=50:1 to 1:2 in an atomic ratio On2O3: ZnO=25:1 to 1:4 in a molar ratio), preferably, In:Zn=20:1 to 1:1 in an atomic ratio (In2O3: ZnO32 10:1 to 1:2 in a molar ratio), further preferably, In:Zn=15:1 to 1.5:1 in an atomic ratio (In2O3: ZnO32 15:2 to 3:4 in a molar ratio). For example, in a target used for formation of an In—Zn—O-based oxide semiconductor which has an atomic ratio of In:Zn:O=X: Y:Z, the relation of Z>1.5X+Y is satisfied.
The relative density of the metal oxide in the target for oxide semiconductor deposition is 80% or more, preferably 95% or more, and more preferably 99.9% or more. The use of the target for oxide semiconductor deposition which has high relative density makes it possible to form an oxide semiconductor layer having a dense structure.
The atmosphere in which the oxide semiconductor layer is formed is preferably a rare gas (typically, argon) atmosphere, an oxygen atmosphere, or a mixed atmosphere containing a rare gas (typically, argon) and oxygen. Specifically, it is preferable to use a high-purity gas atmosphere, for example, from which an impurity such as hydrogen, water, a hydroxyl group, or hydride is removed to a concentration of 1 ppm or less (preferably, 10 ppb or less).
In forming the oxide semiconductor layer, for example, an object to be processed is held in a treatment chamber that is maintained under reduced pressure, and the object to be processed is heated to a temperature higher than or equal to 100° C. and lower than 550° C., preferably higher than or equal to 200° C. and lower than or equal to 400° C. Alternatively, the temperature of an object to be processed in forming the oxide semiconductor layer may be room temperature (25° C.±10° C.). Then, moisture in the treatment chamber is removed, a sputtering gas from which hydrogen, water, or the like is reduced is introduced, and the above-described target is used; thus, the oxide semiconductor layer is formed. By forming the oxide semiconductor layer while heating the object to be processed, an impurity in the oxide semiconductor layer can be reduced. Moreover, damage due to sputtering can be reduced. In order to remove the moisture in the treatment chamber, it is preferable to use an entrapment vacuum pump. For example, a cryopump, an ion pump, a titanium sublimation pump, or the like can be used. A turbomolecular pump provided with a cold trap may be used. Since hydrogen, water, or the like can be removed from the treatment chamber evacuated with a cryopump or the like, the concentration of an impurity in the oxide semiconductor layer can be reduced.
For example, conditions for forming the oxide semiconductor layer can be set as follows: the distance between the object to be processed and the target is 170 mm, the pressure is 0.4 Pa, the direct current (DC) power is 0.5 kW, and the atmosphere is an oxygen (100% oxygen) atmosphere, an argon (100% argon) atmosphere, or a mixed atmosphere of oxygen and argon. Note that a pulsed direct current (DC) power source is preferably used because dust (such as a powder substance formed at the time of the film formation) can be reduced and the film thickness can be made uniform. The thickness of the oxide semiconductor layer is set in the range of 1 nm to 50 nm, preferably 1 nm to 30 nm, more preferably 1 nm to 10 nm. The use of the oxide semiconductor layer of such a thickness makes it possible to suppress a short channel effect which is caused by miniaturization. Note that the appropriate thickness of the oxide semiconductor layer differs depending on the oxide semiconductor material to be used, the intended use of the semiconductor device, or the like; therefore, the thickness can be determined as appropriate in accordance with the material, the intended use, or the like.
Note that before the oxide semiconductor layer is formed by a sputtering method, reverse sputtering in which plasma is generated with an argon gas introduced is preferably performed so that a material attached to a formation surface (e.g., a surface of the insulating layer 128) is removed. Here, the reverse sputtering is a method in which ions collide with a surface to be processed so that the surface is modified, whereas normal sputtering is a method in which ions collide with a sputtering target. An example of a method for making ions collide with a surface to be processed is a method in which high-frequency voltage is applied to the surface side in an argon atmosphere so that plasma is generated near the object to be processed. Note that an atmosphere of nitrogen, helium, oxygen, or the like may be used instead of an argon atmosphere.
After that, heat treatment (first heat treatment) is preferably performed on the oxide semiconductor layer. Through the first heat treatment, excess hydrogen (including water or a hydroxyl group) in the oxide semiconductor layer can be removed, the structure of the oxide semiconductor layer can be ordered, and defect states in an energy gap can be reduced. For example, the temperature of the first heat treatment can be set higher than or equal to 300° C. and lower than 550° C., or higher than or equal to 400° C. and lower than or equal to 500° C.
For example, after an object to be processed is introduced into an electric furnace including a resistance heater or the like, the heat treatment can be performed at 450° C. for one hour in a nitrogen atmosphere. The oxide semiconductor layer is not exposed to the air during the heat treatment so that entry of water or hydrogen can be prevented.
