US8405913B2 - Anamorphic projection optical system - Google Patents
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/435—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material
- B41J2/465—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using masks, e.g. light-switching masks
Definitions
- This invention relates to optical systems utilized, for example, in high speed printers, and in particular to anamorphic projection optical systems.
- Laser imaging systems are extensively used to generate images in applications such as xerographic printing, mask and maskless lithographic patterning, laser texturing of surfaces, and laser cutting machines.
- Laser printers often use a raster optical scanner (ROS) that sweeps a laser perpendicular to a process direction by utilizing a polygon or galvo scanner, whereas for cutting applications lasers imaging systems use flatbed x-y vector scanning.
- ROS raster optical scanner
- LED arrays of up to 20′′ in width have an imaging advantage for large width xerography.
- present LED array are only capable of offering 10 milliWatt power levels per pixel and are therefore only useful for some non-thermal imaging applications such as xerography.
- LED bars have differential aging and performance spread. If a single LED fails it requires the entire LED bar be replaced.
- Many other imaging or marking applications require much higher power. For example, laser texturing, or cutting applications can require power levels in the 10 W-100 W range. Thus LED bars cannot be used for these high power applications.
- High power semiconductor laser arrays in the range of 100 mW-100 Watts do exist. Most often they exist in a 1D array format such as on a laser diode bar often about 1 cm in total width.
- Another type of high power directed light source are 2D surface emitting VCSEL arrays.
- neither of these high power laser technologies allow for the laser pitch between nearest neighbors to be compatible with 600 dpi or higher imaging resolution.
- neither of these technologies allow for the individual high speed control of each laser.
- high power applications such as high power overhead projection imaging systems, often use a high power source such as a laser in combination with a spatial light modulator such as a DLPTM chip from Texas Instruments or liquid crystal arrays.
- imaging systems are arrayed side by side, they can be used to form projected images that overlap wherein the overlap can form a larger image using software to stitch together the image patterns into a seamless pattern.
- arrayed imaging systems for high resolution applications have been arranged in such a way that they must use either two rows of imaging subsystems or use a double pass scanning configuration in order to stitch together a continuous high resolution image. This is because of physical hardware constraints on the dimensions of the optical subsystems.
- the double imaging row configuration can still be seamlessly stitched together using a conveyor to move the substrate in single direction but such a system requires a large amount of overhead hardware real estate and precision alignment between each imaging row.
- the time between exposure and development of photoresist to be imaged is not critical and therefore the imaging of the photoresist along a single line does not need be exposed at once.
- the time between exposure and development is critical.
- xerographic laser printing is based on imaging a photoreceptor by erasing charge which naturally decays over time.
- the time between exposure and development is not time invariant. In such situations, it is desirable for the exposure system to expose a single line, or a few tightly spaced adjacent lines of high resolution of a surface at once.
- variable data lithographic marking approach originally disclosed by Carley in U.S. Pat. No. 3,800,699 entitled, “FOUNTAIN SOLUTION IMAGE APPARATUS FOR ELECTRONIC LITHOGRAPHY”.
- standard offset lithographic printing a static imaging plate is created that has hydrophobic imaging and hydrophilic non-imaging regions.
- a thin layer of water based dampening solution selectively wets the plate and forms an oleophobic layer which selectively rejects oil-based inks.
- a laser can be used to pattern ablate the fountain solution to form variable imaging regions on the fly.
- a thin layer of dampening solution also decays in thickness over time, due to natural partial pressure evaporation into the surrounding air.
- the hardware and packaging surrounding a spatial light modulator usually prevent a seamless continuous line pattern to be imaged.
- laser based imaging approach with high total optical power well above the level of 1 Watt that is scalable across large process widths in excess of 20′′ as well as having achievable resolution greater than or equal to 600 dpi, pixel positioning resolution or addressability greater than or equal to 1200 dpi and allows high resolution high speed imaging in a single pass.
- the present invention is directed to an anamorphic optical system that anamorphically images and concentrates a relatively low intensity two-dimensional light field in order to form a substantially one-dimensional high intensity line image that is aligned in a cross-process (e.g., horizontal) direction on an imaging surface.
- the two-dimensional modulated light field is made up of low-intensity light portions that effectively form a “stretched” line image in which each dot-like “pixel” (image portion) of the line image is expanded in the process (e.g., vertical) direction.
- the anamorphic optical system utilizes one or more elongated curved optical elements (e.g., cylindrical/acylindrical lenses and/or cylindrical/acylindrical mirrors) that are operably positioned and arranged to image and concentrate the two-dimensional modulated light field such that the one-dimensional line image is projected onto the imaging surface.
- the operable optical (i.e., reflective or refractive) surface of the elongated (cylindrical/acylindrical) optical element has a constant curved profile centered along the neutral or zero-power axis, whereby light concentrated by the elongated optical element is equally concentrated on the imaging surface along the entire length of the line.
- high total optical intensity i.e., flux density on the order of hundreds of Watts/cm 2
- every dot-like pixel image is generated at the same time (i.e., as compared with a rastering system that only applies high power to one point of a line image at any given instant).
- the present invention facilitates a reliable yet high power imaging system that can be used, for example, for single-pass high resolution high speed printing applications.
- an anamorphic optical system is implemented either entirely using process-direction cylindrical/acylindrical refractive optical elements, or using a catadioptric system including one or more process-direction cylindrical/acylindrical reflective (e.g., mirror) optical elements.
- a catadioptric system including one or more process-direction cylindrical/acylindrical reflective (e.g., mirror) optical elements.
- either one focusing lens or two focusing lenses having cylindrical or acylindrical refractive surfaces is/are utilized to concentrate the two-dimensional modulated light field in the process direction onto the imaging surface.
- either one focusing mirror or two focusing mirrors having cylindrical or acylindrical reflective surfaces is/are utilized to concentrate the two-dimensional modulated light field in the process direction onto the imaging surface. Due to process direction distortion, the catadioptric anamorphic projection optical system is more suitable for imaging systems where the two-dimensional light field is much wider in the cross-process direction than in the process direction.
- the catadioptric anamorphic optical system architecture also provides a lower level of sagittal field curvature in the cross-process direction than that of the all-refractive system, thereby facilitating the imaging of a square or rectangular input light field.
- an anamorphic optical system includes both a cross-process optical subsystem and a process-direction optical subsystem.
- the cross-process optical subsystem is disposed between the input two-dimensional light field and the process-direction optical subsystem, and includes one or more cylindrical/acylindrical lenses that image the two-dimensional modulated light field in the cross-process direction.
- the process-direction optical subsystem includes either doublet lens elements or triplet lens elements that are arranged to achieve the desired cross-process imaging. This arrangement facilitates generating a wide scan line that can be combined (“stitched” or blended together with a region of overlap) with adjacent optical systems to produce an assembly having a substantially unlimited length scan line.
- a collimating cross-process direction cylindrical/acylindrical field lens is disposed between the cross-process optical subsystem and the source of the two-dimensional light field, and is positioned to enable locating an aperture stop between the doublet or triplet lens elements, thereby enabling efficient correction of aberrations using a low number of simple lenses, and also and minimizes the size of doublet/triplet lens elements.
- the process optical subsystem is located between the cross-process optical subsystem and the imaging surface (i.e., the optical system output), and includes either a single process-direction optical (e.g., mirror or lens) element or doublet process-direction optical (e.g., mirror or lens) elements that that serve to image and concentrate the light field in the process direction in a manner consistent with that described above.
- a single process-direction optical e.g., mirror or lens
- doublet process-direction optical e.g., mirror or lens
- the anamorphic optical system images and concentrates the modulated light portions forming the two-dimensional light field in the process direction such that the concentrated light portions forming the line image on the imaging surface have a light intensity that is at least two times that of the individual light portions forming the light field.
- the present invention can be produced using low-cost, commercially available spatial light modulating devices, such as digital micromirror (DMD) devices, electro-optic diffractive modulator arrays, or arrays of thermo-optic absorber elements.