An apparatus used for the heat treatment is not limited to the electric furnace and may be an apparatus for heating an object to be processed by thermal radiation or thermal conduction from a medium such as a heated gas. For example, a rapid thermal annealing (RTA) apparatus such as a lamp rapid thermal annealing (LRTA) apparatus or a gas rapid thermal annealing (GRTA) apparatus can be used. An LRTA apparatus is an apparatus for heating an object to be processed by radiation of light (an electromagnetic wave) emitted from a lamp such as a halogen lamp, a metal halide lamp, a xenon arc lamp, a carbon arc lamp, a high pressure sodium lamp, or a high pressure mercury lamp. A GRTA apparatus is an apparatus for performing heat treatment using a high-temperature gas. As the gas, an inert gas that does not react with an object to be processed by heat treatment, for example, nitrogen or a rare gas such as argon is used.
For example, as the first heat treatment, GRTA treatment may be performed as follows. The object to be processed is put in a heated inert gas atmosphere, heated for several minutes, and taken out of the inert gas atmosphere. The GRTA treatment enables high-temperature heat treatment in a short time. Moreover, the GRTA treatment can be employed even when the temperature exceeds the upper temperature limit of the object to be processed because the heat treatment can be performed in a short time. Note that the inert gas may be switched to a gas including oxygen during the treatment. This is because defect states in an energy gap caused by oxygen vacancies can be reduced by performing the first heat treatment in an atmosphere including oxygen.
Note that as the inert gas atmosphere, an atmosphere that contains nitrogen or a rare gas (e.g., helium, neon, or argon) as its main component and does not contain water, hydrogen, or the like is preferably used. For example, the purity of nitrogen or a rare gas such as helium, neon, or argon introduced into the heat treatment apparatus is set to 6N (99.9999%) or more, preferably 7N (99.99999%) or more (i.e., the impurity concentration is 1 ppm or less, preferably 0.1 ppm or less).
In any case, a transistor with extremely excellent characteristics can be obtained with the use of the oxide semiconductor layer which is an i-type (intrinsic) or substantially i-type oxide semiconductor layer obtained by reducing an impurity through the first heat treatment.
The above heat treatment (the first heat treatment) can also be referred to as dehydration treatment, dehydrogenation treatment, or the like because it has the effect of removing hydrogen, water, or the like. The dehydration treatment or the dehydrogenation treatment can be performed after the oxide semiconductor layer is formed, after the gate insulating layer is formed, or after a gate electrode is formed. Such dehydration treatment or dehydrogenation treatment may be performed once or plural times.
The etching of the oxide semiconductor layer may be performed either before the heat treatment or after the heat treatment. Dry etching is preferably used in terms of element miniaturization, but wet etching may be used. An etching gas or an etchant can be selected as appropriate depending on a material to be etched. Note that in the case where leakage in an element or the like does not cause a problem, the oxide semiconductor layer does not necessarily need to be processed in an island shape.
Next, the gate insulating layer 146 is formed in contact with the oxide semiconductor layer 144. Then, over the gate insulating layer 146, the gate electrode 148 is formed in a region overlapping with the oxide semiconductor layer 144 (see
The gate insulating layer 146 can be formed by a CVD method, a sputtering method, or the like. The gate insulating layer 146 is preferably formed so as to contain silicon oxide, silicon nitride, silicon oxynitride, aluminum oxide, tantalum oxide, hafnium oxide, yttrium oxide, hafnium silicate (HfSixOy (x>0, y>0)), hafnium silicate (HfSixOy (x>0, y>0)) to which nitrogen is added, hafnium aluminate (HfAlxOy (x>0, y>0)) to which nitrogen is added, or the like. The gate insulating layer 146 may have a single-layer structure or a stacked-layer structure. There is no particular limitation on the thickness of the gate insulating layer 146; the thickness is preferably small in order to ensure the operation of the transistor when the semiconductor device is miniaturized. For example, in the case of using silicon oxide, the thickness can be 1 nm to 100 nm, preferably 10 nm to 50 nm.
When the gate insulating layer is thin as described above, gate leakage due to a tunneling effect or the like becomes a problem. In order to solve the problem of gate leakage, the gate insulating layer 146 may be formed using a high dielectric constant (high-k) material such as hafnium oxide, tantalum oxide, yttrium oxide, hafnium silicate (HfSixOy (x>0, y>0)), hafnium silicate (HfSixOy (x>0, y>0)) to which nitrogen is added, or hafnium aluminate (HfAlxOy (x>0, y>0)) to which nitrogen is added. The use of a high-k material for the gate insulating layer 146 makes it possible to increase the thickness in order to suppress gate leakage as well as ensuring electrical properties. Note that a stacked-layer structure of a film containing a high-k material and a film containing any of silicon oxide, silicon nitride, silicon oxynitride, silicon nitride oxide, aluminum oxide, and the like may also be employed.
After the gate insulating layer 146 is formed, second heat treatment is preferably performed in an inert gas atmosphere or an oxygen atmosphere. The temperature of the heat treatment is set in the range of 200° C. to 450° C., preferably 250° C. to 350° C. For example, the heat treatment may be performed at 250° C. for one hour in a nitrogen atmosphere. By the second heat treatment, variation in electrical characteristics of the transistor can be reduced. In the case where the gate insulating layer 146 contains oxygen, oxygen can be supplied to the oxide semiconductor layer 144 and oxygen vacancies in the oxide semiconductor layer 144 can be filled; thus, the oxide semiconductor layer which is i-type (intrinsic) or substantially i-type can also be formed.
Note that the second heat treatment is performed in this embodiment after the gate insulating layer 146 is formed; there is no limitation on the timing of the second heat treatment. For example, the second heat treatment may be performed after the gate electrode is formed. Alternatively, the first heat treatment and the second heat treatment may be performed in succession, or the first heat treatment may double as the second heat treatment, or the second heat treatment may double as the first heat treatment.
By performing at least one of the first heat treatment and the second heat treatment as described above, the oxide semiconductor layer 144 can be purified so as to contain impurities other than components as little as possible.
The gate electrode 148 can be formed by forming a conductive layer over the gate insulating layer 146 and then by selectively etching the conductive layer. The conductive layer to be the gate electrode 148 can be formed by a PVD method such as a sputtering method, or a CVD method such as a plasma CVD method. The details are similar to those of the source or drain electrode 142 a or the like; thus, the description thereof can be referred to. Through the above steps, the transistor 162 can be formed.
Then, the insulating layer 150 is formed to cover the gate insulating layer 146 and the gate electrode 148, and then the electrode 149 is formed over the insulating layer 150 in a region overlapping with the source or drain electrode 142 a (see
The insulating layer 150 can be formed by a CVD method, a sputtering method, or the like. The details are similar to those of the gate insulating layer 146 or the like; thus, the description thereof can be referred to.
The electrode 149 can be formed by forming a conductive layer over the insulating layer 150 and then by selectively etching the conductive layer. The conductive layer to be the electrode 149 can be formed by a PVD method such as a sputtering method, or a CVD method such as a plasma CVD method. The details are similar to those of the source or drain electrode 142 a or the like; thus, the description thereof can be referred to. Through the above process, the capacitor 164 can be formed.
The electrode 149, which is a capacitor electrode, is preferably formed to overlap with at least part of the gate electrode 148 of the transistor 162. In addition, the electrode 149 may be formed to overlap with at least part of the gate electrode 110 of the transistor 160. This is because, by employing such a structure, the area of the circuit can be sufficiently reduced. Note that this structure can be realized because the gate electrode 148 and the electrode 149 are formed using different layers. If these electrodes are formed using the same layer, it is difficult to obtain a structure in which the distance between the electrodes is sufficiently small, because of electrode pattern formation. In contrast, when the gate electrode 148 and the electrode 149 are formed using different layers, it is possible to obtain a structure in which not only is the distance between the electrodes sufficiently small, but also the electrodes partly overlap each other.
Next, the insulating layer 151 and the insulating layer 152 are formed over the insulating layer 150 and the electrode 149 (see
Note that the insulating layer 151 and the insulating layer 152 are preferably formed using a low dielectric constant material or a low dielectric constant structure (such as a porous structure). This is because when the insulating layer 151 and the insulating layer 152 have a low dielectric constant, capacitance generated between wirings, electrodes, or the like can be reduced and operation at higher speed can be achieved.
Note that although a stacked-layer structure of the insulating layer 151 and the insulating layer 152 is used in this embodiment, an embodiment of the disclosed invention is not limited to this example. A single-layer structure or a stacked-layer structure including three or more layers can also be used. Alternatively, a structure in which the insulating layers are not provided is also possible.
Note that the insulating layer 152 is desirably formed so as to have a flat surface. This is because when the insulating layer 152 has a flat surface, an electrode, a wiring, or the like can be favorably formed over the insulating layer 152 even in the case where the semiconductor device is miniaturized. Note that the insulating layer 152 can be planarized using a method such as CMP.
Next, an opening 153 reaching the source or drain electrode 142 b is formed in the gate insulating layer 146, the insulating layer 150, the insulating layer 151, and the insulating layer 152 (see
Here, the opening 153 is preferably formed in a region overlapping with the electrode 126. By forming the opening 153 in such a region, the element area can be prevented from increasing due to a contact region of the electrodes. In other words, the degree of integration of the semiconductor device can be increased.