- the intensity (Watts/cc) of the light over a given area e.g., over the area of each modulating element
- the intensity (Watts/cc) of the light over a given area is reduced to an acceptable level such that low cost optical glasses and antireflective coatings can be utilized to form spatial light modulator with improved power handling capabilities.
- Spreading the light uniformly out also eliminates the negatives imaging effects that point defects (e.g., microscopic dust particles or scratches) have on total light transmission losses.
- FIG. 1 is a top side perspective view showing a simplified imaging system utilizing an anamorphic optical system in accordance with an exemplary embodiment of the present invention
- FIG. 2 is a simplified side view showing the imaging system of FIG. 1 during an imaging operation according to an embodiment of the present invention
- FIG. 3 is a simplified top view showing a multi-lens anamorphic optical system utilized by imaging system of FIG. 1 according to a specific embodiment of the present invention
- FIG. 4 is a simplified top side view showing the multi-lens anamorphic optical system of FIG. 3 ;
- FIG. 5 is a perspective view showing a portion of a DMD-type spatial light modulator utilized by imaging system of FIG. 1 according to a specific embodiment of the present invention
- FIG. 6 is an exploded perspective view showing a light modulating element of the DMD-type spatial light modulator of FIG. 5 in additional detail;
- FIGS. 7(A) , 7 (B) and 7 (C) are perspective views showing the light modulating element of FIG. 6 during operation;
- FIG. 8 is a perspective view showing an imaging system utilizing a DMD-type spatial light modulator and an all-refractive optical system in a folded arrangement according to another specific embodiment of the present invention.
- FIG. 9 is a simplified side view showing the imaging system of FIG. 8 during an imaging operation
- FIGS. 10(A) , 10 (B) and 10 (C) are simplified side views showing the imaging system of FIG. 9 during an image transfer operation;
- FIG. 11 is a simplified top view showing an all-refractive anamorphic optical system utilized by an imaging system according to another specific embodiment of the present invention.
- FIG. 12 is a simplified side view showing the all-refractive anamorphic optical system of FIG. 11 ;
- FIG. 13 is a simplified top view showing a second all-refractive anamorphic optical system utilized by an imaging system according to another specific embodiment of the present invention.
- FIG. 14 is a simplified side view showing the all-refractive anamorphic optical system of FIG. 13 ;
- FIG. 15 is a perspective view showing an imaging system utilizing a DMD-type spatial light modulator and a catadioptric optical system in a folded arrangement according to another specific embodiment of the present invention
- FIG. 16 is a simplified top view showing a catadioptric anamorphic optical system utilized by an imaging system according to another specific embodiment of the present invention.
- FIG. 17 is a simplified side view showing the catadioptric anamorphic optical system of FIG. 16 ;
- FIG. 18 is a simplified top view showing a second catadioptric anamorphic optical system utilized by an imaging system according to another specific embodiment of the present invention.
- FIG. 19 is a simplified side view showing the all-refractive anamorphic optical system of FIG. 18 .
- the present invention relates to improvements in imaging systems and related apparatus (e.g., scanners and printers).
- imaging systems and related apparatus e.g., scanners and printers.
- the following description is presented to enable one of ordinary skill in the art to make and use the invention as provided in the context of a particular application and its requirements.
- directional terms such as “upper”, “uppermost”, “lower”, “vertical” and “horizontal” are intended to provide relative positions for purposes of description, and are not intended to designate an absolute frame of reference.
- optical elements senses, mirrors
- reference to the position of optical elements is intended to mean in the sense of the normal light path through the associated optical system unless specified otherwise (e.g., a lens is “between” two mirrors when, during normal operation of an optical system including the lens and mirrors, light is reflected from one mirror through the lens to the other mirror).
- cylindrical/acylindrical is intended to mean that an associated optical element is either cylindrical (i.e., a cylindrical lens or mirror whose curved optical surface or surfaces are sections of a cylinder and focus an image onto a line parallel to the intersection of the optical surface and a plane tangent to it), or acylindrical (i.e., an elongated curved lens or mirror whose curved optical surface or surfaces are not cylindrical, but still focus an image onto a line parallel to the intersection of the optical surface and a plane tangent to it).
- acylindrical i.e., an elongated curved lens or mirror whose curved optical surface or surfaces are not cylindrical, but still focus an image onto a line parallel to the intersection of the optical surface and a plane tangent to it.
- FIG. 1 is a perspective view showing a simplified single-pass imaging system 100 utilized to generate a substantially one-dimensional line image of a two-dimensional image on an imaging surface 162 using an anamorphic optical system 130 in accordance with a simplified embodiment of the present invention.
- Simplified imaging system 100 further includes a homogenous light generator 110 , a spatial light modulator 120 that is controlled as described below by a controller 180 to modulate homogeneous light 118 A received from homogenous light generator 110 , and anamorphic optical system 130 that is positioned to image and concentrate a modulated light field 119 B generated by spatial light modulator 120 in the manner described below, and to generate (project) a substantially one-dimensional line image SL on imaging surface 162 .
- the present invention is described below with reference to exemplary imaging processes involving the conversion of digital image data (referred to herein as “image data file ID”) to a corresponding two-dimensional image (e.g., a picture or print document) consisting of a light pattern that is specified by the digital image data.
- image data file ID digital image data
- a corresponding two-dimensional image e.g., a picture or print document
- the invention is described with reference to an “imaging phase” (portion) of the imaging operation involving the generation of a single line (referred to for convenience herein as a “line image”) of the two-dimensional image in accordance with associated line data (referred to for convenience herein as a “line image data portion”).
- imaging image data file ID is depicted at the bottom of FIG. 1 being transmitted to controller 180 , which processes image data file ID in the manner described below, and transmits image data file ID one line at a time to spatial light modulator 120 . That is, consistent with most standardized image file formats, image data file ID is made up of multiple line image data groups LID 1 to LIDn, where each line image data group includes multiple pixel image data portions that collectively form an associated one-dimensional line image of the two-dimensional image.
- line image data group LID 1 includes four pixel image data portions PID 1 to PID 3 .
- Each pixel image data portion (e.g., pixel image data portion PID 1 ) includes one or more bits of image data corresponding to the color and/or gray-scale properties of the corresponding pixel image associated with the corresponding portion of the two-dimensional image.
- each line image data group typically includes a much larger number of pixel image data portions that the four-, eight-, or twenty-four pixel image rows described herein.
- homogenous light generator 110 serves to generate continuous (i.e., constant/non-modulated) homogenous light 118 A that forms a substantially uniform two-dimensional homogenous light field 119 A, which is depicted by the projected dotted rectangular box (i.e., homogenous light field 119 A does not form a structure), and is made up of homogenous light 118 A having substantially the same constant energy level (i.e., all portions of homogenous light field 119 A have substantially the same flux density).
- continuous i.e., constant/non-modulated
- homogeneous light generator 110 comprises a light source 112 including a light generating element (e.g., one or more lasers or light emitting diodes) 115 fabricated or otherwise disposed on a suitable carrier (e.g., a semiconductor substrate) 111 , and a light homogenizing optical system (homogenizer) 117 that is disposed between light source 112 and spatial light modulator 120 .
- Homogenizer 117 generates homogenous light 118 by homogenizing (i.e., mixing and spreading out) light beam 116 over an extended two-dimensional area, and reduces any divergences of light beams 116 .
- homogeneous light source 110 is implemented by multiple edge emitting laser diodes arranged along a straight line that is disposed parallel to the rows of light modulating elements (not shown), or multiple vertical cavity surface emitting lasers (VCSELs) are arranged in a two-dimensional array.
- VCSELs vertical cavity surface emitting lasers
- Light homogenizer 117 can be implemented using any of several different technologies and methods known in the art including but not limited to the use of a fast axis concentrator (FAC) lens together with microlens arrays for beam reshaping, or additionally a light pipe approach which causes light mixing within a waveguide.
- FAC fast axis concentrator
- spatial light modulator 120 is disposed in homogenous light field 119 A, and includes a modulating element array 122 and a control circuit 126 .