After that, the electrode 154 is formed in the opening 153, and the wiring 156 in contact with the insulating layer 152 and the electrode 154 is formed (see
The electrode 154 can be formed in such a manner, for example, that a conductive layer is formed in a region including the opening 153 by a PVD method, a CVD method, or the like and then part of the conductive layer is removed by etching, CMP, or the like.
Specifically, it is possible to employ a method, for example, in which a thin titanium film is formed in a region including the opening 153 by a PVD method and a thin titanium nitride film is formed by a CVD method, and then, a tungsten film is formed so as to be embedded in the opening 153. Here, the titanium film formed by a PVD method functions to reduce an oxide film (e.g., a natural oxide film) formed on a surface where the titanium film is formed, and to decrease the contact resistance with a lower electrode or the like (here, the source or drain electrode 142 b). The titanium nitride film formed after the formation of the titanium film has a barrier function for suppressing diffusion of the conductive material. A copper film may be formed by a plating method after the formation of a barrier film of titanium, titanium nitride, or the like.
Note that in the case where the electrode 154 is formed by removing part of the conductive layer, the process is preferably performed so that the surface is planarized. For example, when a thin titanium film or a thin titanium nitride film is formed in a region including the opening 153 and then a tungsten film is formed so as to be embedded in the opening 153, excess tungsten, titanium, titanium nitride, or the like is removed and the planarity of the surface can be improved by subsequent CMP treatment. The surface including the electrode 154 is planarized in this manner, so that an electrode, a wiring, an insulating layer, a semiconductor layer, or the like can be favorably formed in a later step.
The wiring 156 is formed by forming a conductive layer by a PVD method such as a sputtering method, or a CVD method such as a plasma CVD method, and then by patterning the conductive layer. As a material of the conductive layer, an element selected from aluminum, chromium, copper, tantalum, titanium, molybdenum, and tungsten, an alloy including any of these elements as a component, or the like can be used. A material containing one of manganese, magnesium, zirconium, beryllium, neodymium, and scandium or a combination of a plurality of these elements may be used. The details are similar to those of the source or drain electrode 142 a, the source or drain electrode 142 b, and the like.
Through the above steps, the transistor 162 including the oxide semiconductor layer 144 which is purified and the capacitor 164 are completed (see
In the transistor 162 described in this embodiment, the oxide semiconductor layer 144 is purified. In addition, the carrier density of the oxide semiconductor layer 144 is, for example, less than 1×1012/cm3, preferably less than 1.45×1010/cm3, which is sufficiently lower than the carrier density of a general silicon wafer (approximately 1×1014/cm3). As a result of this, a sufficiently low off-state current can be obtained. For example, the off-state current (per unit channel width (1 μm), here) of the transistor 162 at room temperature (25° C.) is 10 zA (1 zA (zeptoampere) is 1×10−21 A) or less, preferably 1 zA or less.
In this manner, by using the oxide semiconductor layer 144 which is purified and is intrinsic, it becomes possible to sufficiently reduce the off-state current of the transistor. With the use of such a transistor, a semiconductor device in which stored data can be held for an extremely long time can be provided.
The structures, methods, and the like described in this embodiment can be combined as appropriate with any of the structures, methods, and the like described in the other embodiments.
In this embodiment, the cases where the semiconductor device described in any of the above embodiments is applied to electronic devices will be described with reference to
As described above, the electronic devices described in this embodiment each include the semiconductor device according to any of the above embodiments. Therefore, electronic devices with low power consumption can be realized.
This application is based on Japanese Patent Application serial no. 2010-111939 filed with Japan Patent Office on May 14, 2010, the entire contents of which are hereby incorporated by reference.
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Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20140355333A1 (en) * | 2010-01-22 | 2014-12-04 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device and driving method thereof |
US20150262642A1 (en) * | 2014-03-13 | 2015-09-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US9336853B2 (en) | 2014-05-29 | 2016-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Memory device, electronic component, and electronic device |
US9406370B2 (en) | 2014-05-29 | 2016-08-02 | Semiconductor Energy Laboratory Co., Ltd. | Memory device, and semiconductor device and electronic appliance including the same |
US9496022B2 (en) | 2014-05-29 | 2016-11-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including power management unit for refresh operation |
US9583177B2 (en) | 2014-12-10 | 2017-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Memory device and semiconductor device including memory device |
US9633709B2 (en) | 2014-05-23 | 2017-04-25 | Semiconductor Energy Laboratory Co., Ltd. | Storage device including transistor comprising oxide semiconductor |
US9755084B2 (en) | 2012-02-09 | 2017-09-05 | Semiconductor Energy Laboratory Co., Ltd. | Multi-level stacked transistor device including capacitor and different semiconductor materials |
US10559341B2 (en) | 2016-01-28 | 2020-02-11 | Semiconductor Energy Laboratory Co., Ltd. | Method for operating the semiconductor device |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011114867A1 (en) * | 2010-03-19 | 2011-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method of semiconductor device |
JP5923248B2 (en) | 2010-05-20 | 2016-05-24 | 株式会社半導体エネルギー研究所 | Semiconductor device |
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JP6235660B2 (en) * | 2016-07-28 | 2017-11-22 | 株式会社半導体エネルギー研究所 | Semiconductor device |
US10312239B2 (en) | 2017-03-16 | 2019-06-04 | Toshiba Memory Corporation | Semiconductor memory including semiconductor oxie |
US10043808B1 (en) | 2017-03-16 | 2018-08-07 | Toshiba Memory Corporation | Semiconductor memory |
US10553601B2 (en) | 2017-03-16 | 2020-02-04 | Toshiba Memory Corporation | Semiconductor memory including semiconductor oxide |
US10497712B2 (en) | 2017-03-16 | 2019-12-03 | Toshiba Memory Corporation | Semiconductor memory |
Citations (107)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4466081A (en) | 1980-12-08 | 1984-08-14 | Tokyo Shibaura Denki Kabushiki Kaisha | Semiconductor memory device |
US5349366A (en) | 1991-10-29 | 1994-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical device and process for fabricating the same and method of driving the same |
US5731856A (en) | 1995-12-30 | 1998-03-24 | Samsung Electronics Co., Ltd. | Methods for forming liquid crystal displays including thin film transistors and gate pads having a particular structure |
US5744864A (en) | 1995-08-03 | 1998-04-28 | U.S. Philips Corporation | Semiconductor device having a transparent switching element |
JP2000044236A (en) | 1998-07-24 | 2000-02-15 | Hoya Corp | Article having transparent conductive oxide thin film and its production |
JP2000150900A (en) | 1998-11-17 | 2000-05-30 | Japan Science & Technology Corp | Transistor and semiconductor device |
US6127702A (en) | 1996-09-18 | 2000-10-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having an SOI structure and manufacturing method therefor |
US6294274B1 (en) | 1998-11-16 | 2001-09-25 | Tdk Corporation | Oxide thin film |
US6314017B1 (en) * | 1999-07-22 | 2001-11-06 | Sony Corporation | Semiconductor memory device |
US20010046027A1 (en) | 1999-09-03 | 2001-11-29 | Ya-Hsiang Tai | Liquid crystal display having stripe-shaped common electrodes formed above plate-shaped pixel electrodes |
US6327210B1 (en) | 1999-11-16 | 2001-12-04 | Matsushita Electric Industrial Co., Ltd. | Semiconductor memory device |
JP2002076356A (en) | 2000-09-01 | 2002-03-15 | Japan Science & Technology Corp | Semiconductor device |
US20020056838A1 (en) | 2000-11-15 | 2002-05-16 | Matsushita Electric Industrial Co., Ltd. | Thin film transistor array, method of producing the same, and display panel using the same |
US6445026B1 (en) | 1999-07-29 | 2002-09-03 | Sony Corporation | Semiconductor device having a memory cell with a plurality of active elements and at least one passive element |
US20020132454A1 (en) | 2001-03-19 | 2002-09-19 | Fuji Xerox Co., Ltd. | Method of forming crystalline semiconductor thin film on base substrate, lamination formed with crystalline semiconductor thin film and color filter |
JP2002289859A (en) | 2001-03-23 | 2002-10-04 | Minolta Co Ltd | Thin-film transistor |