- Spatial light modulator 120 serves the purpose of modulating portions of homogenous light 118 A in accordance with the method described below, whereby spatial light modulator 120 converts homogenous light field 119 A into a two-dimensional modulated light field 119 B that is projected through anamorphic optical system 130 onto an elongated imaging region 167 of imaging surface 162 .
- such a spatial light modulator can be purchased commercially and would typically have two-dimensional (2D) array sizes of 1024 ⁇ 768 (SVGA resolution) or higher resolution with light modulation element (pixel) spacing on the order of 5-20 microns.
- 2D two-dimensional array sizes of 1024 ⁇ 768
- pixel light modulation element
- modulating element array 122 of spatial light modulator 120 includes modulating elements 125 - 11 to 125 - 34 that are disposed in four horizontal rows and three vertical columns C 1 -C 3 on a support structure 124 .
- Modulating elements 125 - 11 to 125 - 34 are disposed in homogenous light field 119 A such that a light modulating structure (e.g., a mirror, a diffractive element, or a thermo-optic absorber element) of each modulating element receives a corresponding portion of homogenous light 118 A (e.g., modulating elements 125 - 11 and 125 - 12 respectively receive homogenous light portions 118 A- 11 and 118 A- 12 ), and is positioned to selectively pass or redirect the received corresponding modulated light portion along a predetermined direction toward anamorphic optical system 130 (e.g., modulating element 125 - 11 allows received light portion 118 A- 11 to pass to anamorphic optical system 130 , but modulating element 125 - 21 blocks/redirects/prevents received light portion 118 A- 21 from passing to anamorphic optical system 130 ).
- a light modulating structure e.g., a mirror, a diffractive element, or
- control circuit 126 includes an array of control (memory) cells 128 - 11 to 128 - 34 that store one line image data portion (e.g., line image data portion LIN 1 ) during each imaging phase of an imaging operation.
- line image data portion LIN 1 is transmitted (written) from controller 180 to control circuit 126 using known techniques, and line image data portion LIN 1 is used to generate a corresponding line image SL in an elongated imaging region 167 of imaging surface 162 .
- a second line image data portion is written into control circuit 126 (i.e., line image data portion LIN 1 is overwritten), and a corresponding second line image (not shown) is generated in another elongated imaging region of imaging surface 162 .
- this process requires movement (translation) of imaging surface 162 in the process (Y-axis) direction after line image SL is generated and before the second line image is generated.
- each memory cell 128 - 11 to 128 - 34 of control circuit 126 stores a single data bit (1 or 0), and each light modulating element 125 - 11 to 125 - 34 is respectively individually controllable by way of the data bit stored in an associated memory cell 128 - 11 to 128 - 34 (e.g., by way of control signals 127 ) to switch between an “on” (first) modulated state and an “off” (second) modulated state.
- the given modulating element When the associated memory cell of a given modulating element stores a logic “1” value, the given modulating element is controlled to enter an “on” modulated state, whereby the modulating element is actuated to direct the given modulating element's associated received light portion toward anamorphic optic 130 .
- modulating element 125 - 11 is turned “on” (e.g., rendered transparent) in response to the logic “1” stored in memory cell 128 - 11 , whereby received light portion 118 A- 11 is passed through spatial light modulator 120 and is directed toward anamorphic optic 130 .
- modulating element 125 - 21 is turned “off” (e.g., rendered opaque) in response to the logic “0” stored in memory cell 128 - 21 , whereby received light portion 118 A- 21 is blocked (prevented from passing to anamorphic optic 130 ).
- spatial light modulator 120 serves to modulate (i.e., pass or not pass) portions of continuous homogenous light 118 A such that the modulated light is directed onto anamorphic optical system 130 .
- spatial light modulator 120 is implemented using any of several technologies, and is therefore not limited to the linear “pass through” arrangement depicted in FIG. 1 .
- homogenous light 118 A e.g., homogenous light portion 118 A- 24
- modulated light portions e.g., modulated light portions 118 B or two-dimensional modulated light field 119 B.
- homogenous light portion 118 A- 21 becomes modulated light portion 118 B- 11 , which is passed to anamorphic optic system 130 along with light portions passed through light modulating elements 125 - 12 , 125 - 13 , 125 - 14 , 125 - 32 and 125 - 33 , as indicated by the light colored areas of the diagram depicting modulated light field 119 B.
- a given modulating element e.g., modulating element 125 - 21
- the modulating element is actuated to prevent (e.g., block or redirect) the given modulating element's associated received light portion, whereby the corresponding region of the diagram depicting modulated light field 119 B is dark.
- anamorphic optical system 130 serves to anamorphically image and concentrate (focus) two-dimensional modulated light field 119 B onto elongated imaging region 167 of imaging surface 162 .
- anamorphic optical system 130 includes one or more optical elements (e.g., lenses and/or mirrors) that are positioned to receive the two-dimensional pattern of modulated light field 119 B, where the one or more optical elements (e.g., lenses or mirrors) are arranged to concentrate the received light portions to a greater degree along the process (e.g., Y-axis) direction than along the cross-process (X-axis) direction, whereby the received modulated light portions are anamorphically focused to form elongated line image SL that extends parallel to the cross-process (X-axis) direction.
- the process e.g., Y-axis
- X-axis cross-process
- anamorphic optical system 130 images the modulated light such that a width W 2 of line image SL in the cross-process (X-axis) direction is equal to or greater than an original width W 1 of modulated light field 119 B, and such that a height H 2 of line image SL in the process (Y-axis) direction is substantially (e.g., three or more times) smaller than an original height H 1 of two-dimensional modulated light field 119 B.
- modulated light portions that have passed through anamorphic optical system 130 but have not yet reached imaging surface 162 are referred to as concentrated modulated light portions (e.g., modulated light portion 118 B- 11 becomes concentrated modulated light portion 118 C- 11 between anamorphic optical system 130 and imaging surface 162 ).
- Anamorphic optical system 130 is represented for the purposes of simplification in FIG. 1 by a single generalized anamorphic projection lens.
- anamorphic system 130 is typically composed of multiple separate cylindrical or acylindrical lenses, such as described below with reference to various specific embodiments, but is not limited to the specific optical systems described herein.
- FIGS. 3 and 4 are top view and side view diagrams showing a portion of an imaging system 100 E including a spatial light modulator 120 E and a simplified anamorphic optical system 130 E according to a generalized specific embodiment of the present invention.
- Anamorphic optical system 130 E includes a cross-process optical subsystem 133 E and a process-direction optical subsystem 137 E that is disposed in the optical path between cross-process optical subsystem 133 E and imaging surface 162 E.
- Cross-process optical subsystem 133 E is positioned to receive modulated light field 119 B from spatial light modulator 120 E, and includes a cylindrical/acylindrical lens 134 E shaped and arranged to image modulated light field 119 B in the cross-process X-axis direction.
- Process-direction includes optical subsystem 137 E includes a cylindrical/acylindrical focusing lens 138 that is shaped and arranged to image and concentrate the imaged light 119 C 1 passed from cross-process optical subsystem 133 E in the process (Y-axis) direction in order to generate substantially one-dimensional line image SL on imaging surface 162 E.
- imaged and concentrated (converging) light passed from process-direction optical subsystem 137 E to imaging surface 162 E is referred to herein as imaged and concentrated light 119 C 2 .
- FIGS. 3 and 4 include dashed-line ray traces indicating the function of optical subsystems 133 E and 137 E are disposed in the optical path between spatial light modulator 120 E and imaging surface 162 E.
- the top view of FIG. 3 shows that cross-process optical subsystem 133 E acts to expand modulated light field 119 B in the X-axis (i.e., in the cross-process direction), and the side view of FIG. 4 shows that process-direction optical subsystem 137 E acts on modulated light portions 118 B passed by spatial light modulator 120 E to generate imaged and concentrated light field 119 C 2 in a direction perpendicular to the Y-axis (i.e., in the process direction) to form line image SL on imaging surface 162 E.
- the advantage of this arrangement is that it allows the intensity of the light (e.g., laser) power to be concentrated on scan line SL located at the output of single-pass imaging system 100 E.