US6536013B2 (en) | 1999-12-09 | 2003-03-18 | Sony Corporation | Memory embedded semiconductor integrated circuit and a method for designing the same |
JP2003086000A (en) | 2001-09-10 | 2003-03-20 | Sharp Corp | Semiconductor memory and its test method |
JP2003086808A (en) | 2001-09-10 | 2003-03-20 | Masashi Kawasaki | Thin film transistor and matrix display |
US20030123313A1 (en) * | 2001-02-15 | 2003-07-03 | Hitachi, Ltd. | Semiconductor memory device equipped with dummy cells |
US20030189401A1 (en) | 2002-03-26 | 2003-10-09 | International Manufacturing And Engineering Services Co., Ltd. | Organic electroluminescent device |
US20030218222A1 (en) | 2002-05-21 | 2003-11-27 | The State Of Oregon Acting And Through The Oregon State Board Of Higher Education On Behalf Of | Transistor structures and methods for making the same |
US20040038446A1 (en) | 2002-03-15 | 2004-02-26 | Sanyo Electric Co., Ltd.- | Method for forming ZnO film, method for forming ZnO semiconductor layer, method for fabricating semiconductor device, and semiconductor device |
JP2004103957A (en) | 2002-09-11 | 2004-04-02 | Japan Science & Technology Corp | Transparent thin film field effect type transistor using homologous thin film as active layer |
US20040127038A1 (en) | 2002-10-11 | 2004-07-01 | Carcia Peter Francis | Transparent oxide semiconductor thin film transistors |
JP2004273732A (en) | 2003-03-07 | 2004-09-30 | Masashi Kawasaki | Active matrix substrate and its producing process |
JP2004273614A (en) | 2003-03-06 | 2004-09-30 | Masashi Kawasaki | Semiconductor device and its fabricating process |
WO2004114391A1 (en) | 2003-06-20 | 2004-12-29 | Sharp Kabushiki Kaisha | Semiconductor device, its manufacturing method, and electronic device |
US20050017302A1 (en) | 2003-07-25 | 2005-01-27 | Randy Hoffman | Transistor including a deposited channel region having a doped portion |
US20050128803A1 (en) | 2003-12-11 | 2005-06-16 | International Business Machines Corporation | Gated diode memory cells |
US20050199959A1 (en) | 2004-03-12 | 2005-09-15 | Chiang Hai Q. | Semiconductor device |
US20060043377A1 (en) | 2004-03-12 | 2006-03-02 | Hewlett-Packard Development Company, L.P. | Semiconductor device |
US20060091793A1 (en) | 2004-11-02 | 2006-05-04 | 3M Innovative Properties Company | Methods and displays utilizing integrated zinc oxide row and column drivers in conjunction with organic light emitting diodes |
US20060108529A1 (en) | 2004-11-10 | 2006-05-25 | Canon Kabushiki Kaisha | Sensor and image pickup device |
US20060110867A1 (en) | 2004-11-10 | 2006-05-25 | Canon Kabushiki Kaisha | Field effect transistor manufacturing method |
US20060108636A1 (en) | 2004-11-10 | 2006-05-25 | Canon Kabushiki Kaisha | Amorphous oxide and field effect transistor |
US20060113565A1 (en) | 2004-11-10 | 2006-06-01 | Canon Kabushiki Kaisha | Electric elements and circuits utilizing amorphous oxides |
US20060113536A1 (en) | 2004-11-10 | 2006-06-01 | Canon Kabushiki Kaisha | Display |
US20060113549A1 (en) | 2004-11-10 | 2006-06-01 | Canon Kabushiki Kaisha | Light-emitting device |
US20060113539A1 (en) | 2004-11-10 | 2006-06-01 | Canon Kabushiki Kaisha | Field effect transistor |
US7061014B2 (en) | 2001-11-05 | 2006-06-13 | Japan Science And Technology Agency | Natural-superlattice homologous single crystal thin film, method for preparation thereof, and device using said single crystal thin film |
US20060170111A1 (en) | 2005-01-28 | 2006-08-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic device, and method of manufacturing semiconductor device |
US20060169973A1 (en) | 2005-01-28 | 2006-08-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic device, and method of manufacturing semiconductor device |
US20060197092A1 (en) | 2005-03-03 | 2006-09-07 | Randy Hoffman | System and method for forming conductive material on a substrate |
US7105868B2 (en) | 2002-06-24 | 2006-09-12 | Cermet, Inc. | High-electron mobility transistor with zinc oxide |
US20060208977A1 (en) | 2005-03-18 | 2006-09-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, and display device, driving method and electronic apparatus thereof |
US20060228974A1 (en) | 2005-03-31 | 2006-10-12 | Theiss Steven D | Methods of making displays |
US20060231882A1 (en) | 2005-03-28 | 2006-10-19 | Il-Doo Kim | Low voltage flexible organic/transparent transistor for selective gas sensing, photodetecting and CMOS device applications |
US20060238135A1 (en) | 2005-04-20 | 2006-10-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device |
US20060284171A1 (en) | 2005-06-16 | 2006-12-21 | Levy David H | Methods of making thin film transistors comprising zinc-oxide-based semiconductor materials and transistors made thereby |
US20060284172A1 (en) | 2005-06-10 | 2006-12-21 | Casio Computer Co., Ltd. | Thin film transistor having oxide semiconductor layer and manufacturing method thereof |
US20060292777A1 (en) | 2005-06-27 | 2006-12-28 | 3M Innovative Properties Company | Method for making electronic devices using metal oxide nanoparticles |
US20070024187A1 (en) | 2005-07-28 | 2007-02-01 | Shin Hyun S | Organic light emitting display (OLED) and its method of fabrication |
US20070046191A1 (en) | 2005-08-23 | 2007-03-01 | Canon Kabushiki Kaisha | Organic electroluminescent display device and manufacturing method thereof |
US20070054507A1 (en) | 2005-09-06 | 2007-03-08 | Canon Kabushiki Kaisha | Method of fabricating oxide semiconductor device |
US20070052025A1 (en) | 2005-09-06 | 2007-03-08 | Canon Kabushiki Kaisha | Oxide semiconductor thin film transistor and method of manufacturing the same |
US20070090365A1 (en) | 2005-10-20 | 2007-04-26 | Canon Kabushiki Kaisha | Field-effect transistor including transparent oxide and light-shielding member, and display utilizing the transistor |
US7211825B2 (en) | 2004-06-14 | 2007-05-01 | Yi-Chi Shih | Indium oxide-based thin film transistors and circuits |
US20070108446A1 (en) | 2005-11-15 | 2007-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US20070152217A1 (en) | 2005-12-29 | 2007-07-05 | Chih-Ming Lai | Pixel structure of active matrix organic light-emitting diode and method for fabricating the same |
US20070172591A1 (en) | 2006-01-21 | 2007-07-26 | Samsung Electronics Co., Ltd. | METHOD OF FABRICATING ZnO FILM AND THIN FILM TRANSISTOR ADOPTING THE ZnO FILM |
US20070187760A1 (en) | 2006-02-02 | 2007-08-16 | Kochi Industrial Promotion Center | Thin film transistor including low resistance conductive thin films and manufacturing method thereof |
US20070187678A1 (en) | 2006-02-15 | 2007-08-16 | Kochi Industrial Promotion Center | Semiconductor device including active layer made of zinc oxide with controlled orientations and manufacturing method thereof |
US20070194379A1 (en) | 2004-03-12 | 2007-08-23 | Japan Science And Technology Agency | Amorphous Oxide And Thin Film Transistor |
US20070252928A1 (en) | 2006-04-28 | 2007-11-01 | Toppan Printing Co., Ltd. | Structure, transmission type liquid crystal display, reflection type display and manufacturing method thereof |
US7297977B2 (en) | 2004-03-12 | 2007-11-20 | Hewlett-Packard Development Company, L.P. | Semiconductor device |
US20070272922A1 (en) | 2006-04-11 | 2007-11-29 | Samsung Electronics Co. Ltd. | ZnO thin film transistor and method of forming the same |
US20070287296A1 (en) | 2006-06-13 | 2007-12-13 | Canon Kabushiki Kaisha | Dry etching method for oxide semiconductor film |
US20080006877A1 (en) | 2004-09-17 | 2008-01-10 | Peter Mardilovich | Method of Forming a Solution Processed Device |
US7323356B2 (en) | 2002-02-21 | 2008-01-29 | Japan Science And Technology Agency | LnCuO(S,Se,Te)monocrystalline thin film, its manufacturing method, and optical device or electronic device using the monocrystalline thin film |
US20080038882A1 (en) | 2006-08-09 | 2008-02-14 | Kazushige Takechi | Thin-film device and method of fabricating the same |
US20080038929A1 (en) | 2006-08-09 | 2008-02-14 | Canon Kabushiki Kaisha | Method of dry etching oxide semiconductor film |
US20080050595A1 (en) | 2006-01-11 | 2008-02-28 | Murata Manufacturing Co., Ltd. | Transparent conductive film and method for manufacturing the same |
US20080073653A1 (en) | 2006-09-27 | 2008-03-27 | Canon Kabushiki Kaisha | Semiconductor apparatus and method of manufacturing the same |
US20080083950A1 (en) | 2006-10-10 | 2008-04-10 | Alfred I-Tsung Pan | Fused nanocrystal thin film semiconductor and method |
US20080106191A1 (en) | 2006-09-27 | 2008-05-08 | Seiko Epson Corporation | Electronic device, organic electroluminescence device, and organic thin film semiconductor device |
US20080128689A1 (en) | 2006-11-29 | 2008-06-05 | Je-Hun Lee | Flat panel displays comprising a thin-film transistor having a semiconductive oxide in its channel and methods of fabricating the same for use in flat panel displays |
US20080129195A1 (en) | 2006-12-04 | 2008-06-05 | Toppan Printing Co., Ltd. | Color el display and method for producing the same |
US7385224B2 (en) | 2004-09-02 | 2008-06-10 | Casio Computer Co., Ltd. | Thin film transistor having an etching protection film and manufacturing method thereof |
US20080166834A1 (en) | 2007-01-05 | 2008-07-10 | Samsung Electronics Co., Ltd. | Thin film etching method |