- the intensity of the light on spatial light modulator 120 E is reduced relative to the intensity of the line image generated at line image SL.
- cylindrical or acylindrical lens 138 E must be placed closer to imaging surface 162 E (e.g., the surface of an imaging drum cylinder) with a clear aperture extending to the very edges of lens 138 E.
- a “single-pass” substantially one-dimensional line image SL is formed on imaging surface 162 that extends in the cross-process (X-axis) direction.
- a given pixel image (e.g., portion P 1 ) is generated by activating all modulating elements (e.g., 125 - 11 to 125 - 14 ) of a given group (e.g., group G 1 )
- a given group e.g., group G 1
- high total optical intensity (flux density, e.g., on the order of hundreds of Watts/cm 2 ) is generated on a given point of line image SL, thereby facilitating a reliable, high speed imaging system that can be used, for example, to simultaneously produce all portions of a one-dimensional line image SL in a single-pass high resolution high speed printing application.
- multi-level image exposure at lower optical resolution is utilized to achieve high quality imaging (e.g., in a printer) by varying the exposure level (i.e., the amount of concentrated light) directed onto each pixel image location of line image SL.
- the exposure level for each pixel image (e.g., portions P 1 , P 2 and P 3 in FIG. 1 ) in line image SL is varied by controlling the number and location of the activated light modulating elements of spatial light modulator 120 , thereby controlling the amount and location of modulated light 118 B that is combined to generate each pixel image.
- This approach provides a significant improvement over conventional laser ROS operations in that, instead of modulating a high power laser while scanning the laser beam using high optical resolution across an imaging surface to provide multi-level (gray-scale) image exposure properties, the present invention simultaneously provides multi-level image exposure at all locations of line image SL by modulating a relatively low power light source and by utilizing a relatively low optical resolution imaging system to focus the modulated light onto imaging surface 162 .
- the intensity (Watts/cm 2 ) of the light over a given area is reduced to an acceptable level such that low cost optical glasses and antireflective coatings can be utilized to form spatial light modulator 120 , thus reducing manufacturing costs.
- Uniformly spreading the light also eliminates the negative imaging effects that point defects (e.g., microscopic dust particles or scratches) have on total light transmission losses.
- Multi-level image exposure is achieved by imaging system 100 by forming groups of light modulating elements that are substantially aligned in the process (Y-axis) direction defined by the anamorphic optical system, configuring each modulating element group in accordance with an associated pixel image data portion of the line image data group written into the spatial light modulator, and then utilizing anamorphic optical system 130 to image and concentrate the resulting elongated pixel image in the process direction to form a high-intensity pixel image portion of image line SL.
- process (Y-axis) direction defined by the anamorphic optical system
- each modulating element group consists of the modulating elements disposed in each of the columns C 1 to C 3 , where group G 1 includes all modulating elements (i.e., elements 125 - 11 to 125 - 14 ) of column C 1 , group G 2 includes modulating elements 125 - 21 to 125 - 24 ) of column C 2 , and group G 3 includes modulating elements 125 - 31 to 125 - 34 ) of column C 3 .
- each group/column effectively form pixel images that are “stretched” (elongated) in the process (Y-axis) direction (e.g., light elements 118 B- 11 to 118 B- 14 form a first elongated “bright” pixel image associated with pixel data PID 11 ).
- anamorphic optical system 130 generates each pixel image (e.g., pixel image P 1 ) of line image SL by concentrating modulated light portions in the process direction
- the gray-scale properties of each pixel image P 1 can be controlled by configuring a corresponding number of modulating elements (e.g., elements 125 - 11 to 125 - 14 ) that are aligned in the process (Y-axis) direction.
- controller 180 By utilizing controller 180 to interpret the gray-scale value of each pixel image data portion (e.g., pixel image data portion PID 1 ) and to write corresponding control data into control cells (e.g., cells 128 - 11 to 128 - 14 ) of the modulating element group (e.g., group G 1 ) associated with that pixel image data portion, the appropriate pixel image is generated at each pixel location of line image SL.
- control cells e.g., cells 128 - 11 to 128 - 14
- the modulating element group e.g., group G 1
- FIG. 1 shows multi-level image exposure using three exposure levels: “fully on”, “fully off” and “partially on”.
- pixel image data portion PID 1 has a “fully on” (first) gray-scale value, whereby controller 180 writes pixel image data portion PID 1 to control circuit 126 of spatial light modulator 120 such that all modulating elements 125 - 11 to 125 - 14 of associated modulating element group G 1 are activated (i.e., configured into the “on” (first) modulated state).
- modulating elements 125 - 11 to 125 - 14 are activated, homogeneous light portions 118 A- 11 to 118 A- 14 of homogeneous light field 119 A are passed through modulating elements 125 - 11 to 125 - 14 such that modulated light portions 118 B- 11 to 118 B- 14 of modulated light field 119 B are directed onto the anamorphic optical system 130 .
- pixel image data portion PID 2 has a “fully off” (second) value, so all of modulating elements 125 - 21 to 125 - 24 of associated modulating element group G 2 are deactivated (i.e., configured into an “off” (second) modulated state) such that homogeneous light 118 A (e.g., homogeneous light portion 118 A- 21 ) that is directed onto modulating elements 125 - 21 to 125 - 24 are prevented (i.e., blocked or redirected) from reaching anamorphic optical system 130 , thereby generating light pixel image P 2 as a minimum (dark) image “spot” in a second imaging region portion 167 - 2 on imaging surface 162 .
- the gray-scale value of pixel image data portion PID 3 is “partially on”, which is achieved by configuring light modulating elements 125 - 31 to 125 - 34 such that modulating elements 125 - 32 and 125 - 33 are activated and modulating elements 125 - 31 and 125 - 34 are deactivated, causing homogeneous light portions to pass only through modulating elements 125 - 32 to 125 - 33 to anamorphic optical system 130 , whereby pixel image P 3 is formed in third imaging region portion 167 - 3 of imaging surface 162 as a small bright “spot”.
- imaging surface 162 is moved upward and a second imaging phase is performed by writing a next sequential line image data group into spatial light modulator 120 , whereby a second line image is generated as described above that is parallel to and positioned below line image SL.
- light source 110 is optionally toggled between imaging phases, or maintained in an “on” state continuously throughout all imaging phases of the imaging operation.
- the spatial light modulator is implemented using commercially available devices including a digital micromirror device (DMD), such as a digital light processing (DLP®) chip available from Texas Instruments of Dallas Tex., USA, an electro-optic diffractive modulator array such as the Linear Array Liquid Crystal Modulator available from Boulder Nonlinear Systems of Boulder, Colo., USA, or an array of thermo-optic absorber elements such as Vanadium dioxide reflective or absorbing mirror elements.
- DMD digital micromirror device
- DLP® digital light processing
- electro-optic diffractive modulator array such as the Linear Array Liquid Crystal Modulator available from Boulder Nonlinear Systems of Boulder, Colo., USA
- thermo-optic absorber elements such as Vanadium dioxide reflective or absorbing mirror elements.
- Other spatial light modulator technologies may also be used.
- spatial light modulators While any of a variety of spatial light modulators may be suitable for a particular application, many print/scanning applications today require a resolution 1200 dpi and above, with high image contrast ratios over 10:1, small pixel size, and high speed line addressing over 30 kHz. Based on these specifications, the currently preferred spatial light modulator is the DLPTM chip due to its best overall performance.
- FIG. 5 is a perspective view showing a portion of a DMD-type spatial light modulator 120 G including a modulating element array 122 G made up of multiple microelectromechanical (MEMs) mirror mechanisms 125 G.
- DMD-type spatial light modulator 120 G is utilized in accordance with a specific embodiment of the present invention.
- Modulating element array 122 G is consistent with DMDs sold by Texas Instruments, wherein MEMs mirror mechanisms 125 G are arranged in a rectangular array on a semiconductor substrate (i.e., “chip” or support structure) 124 G.