US7402506B2 (en) | 2005-06-16 | 2008-07-22 | Eastman Kodak Company | Methods of making thin film transistors comprising zinc-oxide-based semiconductor materials and transistors made thereby |
US20080182358A1 (en) | 2007-01-26 | 2008-07-31 | Cowdery-Corvan Peter J | Process for atomic layer deposition |
US7411209B2 (en) | 2006-09-15 | 2008-08-12 | Canon Kabushiki Kaisha | Field-effect transistor and method for manufacturing the same |
US20080224133A1 (en) | 2007-03-14 | 2008-09-18 | Jin-Seong Park | Thin film transistor and organic light-emitting display device having the thin film transistor |
US20080258143A1 (en) | 2007-04-18 | 2008-10-23 | Samsung Electronics Co., Ltd. | Thin film transitor substrate and method of manufacturing the same |
US20080258141A1 (en) | 2007-04-19 | 2008-10-23 | Samsung Electronics Co., Ltd. | Thin film transistor, method of manufacturing the same, and flat panel display having the same |
US20080258139A1 (en) | 2007-04-17 | 2008-10-23 | Toppan Printing Co., Ltd. | Structure with transistor |
US20080258140A1 (en) | 2007-04-20 | 2008-10-23 | Samsung Electronics Co., Ltd. | Thin film transistor including selectively crystallized channel layer and method of manufacturing the thin film transistor |
US7453087B2 (en) | 2005-09-06 | 2008-11-18 | Canon Kabushiki Kaisha | Thin-film transistor and thin-film diode having amorphous-oxide semiconductor layer |
US20080296568A1 (en) | 2007-05-29 | 2008-12-04 | Samsung Electronics Co., Ltd | Thin film transistors and methods of manufacturing the same |
US20090002590A1 (en) | 2007-06-29 | 2009-01-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US7501293B2 (en) | 2002-06-13 | 2009-03-10 | Murata Manufacturing Co., Ltd. | Semiconductor device in which zinc oxide is used as a semiconductor material and method for manufacturing the semiconductor device |
US20090073325A1 (en) | 2005-01-21 | 2009-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same, and electric device |
US20090114910A1 (en) | 2005-09-06 | 2009-05-07 | Canon Kabushiki Kaisha | Semiconductor device |
US20090134399A1 (en) | 2005-02-18 | 2009-05-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor Device and Method for Manufacturing the Same |
US20090152506A1 (en) | 2007-12-17 | 2009-06-18 | Fujifilm Corporation | Process for producing oriented inorganic crystalline film, and semiconductor device using the oriented inorganic crystalline film |
US20090152541A1 (en) | 2005-02-03 | 2009-06-18 | Semiconductor Energy Laboratory Co., Ltd. | Electronic device, semiconductor device and manufacturing method thereof |
US7674650B2 (en) | 2005-09-29 | 2010-03-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US20100065844A1 (en) | 2008-09-18 | 2010-03-18 | Sony Corporation | Thin film transistor and method of manufacturing thin film transistor |
US20100092800A1 (en) | 2008-10-09 | 2010-04-15 | Canon Kabushiki Kaisha | Substrate for growing wurtzite type crystal and method for manufacturing the same and semiconductor device |
US20100097838A1 (en) | 2008-01-31 | 2010-04-22 | Sony Corporation | Optical sensor element, imaging device, electronic equipment and memory element |
US20100109002A1 (en) | 2007-04-25 | 2010-05-06 | Canon Kabushiki Kaisha | Oxynitride semiconductor |
US20100148171A1 (en) | 2008-12-15 | 2010-06-17 | Nec Electronics Corporation | Semiconductor device and method of manufacturing semiconductor device |
US7859889B2 (en) | 2005-04-08 | 2010-12-28 | Renesas Electronics Corporation | Semiconductor memory device |
US20110210339A1 (en) | 2010-02-26 | 2011-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US20120039126A1 (en) | 2010-08-16 | 2012-02-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for driving semiconductor memory device |
US20120069634A1 (en) | 2010-09-22 | 2012-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor memory device and method for inspecting the same |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6034199B2 (en) | 1980-12-20 | 1985-08-07 | Tokyo Shibaura Electric Co | |
JPS6012796Y2 (en) | 1980-12-20 | 1985-04-24 | ||
JPS60198861A (en) | 1984-03-23 | 1985-10-08 | Fujitsu Ltd | Thin film transistor |
JPH0244256B2 (en) | 1987-01-28 | 1990-10-03 | Kagaku Gijutsucho Mukizaishitsu Kenkyushocho | INGAZN2O5DESHIMESARERUROTSUHOSHOKEINOSOJOKOZOOJUSURUKAGOBUTSUOYOBISONOSEIZOHO |
JPH0244258B2 (en) | 1987-02-24 | 1990-10-03 | Kagaku Gijutsucho Mukizaishitsu Kenkyushocho | INGAZN3O6DESHIMESARERUROTSUHOSHOKEINOSOJOKOZOOJUSURUKAGOBUTSUOYOBISONOSEIZOHO |
JPH0244259B2 (en) | 1987-02-24 | 1990-10-03 | Kagaku Gijutsucho Mukizaishitsu Kenkyushocho | |