- Mirror mechanism 125 G are controlled as described below by a control circuit 126 G that also is fabricated on substrate 124 G according to known semiconductor processing techniques, and is disposed below mirrors 125 G.
- mirror mechanisms 125 G Although only sixty-four mirror mechanisms 125 G are shown in FIG. 5 for illustrative purposes, those skilled in the art will understand that any number of mirror mechanisms are disposed on DMD-type modulating element array 122 G, and that DMDs sold by Texas Instruments typically include several hundred thousand mirrors per device.
- FIG. 6 is a combination exploded perspective view and simplified block diagram showing an exemplary mirror mechanism 125 G- 11 of DMD-type modulating element array 122 G (see FIG. 5 ) in additional detail.
- mirror mechanism 125 G- 11 is segmented into an uppermost layer 210 , a central region 220 , and a lower region 230 , all of which being disposed on a passivation layer (not shown) formed on an upper surface of substrate 124 G.
- Uppermost layer 210 of mirror mechanism 125 G- 11 includes a square or rectangular mirror (light modulating structure) 212 that is made out of aluminum and is typically approximately 16 micrometers across.
- Central region 220 includes a yoke 222 that connected by two compliant torsion hinges 224 to support plates 225 , and a pair of raised electrodes 227 and 228 .
- Lower region 230 includes first and second electrode plates 231 and 232 , and a bias plate 235 .
- mirror mechanism 125 G- 11 is controlled by an associated SRAM memory cell 240 (i.e., a bi-stable flip-flop) that is disposed on substrate 124 G and controlled to store either of two data states by way of control signal 127 G- 1 , which is generated by control circuit 126 G in accordance with image data as described in additional detail below.
- Memory cell 240 generates complementary output signals D and D-bar that are generated from the current stored state according to known techniques.
- Lower region 230 is formed by etching a plating layer or otherwise forming metal pads on a passivation layer (not shown) formed on an upper surface of substrate 124 G over memory cell 240 .
- electrode plates 231 and 232 are respectively connected to receive either a bias control signal 127 G- 2 (which is selectively transmitted from control circuit 126 G in accordance with the operating scheme set forth below) or complementary data signals D and D-bar stored by memory cell 240 by way of metal vias or other conductive structures that extend through the passivation layer.
- Central region 220 is disposed over lower region 230 using MEMS technology, where yoke 222 is movably (pivotably) connected and supported by support plates 225 by way of compliant torsion hinges 224 , which twist as described below to facilitate tilting of yoke 222 relative to substrate 124 G.
- Support plates 225 are disposed above and electrically connected to bias plate 235 by way of support posts 226 (one shown) that are fixedly connected onto regions 236 of bias plate 235 .
- Electrode plates 227 and 228 are similarly disposed above and electrically connected to electrode plates 231 and 232 , respectively, by way of support posts 229 (one shown) that are fixedly connected onto regions 233 of electrode plates 231 and 232 .
- mirror 212 is fixedly connected to yoke 222 by a mirror post 214 that is attached onto a central region 223 of yoke 222 .
- FIGS. 7(A) to 7(C) are perspective/block views showing mirror mechanism 125 G- 11 of FIG. 5 during operation.
- FIG. 7(A) shows mirror mechanism 125 G- 11 in a first (e.g., “on”) modulating state in which received light portion 118 A-G becomes reflected (modulated) light portion 118 B-G 1 that leaves mirror 212 at a first angle ⁇ 1 .
- SRAM memory cell 240 stores a previously written data value such that output signal D includes a high voltage (VDD) that is transmitted to electrode plate 231 and raised electrode 227 , and output signal D-bar includes a low voltage (ground) that is transmitted to electrode plate 232 and raised electrode 228 .
- VDD high voltage
- output signal D-bar includes a low voltage (ground) that is transmitted to electrode plate 232 and raised electrode 228 .
- Electrodes control the position of the mirror by electrostatic attraction.
- the electrode pair formed by electrode plates 231 and 232 is positioned to act on yoke 222
- the electrode pair formed by raised electrodes 227 and 228 is positioned to act on mirror 212 .
- the majority of the time, equal bias charges are applied to both sides of yoke 222 simultaneously (e.g., as indicated in FIG. 7(A) , bias control signal 127 G- 2 is applied to both electrode plates 227 and 228 and raised electrodes 231 and 232 ).
- this equal bias actually holds mirror 122 in its current “on” position because the attraction force between mirror 122 and raised electrode 231 /electrode plate 227 is greater (i.e., because that side is closer to the electrodes) than the attraction force between mirror 122 and raised electrode 232 /electrode plate 228 .
- the required image data bit is loaded into SRAM memory cell 240 by way of control signal 127 G- 1 (see the lower portion of FIG. 7(A) .
- the bias control signal is de-asserted, thereby transmitting the D signal from SRAM cell 240 to electrode plate 231 and raised electrode 227 , and the D-bar from SRAM cell 240 to electrode plate 232 and raised electrode 228 , thereby causing mirror 212 to move into the “off” position shown in FIG.
- mirror 212 tilts (angularly moves) in the range of approximately 10 to 12° between the “on” state illustrated in FIG. 7(A) and the “off” state illustrated in FIG. 7(B) .
- bias control signal 127 G- 2 is subsequently restored, as indicated in FIG. 7(C) , mirror 212 is maintained in the “off” position, and the next required movement can be loaded into memory cell 240 .
- This bias system is used because it reduces the voltage levels required to address the mirrors such that they can be driven directly from the SRAM cells, and also because the bias voltage can be removed at the same time for the whole chip, so every mirror moves at the same instant.
- the rotation torsional axis of mirror mechanism 125 G- 11 causes mirrors 212 to rotate about a diagonal axis relative to the x-y coordinates of the DLP chip housing.
- This diagonal tilting requires that the incident light portions received from the spatial light modulator in an imaging system be projected onto each mirror mechanism 125 G at a compound incident angle so that the exit angle of the light is perpendicular to the surface of the DLP chip. This requirement complicates the side by side placement of imaging systems.
- FIG. 8 is a perspective view showing an imaging system 100 H utilizing a DMD-type spatial light modulator 120 H including a simplified associated anamorphic optical system 130 H that are positioned in a “folded” arrangement according to a specific embodiment of the present invention.
- Spatial light modulator 120 H is essentially identical to DMD-type spatial light modulator 120 G (described above), and is positioned at a compound angle relative to homogenous light generator 110 H and anamorphic optical system 130 H such that incident homogenous light portion 118 A of homogenous light field 119 A are either reflected toward anamorphic optical system 130 H when associated MEMs mirror mechanisms 125 H of spatial light modulator 120 H are in the “on” position, or reflected away from anamorphic optical system 130 H (e.g., onto a heat sink, not shown) when associated MEMs mirror mechanisms 125 H of spatial light modulator 120 H are in the “off” position.
- each light portions 118 A of homogenous light field 119 A that is directed onto an associated MEMs mirror mechanism 125 H of spatial light modulator 120 H from homogenous light generator 110 H is reflected from the associated MEMs mirror mechanism 125 H to anamorphic optical system 130 only when the associated MEMs mirror mechanism 125 H is in the “on” position (e.g., as described above with reference to FIG. 7(A) ).
- each MEMs mirror mechanism 125 H that is in the “off” position reflects an associated light portion 118 B at angle that directs the associated light portion 118 B away from anamorphic optical system 130 H.
- the components of imaging system 100 H are maintained in the “folded” arrangement by way of a rigid frame that is described in detail in co-owned and co-pending application Ser. No. 13/216,817, entitled SINGLE-PASS IMAGING SYSTEM USING SPATIAL LIGHT MODULATOR AND ANAMORPHIC PROJECTION OPTICS, which is incorporated herein by reference in its entirety.
- DMD-type imaging system 100 H is characterized in that anamorphic optical system 130 H inverts modulated light field 119 B in both the process and cross-process directions such that the position and left-to-right order of the two line images generated on drum cylinder 160 H are effectively “flipped” in both the process and cross-process directions.
- the diagram at the lower left portion of FIG. 8 shows a front view of DMD-type spatial light modulator 120 H, and the diagram at the lower right portion of FIG. 8 shows a front view of elongated imaging region 167 H of imaging surface 162 H. Similar to the embodiment described above with reference to FIG.
- the lower left diagram shows that modulating element column C 1 forms a first modulating element group G 1 that is controlled by a first pixel image data portion PID 11 of line image data portions LIN 11 .
- the remaining light modulating element columns form corresponding modulating element groups that implement the remaining pixel image data portions of line image data portions LIN 11 (e.g., column C 4 forms group G 4 that implements pixel image data portion PID 14 , and column C 8 forms group G 8 that implements pixel image data portion PID 18 .
- modulating element groups G 1 -G 8 are written into spatial light modulator 120 H in an “upside-down and backward” manner such that pixel image data bit PID 111 of pixel image data portion PID 11 is written an inverted (upside-down) manner into a lowermost modulating element of modulating element group G 1 (i.e., the lower left portion of array 122 H when viewed from the front), and pixel image data bit PID 188 of pixel image data portion PID 18 is written in an inverted (upside-down) manner in the upper portion of modulating element group G 8 (i.e., the upper right portion of array 122 H when viewed from the front). As indicated by the double-dot-dash lines in FIG.
- cross-process optical subsystem 133 H inverts modulated light field 119 A such that the light modulating elements configured by pixel image data PID 11 generate pixel image P 11 on the right side of elongated imaging region 167 H, and the light modulating elements configured by pixel image data PID 18 generate pixel image P 18 on the upper left side of elongated imaging region 167 H.
- process optical subsystem 137 H inverts modulated light field 119 A such that (non-inverted) pixel image portion (which is generated by the modulating element implementing pixel image data bit PID 111 ) appears in the upper-left portion of elongated imaging region 167 H, and such that (non-inverted) pixel image P 188 (which is generated by the modulating element implementing pixel image data bit PID 188 ) appears in the lower-right portion of elongated imaging region 167 H.
- Multi-level image exposure is achieved using imaging system 100 H by configuring groups of MEMS mirror mechanisms of DMD-type spatial light modulator 120 H that are substantially aligned in the process (Y-axis) direction such that “partially on” pixel images are implemented by activating contiguous MEMS mirror mechanisms that are disposed in the central region of the associated MEMS mirror mechanism group.
- groups of MEMS mirror mechanisms of DMD-type spatial light modulator 120 H that are substantially aligned in the process (Y-axis) direction such that “partially on” pixel images are implemented by activating contiguous MEMS mirror mechanisms that are disposed in the central region of the associated MEMS mirror mechanism group.
- modulating element group G 1 consists of the modulating elements 125 H disposed in column C 1 , where group G 1 is configured in accordance with a first image pixel data portion PID 11 such that all of the modulating elements are disposed an “on” modulated state (indicated by the white filling each element), whereby a pixel image P 11 is generated on imaging surface 162 H having a maximum brightness.
- modulating element group G 8 consists of the modulating elements 125 H disposed in column C 8 , where group G 8 is configured in accordance with an image pixel data portion PID 18 such that all of the modulating elements are disposed an “off” modulated state (indicated by the slanted-line filling each element), whereby a dark pixel image P 18 is generated on imaging surface 162 H.
- the remaining groups (columns) of MEMS mirror mechanisms are configured using three exemplary “partially on” gray-scale values.
- group G 2 is configured by pixel image data portion PID 12 having a “mostly on” gray-scale value such that two deactivated MEMS mirror mechanisms disposed at the top and bottom of column C 2 , and six activated MEMS mirror mechanisms disposed between the deactivated MEMS mirror mechanisms.
- group G 7 is configured by a pixel image data portion having a “barely on” gray-scale value including six deactivated MEMS mirror mechanisms disposed at the top and bottom of column C 7 and two activated MEMS mirror mechanisms disposed between the deactivated MEMS mirror mechanisms
- group G 5 is configured by a pixel image data portion having a “medium on” gray-scale value including four deactivated MEMS mirror mechanisms disposed at the top and bottom of column C 5 and four activated MEMS mirror mechanisms disposed between the deactivated MEMS mirror mechanisms.
- FIGS. 9 , 10 (A), 10 (B) and 10 (C) are simplified side views showing the imaging system 100 H of FIG. 8 during an exemplary imaging operation. Note that the simplified side views ignore inversion in the cross-process direction, and as such anamorphic optical system 130 H is depicted by a single lens.
- FIG. 9 illustrates imaging system 100 H(T 1 ) (i.e., imaging system 100 H during a first time period T 1 of the imaging operation) when exemplary modulating element group G 2 of spatial light modulator 120 H is respectively configured in accordance with line image data group PID 12 in the manner described above with reference to FIG. 8 .
- FIG. 9 depicts the configuration of modulating elements 125 H- 21 to 125 H- 28 using pixel image data portion PID 12 such that MEMS mirror mechanisms 125 H- 22 to 125 H- 27 are activated and MEMS mirror mechanisms 125 H- 21 and 125 H- 28 are deactivated.
- imaging system 100 H further includes a liquid source 190 that applies a fountain solution 192 onto imaging surface 162 H at a point upstream of the imaging region, an ink source 195 that applies an ink material 197 at a point downstream of imaging region.
- a transfer mechanism (not shown) is provided for transferring the ink material 197 to a target print medium, and a cleaning mechanism 198 is provided for preparing imaging surface 162 H for the next exposure cycle.
- the image transfer operation is further described below with reference to FIGS. 10(A) to 10(C) .
- MEMs mirror mechanisms (light modulating elements) 125 H- 22 to 125 H- 27 reflect portions of homogenous light field 119 A such that modulated light portions 118 B- 21 to 118 B- 27 are directed through anamorphic optical system 130 H (note that homogeneous light portions are redirected away from anamorphic optical system 130 H by deactivated MEMs mirror mechanisms 125 H- 21 and 125 H- 28 ).
- Modulated light portions 118 B- 21 to 118 B- 27 form modulated light field 119 B that is imaged and concentrated by anamorphic optical system 130 H, thereby generating imaged and concentrated modulated light field 119 C 2 that produces pixel image P 12 , which forms part of a line image SL 1 in an elongated imaging region 167 H- 1 on imaging surface 162 H.
- the concentrated light associated formed by modulated light portions 118 B- 21 to 118 B- 27 removes (evaporates) fountain solution 192 from the elongated imaging region 167 H- 1 (i.e., such that a portion of imaging surface 162 H at pixel image P 21 is exposed).
- the size of pixel image P 21 i.e., the amount of fountain solution that is removed from imaging surface 162 H is determined by number of activated MEMs mirror mechanisms.
- FIGS. 10(A) , 10 (B) and 10 (C) show imaging system 100 H at times subsequent to time T 1 , where spatial light modulator 120 H is deactivated in order to how surface feature P 12 (see FIG. 9 ) is subsequently utilized in accordance with the image transfer operation of imaging system 100 H.
- FIG. 10(A) at a time T 2 drum cylinder 160 H has rotated such that surface region 162 H- 1 has passed under ink source 195 . Due to the removal of fountain solution depicted in FIG. 9 , ink material 197 adheres to exposed surface region 162 H- 1 to form an ink feature TF.
- ink material only transfers onto portions of imaging surface 162 H that are exposed by the imaging process described above (i.e., ink material does not adhere to fountain solution 192 ), whereby ink material is only transferred to the print medium from portions of drum roller 160 H that are subjected to concentrated light as described herein.
- variable data from fountain solution removal is transferred, instead of constant data from a plate as in conventional systems.
- a rastered light source i.e., a light source that is rastered back and forth across the scan line
- a single very high power light (e.g., laser) source would be required to sufficiently remove the fountain solution in real time.
- a benefit of the imaging operation of the present invention is that, because liquid is removed from the entire scan line simultaneously, an offset press configuration is provided at high speed using multiple relatively low power light sources.
- anamorphic projection optical system embodiments Each of the specific embodiments described below with reference to FIGS. 11-14 and 16 - 19 may be utilized in the various single-pass imaging systems described above (i.e., in place of the simplified optical systems described with reference to the single-pass imaging systems).
- the anamorphic projection optical system embodiments described herein may be utilized in any other apparatus or device that requires conversion of a low-intensity two-dimensional light field or image (e.g., a modulated light field) into a high-intensity line image.
- FIGS. 11 and 12 are simplified top and side view diagrams showing an all-refractive anamorphic optical system 130 J arranged in accordance with a first specific embodiment of the present invention.
- Anamorphic optical system 130 J is depicted between a spatial light modulator 120 J and an imaging surface 162 J to illustrate an exemplary application of anamorphic optical system 130 J in a single-pass imaging system, such as those described above.
- anamorphic optical system 130 J is not limited to the particular single-pass imaging systems described below.
- anamorphic optical system 130 J includes a field lens 132 J, a cross-process optical subsystem 133 J and a process optical subsystem 137 J.
- Cross-process optical subsystem 133 J includes doublet (first and second) cylindrical/acylindrical lens elements 134 J and 135 J that are cooperatively shaped and arranged to image modulated light field 119 B onto imaging surface 162 J in the cross-process direction in a manner consistent with the ray trace (dashed) lines shown in FIG. 11 .
- doublet lens elements 134 J and 135 J have optical surfaces that have a constant curved profile centered along the neutral or zero-power axis that is parallel to the cross-process (X-axis) direction, and these lenses are positioned between spatial light modulator 120 J and imaging surface 162 J such that line image SL has a predetermined length in the process direction on imaging surface 162 J.
- Optional collimating field lens 132 J is a cross-process direction cylindrical/acylindrical lens that is positioned between spatial light modulator 120 J and lens element 134 J, and is cooperatively formed with lens element 134 J to converge light in the cross-process (X-axis) direction at a point between doublet lens elements 134 J and 135 J, thereby enabling the positioning of an aperture Y-stop between doublet lens elements 134 J and 135 J.
- This arrangement enables efficient correction of aberrations using a low number of simple lenses, and also and minimizes the size of doublet lens elements 134 J and 135 J.
- Field lens 132 J also serves to collimate the light portions that are slightly diverging off of the surface of the spatial light modulator 120 J.
- Process optical subsystem 137 J includes doublet (third and fourth) lens elements 138 J and 139 J that are cooperatively shaped and positioned to image and concentrate modulated light field 119 B in the process (Y-axis) direction on imaging surface 162 J in a manner consistent with the ray trace lines shown in FIG. 12 .
- the intensity of the light on spatial light modulator 120 J is reduced relative to the intensity of the line image SL.
- Table 1 includes an optical prescription for the opposing surfaces of each optical element of optical system 130 J.
- the surface of each element facing the optical system input (light source) is referred to as “S 1 ”
- the surface of each element facing the optical system output is referred to as “S 2 ”.
- S 1 the surface of each element facing the optical system input (light source)
- S 2 the surface of each element facing the optical system output
- 132 J: S 1 refers to the surface of field lens 132 J that faces spatial light modulator 120 J. Curvature values are in 1/millimeter and thickness values are in millimeters.
- both the light source i.e., the surface of spatial light modulator 120 J
- the target surface i.e., imaging surface 162 J
- the optical prescription also assumes a light wavelength of 980 nm.
- the resulting optical system has a cross-process direction magnification of 1.4.
- FIGS. 13 and 14 are simplified top and side view diagrams showing a second all-refractive anamorphic optical system 130 K arranged in accordance with a second specific embodiment of the present invention.
- Anamorphic optical system 130 K is depicted between a spatial light modulator 120 K and an imaging surface 162 K, but may be used in other apparatus or devices as mentioned above.
- Anamorphic optical system 130 K includes a field lens 132 K, a cross-process optical subsystem 133 K and a process optical subsystem 137 K.
- Cross-process optical subsystem 133 K includes triplet cylindrical/acylindrical lens elements 134 K, 135 K and 136 K that are cooperatively shaped and arranged to image modulated light field 119 B onto imaging surface 162 K in the cross-process direction in the manner indicated by the ray trace lines in FIG. 13 .
- Field lens 132 K is a cross-process direction cylindrical/acylindrical lens that is positioned between spatial light modulator 120 K and lens element 134 K, and is cooperatively shaped and positioned with lens elements 134 K and 135 K to enable locating the aperture Y-stop between (second and third) lens elements 135 K and 136 K of cross-process optical subsystem 133 K, providing benefits similar to those described above with reference to field lens 132 J.
- Process optical subsystem 137 K includes a single cylindrical/acylindrical lens element 138 K that is shaped and arranged to image and concentrate modulated light field 119 B in the process (Y-axis) direction onto imaging surface 162 J in a manner consistent with the ray trace lines shown in FIG. 14 .
- Table 2 includes an optical prescription for the opposing surfaces of each optical element of optical system 130 K. The optical prescription assumes a light wavelength of 980 nm, and the resulting optical system has a cross-process direction magnification of 0.0725.
- FIG. 15 is a perspective view showing an imaging system 100 P utilizing a homogenous light generator 110 P and a DMD-type spatial light modulator 120 P according to another specific embodiment of the present invention.
- Spatial light modulator 120 P is essentially identical to DMD-type spatial light modulator 120 G (described above), and is positioned at a compound angle relative to homogenous light generator 110 P in order to generate modulated light field 119 B in response to image data transmitted from a controller 180 P in the manner similar to that described above.
- DMD-type imaging system 100 P differs from the previous embodiments in that it utilizes a simplified catadiotropic anamorphic optical system 130 P to generate a line image SL 1 on imaging surface 162 P of a drum roller 160 P in a manner similar to that described above. That is, unlike the all-refractive anamorphic optical systems described above, catadiotropic anamorphic optical system 130 P includes a cross-process optical subsystem 133 P formed by one or more cylindrical/acylindrical lenses, and a process optical subsystem 137 Q formed by one or more cylindrical/acylindrical mirrors.
- the catadiotropic anamorphic projection optical system is more suitable for imaging systems where the two-dimensional light field 119 B is much wider in the cross-process direction that in the process direction.
- the catadioptric anamorphic optical system architecture illustrated in FIG. 15 and described in additional detail below with reference to FIGS. 16-19 also provides a lower level of sagittal field curvature along the cross-process direction than that of the all-refractive system, thereby facilitating the imaging of the square or rectangular modulated light fields shown and described above.
- FIGS. 16 and 17 are simplified top and side view diagrams showing a first catadiotropic anamorphic optical system 130 Q arranged in accordance with a specific embodiment of the present invention.
- Optical system 130 Q is depicted as forming a light path between a spatial light modulator 120 Q and an imaging surface 162 Q, but may be used in other apparatus or devices as mentioned above.
- Anamorphic optical system 130 Q includes a field lens 132 Q, a cross-process optical subsystem 133 Q and a process optical subsystem 137 Q.
- Cross-process optical subsystem 133 Q includes triplet cylindrical/acylindrical lens elements 134 Q, 135 Q and 136 Q that are cooperatively shaped and arranged to image modulated light field 119 B onto imaging surface 162 Q in the cross-process direction in the manner indicated by the ray trace lines in FIG. 16 .
- Field lens 132 Q is a cross-process direction cylindrical/acylindrical lens that is positioned between spatial light modulator 120 Q and lens element 134 Q, and is cooperatively shaped and positioned with lens elements 134 Q and 135 Q to enable locating the aperture stop between (second and third) lens elements 135 Q and 136 Q, thereby providing benefits similar to those described above with reference to field lens 132 J.
- Process optical subsystem 137 Q includes a separated fold (flat) mirror 138 Q and a cylindrical/acylindrical mirror 139 Q that is shaped and arranged to image and concentrate modulated light field 119 B in the process (Y-axis) direction onto imaging surface 162 Q in a manner consistent with the ray trace lines shown in FIG. 17 .
- Table 3 includes an optical prescription for the opposing surfaces of each optical element of catadiotropic anamorphic optical system 130 Q. The optical prescription assumes a light wavelength of 980 nm, and the resulting optical system has a cross-process direction magnification of 0.33.
- FIGS. 18 and 19 are simplified top and side view diagrams showing a second catadiotropic anamorphic optical system 130 R arranged in accordance with another specific embodiment of the present invention.
- Optical system 130 R forms a light path between a spatial light modulator 120 R and an imaging surface 162 R, but may be used in other apparatus or devices as mentioned above.
- Anamorphic optical system 130 R includes a field lens 132 R, a cross-process optical subsystem 133 R and a process optical subsystem 137 R.
- Cross-process optical subsystem 133 R includes triplet cylindrical/acylindrical lens elements 134 R, 135 R and 136 R that are cooperatively shaped and arranged to image modulated light field 119 B onto imaging surface 162 R in the cross-process direction in the manner indicated by the ray trace lines in FIG. 18 .
- Field lens 132 R is a cross-process direction cylindrical/acylindrical lens that is positioned between spatial light modulator 120 R and lens element 134 R, and is cooperatively shaped and positioned with lens elements 134 R and 135 R to enable locating the aperture stop between (second and third) lens elements 135 R and 136 R, thereby providing benefits similar to those described above with reference to field lens 132 J.
- Process optical subsystem 137 R includes (first and second) cylindrical/acylindrical mirrors 138 Q and 139 Q that are cooperatively shaped and arranged to image and concentrate modulated light field 119 B in the process (Y-axis) direction onto imaging surface 162 R in a manner consistent with the ray trace lines shown in FIG. 19 .
- Table 4 includes an optical prescription for the opposing surfaces of each optical element of catadiotropic anamorphic optical system 130 R. The optical prescription assumes a light wavelength of 980 nm, and the resulting optical system has a cross-process direction magnification of 0.44.
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Lenses (AREA)
Abstract
Description
TABLE 1 | ||||||||
SURFACE | SHAPE | Y-CURVE | Y-RADIUS | X-CURVE | X-RADIUS | | GLASS TYPE | |
132J: S1 | PLANO | 0.00000000 | INFINITY | 0.00000000 | INFINITY | 9.670 | |
132J: S2 | CONVEX | 0.01934236 | 51.700 | 0.00000000 | INFINITY | 111.880 | |
134J: S1 | CONVEX | 0.01289491 | 77.550 | 0.00000000 | INFINITY | 7.280 | |
134J: S2 | PLANO | 0.00000000 | INFINITY | 0.00000000 | INFINITY | 58.509 | |
138J: S1 | PLANO | 0.00000000 | INFINITY | 0.00000000 | INFINITY | 6.170 | |
138J: S2 | CONVEX | 0.00000000 | INFINITY | 0.00967118 | 103.400 | 8.000 | |
Y-STOP | PLANO | 0.00000000 | INFINITY | 0.00000000 | INFINITY | 56.558 | |
135J: S1 | PLANO | 0.00000000 | INFINITY | 0.00000000 | INFINITY | 7.280 | |
135J: S2 | CONVEX | 0.01289491 | 77.550 | 0.00000000 | INFINITY | 20.368 | |
X-STOP | PLANO | 0.00000000 | INFINITY | 0.00000000 | INFINITY | 64.043 | |
138J: S1 | CONVEX | 0.00000000 | INFINITY | 0.03075031 | 32.520 | 5.580 | |
138J: S2 | PLANO | 0.00000000 | INFINITY | 0.00000000 | INFINITY | 59.220 | |
TABLE 2 | ||||||||
SURFACE | SHAPE | Y-CURVE | Y-RADIUS | X-CURVE | X-RADIUS | | GLASS TYPE | |
132R: S1 | PLANO | 0.00000000 | INFINITY | 0.00000000 | INFINITY | 10.000 | |
132R: S2 | CONVEX | 0.02239886 | 44.645 | 0.00000000 | INFINITY | 75.729 | |
134R: S1 | CONVEX | 0.01076421 | 92.900 | 0.00000000 | INFINITY | 12.274 | |
134R: S2 | PLANO | 0.00000000 | INFINITY | 0.00000000 | INFINITY | 13.248 | |
135R: S1 | CONVEX | 0.03329329 | 30.036 | 0.00000000 | INFINITY | 5.000 | |
135R: S2 | CONCAVE | 0.03802478 | 26.299 | 0.00000000 | INFINITY | 22.000 | |
STOP | PLANO | 0.00000000 | INFINITY | 0.00000000 | INFINITY | 155.962 | |
136R: S1 | PLANO | 0.00000000 | INFINITY | 0.00000000 | INFINITY | 12.274 | |
136R: S2 | CONVEX | 0.00552966 | 180.843 | 0.00000000 | INFINITY | 123.866 | |
138R | CONCAVE | 0.00000000 | INFINITY | 0.0019701 | 911.567 | 99.568 | |
139R | CONCAVE | 0.00000000 | INFINITY | 0.00260405 | 384.018 | 193.169 | MIRROR |
TABLE 3 | ||||||||
SURFACE | SHAPE | Y-CURVE | Y-RADIUS | X-CURVE | X-RADIUS | | GLASS TYPE | |
132Q: S1 | PLANO | 0.00000000 | INFINITY | 0.00000000 | INFINITY | 10.000 | |
132Q: S2 | CONVEX | 0.01903430 | 52.537 | 0.00000000 | INFINITY | 73.983 | |
134Q: S1 | CONVEX | 0.01044659 | 95.725 | 0.00000000 | INFINITY | 12.500 | |
134Q: S2 | PLANO | 0.00000000 | INFINITY | 0.00000000 | INFINITY | 12.912 | |
135Q: S1 | CONVEX | 0.03279483 | 30.493 | 0.00000000 | INFINITY | 5.000 | |
135Q: S2 | CONCAVE | 0.03729411 | 26.814 | 0.00000000 | INFINITY | 45.000 | |
STOP | PLANO | 0.00000000 | INFINITY | 0.00000000 | INFINITY | 120.726 | |
136Q: S1 | PLANO | 0.00000000 | INFINITY | 0.00000000 | INFINITY | 12.500 | |
136Q: S2 | CONVEX | 0.00564295 | 177.212 | 0.00000000 | INFINITY | 146.217 | |
138Q | PLANO | 0.00000000 | INFINITY | 0.00000000 | INFINITY | −125.00 | |
139Q | CONCAVE | 0.00000000 | INFINITY | 0.00349853 | 285.834 | 189.156 | MIRROR |
TABLE 4 | ||||||||
SURFACE | SHAPE | Y-CURVE | Y-RADIUS | X-CURVE | X-RADIUS | | GLASS TYPE | |
132R: S1 | PLANO | 0.00000000 | INFINITY | 0.00000000 | INFINITY | 10.000 | |
132R: S2 | CONVEX | 0.02239886 | 44.645 | 0.00000000 | INFINITY | 75.729 | |
134R: S1 | CONVEX | 0.01076421 | 92.900 | 0.00000000 | INFINITY | 12.274 | |
134R: S2 | PLANO | 0.00000000 | INFINITY | 0.00000000 | INFINITY | 13.248 | |
135R: S1 | CONVEX | 0.03329329 | 30.036 | 0.00000000 | INFINITY | 5.000 | |
135R: S2 | CONCAVE | 0.03802478 | 26.299 | 0.00000000 | INFINITY | 22.000 | |
STOP | PLANO | 0.00000000 | INFINITY | 0.00000000 | INFINITY | 155.962 | |
136R: S1 | PLANO | 0.00000000 | INFINITY | 0.00000000 | INFINITY | 12.274 | |
136R: S2 | CONVEX | 0.00552966 | 180.843 | 0.00000000 | INFINITY | 123.866 | |
138R | CONCAVE | 0.00000000 | INFINITY | 0.0019701 | 911.567 | 99.568 | |
139R | CONCAVE | 0.00000000 | INFINITY | 0.00260405 | 384.018 | 193.169 | MIRROR |
Claims (18)
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US20130050842A1 (en) | 2013-02-28 |
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EP2561995A2 (en) | 2013-02-27 |
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